Satake; Tohru

Patent Applications and Registrations

Patent applications and USPTO patent grants for Satake; Tohru.The latest application filed is for "testing apparatus using charged particles and device manufacturing method using the testing apparatus".

Company Profile

0.90.90

Satake; Tohru - Kanagawa-ken JP
Satake; Tohru - Tokyo JP
Satake; Tohru - Chigasaki JP
Satake; Tohru - Chigasaki-shi JP
Satake; Tohru - Kanagawa N/A JP

*profile and listings may contain filings by different individuals or companies with the same name. Review application materials to confirm ownership/assignment.

Patent Activity

Patent	Date
Testing apparatus using charged particles and device manufacturing method using the testing apparatus Grant 9,406,480 - Noji , et al. August 2, 2	2016-08-02
Electro-optical inspection apparatus using electron beam Grant 9,390,886 - Nakasuji , et al. July 12, 2	2016-07-12
Inspection system by charged particle beam and method of manufacturing devices using the system Grant 9,368,314 - Nakasuji , et al. June 14, 2	2016-06-14
Testing Apparatus Using Charged Particles And Device Manufacturing Method Using The Testing Apparatus App 20150122993 - Noji; Nobuharu ; et al.	2015-05-07
Testing apparatus using charged particles and device manufacturing method using the testing apparatus Grant 8,946,631 - Noji , et al. February 3, 2	2015-02-03
Substrate Inspection Method And A Substrate Processing Method App 20140367570 - Kimba; Toshifumi ; et al.	2014-12-18
Inspection System By Charged Particle Beam And Method Of Manufacturing Devices Using The System App 20140319346 - Nakasuji; Mamoru ; et al.	2014-10-30
Apparatus for inspection with electron beam, method for operating same, and method for manufacturing semiconductor device using former Grant 8,822,919 - Kimba , et al. September 2, 2	2014-09-02
Inspection system by charged particle beam and method of manufacturing devices using the system Grant 8,803,103 - Nakasuji , et al. August 12, 2	2014-08-12
Testing Apparatus Using Charged Particles And Device Manufacturing Method Using The Testing Apparatus App 20140158885 - Noji; Nobuharu ; et al.	2014-06-12
Testing apparatus using charged particles and device manufacturing method using the testing apparatus Grant 8,742,341 - Noji , et al. June 3, 2	2014-06-03
Sample surface inspection apparatus and method Grant 8,674,317 - Hatakeyama , et al. March 18, 2	2014-03-18
Inspection System By Charged Particle Beam And Method Of Manufacturing Devices Using The System App 20140034831 - Nakasuji; Mamoru ; et al.	2014-02-06
Electron Beam Apparatus And A Device Manufacturing Method By Using Said Electron Beam Apparatus App 20130032716 - Nakasuji; Mamoru ; et al.	2013-02-07
Electron beam apparatus and a device manufacturing method by using said electron beam apparatus Grant 8,368,016 - Nakasuji , et al. February 5, 2	2013-02-05
Inspection system by charged particle beam and method of manufacturing devices using the system Grant 8,368,031 - Nakasuji , et al. February 5, 2	2013-02-05
Method of controlling electron beam focusing of pierce-type electron gun and control apparatus therefor Grant 8,198,797 - Iijima , et al. June 12, 2	2012-06-12
Sample Surface Inspection Apparatus And Method App 20120049063 - Hatakeyama; Masahiro ; et al.	2012-03-01
Mapping-projection-type electron beam apparatus for inspecting sample by using electrons emitted from the sample Grant 8,124,933 - Watanabe , et al. February 28, 2	2012-02-28
Inspection System By Charged Particle Beam And Method Of Manufacturing Devices Using The System App 20120032079 - Nakasuji; Mamoru ; et al.	2012-02-09
Sample surface inspection apparatus and method Grant 8,076,654 - Hatakeyama , et al. December 13, 2	2011-12-13
Electron beam apparatus Grant 8,067,732 - Nakasuji , et al. November 29, 2	2011-11-29
Inspection system by charged particle beam and method of manufacturing devices using the system Grant 8,053,726 - Nakasuji , et al. November 8, 2	2011-11-08
Apparatus For Inspection With Electron Beam, Method For Operating Same, And Method For Manufacturing Semiconductor Device Using Former App 20110104830 - Kimba; Toshifumi ; et al.	2011-05-05
Apparatus for inspection with electron beam, method for operating same, and method for manufacturing semiconductor device using former Grant 7,928,378 - Kimba , et al. April 19, 2	2011-04-19
Electron beam apparatus and method of manufacturing semiconductor device using the apparatus Grant 7,888,642 - Nakasuji , et al. February 15, 2	2011-02-15
Sheet beam-type testing apparatus Grant 7,829,871 - Nakasuji , et al. November 9, 2	2010-11-09
Testing apparatus using charged particles and device manufacturing method using the testing apparatus App 20100237243 - Noji; Nobuharu ; et al.	2010-09-23
Electron Beam Apparatus App 20100213370 - Nakasuji; Mamoru ; et al.	2010-08-26
Electron beam apparatus and method of manufacturing semiconductor device using the apparatus Grant 7,745,784 - Nakasuji , et al. June 29, 2	2010-06-29
Testing apparatus using charged particles and device manufacturing method using the testing apparatus Grant 7,741,601 - Noji , et al. June 22, 2	2010-06-22
Method of Controlling Electron Beam Focusing of Pierce-Type Electron Gun and Control Apparatus Therefor App 20100026161 - Iijima; Eiichi ; et al.	2010-02-04
Mapping-projection-type Electron Beam Apparatus For Inspecting Sample By Using Electrons Emitted From The Sample App 20100019149 - WATANABE; Kenji ; et al.	2010-01-28
Inspection system by charged particle beam and method of manufacturing devices using the system Grant 7,601,972 - Nakasuji , et al. October 13, 2	2009-10-13
Method of electric discharge machining a cathode for an electron gun Grant 7,598,471 - Hamashima , et al. October 6, 2	2009-10-06
Mapping-projection-type electron beam apparatus for inspecting sample by using electrons reflected from the sample Grant 7,592,586 - Watanabe , et al. September 22, 2	2009-09-22
Electron Beam Apparatus App 20090218506 - Nakasuji; Mamoru ; et al.	2009-09-03
Projection Electron Beam Apparatus And Defect Inspection System Using The Apparatus App 20090212213 - Nakasuji; Mamoru ; et al.	2009-08-27
Electron beam inspection system and inspection method and method of manufacturing devices using the system Grant 7,569,838 - Watanabe , et al. August 4, 2	2009-08-04
Testing apparatus using charged particles and device manufacturing method using the testing apparatus App 20090101816 - Noji; Nobuharu ; et al.	2009-04-23
TDI detecting device, a feed-through equipment, an electron beam apparatus using these device and equipment, and a semiconductor device manufacturing method using the same electron beam apparatus Grant 7,521,692 - Hatakeyama , et al. April 21, 2	2009-04-21
Electron beam apparatus and method of manufacturing semiconductor device using the apparatus App 20090050822 - Nakasuji; Mamoru ; et al.	2009-02-26
Electron Beam Apparatus And Method Of Manufacturing Semiconductor Device Using The Apparatus App 20090039262 - NAKASUJI; Mamoru ; et al.	2009-02-12
Inspection system by charged particle beam and method of manufacturing devices using the system App 20090032708 - Nakasuji; Mamoru ; et al.	2009-02-05
Electron beam apparatus and device manufacturing method using the same Grant 7,479,634 - Nakasuji , et al. January 20, 2	2009-01-20
Electron Beam Apparatus App 20090014649 - Nakasuji; Mamoru ; et al.	2009-01-15
Electron beam apparatus, a device manufacturing method using the same apparatus, a pattern evaluation method, a device manufacturing method using the same method, and a resist pattern or processed wafer evaluation method App 20080315095 - Nakasuji; Mamoru ; et al.	2008-12-25
Objective lens, electron beam system and method of inspecting defect App 20080315090 - Nakasuji; Mamoru ; et al.	2008-12-25
Apparatus for inspection with electron beam, method for operating same, and method for manufacturing semiconductor device using former App 20080308729 - Kimba; Toshifumi ; et al.	2008-12-18
Sheet Beam-type Testing Apparatus App 20080302963 - NAKASUJI; Mamoru ; et al.	2008-12-11
Detecting apparatus and device manufacturing method Grant 7,449,691 - Hatakeyama , et al. November 11, 2	2008-11-11
Sample surface inspection apparatus and method App 20080265159 - Hatakeyama; Masahiro ; et al.	2008-10-30
Electron beam apparatus and device production method using the electron beam apparatus Grant 7,439,502 - Nakasuji , et al. October 21, 2	2008-10-21
Electron beam apparatus, a device manufacturing method using the same apparatus, a pattern evaluation method, a device manufacturing method using the same method, and a resist pattern or processed wafer evaluation method Grant 7,425,703 - Nakasuji , et al. September 16, 2	2008-09-16
Electron beam apparatus and method of manufacturing semiconductor device using the apparatus Grant 7,423,267 - Nakasuji , et al. September 9, 2	2008-09-09
Objective lens, electron beam system and method of inspecting defect Grant 7,420,164 - Nakasuji , et al. September 2, 2	2008-09-02
Sheet beam-type testing apparatus Grant 7,417,236 - Nakasuji , et al. August 26, 2	2008-08-26
Inspection system by charged particle beam and method of manufacturing devices using the system Grant 7,411,191 - Nakasuji , et al. August 12, 2	2008-08-12
Method and apparatus for inspecting samples, and method for manufacturing devices using method and apparatus for inspecting samples Grant 7,408,643 - Kimba , et al. August 5, 2	2008-08-05
Apparatus for inspection with electron beam, method for operating same, and method for manufacturing semiconductor device using former Grant 7,408,175 - Kimba , et al. August 5, 2	2008-08-05
Electron beam apparatus and device production method using the electron beam apparatus App 20080173815 - Nakasuji; Mamoru ; et al.	2008-07-24
Electron beam inspection system and inspection method and method of manufacturing devices using the system App 20080173814 - Watanabe; Kenji ; et al.	2008-07-24
Sample surface inspection apparatus and method Grant 7,391,036 - Hatakeyama , et al. June 24, 2	2008-06-24
Electron beam apparatus and a device manufacturing method using the same apparatus Grant 7,385,197 - Nakasuji , et al. June 10, 2	2008-06-10
Method for inspecting substrate, substrate inspecting system and electron App 20080121804 - Nakasuji; Mamoru ; et al.	2008-05-29
Testing apparatus using charged particles and device manufacturing method using the testing apparatus Grant 7,365,324 - Noji , et al. April 29, 2	2008-04-29
Electron beam apparatus and a device manufacturing method by using said electron beam apparatus Grant 7,361,895 - Nakasuji , et al. April 22, 2	2008-04-22
Semiconductor manufacturing apparatus having a built-in inspection apparatus and a device manufacturing method using said manufacturing apparatus Grant 7,361,600 - Satake , et al. April 22, 2	2008-04-22
Electron beam apparatus with detailed observation function and sample inspecting and observing method using electron beam apparatus Grant 7,352,195 - Watanabe , et al. April 1, 2	2008-04-01
Electron beam inspection system and inspection method and method of manufacturing devices using the system Grant 7,351,969 - Watanabe , et al. April 1, 2	2008-04-01
Inspection system by charged particle beam and method of manufacturing devices using the system App 20080042060 - Nakasuji; Mamoru ; et al.	2008-02-21
TDI detecting device, a feed-through equipment, an electron beam apparatus using these device and equipment, and a semiconductor device manufacturing method using the same electron beam apparatus App 20080023651 - Hatakeyama; Masahiro ; et al.	2008-01-31
Electron beam system and method of manufacturing devices using the system Grant 7,312,449 - Nakasuji , et al. December 25, 2	2007-12-25
Electron beam apparatus and device production method using the electron beam apparatus App 20070272859 - Nakasuji; Mamoru ; et al.	2007-11-29
Inspection system by charged particle beam and method of manufacturing devices using the system Grant 7,297,949 - Nakasuji , et al. November 20, 2	2007-11-20
TDI detecting device, a feed-through equipment and electron beam apparatus using these devices Grant 7,285,010 - Hatakeyama , et al. October 23, 2	2007-10-23
Method and apparatus for inspecting samples, and method for manufacturing devices using method and apparatus for inspecting samples App 20070236690 - Kimba; Toshifumi ; et al.	2007-10-11
Inspection system by charged particle beam and method of manufacturing devices using the same App 20070235644 - Nakasuji; Mamoru ; et al.	2007-10-11
Electron beam apparatus with detailed observation function and sample inspecting and observing method using electron beam apparatus App 20070200569 - Watanabe; Kenji ; et al.	2007-08-30
Apparatus for inspection with electron beam, method for operating same, and method for manufacturing semiconductor device using former App 20070194235 - Kimba; Toshifumi ; et al.	2007-08-23
Method and apparatus for repairing shape, and method for manufacturing semiconductor device using those App 20070192057 - Satake; Tohru ; et al.	2007-08-16
Sample repairing apparatus, a sample repairing method and a device manufacturing method using the same method Grant 7,256,405 - Nakasuji , et al. August 14, 2	2007-08-14
Method and apparatus for inspecting samples, and method for manufacturing devices using method and apparatus for inspecting samples Grant 7,248,353 - Kimba , et al. July 24, 2	2007-07-24
Electron beam apparatus and method of manufacturing semiconductor device using the apparatus Grant 7,247,848 - Nakasuji , et al. July 24, 2	2007-07-24
Electron beam apparatus and device manufacturing method using the same App 20070164226 - Hamashima; Muneki ; et al.	2007-07-19
Electron beam apparatus and device fabrication method using the electron beam apparatus Grant 7,244,932 - Nakasuji , et al. July 17, 2	2007-07-17
Electron beam apparatus, a pattern evaluation method and a device manufacturing method using the electron beam apparatus or pattern evaluation method Grant 7,244,933 - Nakasuji , et al. July 17, 2	2007-07-17
Electron beam apparatus and device manufacturing method using the same App 20070158565 - Nakasuji; Mamoru ; et al.	2007-07-12
Inspection system by charged particle beam and method of manufacturing devices using the system Grant 7,241,993 - Nakasuji , et al. July 10, 2	2007-07-10
System and method for evaluation using electron beam and manufacture of devices Grant 7,235,799 - Nakasuji , et al. June 26, 2	2007-06-26
Electron beam apparatus Grant 7,227,141 - Nakasuji , et al. June 5, 2	2007-06-05
Apparatus for inspection with electron beam, method for operating same, and method for manufacturing semiconductor device using former Grant 7,223,973 - Kimba , et al. May 29, 2	2007-05-29
Method and apparatus for repairing shape, and method for manufacturing semiconductor device using those Grant 7,220,604 - Satake , et al. May 22, 2	2007-05-22
Electron beam apparatus with detailed observation function and sample inspecting and observing method using electron beam apparatus Grant 7,212,017 - Watanabe , et al. May 1, 2	2007-05-01
Electron beam apparatus and device manufacturing method using same Grant 7,205,559 - Hamashima , et al. April 17, 2	2007-04-17
Electron beam apparatus and device manufacturing method using same Grant 7,205,540 - Nakasuji , et al. April 17, 2	2007-04-17
Inspection system by charged particle beam and method of manufacturing devices using the system App 20070057186 - Nakasuji; Mamoru ; et al.	2007-03-15
Method for inspecting substrate, substrate inspecting system and electron beam apparatus App 20070045536 - Nakasuji; Mamoru ; et al.	2007-03-01
Electron beam apparatus Grant 7,176,459 - Watanabe , et al. February 13, 2	2007-02-13
Electron beam apparatus and method of manufacturing semiconductor device using the apparatus App 20070018101 - Nakasuji; Mamoru ; et al.	2007-01-25
Electron beam system Grant 7,157,703 - Nakasuji , et al. January 2, 2	2007-01-02
Testing apparatus using charged particles and device manufacturing method using the testing apparatus Grant 7,138,629 - Noji , et al. November 21, 2	2006-11-21
Inspection system by charged particle beam and method of manufacturing devices using the system Grant 7,135,676 - Nakasuji , et al. November 14, 2	2006-11-14
Electron beam apparatus and method of manufacturing semiconductor device using the apparatus Grant 7,129,485 - Nakasuji , et al. October 31, 2	2006-10-31
Mapping-projection-type electron beam apparatus for inspecting sample by using electrons reflected from the sample App 20060237646 - Watanabe; Kenji ; et al.	2006-10-26
Detecting apparatus and device manufacturing method App 20060219909 - Hatakeyama; Masahiro ; et al.	2006-10-05
Microfabrication of pattern imprinting Grant 7,115,354 - Hatakeyama , et al. October 3, 2	2006-10-03
Sheet beam-type inspection apparatus Grant 7,109,484 - Nakasuji , et al. September 19, 2	2006-09-19
Method for inspecting substrate, substrate inspecting system and electron beam apparatus Grant 7,109,483 - Nakasuji , et al. September 19, 2	2006-09-19
Electron beam apparatus and device manufacturing method using same Grant 7,098,457 - Nagahama , et al. August 29, 2	2006-08-29
Electron beam apparatus and method of manufacturing semiconductor device using the apparatus Grant 7,095,022 - Nakasuji , et al. August 22, 2	2006-08-22
Testing apparatus using charged particles and device manufacturing method using the testing apparatus App 20060169900 - Noji; Nobuharu ; et al.	2006-08-03
Detecting apparatus and device manufacturing method Grant 7,075,072 - Hatakeyama , et al. July 11, 2	2006-07-11
Sheet beam-type testing apparatus App 20060138343 - Nakasuji; Mamoru ; et al.	2006-06-29
Electron beam inspection system and inspection method and method of manufacturing devices using the system App 20060118719 - Watanabe; Kenji ; et al.	2006-06-08
Sheet beam-type testing apparatus Grant 7,049,585 - Nakasuji , et al. May 23, 2	2006-05-23
Electron beam apparatus, a pattern evaluation method and a device manufacturing method using the electron beam apparatus or pattern evaluation method App 20060102838 - Nakasuji; Mamoru ; et al.	2006-05-18
Electron beam apparatus and a device manufacturing method by using said electron beam apparatus App 20060097200 - Nakasuji; Mamoru ; et al.	2006-05-11
System and method for evaluation using electron beam and manufacture of devices App 20060060790 - Nakasuji; Mamoru ; et al.	2006-03-23
Electron beam apparatus and device manufacturing method using same App 20060054819 - Nakasuji; Mamoru ; et al.	2006-03-16
Electron beam apparatus, a pattern evaluation method and a device manufacturing method using the electron beam apparatus or pattern evaluation method Grant 7,012,251 - Nakasuji , et al. March 14, 2	2006-03-14
Electron beam apparatus and a device manufacturing method by using said electron beam apparatus Grant 7,005,641 - Nakasuji , et al. February 28, 2	2006-02-28
Electron beam apparatus and device manufacturing method using same Grant 6,998,611 - Nakasuji , et al. February 14, 2	2006-02-14
Electron beam inspection system and inspection method and method of manufacturing devices using the system Grant 6,992,290 - Watanabe , et al. January 31, 2	2006-01-31
Electron beam apparatus and a device manufacturing method using the same apparatus App 20060016989 - Nakasuji; Mamoru ; et al.	2006-01-26
Objective lens, electron beam system and method of inspecting defect App 20050263715 - Nakasuji, Mamoru ; et al.	2005-12-01
Electron beam apparatus App 20050253066 - Watanabe, Kenji ; et al.	2005-11-17
Method and apparatus for repairing shape, and method for manufacturing semiconductor device using those App 20050224457 - Satake, Tohru ; et al.	2005-10-13
Electron beam apparatus, a device manufacturing method using the same apparatus, a pattern evaluation method, a device manufacturing method using the same method, and a resist pattern or processed wafer evaluation method App 20050214958 - Nakasuji, Mamoru ; et al.	2005-09-29
Sample repairing apparatus, a sample repairing method and a device manufacturing method using the same method App 20050211925 - Nakasuji, Mamoru ; et al.	2005-09-29
Beam source Grant 6,949,735 - Hatakeyama , et al. September 27, 2	2005-09-27
Electron beam apparatus and device manufacturing method using same App 20050205783 - Nagahama, Ichirota ; et al.	2005-09-22
Electron beam apparatus with detailed observation function and sample inspecting and observing method using electron beam apparatus App 20050199807 - Watanabe, Kenji ; et al.	2005-09-15
Coating, modification and etching of substrate surface with particle beam irradiation of the same Grant 6,921,722 - Ogure , et al. July 26, 2	2005-07-26
Sample surface inspection apparatus and method App 20050158653 - Hatakeyama, Masahiro ; et al.	2005-07-21
Electron beam system and method of manufacturing devices using the system App 20050133733 - Nakasuji, Mamoru ; et al.	2005-06-23
Electron beam apparatus and device manufacturing method using same Grant 6,909,092 - Nagahama , et al. June 21, 2	2005-06-21
Apparatus for inspection with electron beam, method for operating same, and method for manufacturing semiconductor device using former App 20050121611 - Kimba, Toshifumi ; et al.	2005-06-09
Method and apparatus for inspecting samples, and method for manufacturing devices using method and apparatus for inspecting samples App 20050104017 - Kimba, Toshifumi ; et al.	2005-05-19
Sheet beam-type inspection apparatus App 20050092921 - Nakasuji, Mamoru ; et al.	2005-05-05
Electron beam apparatus, a pattern evaluation method and a device manufacturing method using the electron beam apparatus or pattern evaluation method App 20050051724 - Nakasuji, Mamoru ; et al.	2005-03-10
Testing apparatus using charged particles and device manufacturing method using the testing apparatus App 20050045821 - Noji, Nobuharu ; et al.	2005-03-03
Apparatus for inspection with electron beam, method for operating same, and method for manufacturing semiconductor device using former Grant 6,855,929 - Kimba , et al. February 15, 2	2005-02-15
Electron beam system and method of manufacturing devices using the system Grant 6,853,143 - Nakasuji , et al. February 8, 2	2005-02-08
Semiconductor manufacturing apparatus having a built-in inspection apparatus and a device manufacturing method using said manufacturing apparatus App 20040248329 - Satake, Tohru ; et al.	2004-12-09
Electron beam apparatus and method of manufacturing semiconductor device using the apparatus App 20040183013 - Nakasuji, Mamoru ; et al.	2004-09-23
Tdi detecting device, a feed-through equipment and electron beam apparatus using these devices App 20040173762 - Hatakeyama, Masahiro ; et al.	2004-09-09
Electron beam system App 20040159787 - Nakasuji, Mamoru ; et al.	2004-08-19
Electron beam apparatus and device manufacturing method using same App 20040135515 - Hamashima, Muneki ; et al.	2004-07-15
Electron beam apparatus and a device manufacturing method by using said electron beam apparatus App 20040119023 - Nakasuji, Mamoru ; et al.	2004-06-24
Electron beam apparatus App 20040113073 - Nakasuji, Mamoru ; et al.	2004-06-17
Microfabrication of pattern imprinting App 20040090610 - Hatakeyama, Masahiro ; et al.	2004-05-13
Microfabrication of pattern imprinting Grant 6,671,034 - Hatakeyama , et al. December 30, 2	2003-12-30
Electron beam apparatus and device manufacturing method using same App 20030213893 - Nagahama, Ichirota ; et al.	2003-11-20
Electron beam apparatus and method of manufacturing semiconductor device using the apparatus App 20030207475 - Nakasuji, Mamoru ; et al.	2003-11-06
Magnetic recording disk and method of manufacturing same Grant 6,627,095 - Hatakeyama , et al. September 30, 2	2003-09-30
Electron beam system and method of manufacturing devices using the system App 20030155509 - Nakasuji, Mamoru ; et al.	2003-08-21
Electron beam apparatus and method of manufacturing semiconductor device using the apparatus Grant 6,593,152 - Nakasuji , et al. July 15, 2	2003-07-15
Detecting apparatus and device manufacturing method App 20030047682 - Hatakeyama, Masahiro ; et al.	2003-03-13
Electron beam apparatus and device manufacturing method using same App 20030042417 - Nakasuji, Mamoru ; et al.	2003-03-06
Apparatus for inspection with electron beam, method for operating same, and method for manufacturing semiconductor device using former App 20020148975 - Kimba, Toshifumi ; et al.	2002-10-17
Electron beam apparatus and device production method using the electron beam apparatus App 20020148961 - Nakasuji, Mamoru ; et al.	2002-10-17
Electron beam apparatus and method of manufacturing semiconductor device using the apparatus App 20020142496 - Nakasuji, Mamoru ; et al.	2002-10-03
Method for inspecting substrate, substrate inspecting system and electron beam apparatus App 20020130262 - Nakasuji, Mamoru ; et al.	2002-09-19
Electron beam apparatus and method of manufacturing semiconductor device using the apparatus App 20020109090 - Nakasuji, Mamoru ; et al.	2002-08-15
Electron beam inspection system and inspection method and method of manufacturing devices using the system App 20020088940 - Watanabe, Kenji ; et al.	2002-07-11
Sheet beam-type inspection apparatus App 20020036264 - Nakasuji, Mamoru ; et al.	2002-03-28
Inspection system by charged particle beam and method of manufacturing devices using the system App 20020033449 - Nakasuji, Mamoru ; et al.	2002-03-21
Inspection system by charged particle beam and method of manufacturing devices using the system App 20020028399 - Nakasuji, Mamoru ; et al.	2002-03-07
Coating, modification and etching of substrate surface with particle beam irradiation of the same App 20010055649 - Ogure, Naoaki ; et al.	2001-12-27
Magnetic recording disk and method of manufacturing same App 20010016235 - Hatakeyama, Masahiro ; et al.	2001-08-23
Magnetic recording disk Grant 6,194,048 - Hatakeyama , et al. February 27, 2	2001-02-27
Ion neutralizer Grant 5,243,189 - Nagai , et al. September 7, 1	1993-09-07