Patent | Date |
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High resistivity silicon wafers Grant 8,252,404 - Sadamitsu , et al. August 28, 2 | 2012-08-28 |
Silicon Epitaxial Wafer And Production Method For Same App 20110171814 - Sadamitsu; Shinsuke ;   et al. | 2011-07-14 |
Process for producing high-resistance silicon wafers and process for producing epitaxial wafers and SOI wafers Grant 7,803,228 - Kurita , et al. September 28, 2 | 2010-09-28 |
Method for manufacturing silicon wafer method Grant 7,700,394 - Sadamitsu , et al. April 20, 2 | 2010-04-20 |
Silicon epitaxial wafer and production method for same App 20090017291 - Sadamitsu; Shinsuke ;   et al. | 2009-01-15 |
High resistance silicon wafer and its manufacturing method Grant 7,397,110 - Takase , et al. July 8, 2 | 2008-07-08 |
Method for Manufacturing Silicon Wafer and Silicon Wafer Manufactured by this Method App 20080118424 - Sadamitsu; Shinsuke ;   et al. | 2008-05-22 |
High-resistance silicon wafer and process for producing the same Grant 7,316,745 - Sadamitsu , et al. January 8, 2 | 2008-01-08 |
High resistivity silicon wafer and method for fabricating the same Grant 7,226,571 - Takase , et al. June 5, 2 | 2007-06-05 |
Manufacturing method of high resistivity silicon single crystal Grant 7,220,308 - Takase , et al. May 22, 2 | 2007-05-22 |
Process for producing high-resistance silicon wafers and process for producing epitaxial wafers and soi wafers (as amended) App 20070066033 - Kurita; Kazunari ;   et al. | 2007-03-22 |
High resistance silicon wafer and method for production thereof App 20050253221 - Takase, Nobumitsu ;   et al. | 2005-11-17 |
High-resistance silicon wafer and process for producing the same App 20050250349 - Sadamitsu, Shinsuke ;   et al. | 2005-11-10 |
High resistivity silicon wafer and method for fabricating the same App 20050127477 - Takase, Nobumitsu ;   et al. | 2005-06-16 |
High resistivity silicon wafers App 20050103256 - Sadamitsu, Shinsuke ;   et al. | 2005-05-19 |
Manufacturing method of high resistivity silicon single crystal App 20050000410 - Takase, Nobumitsu ;   et al. | 2005-01-06 |
Evaluation method of IG effectivity in semiconductor silicon substrates Grant 6,803,242 - Kihara , et al. October 12, 2 | 2004-10-12 |
Silicon single crystal, silicon wafer, and epitaxial wafer. Grant 6,641,888 - Asayama , et al. November 4, 2 | 2003-11-04 |
Evaluation method of IG effectivity in semiconductor silicon substrates App 20030203519 - Kihara, Takayuki ;   et al. | 2003-10-30 |
Silicon single crystal, silicon wafer, and epitaxial wafer App 20020142170 - Asayama, Eiichi ;   et al. | 2002-10-03 |
Silicon single crystal, silicon wafer, and epitaxial wafer App 20020142171 - Asayama, Eiichi ;   et al. | 2002-10-03 |
Semiconductor silicon wafer, semiconductor silicon wafer fabrication method and annealing equipment Grant 6,129,787 - Adachi , et al. October 10, 2 | 2000-10-10 |