Sakai; Itsuko
Patent Applications and Registrations
Patent applications and USPTO patent grants for Sakai; Itsuko.The latest application filed is for "plasma processing apparatus and plasma processing method".
Company Profile
0.19.25
- Sakai; Itsuko - Mie JP
- Sakai; Itsuko - Kuwana Mie JP
- Sakai; Itsuko - Kuwana JP
- Sakai; Itsuko - Yokohama N/A JP
- Sakai; Itsuko - Yokohama-shi JP
- Sakai; Itsuko - Kanagawa JP
- Sakai, Itsuko - Kanagawa-ken JP
- Sakai; Itsuko - Kawasaki JP
Patent Activity
| Patent | Date |
|---|---|
| Plasma processing apparatus and plasma processing method Grant 10,672,615 - Sato , et al. | 2020-06-02 |
| Method for manufacturing semiconductor device Grant 10,026,622 - Omura , et al. July 17, 2 | 2018-07-17 |
| Plasma Processing Apparatus and Plasma Processing Method App 20180012768 - SATO; Yosuke ; et al. | 2018-01-11 |
| Method For Manufacturing Semiconductor Device App 20170271170 - OMURA; Mitsuhiro ; et al. | 2017-09-21 |
| Semiconductor device and manufacturing method thereof Grant 8,580,652 - Kawasaki , et al. November 12, 2 | 2013-11-12 |
| Edge detection method for transparent substrate by detecting non-light-emitting region of transparent substrate Grant 8,339,615 - Dohi , et al. December 25, 2 | 2012-12-25 |
| Semiconductor Device Manufacturing Method App 20120315758 - SAKURAI; Noriko ; et al. | 2012-12-13 |
| Semiconductor Device And Manufacturing Method Thereof App 20110068476 - KAWASAKI; Atsuko ; et al. | 2011-03-24 |
| Capacitive coupling plasma processing apparatus Grant 7,767,055 - Himori , et al. August 3, 2 | 2010-08-03 |
| Edge Detection Method App 20100027032 - Dohi; Masayuki ; et al. | 2010-02-04 |
| Processing method for conservation of processing gases Grant 7,628,931 - Saito , et al. December 8, 2 | 2009-12-08 |
| Plasma processing apparatus Grant 7,368,876 - Hayami , et al. May 6, 2 | 2008-05-06 |
| Substrate Transferring Apparatus, Substrate Processing Apparatus, And Substrate Processing Method App 20070227033 - Kobayashi; Yoshiyuki ; et al. | 2007-10-04 |
| Plasma treatment apparatus Grant 7,186,315 - Himori , et al. March 6, 2 | 2007-03-06 |
| Plasma processing method Grant 7,182,879 - Sakai , et al. February 27, 2 | 2007-02-27 |
| Semiconductor device App 20060231877 - Takenaka; Keiichi ; et al. | 2006-10-19 |
| Semiconductor manufacturing apparatus and manufacturing method of semiconductor device App 20060137988 - Yahashi; Katsunori ; et al. | 2006-06-29 |
| Method of manufacturing semiconductor device App 20060128093 - Takenaka; Keiichi ; et al. | 2006-06-15 |
| Capacitive coupling plasma processing apparatus App 20060118044 - Himori; Shinji ; et al. | 2006-06-08 |
| High speed silicon etching method Grant 7,022,616 - Mimura , et al. April 4, 2 | 2006-04-04 |
| Processing method for conservation of processing gases App 20050279731 - Saito, Masashi ; et al. | 2005-12-22 |
| Gas circulating-processing apparatus Grant 6,938,638 - Kubota , et al. September 6, 2 | 2005-09-06 |
| Plasma processing apparatus App 20050011452 - Hayami, Toshihiro ; et al. | 2005-01-20 |
| Plasma processing apparatus App 20040244688 - Himori, Shinji ; et al. | 2004-12-09 |
| Plasma processing apparatus with reduced parasitic capacity and loss in RF power App 20040238126 - Hayashi, Hisataka ; et al. | 2004-12-02 |
| Semiconductor device including trench capacitor and manufacturing method of the same App 20040188739 - Takenaka, Keiichi ; et al. | 2004-09-30 |
| Plasma processing method App 20040168766 - Sakai, Itsuko ; et al. | 2004-09-02 |
| Gas recirculation flow control method and apparatus for use in vacuum system Grant 6,782,907 - Kawasaki , et al. August 31, 2 | 2004-08-31 |
| Plasma processing apparatus with reduced parasitic capacity and loss in RF power Grant 6,780,278 - Hayashi , et al. August 24, 2 | 2004-08-24 |
| High speed silicon etching method App 20040097079 - Mimura, Takanori ; et al. | 2004-05-20 |
| Method for manufacturing a semiconductor device using recirculation of a process gas Grant 6,689,699 - Sakai , et al. February 10, 2 | 2004-02-10 |
| Plasma treatment apparatus App 20040020431 - Himori, Shinji ; et al. | 2004-02-05 |
| Plasma processing method Grant 6,642,149 - Suemasa , et al. November 4, 2 | 2003-11-04 |
| Plasma processing method App 20030054647 - Suemasa, Tomoki ; et al. | 2003-03-20 |
| Gas circulating-processing apparatus App 20020134429 - Kubota, Hiroshi ; et al. | 2002-09-26 |
| Gas recirculation flow control method and apparatus for use in vacuum system App 20020134439 - Kawasaki, Hiroyuki ; et al. | 2002-09-26 |
| Plasma processing apparatus with reduced parasitic capacity and loss in RF power App 20020042204 - Hayashi, Hisataka ; et al. | 2002-04-11 |
| Semiconductor processing apparatus and method for manufacturing a semiconductor device App 20020034880 - Sakai, Itsuko ; et al. | 2002-03-21 |
| Plasma processing method App 20010051232 - Sakai, Itsuko ; et al. | 2001-12-13 |
| Gas recovery system and gas recovery method App 20010015133 - Sakai, Itsuko ; et al. | 2001-08-23 |
| Plasma process apparatus Grant 5,717,294 - Sakai , et al. February 10, 1 | 1998-02-10 |
| Charged beam apparatus having cleaning function and method of cleaning charged beam apparatus Grant 5,539,211 - Ohtoshi , et al. July 23, 1 | 1996-07-23 |
| Method of cleaning a charged beam apparatus Grant 5,312,519 - Sakai , et al. May 17, 1 | 1994-05-17 |
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