Sarode Vishwanath; Yogananda

Patent Applications and Registrations

Patent applications and USPTO patent grants for Sarode Vishwanath; Yogananda.The latest application filed is for "semiconductor processing with cooled electrostatic chuck".

Company Profile

18.15.21

Sarode Vishwanath; Yogananda - Bangalore IN

*profile and listings may contain filings by different individuals or companies with the same name. Review application materials to confirm ownership/assignment.

Patent Activity

Patent	Date
Cryogenic electrostatic chuck Grant 11,437,261 - Sarode Vishwanath , et al. September 6, 2	2022-09-06
Semiconductor Processing With Cooled Electrostatic Chuck App 20220262664 - SARODE VISHWANATH; Yogananda ; et al.	2022-08-18
Wafer edge ring lifting solution Grant 11,393,710 - Rice , et al. July 19, 2	2022-07-19
Cryogenic electrostatic chuck Grant 11,373,893 - Sarode Vishwanath , et al. June 28, 2	2022-06-28
Process kit with adjustable tuning ring for edge uniformity control Grant 11,201,037 - Sarode Vishwanath December 14, 2	2021-12-14
In-situ Apparatus For Semiconductor Process Module App 20210351063 - Sarode Vishwanath; Yogananda ; et al.	2021-11-11
Lift Pin Assembly App 20210233799 - SARODE VISHWANATH; Yogananda ; et al.	2021-07-29
In-situ apparatus for semiconductor process module Grant 11,075,105 - Sarode Vishwanath , et al. July 27, 2	2021-07-27
Lift pin assembly Grant 11,004,722 - Sarode Vishwanath , et al. May 11, 2	2021-05-11
Cryogenic Electrostatic Chuck App 20210082730 - SARODE VISHWANATH; Yogananda ; et al.	2021-03-18
Process Kit With Adjustable Tuning Ring For Edge Uniformity Control App 20210013014 - SARODE VISHWANATH; Yogananda	2021-01-14
Process Kit Enclosure System App 20200373190 - Lee; Helder ; et al.	2020-11-26
Plasma chamber with tandem processing regions Grant 10,847,351 - Nguyen , et al. November 24, 2	2020-11-24
Process kit with adjustable tuning ring for edge uniformity control Grant 10,790,123 - Sarode Vishwanath September 29, 2	2020-09-29
Apparatus and methods for reducing particles in semiconductor process chambers Grant 10,770,269 - Nguyen , et al. Sep	2020-09-08
Symmetric chamber body design architecture to address variable process volume with improved flow uniformity/gas conductance Grant 10,727,096 - Nguyen , et al.	2020-07-28
Cryogenic Electrostatic Chuck App 20200185248 - SARODE VISHWANATH; Yogananda ; et al.	2020-06-11
Process kit with adjustable tuning ring for edge uniformity control Grant 10,600,623 - Sarode Vishwanath	2020-03-24
Symmetric Chamber Body Design Architecture To Address Variable Process Volume With Improved Flow Uniformity/gas Conductance App 20190371627 - NGUYEN; Andrew ; et al.	2019-12-05
Process Kit With Adjustable Tuning Ring For Edge Uniformity Control App 20190362948 - SARODE VISHWANATH; Yogananda	2019-11-28
Process Kit With Adjustable Tuning Ring For Edge Uniformity Control App 20190363003 - SARODE VISHWANATH; Yogananda	2019-11-28
Process Kit With Adjustable Tuning Ring For Edge Uniformity Control App 20190362949 - SARODE VISHWANATH; Yogananda	2019-11-28
Plasma Chamber With Tandem Processing Regions App 20190341236 - NGUYEN; Andrew ; et al.	2019-11-07
Symmetric chamber body design architecture to address variable process volume with improved flow uniformity/gas conductance Grant 10,446,418 - Nguyen , et al. Oc	2019-10-15
Plasma chamber with tandem processing regions Grant 10,381,200 - Nguyen , et al. A	2019-08-13
Inline Dps Chamber Hardware Design To Enable Axis Symmetry For Improved Flow Conductance And Uniformity App 20190148121 - NGUYEN; Andrew ; et al.	2019-05-16
In-situ Apparatus For Semiconductor Process Module App 20190088531 - SARODE VISHWANATH; Yogananda ; et al.	2019-03-21
Inline DPS chamber hardware are design to enable axis symmetry for improved flow conductance and uniformity Grant 10,211,033 - Nguyen , et al. Feb	2019-02-19
Lift Pin Assembly App 20190027394 - SARODE VISHWANATH; Yogananda ; et al.	2019-01-24
Plasma Chamber With Tandem Processing Regions App 20180261436 - NGUYEN; Andrew ; et al.	2018-09-13
Apparatus And Methods For Reducing Particles In Semiconductor Process Chambers App 20170345623 - NGUYEN; Andrew ; et al.	2017-11-30
Apparatus and methods for reducing particles in semiconductor process chambers Grant 9,761,416 - Nguyen , et al. September 12, 2	2017-09-12
Wafer Edge Ring Lifting Solution App 20170213758 - RICE; Michael R. ; et al.	2017-07-27
Symmetric Chamber Body Design Architecture To Address Variable Process Volume With Improved Flow Uniformity/gas Conductance App 20150293527 - NGUYEN; Andrew ; et al.	2015-10-15
Inline Dps Chamber Hardware Design To Enable Axis Symmetry For Improved Flow Conductance And Uniformity App 20150218697 - NGUYEN; Andrew ; et al.	2015-08-06
Multizone Hollow Cathode Discharge System With Coaxial And Azimuthal Symmetry And With Consistent Central Trigger App 20150097486 - NGUYEN; Andrew ; et al.	2015-04-09

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