Roy; Susmit Singha
Patent Applications and Registrations
Patent applications and USPTO patent grants for Roy; Susmit Singha.The latest application filed is for "defect free germanium oxide gap fill".
Company Profile
41.28.39
- Roy; Susmit Singha - Sunnyvale CA
- Roy; Susmit Singha - Mountain View CA
Patent Activity
| Patent | Date |
|---|---|
| Fully self-aligned via Grant 11,437,274 - Freed , et al. September 6, 2 | 2022-09-06 |
| Self-aligned contact and contact over active gate structures Grant 11,437,273 - Shusterman , et al. September 6, 2 | 2022-09-06 |
| Self-aligned structures from sub-oxides Grant 11,414,751 - Gandikota , et al. August 16, 2 | 2022-08-16 |
| Super-conformal Germanium Oxide Films App 20220186365 - Wang; Huiyuan ; et al. | 2022-06-16 |
| Defect Free Germanium Oxide Gap Fill App 20220189824 - Wang; Huiyuan ; et al. | 2022-06-16 |
| Conformal Silicon-germanium Film Deposition App 20220165566 - Wang; Huiyuan ; et al. | 2022-05-26 |
| Conformal high concentration boron doping of semiconductors Grant 11,328,928 - Gandikota , et al. May 10, 2 | 2022-05-10 |
| Bottom-up approach to high aspect ratio hole formation in 3D memory structures Grant 11,315,943 - Gopalraja , et al. April 26, 2 | 2022-04-26 |
| Selective Deposition of Germanium App 20220108888 - Wang; Huiyuan ; et al. | 2022-04-07 |
| Nucleation-free gap fill ALD process Grant 11,289,374 - Chen , et al. March 29, 2 | 2022-03-29 |
| Methods of etching metal oxides with less etch residue Grant 11,232,955 - Mullick , et al. January 25, 2 | 2022-01-25 |
| Ultra-thin Films With Transition Metal Dichalcogenides App 20210404056 - Roy; Susmit Singha ; et al. | 2021-12-30 |
| Selective deposition of carbon films and uses thereof Grant 11,177,174 - Roy , et al. November 16, 2 | 2021-11-16 |
| Self-aligned high aspect ratio structures and methods of making Grant 11,177,164 - Roy , et al. November 16, 2 | 2021-11-16 |
| Fluorine-doped nitride films for improved high-k reliability Grant 11,171,047 - Yang , et al. November 9, 2 | 2021-11-09 |
| Stack For 3d-nand Memory Cell App 20210327891 - Koshizawa; Takehito ; et al. | 2021-10-21 |
| Methods of forming self-aligned vias Grant 11,094,544 - Thompson , et al. August 17, 2 | 2021-08-17 |
| Ultra-thin diffusion barriers Grant 11,069,568 - Roy , et al. July 20, 2 | 2021-07-20 |
| Metal and metal-derived films Grant 10,998,195 - Roy , et al. May 4, 2 | 2021-05-04 |
| Fully Self-Aligned Via App 20210090952 - Freed; Regina ; et al. | 2021-03-25 |
| Selective and self-limiting tungsten etch process Grant 10,950,498 - Roy , et al. March 16, 2 | 2021-03-16 |
| Linerless continuous amorphous metal films Grant 10,930,493 - Roy , et al. February 23, 2 | 2021-02-23 |
| Bottom-Up Approach To High Aspect Ratio Hole Formation In 3D Memory Structures App 20210050365 - Gopalraja; Praburam ; et al. | 2021-02-18 |
| Self-Aligned Structures From Sub-Oxides App 20210047728 - Gandikota; Srinivas ; et al. | 2021-02-18 |
| Fluorine-Doped Nitride Films for Improved High-K Reliability App 20200411373 - Yang; Yixiong ; et al. | 2020-12-31 |
| Metal Based Hydrogen Barrier App 20200373200 - Gandikota; Srinivas ; et al. | 2020-11-26 |
| Methods of forming self-aligned vias and air gaps Grant 10,840,186 - Roy , et al. November 17, 2 | 2020-11-17 |
| Volumetric Expansion Of Metal-Containing Films By Silicidation App 20200279772 - Roy; Susmit Singha ; et al. | 2020-09-03 |
| Self-aligned Contact And Contact Over Active Gate Structures App 20200279773 - Shusterman; Yuriy ; et al. | 2020-09-03 |
| Oxidative volumetric expansion of metals and metal containing compounds Grant 10,741,435 - Roy , et al. A | 2020-08-11 |
| Methods Of Etching Metal Oxides With Less Etch Residue App 20200227275 - Mullick; Amrita B. ; et al. | 2020-07-16 |
| Ultra-thin Diffusion Barriers App 20200194307 - ROY; Susmit Singha ; et al. | 2020-06-18 |
| Self-Aligned High Aspect Ratio Structures And Methods Of Making App 20200194304 - Roy; Susmit Singha ; et al. | 2020-06-18 |
| Selective Deposition Of Carbon Films And Uses Thereof App 20200168503 - Roy; Susmit Singha ; et al. | 2020-05-28 |
| Linerless Continuous Amorphous Metal Films App 20200135456 - ROY; Susmit Singha ; et al. | 2020-04-30 |
| Methods of etching metal oxides with less etch residue Grant 10,622,221 - Mullick , et al. | 2020-04-14 |
| Ultra-thin diffusion barriers Grant 10,600,684 - Roy , et al. | 2020-03-24 |
| Metal And Metal-derived Films App 20200083056 - ROY; Susmit Singha ; et al. | 2020-03-12 |
| PECVD Tungsten Containing Hardmask Films And Methods Of Making App 20200075333 - Roy; Susmit Singha ; et al. | 2020-03-05 |
| Selective and Self-Limiting Tungsten Etch Process App 20200027785 - Roy; Susmit Singha ; et al. | 2020-01-23 |
| PECVD tungsten containing hardmask films and methods of making Grant 10,529,568 - Roy , et al. J | 2020-01-07 |
| Conformal High Concentration Boron Doping Of Semiconductors App 20190385851 - GANDIKOTA; SRINIVAS ; et al. | 2019-12-19 |
| Methods Of Forming Self-Aligned Vias App 20190385849 - Thompson; David ; et al. | 2019-12-19 |
| Metal and metal-derived films Grant 10,510,547 - Roy , et al. Dec | 2019-12-17 |
| Thick tungsten hardmask films deposition on high compressive/tensile bow wafers Grant 10,504,727 - Wang , et al. Dec | 2019-12-10 |
| Nucleation-Free Gap Fill ALD Process App 20190371662 - Chen; Yihong ; et al. | 2019-12-05 |
| Method For Increasing The Verticality Of Pillars App 20190355621 - Marcadal; Christophe ; et al. | 2019-11-21 |
| Methods Of Forming Self-Aligned Vias And Air Gaps App 20190348368 - Roy; Susmit Singha ; et al. | 2019-11-14 |
| Methods of forming self-aligned vias Grant 10,410,865 - Thompson , et al. Sept | 2019-09-10 |
| Methods of forming self-aligned vias and air gaps Grant 10,403,542 - Roy , et al. Sep | 2019-09-03 |
| Boron doped tungsten carbide for hardmask applications Grant 10,403,502 - Venkatasubramanian , et al. Sep | 2019-09-03 |
| Oxidative Volumetric Expansion Of Metals And Metal Containing Compounds App 20190259652 - Roy; Susmit Singha ; et al. | 2019-08-22 |
| Methods Of Etching Metal Oxides With Less Etch Residue App 20190189456 - Mullick; Amrita B. ; et al. | 2019-06-20 |
| Ultra-thin Diffusion Barriers App 20190189506 - Roy; Susmit Singha ; et al. | 2019-06-20 |
| Oxidative volumetric expansion of metals and metal containing compounds Grant 10,319,624 - Roy , et al. | 2019-06-11 |
| Hardmask layer for 3D NAND staircase structure in semiconductor applications Grant 10,312,137 - Venkatasubramanian , et al. | 2019-06-04 |
| Metal And Metal-derived Films App 20190080915 - ROY; Susmit Singha ; et al. | 2019-03-14 |
| Methods Of Forming Self-Aligned Vias App 20190013202 - Thompson; David ; et al. | 2019-01-10 |
| Methods Of Forming Self-Aligned Vias And Air Gaps App 20180358260 - Roy; Susmit Singha ; et al. | 2018-12-13 |
| Methods of forming self-aligned vias Grant 10,083,834 - Thompson , et al. September 25, 2 | 2018-09-25 |
| Boron Doped Tungsten Carbide For Hardmask Applications App 20180218902 - VENKATASUBRAMANIAN; Eswaranand ; et al. | 2018-08-02 |
| Methods Of Forming Self-Aligned Vias App 20180096847 - Thompson; David ; et al. | 2018-04-05 |
| Thick Tungsten Hardmask Films Deposition On High Compressive/tensile Bow Wafers App 20180076032 - WANG; Jiarui ; et al. | 2018-03-15 |
| Cvd Based Oxide-metal Multi Structure For 3d Nand Memory Devices App 20170372953 - ROY; Susmit Singha ; et al. | 2017-12-28 |
| Oxidative Volumetric Expansion Of Metals And Metal Containing Compounds App 20170358483 - Roy; Susmit Singha ; et al. | 2017-12-14 |
| Hardmask Layer For 3d Nand Staircase Structure In Semiconductor Applications App 20170352586 - VENKATASUBRAMANIAN; Eswaranand ; et al. | 2017-12-07 |
| PECVD Tungsten Containing Hardmask Films And Methods Of Making App 20170207087 - Roy; Susmit Singha ; et al. | 2017-07-20 |
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