Patent | Date |
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Simulation Method And Simulation Apparatus App 20210350047 - Asano; Tosiya ;   et al. | 2021-11-11 |
Method in which alignment control of a member and a substrate is effected with respect to an in-plane direction of the substrate and an uncured material in a state of bringing a member and the uncured material on a substrate into contact Grant 10,990,005 - Okushima , et al. April 27, 2 | 2021-04-27 |
Simulation Method, Simulation Apparatus, And Storage Medium App 20200394346 - Asano; Tosiya ;   et al. | 2020-12-17 |
Simulation Method, Simulation Apparatus, Storage Medium Film Forming Method, And Method Of Producing Cured Product App 20200394349 - Asano; Tosiya ;   et al. | 2020-12-17 |
Imprint Method, Imprint Apparatus, Manufacturing Method Of Mold, And Article Manufacturing Method App 20200363716 - Seki; Junichi | 2020-11-19 |
Imprint apparatus, imprinting method, and method for manufacturing article Grant 10,777,443 - Sakamoto , et al. Sept | 2020-09-15 |
Method In Which Alignment Control Of A Member And A Substrate Is Effected With Respect To An In-plane Direction Of The Substrate App 20200241411 - Okushima; Shingo ;   et al. | 2020-07-30 |
Imprinting apparatus for producing a member in which a mold contacts a pattern forming layer using alignment control in an in-plane direction of a substrate Grant 10,670,961 - Okushima , et al. | 2020-06-02 |
Imprint method, imprint apparatus, mold, and article manufacturing method Grant 10,620,532 - Seki , et al. | 2020-04-14 |
Vehicular arm component manufacturing method and vehicular arm component Grant 10,596,870 - Kimura , et al. | 2020-03-24 |
Imprint apparatus, mold, imprint method, and method of manufacturing article Grant 10,569,450 - Seki Feb | 2020-02-25 |
Imprint Apparatus, Imprinting Method, And Method For Manufacturing Article App 20170246658 - Sakamoto; Eiji ;   et al. | 2017-08-31 |
Imprint Apparatus, Mold, Imprint Method, And Method Of Manufacturing Article App 20170248843 - Seki; Junichi | 2017-08-31 |
Vehicular Arm Component Manufacturing Method And Vehicular Arm Component App 20170144499 - KIMURA; Hiroshi ;   et al. | 2017-05-25 |
Imprinting Apparatus For Producing A Member In Which A Mold Contacts A Pattern Forming Layer Using Alignment Control In An In-plane Direction Of A Substrate App 20170115560 - Okushima; Shingo ;   et al. | 2017-04-27 |
Imprint apparatus in which alignment control of a mold and a substrate is effected Grant 9,579,843 - Okushima , et al. February 28, 2 | 2017-02-28 |
Imprinting method and process for producing a member in which a mold contacts a pattern forming layer Grant 9,573,319 - Okushima , et al. February 21, 2 | 2017-02-21 |
Imprint method, imprint apparatus, and process for producing chip Grant 9,507,256 - Seki , et al. November 29, 2 | 2016-11-29 |
Imprint Method, Imprint Apparatus, Mold, And Article Manufacturing Method App 20160129612 - Seki; Junichi ;   et al. | 2016-05-12 |
Process For Producing A Member Having A Pattern, A Pattern Transfer Apparatus, And A Mold App 20150192855 - Seki; Junichi ;   et al. | 2015-07-09 |
Light transmissive mold and apparatus for imprinting a pattern onto a material applied on a semiconductor workpiece and related methods Grant 9,046,793 - Suehira , et al. June 2, 2 | 2015-06-02 |
Imprinting apparatus and method therefor Grant 9,039,402 - Kawakami , et al. May 26, 2 | 2015-05-26 |
Process for producing member having pattern, pattern transfer apparatus, and mold Grant 8,999,218 - Seki , et al. April 7, 2 | 2015-04-07 |
Alignment method, imprint method, alignment apparatus, and position measurement method Grant 8,845,317 - Suehira , et al. September 30, 2 | 2014-09-30 |
Imprint apparatus, imprint method, and mold for imprint Grant 8,845,318 - Suehira , et al. September 30, 2 | 2014-09-30 |
Imprint method, chip production process, and imprint apparatus Grant 8,828,307 - Okushima , et al. September 9, 2 | 2014-09-09 |
Pattern forming method and pattern forming apparatus in which a substrate and a mold are aligned in an in-plane direction Grant 8,770,958 - Suehira , et al. July 8, 2 | 2014-07-08 |
Mold, Imprint Method, And Process For Producing Chip App 20140120199 - TERASAKI; Atsunori ;   et al. | 2014-05-01 |
Molding apparatus and molding method Grant 8,685,306 - Seki April 1, 2 | 2014-04-01 |
Mold, imprint method, and process for producing a chip Grant 8,668,484 - Terasaki , et al. March 11, 2 | 2014-03-11 |
Process for producing a device using a mold Grant 8,568,639 - Terasaki , et al. October 29, 2 | 2013-10-29 |
Process for producing a chip using a mold Grant 8,562,846 - Terasaki , et al. October 22, 2 | 2013-10-22 |
Imprint Apparatus In Which Alignment Control Of A Mold And A Substrate Is Effected App 20130196016 - Okushima; Shingo ;   et al. | 2013-08-01 |
Imprint apparatus and method of manufacturing article Grant 8,404,169 - Kawakami , et al. March 26, 2 | 2013-03-26 |
Imprint method for imprinting a pattern of a mold onto a resin material of a substrate and related substrate processing method Grant 8,361,336 - Okushima , et al. January 29, 2 | 2013-01-29 |
Mold, mold production process, processing apparatus, and processing method Grant 8,308,471 - Terasaki , et al. November 13, 2 | 2012-11-13 |
Imprint method and process for producing a chip that change a relative position between a member to be processed and a support portion Grant 8,246,887 - Seki , et al. August 21, 2 | 2012-08-21 |
Imprint apparatus and imprint method Grant 8,202,075 - Suehira , et al. June 19, 2 | 2012-06-19 |
Nanoimprinting method and mold for use in nanoimprinting Grant 8,178,026 - Okinaka , et al. May 15, 2 | 2012-05-15 |
Manufacturing method of structure by imprint Grant 8,138,088 - Terasaki , et al. March 20, 2 | 2012-03-20 |
Imprint Method Using A Mold And Process For Producing Structure Using An Imprint Apparatus App 20110284499 - Suehira; Nobuhito ;   et al. | 2011-11-24 |
Process For Producing A Chip Using A Mold App 20110278259 - TERASAKI; Atsunori ;   et al. | 2011-11-17 |
Light Transmissive Mold and Apparatus For Imprinting a Pattern Onto a Material Applied on a Semiconductor Workpiece and Related Methods App 20110272840 - Suehira; Nobuhito ;   et al. | 2011-11-10 |
Imprint apparatus, imprint method, and mold for imprint Grant 8,047,828 - Suehira , et al. November 1, 2 | 2011-11-01 |
Scanning probe apparatus Grant 8,035,089 - Kusaka , et al. October 11, 2 | 2011-10-11 |
Mold, imprint apparatus, and process for producing structure Grant 8,011,916 - Suehira , et al. September 6, 2 | 2011-09-06 |
Process For Producing A Device Using A Mold App 20110198783 - TERASAKI; Atsunori ;   et al. | 2011-08-18 |
Imprint apparatus having attitude control Grant 7,985,061 - Suehira , et al. July 26, 2 | 2011-07-26 |
Process for producing a chip using a mold Grant 7,981,304 - Terasaki , et al. July 19, 2 | 2011-07-19 |
Pattern forming method, pattern formed thereby, mold, processing apparatus, and processing method Grant 7,960,090 - Terasaki , et al. June 14, 2 | 2011-06-14 |
Mold, apparatus including mold, pattern transfer apparatus, and pattern forming method Grant 7,927,089 - Seki , et al. April 19, 2 | 2011-04-19 |
Imprint Method, Imprint Apparatus, And Process For Producing Chip App 20110042348 - Seki; Junichi ;   et al. | 2011-02-24 |
Imprint Method And Processing Method Of Substrate Using The Imprint Method App 20110042352 - Okushima; Shingo ;   et al. | 2011-02-24 |
Pattern transfer apparatus, imprint apparatus, and pattern transfer method Grant 7,884,935 - Suehira , et al. February 8, 2 | 2011-02-08 |
Pattern forming method and pattern forming apparatus Grant 7,862,761 - Okushima , et al. January 4, 2 | 2011-01-04 |
Pattern Forming Method And Pattern Forming Apparatus In Which A Substrate And A Mold Are Aligned In An In-plane Direction App 20100314799 - Suehira; Nobuhito ;   et al. | 2010-12-16 |
Imprint method, imprint apparatus, and process for producing chip Grant 7,828,984 - Seki , et al. November 9, 2 | 2010-11-09 |
Imprint Method And Imprint Apparatus App 20100270705 - Okushima; Shingo ;   et al. | 2010-10-28 |
Mold, production process of mold, imprint apparatus, and imprint method Grant 7,815,430 - Terasaki , et al. October 19, 2 | 2010-10-19 |
Imprint Method And Processing Method Of Substrate App 20100233432 - Okushima; Shingo ;   et al. | 2010-09-16 |
Mold, pattern forming method, and pattern forming apparatus Grant 7,794,222 - Suehira , et al. September 14, 2 | 2010-09-14 |
Production process of structure Grant 7,790,049 - Terasaki , et al. September 7, 2 | 2010-09-07 |
Production Process Of Structure App 20100200544 - Terasaki; Atsunori ;   et al. | 2010-08-12 |
Scanning probe apparatus Grant 7,765,606 - Kusaka , et al. July 27, 2 | 2010-07-27 |
Imprint Method And Imprint Apparatus App 20100173032 - Suehira; Nobuhito ;   et al. | 2010-07-08 |
Molding apparatus and molding method Grant 7,726,964 - Seki June 1, 2 | 2010-06-01 |
Imprint method and imprint apparatus Grant 7,708,927 - Suehira , et al. May 4, 2 | 2010-05-04 |
Imprint Apparatus And Method Of Manufacturing Article App 20100078840 - Kawakami; Eigo ;   et al. | 2010-04-01 |
Epoxy resin composition, and cured material, semi-cured material, prepreg and composite substrate using the epoxy resin composition App 20100080998 - Seki; Junichi ;   et al. | 2010-04-01 |
Epoxy prepolymer, and epoxy resin composition, cured material, semi-cured material, prepreg and composite substrate using the epoxy prepolymer App 20100080997 - Seki; Junichi ;   et al. | 2010-04-01 |
Scanning probe apparatus Grant 7,690,047 - Yasuda , et al. March 30, 2 | 2010-03-30 |
Drive stage for scanning probe apparatus, and scanning probe apparatus Grant 7,690,046 - Yasuda , et al. March 30, 2 | 2010-03-30 |
Imprinting Method App 20100072667 - Kawakami; Eigo ;   et al. | 2010-03-25 |
Imprint Apparatus And Method Of Manufacturing Article App 20100072664 - Kawakami; Eigo ;   et al. | 2010-03-25 |
Imprinting Apparatus And Method Therefor App 20100072653 - Kawakami; Eigo ;   et al. | 2010-03-25 |
Mold and molding apparatus using the same Grant 7,678,319 - Seki , et al. March 16, 2 | 2010-03-16 |
Mold and molding apparatus using the same Grant 7,674,104 - Seki , et al. March 9, 2 | 2010-03-09 |
Processing apparatus, processing method, and process for producing chip Grant 7,635,260 - Seki , et al. December 22, 2 | 2009-12-22 |
Scanning probe apparatus and drive stage therefor Grant 7,631,547 - Yoshimatsu , et al. December 15, 2 | 2009-12-15 |
Imprint Apparatus, Imprint Method, And Mold For Imprint App 20090283938 - Suehira; Nobuhito ;   et al. | 2009-11-19 |
Nanoimprinting Method And Mold For Use In Nanoimprinting App 20090273124 - Okinaka; Motoki ;   et al. | 2009-11-05 |
Method for manufacturing semiconductor device by using dual damascene process and method for manufacturing article having communicating hole Grant 7,598,172 - Terasaki , et al. October 6, 2 | 2009-10-06 |
Scanning Probe Apparatus App 20090230320 - Kusaka; Takao ;   et al. | 2009-09-17 |
Scanning probe apparatus Grant 7,569,817 - Kusaka , et al. August 4, 2 | 2009-08-04 |
Manufacturing Method Of Structure By Imprint App 20090189306 - Terasaki; Atsunori ;   et al. | 2009-07-30 |
Method Of Processing Substrate By Imprinting App 20090166317 - Okushima; Shingo ;   et al. | 2009-07-02 |
Process For Producing A Chip Using A Mold App 20090152239 - TERASAKI; Atsunori ;   et al. | 2009-06-18 |
Mold, Imprint Method, And Process For Producing A Chip App 20090152753 - Terasaki; Atsunori ;   et al. | 2009-06-18 |
Imprint apparatus and imprint method including dual movable image pick-up device Grant 7,531,821 - Suehira , et al. May 12, 2 | 2009-05-12 |
Alignment Method, Imprint Method, Alignment Apparatus, And Position Measurement Method App 20090108483 - Suehira; Nobuhito ;   et al. | 2009-04-30 |
Gap Measuring Method, Imprint Method, And Imprint Apparatus App 20090101037 - Suehira; Nobuhito ;   et al. | 2009-04-23 |
Imprint Method, Chip Production Process, And Imprint Apparatus App 20090098688 - Okushima; Shingo ;   et al. | 2009-04-16 |
Mold, Mold Production Process, Processing Apparatus, And Processing Method App 20090092791 - Terasaki; Atsunori ;   et al. | 2009-04-09 |
Mold, imprint method, and process for producing chip Grant 7,510,388 - Terasaki , et al. March 31, 2 | 2009-03-31 |
Method of manufacturing EL panel including two curing steps Grant 7,491,106 - Seki , et al. February 17, 2 | 2009-02-17 |
Imprint Method And Imprint Apparatus App 20090039550 - Suehira; Nobuhito ;   et al. | 2009-02-12 |
Molding Apparatus And Molding Method App 20090032998 - Seki; Junichi | 2009-02-05 |
Molding Apparatus And Molding Method App 20090004321 - Seki; Junichi | 2009-01-01 |
Pattern Forming Method, Pattern Formed Thereby, Mold, Processing Apparatus, And Processing Method App 20080292976 - Terasaki; Atsunori ;   et al. | 2008-11-27 |
Method For Manufacturing Semiconductor Device By Using Dual Damascene Process And Method For Manufacturing Article Having Communicating Hole App 20080293237 - TERASAKI; ATSUNORI ;   et al. | 2008-11-27 |
Molding apparatus and molding method Grant 7,442,028 - Seki October 28, 2 | 2008-10-28 |
Method for manufacturing semiconductor device by using dual damascene process and method for manufacturing article having communicating hole Grant 7,422,981 - Terasaki , et al. September 9, 2 | 2008-09-09 |
Mold, Production Process Of Mold, Imprint Apparatus, And Imprint Method App 20080211133 - Terasaki; Atsunori ;   et al. | 2008-09-04 |
Mold and Molding Apparatus Using the Same App 20080131550 - Seki; Junichi ;   et al. | 2008-06-05 |
Mold and Molding Apparatus Using the Same App 20080128945 - Seki; Junichi ;   et al. | 2008-06-05 |
Imprint Apparatus, Imprint Method, And Mold for Imprint App 20080099941 - Suehira; Nobuhito ;   et al. | 2008-05-01 |
Imprint Apparatus And Imprint Method App 20080073604 - Suehira; Nobuhito ;   et al. | 2008-03-27 |
Mold and molding apparatus using the same Grant 7,347,683 - Seki , et al. March 25, 2 | 2008-03-25 |
Production Process Of Structure App 20080047932 - Terasaki; Atsunori ;   et al. | 2008-02-28 |
Processing Apparatus, Processing Method, And Process For Producing Chip App 20080042320 - SEKI; Junichi ;   et al. | 2008-02-21 |
Pattern Forming Method And Pattern Forming Apparatus App 20070278712 - Okushima; Shingo ;   et al. | 2007-12-06 |
Drive Stage For Scanning Probe Apparatus, And Scanning Probe Apparatus App 20070267580 - Yasuda; Susumu ;   et al. | 2007-11-22 |
Pattern Transfer Apparatus, Imprint Apparatus, And Pattern Transfer Method App 20070242272 - Suehira; Nobuhito ;   et al. | 2007-10-18 |
Optical deflector based on photonic bandgap structure Grant 7,272,272 - Seki , et al. September 18, 2 | 2007-09-18 |
Scanning Probe Apparatus App 20070187593 - Yasuda; Susumu ;   et al. | 2007-08-16 |
Scanning Probe Apparatus App 20070187594 - Kusaka; Takao ;   et al. | 2007-08-16 |
Mold, Imprint Method, And Process For Producing Chip App 20070187875 - TERASAKI; Atsunori ;   et al. | 2007-08-16 |
Scanning Probe Apparatus App 20070158559 - KUSAKA; Takao ;   et al. | 2007-07-12 |
EL panel App 20070159098 - Seki; Junichi | 2007-07-12 |
Scanning Probe Apparatus And Drive Stage Therefor App 20070144243 - YOSHIMATSU; Nobuki ;   et al. | 2007-06-28 |
Imprint Method, Imprint Apparatus, And Process For Producing Chip App 20070145639 - Seki; Junichi ;   et al. | 2007-06-28 |
Method for manufacturing semiconductor device by using dual damascene process and method for manufacturing article having communicating hole App 20070128850 - Terasaki; Atsunori ;   et al. | 2007-06-07 |
Mold And Imprint Apparatus App 20070090574 - Terasaki; Atsunori ;   et al. | 2007-04-26 |
Mold, Imprint Apparatus, And Process For Producing Structure App 20070054097 - Suehira; Nobuhito ;   et al. | 2007-03-08 |
Imprint Apparatus And Imprint Method App 20070035056 - Suehira; Nobuhito ;   et al. | 2007-02-15 |
Panel App 20060290256 - Seki; Junichi ;   et al. | 2006-12-28 |
Mold, pattern forming method, and pattern forming apparatus App 20060279004 - Suehira; Nobuhito ;   et al. | 2006-12-14 |
Mold, apparatus including mold, pattern transfer apparatus, and pattern forming method App 20060279022 - Seki; Junichi ;   et al. | 2006-12-14 |
Processing apparatus, processing method, and process for producing chip App 20060273488 - Seki; Junichi ;   et al. | 2006-12-07 |
Process for producing member having pattern, pattern transfer apparatus, and mold App 20060272535 - Seki; Junichi ;   et al. | 2006-12-07 |
Method of controlling optical characteristic of optical element and optical device Grant 7,136,560 - Seki , et al. November 14, 2 | 2006-11-14 |
Method of manufacturing EL panel App 20060178073 - Seki; Junichi ;   et al. | 2006-08-10 |
Method of controlling optical characteristic of optical element and optical device App 20060140568 - Seki; Junichi ;   et al. | 2006-06-29 |
Optical element with periodic structure Grant 7,068,904 - Itsuji , et al. June 27, 2 | 2006-06-27 |
Optical deflector based on photonic bandgap structure App 20060051009 - Seki; Junichi ;   et al. | 2006-03-09 |
Optical element with periodic structure App 20050244122 - Itsuji, Takeaki ;   et al. | 2005-11-03 |
Mold and molding apparatus using the same App 20050208171 - Seki, Junichi ;   et al. | 2005-09-22 |
Molding apparatus and molding method App 20050186304 - Seki, Junichi | 2005-08-25 |
Image forming apparatus having a heat insulating member Grant 6,737,790 - Seki May 18, 2 | 2004-05-18 |
Light modulation apparatus and optical switch, movement detecting device and distance measuring device, alignment device and semiconductor aligner, and processes thereof Grant 6,628,392 - Kuroda , et al. September 30, 2 | 2003-09-30 |
Light Modulation Apparatus And Optical Switch, Movement Detecting Device And Distance Measuring Device, Alignment Device And Semiconductor Aligner, And Processes Thereof App 20030128361 - Kuroda`, Ryo ;   et al. | 2003-07-10 |
Drive stage and scanning probe microscope and information recording/reproducing apparatus using the same Grant 6,459,088 - Yasuda , et al. October 1, 2 | 2002-10-01 |
Image Forming Apparatus App 20020125803 - SEKI, JUNICHI | 2002-09-12 |
Tracking mechanism and method using probes for information recording/reproducing apparatus Grant 6,195,313 - Seki , et al. February 27, 2 | 2001-02-27 |
Method and apparatus for file operation Grant 5,283,892 - Nakane , et al. February 1, 1 | 1994-02-01 |
Window management apparatus for a document creating apparatus Grant 5,142,618 - Fujiwara , et al. August 25, 1 | 1992-08-25 |
Surface-treated magnesium or magnesium alloy, and surface treatment process therefor Grant 4,770,946 - Yamauchi , et al. September 13, 1 | 1988-09-13 |
Mold equipment Grant 4,325,688 - Kumasaka , et al. April 20, 1 | 1982-04-20 |