| Patent | Date |
|---|
Wafer singulation process control
Grant 11,315,832 - Fitzgerald April 26, 2 | 2022-04-26 |
Wafer-level Package Assembly Handling
App 20220121676 - Barr; Kevin ; et al. | 2022-04-21 |
Wafer-level Package Assembly Handling
App 20220012261 - Barr; Kevin ; et al. | 2022-01-13 |
Wafer Crack Detection
App 20200225278 - SEEGER; Hartmut | 2020-07-16 |
Wafer Inspection System Including A Laser Triangulation Sensor
App 20200191557 - Schaefer; John ; et al. | 2020-06-18 |
Substrate handling and identification mechanism
Grant 10,664,714 - Barr | 2020-05-26 |
Inspection of substrates
Grant 10,553,504 - Singh , et al. Fe | 2020-02-04 |
Semiconductor device inspection of metallic discontinuities
Grant 10,466,179 - Singh , et al. No | 2019-11-05 |
Focus adjustment for surface part inspection
Grant 10,412,311 - Bishop , et al. Sept | 2019-09-10 |
Opto-acoustic metrology of signal attenuating structures
Grant 10,209,300 - Kotelyanskii , et al. Feb | 2019-02-19 |
Wafer Singulation Process Control
App 20190019728 - Fitzgerald; Wayne | 2019-01-17 |
Calibration of semiconductor metrology systems
Grant 10,173,249 - Ding , et al. J | 2019-01-08 |
Inspection Of Substrates
App 20180277452 - Singh; Gurvinder ; et al. | 2018-09-27 |
Semiconductor Device Inspection Of Metallic Discontinuities
App 20180275063 - Singh; Gurvinder ; et al. | 2018-09-27 |
System and method of characterizing micro-fabrication processes
Grant 10,024,804 - Thornell , et al. July 17, 2 | 2018-07-17 |
Method and apparatus to assist the processing of deformed substrates
Grant 10,014,228 - Greer , et al. July 3, 2 | 2018-07-03 |
Substrate Handling And Identification Mechanism
App 20180173984 - Barr; Kevin | 2018-06-21 |
Non-destructive acoustic metrology for void detection
Grant 9,991,176 - Mehendale , et al. June 5, 2 | 2018-06-05 |
Assessing alignment of top and bottom ends of TSVs and characterizing microfabrication process
Grant 9,952,041 - Roy , et al. April 24, 2 | 2018-04-24 |
Method Of Measuring And Assessing A Probe Card With An Inspection Device
App 20170276758 - Olmstead; Greg | 2017-09-28 |
Flying sensor head
Grant 9,772,183 - Stefanczyk , et al. September 26, 2 | 2017-09-26 |
System And Method Of Characterizing Micro-fabrication Processes
App 20170254757 - Thornell; John ; et al. | 2017-09-07 |
Wafer shape thickness and trench measurement
Grant 9,714,825 - Marx , et al. July 25, 2 | 2017-07-25 |
Method of measuring and assessing a probe card with an inspection device
Grant 9,684,052 - Olmstead June 20, 2 | 2017-06-20 |
Inspection of substrates using calibration and imaging
Grant 9,664,625 - Zhou May 30, 2 | 2017-05-30 |
System and method of characterizing micro-fabrication processes
Grant 9,658,169 - Thornell , et al. May 23, 2 | 2017-05-23 |
Opto-acoustic Metrology Of Signal Attenuating Structures
App 20170141004 - Kotelyanskii; Michael ; et al. | 2017-05-18 |
Probe card analysis system and method
Grant 9,638,782 - Endres , et al. May 2, 2 | 2017-05-02 |
Planar motor system with increased efficiency
Grant 9,625,832 - Donaher , et al. April 18, 2 | 2017-04-18 |
On-axis focus sensor and method
Grant 9,594,230 - Ohren , et al. March 14, 2 | 2017-03-14 |
System for directly measuring the depth of a high aspect ratio etched feature on a wafer
Grant 9,587,932 - Marx , et al. March 7, 2 | 2017-03-07 |
Optical acoustic substrate assessment system and method
Grant 9,576,862 - Murray , et al. February 21, 2 | 2017-02-21 |
Volumetric Substrate Scanner
App 20170045463 - Wenz; Holger | 2017-02-16 |
Inspection device with vertically moveable assembly
Grant 9,535,089 - Gunderson , et al. January 3, 2 | 2017-01-03 |
High Speed Autofocus System
App 20160352997 - Bishop; Robert ; et al. | 2016-12-01 |
Automated wafer defect inspection system and a process of performing such inspection
Grant 9,464,992 - O'Dell , et al. October 11, 2 | 2016-10-11 |
Edge grip substrate handler
Grant 9,460,953 - Sato , et al. October 4, 2 | 2016-10-04 |
Substrate handler
Grant 9,437,467 - Palm , et al. September 6, 2 | 2016-09-06 |
Wafer inversion mechanism
Grant 9,431,282 - Palm August 30, 2 | 2016-08-30 |
System For Directly Measuring The Depth Of A High Aspect Ratio Etched Feature On A Wafer
App 20160238378 - Marx; David S. ; et al. | 2016-08-18 |
Automated Wafer Defect Inspection System and a Process of Performing Such Inspection
App 20160223470 - O'Dell; Jeffrey L. ; et al. | 2016-08-04 |
Scratch detection method and apparatus
Grant 9,406,115 - Zhou , et al. August 2, 2 | 2016-08-02 |
Support for semiconductor substrate
Grant 9,401,299 - Sowden , et al. July 26, 2 | 2016-07-26 |
Scanning operation with concurrent focus and inspection
Grant 9,402,036 - Bishop , et al. July 26, 2 | 2016-07-26 |
Method and Apparatus to Assist the Processing of Deformed Substrates
App 20160148831 - Greer; James H. ; et al. | 2016-05-26 |
Automated wafer defect inspection system and a process of performing such inspection
Grant 9,337,071 - O'Dell , et al. May 10, 2 | 2016-05-10 |
Calibration Of Semiconductor Metrology Systems
App 20160101445 - Ding; Jian ; et al. | 2016-04-14 |
Flexible Handling System For Semiconductor Substrates
App 20160042987 - Benson; Dennis | 2016-02-11 |
Edge Grip Substrate Handler
App 20150371886 - Sato; Isao ; et al. | 2015-12-24 |
Method Of Characterizing Microfabrication Process And Products Thereof
App 20150362314 - Roy; Rajiv ; et al. | 2015-12-17 |
Flying Sensor Head
App 20150323320 - STEFANCZYK; Wojciech ; et al. | 2015-11-12 |
System And Method Of Characterizing Micro-fabrication Processes
App 20150316487 - Thornell; John ; et al. | 2015-11-05 |
Planar Motor System With Increased Efficiency
App 20150309425 - Donaher; J. Casey ; et al. | 2015-10-29 |
Multiple-Blade Device for Substrate Edge Protection during Photolithography
App 20150277239 - Greer; James H. ; et al. | 2015-10-01 |
Inspection Of Substrates Using Calibration And Imaging
App 20150253256 - Zhou; Wei | 2015-09-10 |
Blade for Substrate Edge Protection During Photolithography
App 20150234281 - Gardner; Steven D. ; et al. | 2015-08-20 |
Wafer edge inspection illumination system
Grant 9,062,859 - Voges , et al. June 23, 2 | 2015-06-23 |
Substrate analysis using surface acoustic wave metrology
Grant 9,041,931 - Colgan , et al. May 26, 2 | 2015-05-26 |
Method Of Measuring And Assessing A Probe Card With An Inspection Device
App 20150054534 - Olmstead; Greg | 2015-02-26 |
Multiple Measurement Techniques Including Focused Beam Scatterometry For Characterization Of Samples
App 20140375983 - Wolf; Robert Gregory ; et al. | 2014-12-25 |
On-axis Focus Sensor And Method
App 20140368635 - Ohren; Dennis L. ; et al. | 2014-12-18 |
System And Method Of Characterizing Micro-fabrication Processes
App 20140320635 - Thornell; John ; et al. | 2014-10-30 |
Substrate Handler
App 20140314535 - Palm; Troy ; et al. | 2014-10-23 |
Inspection Device With Vertically Moveable Assembly
App 20140253166 - Gunderson; Gary Mark ; et al. | 2014-09-11 |
Wafer edge inspection and metrology
Grant 8,818,074 - Pai , et al. August 26, 2 | 2014-08-26 |
System and method for estimating field curvature
Grant 8,760,624 - Donaher June 24, 2 | 2014-06-24 |
Inspection device with vertically moveable assembly
Grant 8,729,917 - Gunderson , et al. May 20, 2 | 2014-05-20 |
System For Directly Measuring The Depth Of A High Aspect Ratio Etched Feature On A Wafer
App 20140110582 - Marx; David S. ; et al. | 2014-04-24 |
Multiple measurement techniques including focused beam scatterometry for characterization of samples
Grant 8,699,027 - Wolf , et al. April 15, 2 | 2014-04-15 |
Substrate handler
Grant 8,698,327 - Palm , et al. April 15, 2 | 2014-04-15 |
Wafer Edge Inspection
App 20140063799 - Voges; Christopher ; et al. | 2014-03-06 |
Selective overtravel during electrical test of probe cards
Grant 8,659,308 - Andersen February 25, 2 | 2014-02-25 |
System for directly measuring the depth of a high aspect ratio etched feature on a wafer
Grant 8,649,016 - Marx , et al. February 11, 2 | 2014-02-11 |
Probe Card Analysis System And Method
App 20140021970 - Endres; Eric ; et al. | 2014-01-23 |
Polarization imaging
Grant 8,620,063 - Balak , et al. December 31, 2 | 2013-12-31 |
Polarization imaging
Grant 08620063 - | 2013-12-31 |
Scratch Detection Method And Apparatus
App 20130216122 - Zhou; Wei ; et al. | 2013-08-22 |
Wafer Inversion Mechanism
App 20130209211 - Palm; Troy | 2013-08-15 |
Method of monitoring fabrication processing including edge bead removal processing
Grant 8,492,178 - Carlson , et al. July 23, 2 | 2013-07-23 |
Probe card analysis system and method
Grant 8,466,703 - Endres , et al. June 18, 2 | 2013-06-18 |
Wafer edge inspection
Grant 8,426,223 - Voges , et al. April 23, 2 | 2013-04-23 |
System and method of non-linear grid fitting and coordinate system mapping
Grant 8,428,393 - Kraft April 23, 2 | 2013-04-23 |
System metrology core
Grant 8,395,783 - Donaher , et al. March 12, 2 | 2013-03-12 |
Semiconductor yield management system and method
Grant 8,380,472 - Wang , et al. February 19, 2 | 2013-02-19 |
Wafer Edge Inspection And Metrology
App 20130022260 - Pai; Ajay ; et al. | 2013-01-24 |
Probe mark inspection
Grant 8,358,831 - Doe , et al. January 22, 2 | 2013-01-22 |
Characterization with picosecond ultrasonics of metal portions of samples potentially subject to erosion
Grant 8,312,772 - Tas , et al. November 20, 2 | 2012-11-20 |
Infrared Inspection Of Bonded Substrates
App 20120287263 - Zhou; Wei | 2012-11-15 |
Substrate Handler
App 20120257952 - Palm; Troy ; et al. | 2012-10-11 |
Optical Inspection Optimization
App 20120189189 - Doe; Rodney Bryan ; et al. | 2012-07-26 |
Focusing method and apparatus
Grant 8,204,298 - Vaughnn June 19, 2 | 2012-06-19 |
Apparatus For Obtaining Planarity Measurements With Respect To A Probe Card Analysis System
App 20120150475 - Strom; John T. ; et al. | 2012-06-14 |
Method of applying the analysis of scrub mark morphology and location to the evaluation and correction of semiconductor testing, analysis, and manufacture
Grant 8,198,906 - Strom June 12, 2 | 2012-06-12 |
Bitmap cluster analysis of defects in integrated circuits
Grant 8,190,952 - Ho , et al. May 29, 2 | 2012-05-29 |
Wafer edge inspection and metrology
Grant 8,175,372 - Pai , et al. May 8, 2 | 2012-05-08 |
Inspection Device With Vertically Moveable Assembly
App 20120098563 - Gunderson; Gary Mark ; et al. | 2012-04-26 |
Automated Wafer Defect Inspection System And A Process Of Performing Such Inspection
App 20120087569 - O'Dell; Jeffrey ; et al. | 2012-04-12 |
Polarization Imaging
App 20120070065 - Balak; Scott A. ; et al. | 2012-03-22 |
Multiple measurement techniques including focused beam scatterometry for characterization of samples
Grant 8,139,232 - Wolf , et al. March 20, 2 | 2012-03-20 |
Wafer holding mechanism
Grant 8,130,372 - Harless , et al. March 6, 2 | 2012-03-06 |
Adjustable film frame aligner
Grant 8,097,966 - Herrmann , et al. January 17, 2 | 2012-01-17 |
System and method of measuring probe float
Grant 8,089,292 - Strom , et al. January 3, 2 | 2012-01-03 |
Focusing Method And Apparatus
App 20110268348 - Vaughnn; David | 2011-11-03 |
Wafer Edge Inspection
App 20110263049 - Voges; Christopher ; et al. | 2011-10-27 |
Semiconductor yield management system and method
Grant RE42,481 - Wang , et al. June 21, 2 | 2011-06-21 |
Reflective Objective
App 20110141594 - Vaughnn; David ; et al. | 2011-06-16 |
Apparatus for obtaining planarity measurements with respect to a probe card analysis system
Grant 7,960,981 - Strom , et al. June 14, 2 | 2011-06-14 |
Analysis techniques for multi-level memory
Grant 7,954,018 - Ho , et al. May 31, 2 | 2011-05-31 |
Probe Card Analysis System And Method
App 20110089965 - Endres; Eric ; et al. | 2011-04-21 |
Wafer Edge Inspection And Metrology
App 20110085725 - Pai; Ajay ; et al. | 2011-04-14 |
Combination of ellipsometry and optical stress generation and detection
Grant 7,903,238 - Mehendale , et al. March 8, 2 | 2011-03-08 |
Wafer Fabrication Monitoring Systems And Methods, Including Edge Bead Removal Processing
App 20110054659 - Carlson; Alan ; et al. | 2011-03-03 |
Wafer Probe Test And Inspection System
App 20110037492 - Seubert; Ronald C. ; et al. | 2011-02-17 |
Wafer edge inspection and metrology
Grant 7,865,010 - Pai , et al. January 4, 2 | 2011-01-04 |
System And Method Of Measuring Probe Float
App 20100321056 - Strom; John T. ; et al. | 2010-12-23 |
Method Of Applying The Analysis Of Scrub Mark Morphology And Location To The Evaluation And Correction Of Semiconductor Testing, Analysis, And Manufacture
App 20100305897 - Strom; John T. | 2010-12-02 |
All surface data for use in substrate inspection
Grant 7,835,566 - Reich , et al. November 16, 2 | 2010-11-16 |
Method And System For Providing A High Definition Triangulation System
App 20100277717 - Stern; Howard ; et al. | 2010-11-04 |
Edge inspection
Grant 7,822,260 - Watkins , et al. October 26, 2 | 2010-10-26 |
System for generating camera triggers
Grant 7,813,638 - Watkins , et al. October 12, 2 | 2010-10-12 |
Automated Wafer Defect Inspection System And A Process Of Performing Such Inspection
App 20100239157 - O'Dell; Jeffrey ; et al. | 2010-09-23 |
Probe card analysis system and method
Grant 7,782,071 - Endres August 24, 2 | 2010-08-24 |
High-speed Capacitor Leakage Measurement Systems And Methods
App 20100194406 - Corulli; Charles ; et al. | 2010-08-05 |
Method of applying the analysis of scrub mark morphology and location to the evaluation and correction of semiconductor testing, analysis and manufacture
Grant 7,750,622 - Strom July 6, 2 | 2010-07-06 |
Automated wafer defect inspection system and a process of performing such inspection
Grant 7,729,528 - O'Dell , et al. June 1, 2 | 2010-06-01 |
Illuminator for darkfield inspection
Grant 7,724,358 - Vaughnn May 25, 2 | 2010-05-25 |
Wafer holding mechanism
Grant 7,703,823 - Harless , et al. April 27, 2 | 2010-04-27 |
Metrology system with spectroscopic ellipsometer and photoacoustic measurements
Grant 7,705,974 - Wolf , et al. April 27, 2 | 2010-04-27 |
Edge normal process
Grant 7,706,599 - Sim April 27, 2 | 2010-04-27 |
Wafer Edge Inspection And Metrology
App 20100086197 - Pai; Ajay ; et al. | 2010-04-08 |
Apparatus For Obtaining Planarity Measurements With Respect To A Probe Card Analysis System
App 20100073019 - Strom; John T. ; et al. | 2010-03-25 |
Photoresist edge bead removal measurement
Grant 7,684,611 - Simpkins March 23, 2 | 2010-03-23 |
All Surface Data For Use In Substrate Inspection
App 20100067779 - Reich; David ; et al. | 2010-03-18 |
Probe Mark Inspection
App 20100061620 - Doe; Rodney ; et al. | 2010-03-11 |
High-speed capacitor leakage measurement systems and methods
Grant 7,663,382 - Corulli , et al. February 16, 2 | 2010-02-16 |
Wafer Scanning
App 20100012855 - Lazarov; Guenadiy ; et al. | 2010-01-21 |
Polarization Imaging
App 20090324056 - Sun; Gang | 2009-12-31 |
Dual-axis scanning system and method
Grant 7,634,129 - Strom December 15, 2 | 2009-12-15 |
Stereoscopic three-dimensional metrology system and method
Grant 7,634,128 - Snow , et al. December 15, 2 | 2009-12-15 |
System and method of measuring probe float
Grant 7,633,306 - Strom , et al. December 15, 2 | 2009-12-15 |
Automated wafer defect inspection system using backside illumination
Grant 7,629,993 - Harless , et al. December 8, 2 | 2009-12-08 |
Wafer edge inspection and metrology
Grant 7,616,804 - Pai , et al. November 10, 2 | 2009-11-10 |
Method and system for providing a high definition triangulation system
Grant 7,616,328 - Stern , et al. November 10, 2 | 2009-11-10 |
All surface data for use in substrate inspection
Grant 7,593,565 - Reich , et al. September 22, 2 | 2009-09-22 |
Camera and illumination matching for inspection system
Grant 7,589,783 - Simpkins , et al. September 15, 2 | 2009-09-15 |
Polarization imaging
Grant 7,586,607 - Sun September 8, 2 | 2009-09-08 |
Apparatus for obtaining planarity measurements with respect to a probe card analysis system
Grant 7,579,853 - Strom August 25, 2 | 2009-08-25 |
Method and system for defect detection
Grant 7,539,583 - Fu , et al. May 26, 2 | 2009-05-26 |
Metrology system with spectroscopic ellipsometer and photoacoustic measurements
Grant 7,522,272 - Wolf , et al. April 21, 2 | 2009-04-21 |
Illuminator For Darkfield Inspection
App 20090073429 - Vaughnn; David | 2009-03-19 |
Fiber optic darkfield ring light
Grant 7,461,961 - Li December 9, 2 | 2008-12-09 |
System And Method Of Mitigating Effects Of Component Deflection In A Probe Card Analyzer
App 20080238464 - STROM; JOHN T. | 2008-10-02 |
Edge Normal Process
App 20080204756 - Sim; Hak Chuah | 2008-08-28 |
Probe Card Analysis System And Method
App 20080197865 - ENDRES; ERIC | 2008-08-21 |
System and method of mitigating effects of component deflection in a probe card analyzer
Grant 7,385,409 - Strom June 10, 2 | 2008-06-10 |
Dual photo-acoustic and resistivity measurement system
Grant 7,372,584 - Wolf May 13, 2 | 2008-05-13 |
System and method of point matching measured positions to template positions
Grant 7,373,275 - Kraft May 13, 2 | 2008-05-13 |
Method of performing optical measurement on a sample
Grant 7,369,234 - Beaglehole May 6, 2 | 2008-05-06 |
Edge normal process
Grant 7,366,344 - Sim April 29, 2 | 2008-04-29 |
Edge inspection
Grant 7,340,087 - Watkins , et al. March 4, 2 | 2008-03-04 |
Adjustable film frame aligner
Grant 7,316,938 - Herrmann , et al. January 8, 2 | 2008-01-08 |
Metrology system with spectroscopic ellipsometer and photoacoustic measurements
App 20070268478 - Wolf; Robert Gregory ; et al. | 2007-11-22 |
Reflective objective
App 20070247729 - Vaughnn; David ; et al. | 2007-10-25 |
Metrology system with spectroscopic ellipsometer and photoacoustic measurements
Grant 7,253,887 - Wolf , et al. August 7, 2 | 2007-08-07 |
Wafer staging platform for a wafer inspection system
Grant 7,230,441 - Carlson-Stevermer June 12, 2 | 2007-06-12 |
Fiber optic darkfield ring light
Grant 7,220,034 - Li May 22, 2 | 2007-05-22 |
Optical inspection method utilizing ultraviolet light
Grant 7,206,442 - Herod , et al. April 17, 2 | 2007-04-17 |
Photoresist edge bead removal measurement
Grant 7,197,178 - Simpkins March 27, 2 | 2007-03-27 |
Dynamic focusing method and apparatus
Grant 7,196,300 - Watkins , et al. March 27, 2 | 2007-03-27 |
Optical throughput condenser
Grant 7,192,173 - Vaughnn March 20, 2 | 2007-03-20 |
Inspection tool with a 3D point sensor to develop a focus map
Grant 7,170,075 - Oberski , et al. January 30, 2 | 2007-01-30 |
System and method for inspection using white light interferometry
Grant 7,158,235 - Mathur , et al. January 2, 2 | 2007-01-02 |
Combined ultra-fast x-ray and optical system for thin film measurements
App 20060256916 - Kotelyanskii; Michael ; et al. | 2006-11-16 |
Dual photo-acoustic and resistivity measurement system
App 20060227342 - Wolf; R. Gregory | 2006-10-12 |
Metrology system with spectroscopic ellipsometer and photoacoustic measurements
App 20060126057 - Wolf; Robert Gregory ; et al. | 2006-06-15 |
Method and apparatus for increasing signal to noise ratio in a photoacoustic film thickness measurement system
Grant 7,050,178 - Morath , et al. May 23, 2 | 2006-05-23 |
System and method for three-dimensional surface inspection
Grant 7,039,228 - Pattikonda , et al. May 2, 2 | 2006-05-02 |
Measuring Elastic Moduli Of Dielectric Thin Films Using An Optical Metrology System
App 20060072120 - Leary; Sean P. ; et al. | 2006-04-06 |
Measuring elastic moduli of dielectric thin films using an optical metrology system
Grant 7,019,845 - Leary , et al. March 28, 2 | 2006-03-28 |
Metrology system with spectroscopic ellipsometer and photoacoustic measurements
Grant 7,006,221 - Wolf , et al. February 28, 2 | 2006-02-28 |
Optically-based method and apparatus for detecting and characterizing surface pits in a metal film during chemical mechanical polish
Grant 7,002,689 - Liu , et al. February 21, 2 | 2006-02-21 |
Methods and apparatus for determining optical constants of semiconductors and dielectrics with interband states
Grant 6,934,031 - Kwon August 23, 2 | 2005-08-23 |
Molecular airborne contaminants (MACs) film removal and wafer surface sustaining system and method
App 20050098264 - Wolf, Robert Gregory ; et al. | 2005-05-12 |
Scalable, automated metrology system and method of making the system
Grant 6,886,423 - Wolf May 3, 2 | 2005-05-03 |
System and method for multi-wavelength, narrow-bandwidth detection of surface defects
Grant 6,847,443 - Herod , et al. January 25, 2 | 2005-01-25 |
System and method for detecting defects on a structure-bearing surface using optical inspection
Grant 6,813,376 - Hennessey , et al. November 2, 2 | 2004-11-02 |
Optical metrology system and method employing laser-server supplying laser energy to distributed slave metrology heads
Grant 6,621,582 - Wolf September 16, 2 | 2003-09-16 |
Method and apparatus for measuring very thin dielectric film thickness and creating a stable measurement environment
Grant 6,519,045 - Kwon February 11, 2 | 2003-02-11 |
Method and apparatus for decreasing thermal loading and roughness sensitivity in a photoacoustic film thickness measurement system
Grant 6,504,618 - Morath , et al. January 7, 2 | 2003-01-07 |
Optically-based method and apparatus for detecting and characterizing surface pits in a metal film during chemical mechanical polish
App 20020151127 - Liu, Hengda ; et al. | 2002-10-17 |
Method and apparatus for decreasing thermal loading and roughness sensitivity in a photoacoustic film thickness measurement system
App 20020135784 - Morath, Christopher ; et al. | 2002-09-26 |
Optical metrology system and method employing laser-server supplying laser energy to distributed slave metrology heads
App 20020030825 - Wolf, R. Gregory | 2002-03-14 |
Ellipsometer and ellipsometry method
Grant 6,256,097 - Wagner July 3, 2 | 2001-07-03 |
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