Sadjadi; Reza

Patent Applications and Registrations

Patent applications and USPTO patent grants for Sadjadi; Reza.The latest application filed is for "process chamber having tunable showerhead and tunable liner".

Company Profile

0.20.19

Sadjadi; Reza - Saratoga CA
Sadjadi; Reza - San Jose CA

*profile and listings may contain filings by different individuals or companies with the same name. Review application materials to confirm ownership/assignment.

Patent Activity

Patent	Date
Process chamber having tunable showerhead and tunable liner Grant 10,811,233 - Nguyen , et al. October 20, 2	2020-10-20
Process Chamber Having Tunable Showerhead And Tunable Liner App 20180047544 - NGUYEN; ANDREW ; et al.	2018-02-15
Pixelated capacitance controlled ESC Grant 9,805,965 - Sadjadi , et al. October 31, 2	2017-10-31
Tunable magnetic field to improve uniformity Grant 9,646,843 - Nguyen , et al. May 9, 2	2017-05-09
Pixelated Capacitance Controlled Esc App 20170004988 - SADJADI; Reza ; et al.	2017-01-05
Pixelated capacitance controlled ESC Grant 9,536,769 - Sadjadi , et al. January 3, 2	2017-01-03
Pixelated capacitance controlled ESC Grant 9,472,410 - Sadjadi , et al. October 18, 2	2016-10-18
Tunable Magnetic Field To Improve Uniformity App 20160163511 - NGUYEN; Andrew ; et al.	2016-06-09
Pixelated Capacitance Controlled Esc App 20150311105 - SADJADI; Reza ; et al.	2015-10-29
Apparatus and method for controlling plasma potential Grant 9,111,724 - Keil , et al. August 18, 2	2015-08-18
Gas distribution system having fast gas switching capabilities Grant 8,673,785 - Huang , et al. March 18, 2	2014-03-18
Apparatus and Method for Controlling Plasma Potential App 20110024045 - Keil; Douglas ; et al.	2011-02-03
Apparatus and Method for Controlling Plasma Potential App 20110024046 - Keil; Douglas ; et al.	2011-02-03
Magnetic enhancement for mechanical confinement of plasma Grant 7,838,086 - Keil , et al. November 23, 2	2010-11-23
Gas Distribution System Having Fast Gas Switching Capabilities App 20100159707 - Huang; Zhisong ; et al.	2010-06-24
Gas distribution system having fast gas switching capabilities Grant 7,708,859 - Huang , et al. May 4, 2	2010-05-04
Electrically enhancing the confinement of plasma Grant 7,632,375 - Kuthi , et al. December 15, 2	2009-12-15
Electrically Enhancing The Confinement Of Plasma App 20090165954 - Kuthi; Andras ; et al.	2009-07-02
Magnetic Enhancement For Mechanical Confinement Of Plasma App 20090041951 - Keil; Douglas L. ; et al.	2009-02-12
Method for Resist Strip in Presence of Low K Dielectric Material and Apparatus for Performing the Same App 20090032192 - Huang; Zhisong ; et al.	2009-02-05
Magnetic enhancement for mechanical confinement of plasma Grant 7,455,748 - Keil , et al. November 25, 2	2008-11-25
Method for resist strip in presence of low K dielectric material and apparatus for performing the same Grant 7,452,660 - Huang , et al. November 18, 2	2008-11-18
Apparatus and Method for Controlling Plasma Potential App 20080006205 - Keil; Douglas ; et al.	2008-01-10
Method for plasma stripping using periodic modulation of gas chemistry and hydrocarbon addition Grant 7,294,580 - Yun , et al. November 13, 2	2007-11-13
Method for resist strip in presence of regular low k and/or porous low k dielectric materials Grant 7,288,488 - Zhu , et al. October 30, 2	2007-10-30
In-situ plug fill Grant 7,192,531 - Kang , et al. March 20, 2	2007-03-20
Method for forming a dual damascene structure Grant 7,169,695 - Huang , et al. January 30, 2	2007-01-30
Method for resist strip in presence of regular low k and/or porous low k dielectric materials App 20060258148 - Zhu; Helen ; et al.	2006-11-16
Methods and apparatus for inspecting contact openings in a plasma processing system Grant 6,979,579 - Kim , et al. December 27, 2	2005-12-27
Gas distribution system having fast gas switching capabilities App 20050241763 - Huang, Zhisong ; et al.	2005-11-03
Magnetic enhancement for mechanical confinement of plasma App 20050006028 - Keil, Douglas L. ; et al.	2005-01-13
Method for plasma stripping using periodic modulation of gas chemistry and hydrocarbon addition App 20040224520 - Yun, Seokmin ; et al.	2004-11-11
Method of etching with NH3 and fluorine chemistries App 20040211517 - Annapragada, Rao ; et al.	2004-10-28
Post-development treatment of patterned photoresist to promote cross-linking of polymer chains Grant 6,780,569 - Hudson , et al. August 24, 2	2004-08-24
Method for forming a dual damascene structure App 20040072430 - Huang, Zhisong ; et al.	2004-04-15
Method of etching with NH3 and fluorine chemistries App 20020121500 - Annapragada, Rao ; et al.	2002-09-05
Combined resist strip and barrier etch process for dual damascene structures App 20020119664 - Annapragada, Rao ; et al.	2002-08-29

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