| Patent | Date |
|---|
Micromechanical sensor device with improved liquid tightness protection
Grant 11,401,157 - Doering , et al. August 2, 2 | 2022-08-02 |
Interferometer and method for producing an interferometer
Grant 11,391,629 - Noltemeyer , et al. July 19, 2 | 2022-07-19 |
Mirror Device for an Interferometer Device, Interferometer Device and Method for Producing a Mirror Device
App 20220221709 - Schelling; Christoph ; et al. | 2022-07-14 |
MEMS optical switch with stop control
Grant 11,360,270 - Wang , et al. June 14, 2 | 2022-06-14 |
In-plane MEMS optical switch
Grant 11,340,399 - Wang , et al. May 24, 2 | 2022-05-24 |
MEMS optical switch with a cantilever coupler
Grant 11,300,852 - Wang , et al. April 12, 2 | 2022-04-12 |
Spectrometer Device and Method for Producing a Spectrometer Device
App 20220042847 - Noltemeyer; Ralf ; et al. | 2022-02-10 |
MEMS Optical Switch With a Cantilever Coupler
App 20220004078 - Wang; Ning ; et al. | 2022-01-06 |
Lidar Module With Monolithic Array
App 20220003842 - Wang; Ning ; et al. | 2022-01-06 |
In-Plane MEMS Optical Switch
App 20220003925 - Wang; Ning ; et al. | 2022-01-06 |
Interferometer Device and Method for Producing an Interferometer Device
App 20220003534 - Stein; Benedikt ; et al. | 2022-01-06 |
MEMS Optical Switch With Stop Control
App 20220003936 - Wang; Ning ; et al. | 2022-01-06 |
Readout Signal Generator And Method For Operating A Capacitive Device
App 20210381850 - Schelling; Christoph ; et al. | 2021-12-09 |
Interferometer Element, Spectrometer and Method for Operating an Interferometer
App 20210356321 - Noltemeyer; Ralf ; et al. | 2021-11-18 |
Interferometer and Method for Producing an Interferometer
App 20210262858 - Noltemeyer; Ralf ; et al. | 2021-08-26 |
Spectrometer Device and Method for Producing a Spectrometer Device
App 20210164836 - Husnik; Martin ; et al. | 2021-06-03 |
MEMS component having low-resistance wiring and method for manufacturing it
Grant 10,988,373 - Schelling April 27, 2 | 2021-04-27 |
Micromechanical sensor that includes a stress decoupling structure
Grant 10,954,120 - Schelling , et al. March 23, 2 | 2021-03-23 |
Micromechanical Mirror Device, Mirror System, and Method for Producing a Micromechanical Mirror Device
App 20210033847 - Huber; Christian ; et al. | 2021-02-04 |
Micromechanical sensor
Grant 10,830,590 - Schelling , et al. November 10, 2 | 2020-11-10 |
Micromechanical component
Grant 10,781,097 - Schelling Sept | 2020-09-22 |
Micromechanical Sensor Device And Corresponding Production Method
App 20200255285 - Kind Code | 2020-08-13 |
Method for producing a conductive through-plating for a substrate as well as conductive through-plating
Grant 10,607,888 - Schelling , et al. | 2020-03-31 |
Micromechanical Sensor That Includes A Stress Decoupling Structure
App 20200048072 - Schelling; Christoph ; et al. | 2020-02-13 |
Method For Producing A Conductive Through-plating For A Substrate As Well As Conductive Through-plating
App 20190371665 - Schelling; Christoph ; et al. | 2019-12-05 |
Micro heating plate device and sensor having a micro heating plate device
Grant 10,383,177 - Schelling , et al. A | 2019-08-13 |
Method for producing a multi-layer electrode system
Grant 10,217,926 - Pirk , et al. Feb | 2019-02-26 |
Micromechanical Component
App 20190002277 - Schelling; Christoph | 2019-01-03 |
Manufacturing Method For A Micromechanical Device Including An Oblique Surface And Corresponding Micromechanical Device
App 20180257932 - Steuer; Benjamin ; et al. | 2018-09-13 |
Circuit board for a microphone component part, and microphone module having such a circuit board
Grant 10,051,355 - Zoellin , et al. August 14, 2 | 2018-08-14 |
MEMS component including a diaphragm element which is attached via a spring structure to the component layer structure
Grant 10,035,696 - Purkl , et al. July 31, 2 | 2018-07-31 |
Micromechanical Sensor
App 20180202807 - Schelling; Christoph ; et al. | 2018-07-19 |
MEMS structural component including a deflectable diaphragm and a fixed counter-element as well as a method for manufacturing it
Grant 10,011,479 - Schelling , et al. July 3, 2 | 2018-07-03 |
MEMS component
Grant 10,000,374 - Schelling , et al. June 19, 2 | 2018-06-19 |
Mems Component Having Low-resistance Wiring And Method For Manufacturing It
App 20180141803 - Schelling; Christoph | 2018-05-24 |
MEMS component including a sound-pressure-sensitive diaphragm element and piezosensitive signal detection
Grant 9,936,298 - Buck , et al. April 3, 2 | 2018-04-03 |
Sensor unit including a decoupling structure and manufacturing method therefor
Grant 9,926,188 - Classen , et al. March 27, 2 | 2018-03-27 |
MEMS component including a sound-pressure-sensitive diaphragm element
Grant 9,914,636 - Buck , et al. March 13, 2 | 2018-03-13 |
Infrared sensor device and method for producing an infrared sensor device
Grant 9,818,792 - Herrmann , et al. November 14, 2 | 2017-11-14 |
Component having a micromechanical microphone pattern
Grant 9,788,124 - Schelling , et al. October 10, 2 | 2017-10-10 |
Micromechanical sensor device and corresponding production method
Grant 9,780,284 - Bischopink , et al. October 3, 2 | 2017-10-03 |
Mems Component
App 20170247246 - Schelling; Christoph ; et al. | 2017-08-31 |
Micromechanical component having a diaphragm structure
Grant 9,738,509 - Schelling , et al. August 22, 2 | 2017-08-22 |
Mems Loudspeaker Device And Corresponding Manufacturing Method
App 20170230756 - Schelling; Christoph ; et al. | 2017-08-10 |
Sensor Unit Including A Decoupling Structure And Manufacturing Method Therefor
App 20170203958 - CLASSEN; Johannes ; et al. | 2017-07-20 |
Sensor, method for producing a sensor and method for mounting a sensor
Grant 9,632,104 - Benzel , et al. April 25, 2 | 2017-04-25 |
Micromechanical sound transducer system and a corresponding manufacturing method
Grant 9,621,996 - Schelling , et al. April 11, 2 | 2017-04-11 |
Method for producing a micromechanical component, and corresponding micromechanical component
Grant 9,593,012 - Heuck , et al. March 14, 2 | 2017-03-14 |
Component part and method for testing such a component part
Grant 9,588,005 - Zoellin , et al. March 7, 2 | 2017-03-07 |
Microphone element and device for detecting acoustic and ultrasound signals
Grant 9,571,938 - Schelling , et al. February 14, 2 | 2017-02-14 |
Device for Detecting a Parameter of a Gas, Method for Operating Such a Device, and Measuring System for Determining a Parameter of a Gas
App 20170038273 - Krauss; Andreas ; et al. | 2017-02-09 |
Mems Component Including A Diaphragm Element Which Is Attached Via A Spring Structure To The Component Layer Structure
App 20170022047 - PURKL; Fabian ; et al. | 2017-01-26 |
Mems Component Including A Sound-pressure-sensitive Diaphragm Element And Piezosensitive Signal Detection
App 20170026754 - Buck; Thomas ; et al. | 2017-01-26 |
Mems Component Including A Sound-pressure-sensitive Diaphragm Element
App 20170022046 - BUCK; Thomas ; et al. | 2017-01-26 |
Micromechanical Sound Transducer System And A Corresponding Manufacturing Method
App 20170013364 - SCHELLING; Christoph ; et al. | 2017-01-12 |
Vertical microelectronic component and corresponding production method
Grant 9,525,056 - Schelling , et al. December 20, 2 | 2016-12-20 |
Micromechanical sensor system combination and a corresponding manufacturing method
Grant 9,516,424 - Schelling , et al. December 6, 2 | 2016-12-06 |
Membrane arrangement for a microelectromechanical measuring transducer and method for producing a membrane arrangement
Grant 9,516,423 - Daley , et al. December 6, 2 | 2016-12-06 |
Component Having A Micromechanical Microphone Pattern
App 20160353209 - Schelling; Christoph ; et al. | 2016-12-01 |
Infrared sensor with acceleration sensor and method for operating an infrared sensor
Grant 9,476,762 - Herrmann , et al. October 25, 2 | 2016-10-25 |
ASIC element, in particular as a component of a vertically integrated hybrid component
Grant 9,475,693 - Meisel , et al. October 25, 2 | 2016-10-25 |
Circuit Board For A Microphone Component Part, And Microphone Module Having Such A Circuit Board
App 20160295310 - Zoellin; Jochen ; et al. | 2016-10-06 |
Component having a micromechanical microphone pattern
Grant 9,451,366 - Schelling , et al. September 20, 2 | 2016-09-20 |
Component including two semiconductor elements, between which at least two hermetically sealed cavities are formed and method for establishing a corresponding bonding connection between two semiconductor elements
Grant 9,416,000 - Schelling , et al. August 16, 2 | 2016-08-16 |
MEMS device having a microphone structure, and method for the production thereof
Grant 9,403,670 - Schelling , et al. August 2, 2 | 2016-08-02 |
Micro Heating Plate Device And Sensor Having A Micro Heating Plate Device
App 20160219649 - SCHELLING; Christoph ; et al. | 2016-07-28 |
Micromechanical acceleration sensor having conductor tracks and cavities
Grant 9,394,158 - Schelling July 19, 2 | 2016-07-19 |
MEMS component
Grant 9,335,203 - Zoellin , et al. May 10, 2 | 2016-05-10 |
Bonding pad for thermocompression bonding, process for producing a bonding pad and component
Grant 9,281,280 - Schelling , et al. March 8, 2 | 2016-03-08 |
Capacitive MEMS element including a pressure-sensitive diaphragm
Grant 9,277,329 - Schelling , et al. March 1, 2 | 2016-03-01 |
Infrared sensor device and method for producing an infrared sensor device
Grant 9,276,146 - Herrmann , et al. March 1, 2 | 2016-03-01 |
Image pixel apparatus for detecting electromagnetic radiation, sensor array for detecting electromagnetic radiation and method for detecting electromagnetic radiation by means of an image pixel apparatus
Grant 9,274,003 - Herrmann , et al. March 1, 2 | 2016-03-01 |
Micromechanical Sensor Device and Corresponding Production Method
App 20160056365 - Bischopink; Georg ; et al. | 2016-02-25 |
Eutectic bonding of thin chips on a carrier substrate
Grant 9,266,721 - Pruemm , et al. February 23, 2 | 2016-02-23 |
Method for Producing a Micromechanical Component, and Corresponding Micromechanical Component
App 20160023895 - Heuck; Friedjof ; et al. | 2016-01-28 |
Production process for a micromechanical component and micromechanical component
Grant 9,233,841 - Heuck , et al. January 12, 2 | 2016-01-12 |
Micromechanical Component Having A Diaphragm Structure
App 20150375991 - Schelling; Christoph ; et al. | 2015-12-31 |
Thermodiode Element for a Photosensor for Infrared Radiation Measurement, Photosensor and Method for producing a Thermodiode Element
App 20150372216 - Schelling; Christoph ; et al. | 2015-12-24 |
Micromechanical Sensor System Combination and a Corresponding Manufacturing Method
App 20150365751 - Schelling; Christoph ; et al. | 2015-12-17 |
Component including two semiconductor elements, between which at least two hermetically sealed cavities are formed and method for establishing a corresponding bonding connection between two semiconductor elements
App 20150353347 - Schelling; Christoph ; et al. | 2015-12-10 |
Asic Element, In Particular As A Component Of A Vertically Integrated Hybrid Component
App 20150353343 - MEISEL; Daniel Christoph ; et al. | 2015-12-10 |
Method and Device for Producing a Multi-Layer Electrode System
App 20150340592 - Pirk; Tjalf ; et al. | 2015-11-26 |
Manufacturing method for a micromechanical component and a corresponding micromechanical component
Grant 9,178,018 - Schelling November 3, 2 | 2015-11-03 |
Component and method for producing same
Grant 9,162,873 - Zoellin , et al. October 20, 2 | 2015-10-20 |
MEMS component
Grant 9,139,418 - Zoellin , et al. September 22, 2 | 2015-09-22 |
Component Having A Microphone And Media Sensor Function
App 20150256917 - SCHELLING; Christoph ; et al. | 2015-09-10 |
Component having a micromechanical microphone structure
Grant 9,131,319 - Zoellin , et al. September 8, 2 | 2015-09-08 |
Microelectronic component and corresponding production process
Grant 9,082,882 - Schelling , et al. July 14, 2 | 2015-07-14 |
Component having a micromechanical microphone structure
Grant 9,066,180 - Zoellin , et al. June 23, 2 | 2015-06-23 |
Mems Microphone Element And Device Including Such An Mems Microphone Element
App 20150156591 - SCHELLING; Christoph ; et al. | 2015-06-04 |
Infrared Sensor Device and Method for Producing an Infrared Sensor Device
App 20150137300 - Herrmann; Ingo ; et al. | 2015-05-21 |
Infrared Sensor Device and Method for Producing an Infrared Sensor Device
App 20150102443 - Herrmann; Ingo ; et al. | 2015-04-16 |
Membrane Arrangement for a MicroElectromechanical Measuring Transducer and Method for Producing a Membrane Arrangement
App 20150078590 - Daley; Mike ; et al. | 2015-03-19 |
Mems Component
App 20150059482 - ZOELLIN; Jochen ; et al. | 2015-03-05 |
Capacitive mems element including a pressure-sensitive diaphragm
App 20150063608 - SCHELLING; Christoph ; et al. | 2015-03-05 |
Infrared Sensor with Acceleration Sensor and Method for Operating an Infrared Sensor
App 20150028207 - Herrmann; Ingo ; et al. | 2015-01-29 |
Mems Device Having A Microphone Structure, And Method For The Production Thereof
App 20150014797 - SCHELLING; Christoph ; et al. | 2015-01-15 |
Component having a micromechanical microphone structure
Grant 8,929,584 - Zoellin , et al. January 6, 2 | 2015-01-06 |
MEMS structural component including a deflectable diaphragm and a fixed counter-element as well as a method for manufacturing it
App 20150001653 - SCHELLING; Christoph ; et al. | 2015-01-01 |
Manufacturing method for a micromechanical component, corresponding composite component, and corresponding micromechanical component
Grant 8,901,684 - Benzel , et al. December 2, 2 | 2014-12-02 |
Component Having A Micromechanical Microphone Pattern
App 20140319629 - SCHELLING; Christoph ; et al. | 2014-10-30 |
component having a micromechanical microphone structure
App 20140291786 - Zoellin; Jochen ; et al. | 2014-10-02 |
Micromechanical component having an inclined structure and corresponding manufacturing method
Grant 8,847,336 - Pirk , et al. September 30, 2 | 2014-09-30 |
Micromechanical Structure And Corresponding Production Process
App 20140264649 - Schelling; Christoph | 2014-09-18 |
Component having a micromechanical microphone pattern
Grant 8,816,454 - Zoellin , et al. August 26, 2 | 2014-08-26 |
Mems Component
App 20140225205 - ZOELLIN; Jochen ; et al. | 2014-08-14 |
Manufacturing Method For A Micromechanical Component And A Corresponding Micromechanical Component
App 20140159209 - SCHELLING; Christoph | 2014-06-12 |
Sensor and method for its production
Grant 8,749,013 - Benzel , et al. June 10, 2 | 2014-06-10 |
Component Having A Micromechanical Microphone Structure
App 20140126762 - ZOELLIN; Jochen ; et al. | 2014-05-08 |
Image Pixel Apparatus For Detecting Electromagnetic Radiation, Sensor Array For Detecting Electromagnetic Radiation And Method For Detecting Electromagnetic Radiation By Means Of An Image Pixel Apparatus
App 20140124671 - Herrmann; Ingo ; et al. | 2014-05-08 |
Component and method for producing same
App 20140124879 - ZOELLIN; Jochen ; et al. | 2014-05-08 |
Production Process For A Micromechanical Component And Micromechanical Component
App 20140103497 - Heuck; Friedjof ; et al. | 2014-04-17 |
Microelectromechanical Component And Method For Producing A Microelectromechanical Component
App 20140103779 - Schelling; Christoph ; et al. | 2014-04-17 |
Component Having A Micromechanical Microphone Structure
App 20140105428 - ZOELLIN; Jochen ; et al. | 2014-04-17 |
Vertical Microelectronic Component And Corresponding Production Method
App 20140084299 - Schelling; Christoph ; et al. | 2014-03-27 |
Microelectronic Component and Corresponding Production Process
App 20140084349 - Schelling; Christoph ; et al. | 2014-03-27 |
Semiconductor Device and Production Method for a Semiconductor Device
App 20140084408 - Bischopink; Georg ; et al. | 2014-03-27 |
Component Part And Method For Testing Such A Component Part
App 20140060146 - ZOELLIN; Jochen ; et al. | 2014-03-06 |
Bonding Pad For Thermocompression Bonding, Process For Producing A Bonding Pad And Component
App 20140035168 - Schelling; Christoph ; et al. | 2014-02-06 |
Method For Producing A Bonding Pad For Thermocompression Bonding, And Bonding Pad
App 20140035167 - Schelling; Christoph ; et al. | 2014-02-06 |
Component Having A Micromechanical Microphone Pattern
App 20140015070 - ZOELLIN; Jochen ; et al. | 2014-01-16 |
Sensor, Method For Producing A Sensor And Method For Mounting A Sensor
App 20130257420 - Benzel; Hubert ; et al. | 2013-10-03 |
Eutectic Bonding Of Thin Chips On A Carrier Substrate
App 20130241012 - Pruemm; Andreas ; et al. | 2013-09-19 |
Component Having A Micromechanical Microphone Structure
App 20130243234 - ZOELLIN; Jochen ; et al. | 2013-09-19 |
Method for producing a component, and sensor element
Grant 8,530,261 - Kramer , et al. September 10, 2 | 2013-09-10 |
Method for producing a silicon substrate having modified surface properties and a silicon substrate of said type
Grant 8,492,850 - Lammel , et al. July 23, 2 | 2013-07-23 |
Micromechanical capacitive pressure transducer and production method
Grant 8,492,855 - Lammel , et al. July 23, 2 | 2013-07-23 |
Manufacturing Method For A Micromechanical Component, Corresponding Composite Component, And Corresponding Micromechanical Component
App 20130001711 - BENZEL; Hubert ; et al. | 2013-01-03 |
Method for manufacturing a plurality of thin chips and correspondingly manufactured thin chip
Grant 8,318,544 - Benzel , et al. November 27, 2 | 2012-11-27 |
Manufacturing method for a micromechanical component, corresponding composite component, and corresponding micromechanical component
Grant 8,232,126 - Benzel , et al. July 31, 2 | 2012-07-31 |
Method for producing a micromechanical component and mircomechanical component
Grant 8,207,585 - Schlosser , et al. June 26, 2 | 2012-06-26 |
Method For Manufacturing A Semiconductor Structure, And A Corresponding Semiconductor Structure
App 20120132925 - Lammel; Gerhard ; et al. | 2012-05-31 |
Method for manufacturing a semiconductor structure, and a corresponding Semiconductor Structure
Grant 8,148,234 - Lammel , et al. April 3, 2 | 2012-04-03 |
Micromechanical component and method for manufacturing a micromechanical component
App 20110220471 - Benzel; Hubert ; et al. | 2011-09-15 |
Method for manufacturing a micromechanical chip and a component having a chip of this type
Grant 7,989,263 - Kramer , et al. August 2, 2 | 2011-08-02 |
Manufacturing method for a micromechanical component, corresponding composite component, and corresponding micromechanical component
App 20110163396 - Benzel; Hubert ; et al. | 2011-07-07 |
Micromechanical Component Having An Inclined Structure And Corresponding Manufacturing Method
App 20110147862 - Pirk; Tjalf ; et al. | 2011-06-23 |
Method For Manufacturing A Plurality Of Thin Chips And Correspondingly Manufactured Thin Chip
App 20110115095 - Benzel; Hubert ; et al. | 2011-05-19 |
Micromechanical sensor element
Grant 7,918,136 - Muchow , et al. April 5, 2 | 2011-04-05 |
Micromechanical structure for receiving and/or generating acoustic signals, method for producing a micromechanical structure, and use of a micromechanical structure
Grant 7,902,615 - Schlosser , et al. March 8, 2 | 2011-03-08 |
Sensor And Method For Producing The Same
App 20110002359 - Benzel; Hubert ; et al. | 2011-01-06 |
Micromechanical diaphragm sensor having a double diaphragm
Grant 7,863,072 - Illing , et al. January 4, 2 | 2011-01-04 |
Micromechanical semiconductor sensor
Grant 7,843,025 - Benzel , et al. November 30, 2 | 2010-11-30 |
Micromechanical component and corresponding method for its manufacture
Grant 7,834,409 - Reichenbach , et al. November 16, 2 | 2010-11-16 |
Semiconductor component configured as a diaphragm sensor
Grant 7,755,152 - Benzel , et al. July 13, 2 | 2010-07-13 |
Method For Producing A Component, And Sensor Element
App 20100164027 - Kramer; Torsten ; et al. | 2010-07-01 |
Method for manufacturing a micromechanical chip and a component having a chip of this type
App 20100084722 - KRAMER; Torsten ; et al. | 2010-04-08 |
Method for producing a silicon substrate having modified surface properties and a silicon substrate of said type
App 20100035068 - Lammel; Gerhard ; et al. | 2010-02-11 |
Micromechanical device and method for producing a micromechanical device
Grant 7,647,832 - Muchow , et al. January 19, 2 | 2010-01-19 |
Micromechanical Structure for Receiving and/or Generating Acoustic Signals, Method for Producing a Micromechnical Structure, and Use of a Micromechanical Structure
App 20100002543 - Schlosser; Roman ; et al. | 2010-01-07 |
Method For Manufacturing A Semiconductor Component, As Well As A Semiconductor Component, In A Particular A Diaphragm Sensor
App 20090256219 - BENZEL; Hubert ; et al. | 2009-10-15 |
Method for Manufacturing a Semiconductor Structure, and a Corresponding Semiconductor Structure
App 20090236610 - Lammel; Gerhard ; et al. | 2009-09-24 |
Micromechanical diaphragm sensor having a double diaphragm
App 20090206422 - Illing; Matthias ; et al. | 2009-08-20 |
Method for manufacturing a micromechanical sensor element
Grant 7,572,661 - Benzel , et al. August 11, 2 | 2009-08-11 |
Electrical through-plating of semiconductor chips
Grant 7,572,660 - Benzel , et al. August 11, 2 | 2009-08-11 |
Method for manufacturing a diaphragm sensor
Grant 7,569,412 - Benzel , et al. August 4, 2 | 2009-08-04 |
Micromechanical device having two sensor patterns
Grant 7,555,956 - Benzel , et al. July 7, 2 | 2009-07-07 |
Method For Producing A Micromechanical Component And Mircomechanical Component
App 20090162619 - Schlosser; Roman ; et al. | 2009-06-25 |
Method For Manufacturing A Semiconductor Component, As Well As A Semiconductor Component, In Particular A Membrane Sensor
App 20090127640 - Benzel; Hubert ; et al. | 2009-05-21 |
Micromechanical Capacitive Pressure Transducer and Production Method
App 20090101997 - Lammel; Gerhard ; et al. | 2009-04-23 |
Micromechanical Sensor Element
App 20090084182 - Muchow; Joerg ; et al. | 2009-04-02 |
Method for manufacturing a membrane sensor
Grant 7,494,839 - Benzel , et al. February 24, 2 | 2009-02-24 |
Micromechanical component and corresponding method for its manufacture
App 20090026561 - Reichenbach; Frank ; et al. | 2009-01-29 |
Microstructured chemical sensor
Grant 7,453,254 - Weber , et al. November 18, 2 | 2008-11-18 |
Method for Accelerated Etching of Silicon
App 20080254635 - Benzel; Hubert ; et al. | 2008-10-16 |
Sensor element with trenched cavity
Grant 7,354,786 - Benzel , et al. April 8, 2 | 2008-04-08 |
Microfluidic device, in particular for metering a fluid or for the metered dispensing of a fluid, and method for producing a microfluidic device
App 20080041151 - Fuertsch; Matthias ; et al. | 2008-02-21 |
Microstructured Chemical Sensor
App 20070234801 - Weber; Heribert ; et al. | 2007-10-11 |
Membrane sensor
Grant 7,279,759 - Muller-Fiedler , et al. October 9, 2 | 2007-10-09 |
Micromechanical component and corresponding manufacturing method
App 20070222006 - Weber; Heribert ; et al. | 2007-09-27 |
Micromechanical device having two sensor patterns; method for producing a micromechanical device
App 20070169558 - Benzel; Hubert ; et al. | 2007-07-26 |
Micronozzle plate and manufacturing method
App 20070128755 - Fuertsch; Matthias ; et al. | 2007-06-07 |
Micromechanical device and method for producing a micromechanical device
App 20070126069 - Muchow; Joerg ; et al. | 2007-06-07 |
Micromechanical sensor
Grant 7,213,465 - Benzel , et al. May 8, 2 | 2007-05-08 |
Gas sensor and method for the production thereof
App 20070062812 - Weber; Heribert ; et al. | 2007-03-22 |
Micromechanical structural element having a diaphragm and method for producing such a structural element
Grant 7,148,077 - Fuertsch , et al. December 12, 2 | 2006-12-12 |
Micromechanical sensor element
App 20060063293 - Benzel; Hubert ; et al. | 2006-03-23 |
Sensor element with trenched cavity
App 20060057816 - Benzel; Hubert ; et al. | 2006-03-16 |
Method for manufacturing a semiconductor component, as well as a semiconductor component, in particular a membrane sensor
App 20050181529 - Benzel, Hubert ; et al. | 2005-08-18 |
Method for manufacturing a semicondutor component, as well as a semicondutor component, in particular a diaphragm sensor
App 20050142687 - Benzel, Hubert ; et al. | 2005-06-30 |
Electrical through-plating of semiconductor chips
App 20050133880 - Benzel, Hubert ; et al. | 2005-06-23 |
Micromechanical sensor
App 20050115321 - Benzel, Hubert ; et al. | 2005-06-02 |
Micromechanical structural element having a diaphragm and method for producing such a structural element
App 20050098840 - Fuertsch, Matthias ; et al. | 2005-05-12 |
Semiconductor element and method for its production
App 20050020007 - Weber, Heribert ; et al. | 2005-01-27 |
Micromechanical apparatus, pressure sensor, and method
App 20050016288 - Muchow, Joerg ; et al. | 2005-01-27 |
Sensor element
App 20050006235 - Fuertsch, Matthias ; et al. | 2005-01-13 |
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