| Patent | Date |
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Substrate treating apparatus
Grant 11,004,706 - Nishiyama May 11, 2 | 2021-05-11 |
Substrate Treating Apparatus With Parallel Substrate Treatment Lines On Multiple Stories For Simultaneously Treating A Plurality Of Substrates
App 20210134626 - Ogura; Hiroyuki ; et al. | 2021-05-06 |
Development processing device
Grant 10,960,426 - Sugiyama , et al. March 30, 2 | 2021-03-30 |
Substrate Treating Apparatus
App 20190221457 - Fukutomi; Yoshiteru ; et al. | 2019-07-18 |
Substrate treating apparatus with parallel gas supply pipes and a gas exhaust pipe
Grant 10,290,521 - Fukutomi , et al. | 2019-05-14 |
Substrate processing apparatus
Grant 10,216,099 - Nishimura , et al. Feb | 2019-02-26 |
Substrate processing apparatus and substrate processing method
Grant 10,201,824 - Inagaki Feb | 2019-02-12 |
Substrate Treating Apparatus
App 20190019698 - NISHIYAMA; Koji | 2019-01-17 |
Substrate treating apparatus and substrate transporting method
Grant 10,181,417 - Kokabu , et al. Ja | 2019-01-15 |
Cup and substrate processing apparatus
Grant 10,160,012 - Sugiyama , et al. Dec | 2018-12-25 |
Substrate processing method for drying a substrate by discharging gas to liquid layer on the substrate while rotating the substrate
Grant 10,134,610 - Miyagi , et al. November 20, 2 | 2018-11-20 |
Substrate treating apparatus
Grant 10,109,513 - Nishiyama October 23, 2 | 2018-10-23 |
Substrate processing apparatus and substrate processing method
Grant 10,047,441 - Harumoto , et al. August 14, 2 | 2018-08-14 |
Development Processing Device
App 20180164736 - SUGIYAMA; Minoru ; et al. | 2018-06-14 |
Development processing device
Grant 9,927,760 - Sugiyama , et al. March 27, 2 | 2018-03-27 |
Substrate Processing Apparatus And Substrate Processing Method
App 20180044795 - HARUMOTO; Masahiko ; et al. | 2018-02-15 |
Substrate processing apparatus and substrate processing method
Grant 9,828,676 - Harumoto , et al. November 28, 2 | 2017-11-28 |
Substrate processing apparatus and substrate processing method for performing heat treatment on substrate
Grant 9,741,594 - Hashimoto , et al. August 22, 2 | 2017-08-22 |
Substrate processing apparatus, storage device, and method of transporting substrate storing container
Grant 9,728,434 - Inagaki , et al. August 8, 2 | 2017-08-08 |
Substrate processing apparatus
Grant 9,703,199 - Asano , et al. July 11, 2 | 2017-07-11 |
Multi-story substrate treating apparatus with flexible transport mechanisms and vertically divided treating units
Grant 9,687,874 - Ogura , et al. June 27, 2 | 2017-06-27 |
Alignment device and substrate processing apparatus
Grant 9,685,363 - Kashiyama June 20, 2 | 2017-06-20 |
Substrate Processing Apparatus And Substrate Processing Method
App 20170106389 - INAGAKI; Yukihiko | 2017-04-20 |
Substrate cleaning apparatus for cleaning a lower surface of a substrate
Grant 9,623,450 - Nishiyama April 18, 2 | 2017-04-18 |
Substrate processing apparatus and substrate processing system
Grant 9,606,454 - Taguchi , et al. March 28, 2 | 2017-03-28 |
Developing apparatus
Grant 9,581,907 - Harumoto , et al. February 28, 2 | 2017-02-28 |
Substrate processing apparatus and substrate processing method
Grant 9,566,598 - Inagaki February 14, 2 | 2017-02-14 |
Coating method and coating apparatus
Grant 9,553,007 - Inagaki , et al. January 24, 2 | 2017-01-24 |
Substrate Processing Apparatus
App 20170008017 - NISHIMURA; Kazuhiro ; et al. | 2017-01-12 |
Substrate processing apparatus and substrate processing method
Grant 9,539,607 - Kuwahara , et al. January 10, 2 | 2017-01-10 |
Substrate processing apparatus and substrate processing method
Grant 9,508,573 - Kashiyama , et al. November 29, 2 | 2016-11-29 |
Substrate processing apparatus
Grant 9,494,877 - Nishimura , et al. November 15, 2 | 2016-11-15 |
Substrate processing method
Grant 9,477,162 - Kaneyama , et al. October 25, 2 | 2016-10-25 |
Substrate processing apparatus and substrate processing method
Grant 9,465,293 - Kashiyama , et al. October 11, 2 | 2016-10-11 |
Substrate Processing Apparatus And Substrate Processing Method
App 20160289839 - HARUMOTO; Masahiko ; et al. | 2016-10-06 |
Substrate cleaning apparatus and substrate processing apparatus including the substrate cleaning apparatus
Grant 9,460,941 - Nishiyama October 4, 2 | 2016-10-04 |
Substrate processing apparatus with a cleaning processing section for cleaning a chemical liquid processing section
Grant 9,436,087 - Morioka , et al. September 6, 2 | 2016-09-06 |
Substrate Processing Method
App 20160203997 - Miyagi; Tadashi ; et al. | 2016-07-14 |
Substrate processing apparatus and substrate processing method
Grant 9,375,748 - Harumoto , et al. June 28, 2 | 2016-06-28 |
Substrate treating apparatus with substrate reordering
Grant 9,368,383 - Ogura , et al. June 14, 2 | 2016-06-14 |
Substrate Treating Apparatus With Parallel Substrate Treatment Lines
App 20160163573 - Ogura; Hiroyuki ; et al. | 2016-06-09 |
Coating method and coating apparatus
Grant 9,343,339 - Inagaki , et al. May 17, 2 | 2016-05-17 |
Substrate treating apparatus with parallel substrate treatment lines simultaneously treating a plurality of substrates
Grant 9,299,596 - Ogura , et al. March 29, 2 | 2016-03-29 |
Substrate Treating Apparatus
App 20160079099 - Fukutomi; Yoshiteru ; et al. | 2016-03-17 |
Multi-story Substrate Treating Apparatus With Flexible Transport Mechanisms And Vertically Divided Treating Units
App 20160008841 - Ogura; Hiroyuki ; et al. | 2016-01-14 |
Processing cup and substrate processing apparatus
Grant 9,233,390 - Sugiyama January 12, 2 | 2016-01-12 |
Substrate treating apparatus
Grant 9,230,834 - Fukutomi , et al. January 5, 2 | 2016-01-05 |
Multi-story substrate treating apparatus with flexible transport mechanisms and vertically divided treating units
Grant 9,184,071 - Ogura , et al. November 10, 2 | 2015-11-10 |
Substrate treating apparatus with vertical treatment arrangement including vertical blowout and exhaust units
Grant 9,165,807 - Fukutomi , et al. October 20, 2 | 2015-10-20 |
Exposure device, substrate processing apparatus, method for exposing substrate and substrate processing method
Grant 9,152,054 - Nishimura , et al. October 6, 2 | 2015-10-06 |
Substrate Treating Apparatus And Substrate Transporting Method
App 20150279713 - KOKABU; Yoshinori ; et al. | 2015-10-01 |
Negative developing method and negative developing apparatus
Grant 9,063,429 - Miyagi , et al. June 23, 2 | 2015-06-23 |
Method of and apparatus for heat-treating exposed substrate
Grant 9,064,914 - Kaneyama June 23, 2 | 2015-06-23 |
Substrate processing method
Grant 9,032,977 - Hamada , et al. May 19, 2 | 2015-05-19 |
Substrate cleaning method and substrate cleaning device
Grant 9,028,621 - Miyagi , et al. May 12, 2 | 2015-05-12 |
Developing Apparatus
App 20150104747 - Harumoto; Masahiko ; et al. | 2015-04-16 |
Substrate Processing Method
App 20150086923 - Kaneyama; Koji ; et al. | 2015-03-26 |
Stocker apparatus and substrate treating apparatus
Grant 8,985,937 - Fukutomi , et al. March 24, 2 | 2015-03-24 |
Developing method
Grant 8,956,695 - Harumoto , et al. February 17, 2 | 2015-02-17 |
Substrate processing apparatus and substrate processing method
Grant 8,941,809 - Kanaoka January 27, 2 | 2015-01-27 |
Substrate processing apparatus
Grant 8,932,672 - Kaneyama , et al. January 13, 2 | 2015-01-13 |
Substrate processing apparatus and substrate processing method
Grant 8,894,775 - Miyagi , et al. November 25, 2 | 2014-11-25 |
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