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Template Structures Including Ultraviolet Wavelength Radiation Transparent Material
App 20140147542 - Sandhu; Gurtej S. ; et al. | 2014-05-29 |
Method to align mask patterns
Grant 8,674,512 - Sandhu , et al. March 18, 2 | 2014-03-18 |
Templates for use in imprint lithography and related intermediate template structures
Grant 8,657,597 - Sandhu , et al. February 25, 2 | 2014-02-25 |
Integrated circuit having pitch reduced patterns relative to photoithography features
Grant 8,598,632 - Tran , et al. December 3, 2 | 2013-12-03 |
Method To Align Mask Patterns
App 20130105976 - Sandhu; Gurtej S. ; et al. | 2013-05-02 |
Method to align mask patterns
Grant 8,338,085 - Sandhu , et al. December 25, 2 | 2012-12-25 |
Integrated Circuit Having Pitch Reduced Patterns Relative To Photolithography Features
App 20120256309 - Tran; Luan ; et al. | 2012-10-11 |
Method for integrated circuit fabrication using pitch multiplication
Grant 8,216,949 - Abatchev , et al. July 10, 2 | 2012-07-10 |
Pitch reduced patterns relative to photolithography features
Grant 8,207,576 - Tran , et al. June 26, 2 | 2012-06-26 |
Pitch reduced patterns relative to photolithography features
Grant 8,119,535 - Tran , et al. February 21, 2 | 2012-02-21 |
Pitch reduced patterns relative to photolithography features
Grant 8,048,812 - Tran , et al. November 1, 2 | 2011-11-01 |
Templates For Use In Imprint Lithography And Related Intermediate Template Structures
App 20100285167 - Sandhu; Gurtej S. ; et al. | 2010-11-11 |
Pitch Reduced Patterns Relative Tophotolithography Features
App 20100210111 - Tran; Luan ; et al. | 2010-08-19 |
Method For Integrated Circuit Fabrication Using Pitch Multiplication
App 20100203727 - Abatchev; Mirzafer K. ; et al. | 2010-08-12 |
Methods of making templates for use in imprint lithography
Grant 7,771,917 - Sandhu , et al. August 10, 2 | 2010-08-10 |
Pitch reduced patterns relative to photolithography features
Grant 7,718,540 - Tran , et al. May 18, 2 | 2010-05-18 |
Pitch Reduced Patterns Relative To Photolithography Features
App 20100092891 - Tran; Luan ; et al. | 2010-04-15 |
Method To Align Mask Patterns
App 20100092890 - Sandhu; Gurtej S. ; et al. | 2010-04-15 |
Method for integrated circuit fabrication using pitch multiplication
Grant 7,687,408 - Abatchev , et al. March 30, 2 | 2010-03-30 |
Method to align mask patterns
Grant 7,655,387 - Sandhu , et al. February 2, 2 | 2010-02-02 |
Pitch reduced patterns relative to photolithography features
Grant 7,651,951 - Tran , et al. January 26, 2 | 2010-01-26 |
Method for integrated circuit fabrication using pitch multiplication
Grant 7,629,693 - Abatchev , et al. December 8, 2 | 2009-12-08 |
Method for integrated circuit fabrication using pitch multiplication
Grant 7,547,640 - Abatchev , et al. June 16, 2 | 2009-06-16 |
Method to align mask patterns
Grant 7,455,956 - Sandhu , et al. November 25, 2 | 2008-11-25 |
Method to align mask patterns
Grant 7,435,536 - Sandhu , et al. October 14, 2 | 2008-10-14 |
Method and apparatus for irradiating a microlithographic substrate
Grant 7,298,453 - Boettiger , et al. November 20, 2 | 2007-11-20 |
Method To Align Mask Patterns
App 20070190463 - Sandhu; Gurtej S. ; et al. | 2007-08-16 |
Pitch reduced patterns relative to photolithography features
Grant 7,253,118 - Tran , et al. August 7, 2 | 2007-08-07 |
Pitch Reduced Patterns Relative To Photolithography Features
App 20070161251 - Tran; Luan ; et al. | 2007-07-12 |
Method For Integrated Circuit Fabrication Using Pitch Multiplication
App 20070148984 - Abatchev; Mirzafer K. ; et al. | 2007-06-28 |
Pitch Reduced Patterns Relative To Photolithography Features
App 20070138526 - Tran; Luan ; et al. | 2007-06-21 |
Pitch Reduced Patterns Relative To Photolithography Features
App 20070128856 - Tran; Luan ; et al. | 2007-06-07 |
Methods of making templates for use in imprint lithography and related structures
App 20060286490 - Sandhu; Gurtej S. ; et al. | 2006-12-21 |
Method for integrated circuit fabrication using pitch multiplication
App 20060262511 - Abatchev; Mirzafer K. ; et al. | 2006-11-23 |
Method for integrated circuit fabrication using pitch multiplication
App 20060258162 - Abatchev; Mirzafer K. ; et al. | 2006-11-16 |
Method to align mask patterns
App 20060240362 - Sandhu; Gurtej S. ; et al. | 2006-10-26 |
Method for integrated circuit fabrication using pitch multiplication
Grant 7,115,525 - Abatchev , et al. October 3, 2 | 2006-10-03 |
Pitch reduced patterns relative to photolithography features
App 20060211260 - Tran; Luan ; et al. | 2006-09-21 |
Method and apparatus for irradiating a microlithographic substrate
App 20060158631 - Boettiger; Ulrich C. ; et al. | 2006-07-20 |
Method and apparatus for irradiating a microlithographic substrate
Grant 7,038,762 - Boettiger , et al. May 2, 2 | 2006-05-02 |
Method to align mask patterns
App 20060046201 - Sandhu; Gurtej S. ; et al. | 2006-03-02 |
Method for integrated circuit fabrication using pitch multiplication
App 20060046484 - Abatchev; Mirzafer K. ; et al. | 2006-03-02 |
Method and apparatus for irradiating a microlithographic substrate
App 20050041228 - Boettiger, Ulrich C. ; et al. | 2005-02-24 |
Method and apparatus for irradiating a microlithographic substrate
Grant 6,784,975 - Boettiger , et al. August 31, 2 | 2004-08-31 |
Method and apparatus for irradiating a microlithographic substrate
App 20030044693 - Boettiger, Ulrich C. ; et al. | 2003-03-06 |
Vibration-enhanced spin-on film techniques for semiconductor device processing
Grant 5,925,410 - Akram , et al. July 20, 1 | 1999-07-20 |
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