SATOYOSHI; Tsutomu
Patent Applications and Registrations
Patent applications and USPTO patent grants for SATOYOSHI; Tsutomu.The latest application filed is for "inductively-coupled plasma processing apparatus".
- SATOYOSHI; Tsutomu - Nirasaki City JP
- Satoyoshi; Tsutomu - Tokyo JP
- Satoyoshi, Tsutomu - Yamanashi JP
- Satoyoshi, Tsutomu - Nirasaki-Shi JP
- Satoyoshi; Tsutomu - Nirasaki JP
- Satoyoshi; Tsutomu - Niraski JP
| Patent | Date |
|---|---|
| Inductively-Coupled Plasma Processing Apparatus App 20200227236 - SAITO; Hitoshi ; et al. | 2020-07-16 |
| Batch Type Processing Apparatus App 20180327903 - Satoyoshi; Tsutomu ; et al. | 2018-11-15 |
| Nozzle Designs For Distribution Of Reactants Across Substrates App 20150099371 - Londergan; Ana R. ; et al. | 2015-04-09 |
| Batch Type Processing Apparatus App 20120325145 - SATOYOSHI; Tsutomu ; et al. | 2012-12-27 |
| Plasma processing apparatus and plasma processing method App 20050241769 - Satoyoshi, Tsutomu ; et al. | 2005-11-03 |
| Substrate supporting table, method for producing same, and processing system App 20050120962 - Ushioda, Joichi ; et al. | 2005-06-09 |
| Substrate supporting table,method for producing same, and processing system App 20020134511 - Ushioda, Joichi ; et al. | 2002-09-26 |
| Inductive coupling plasma processing apparatus Grant 6,387,208 - Satoyoshi , et al. May 14, 2 | 2002-05-14 |
| Inductive coupling plasma processing apparatus App 20020002947 - Satoyoshi, Tsutomu ; et al. | 2002-01-10 |
| Apparatus for detecting and aligning a substrate Grant 5,636,960 - Hiroki , et al. June 10, 1 | 1997-06-10 |
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