Patent | Date |
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Cleaning solution formulations for substrates Grant 9,058,975 - Kolics , et al. June 16, 2 | 2015-06-16 |
Devices for metallization Grant 9,006,893 - Kolics , et al. April 14, 2 | 2015-04-14 |
Metallization mixtures and electronic devices Grant 8,970,027 - Kolics , et al. March 3, 2 | 2015-03-03 |
Methods And Apparatuses For Three Dimensional Integrated Circuits App 20140145334 - BOYD; John ;   et al. | 2014-05-29 |
Methods and apparatuses for three dimensional integrated circuits Grant 8,673,769 - Boyd , et al. March 18, 2 | 2014-03-18 |
Methods, Devices, And Materials For Metallization App 20140054776 - KOLICS; Artur ;   et al. | 2014-02-27 |
Metallization Mixtures And Electronic Devices App 20140034370 - KOLICS; Artur ;   et al. | 2014-02-06 |
Apparatus for cleaning contaminants from substrate Grant 8,590,550 - Korolik , et al. November 26, 2 | 2013-11-26 |
Method and apparatus for cleaning semiconductor wafers using compressed and/or pressurized foams, bubbles, and/or liquids Grant 8,535,451 - de Larios , et al. September 17, 2 | 2013-09-17 |
Methods, devices, and materials for metallization Grant 8,518,815 - Kolics , et al. August 27, 2 | 2013-08-27 |
Metallization processes, mixtures, and electronic devices Grant 8,518,826 - Kolics , et al. August 27, 2 | 2013-08-27 |
Device with post-contact back end of line through-hole via integration Grant 8,519,461 - Boyd , et al. August 27, 2 | 2013-08-27 |
Methods For Three-dimensional Integrated Circuit Through Hole Via Gapfill And Overburden Removal App 20130171820 - Boyd; John ;   et al. | 2013-07-04 |
Methods and systems for three-dimensional integrated circuit through hole via gapfill and overburden removal Grant 8,323,460 - Boyd , et al. December 4, 2 | 2012-12-04 |
Device With Post-contact Back End Of Line Through-hole Via Integration App 20120205807 - Boyd; John ;   et al. | 2012-08-16 |
Two-phase substrate cleaning material Grant 8,242,067 - Korolik , et al. August 14, 2 | 2012-08-14 |
Methods of post-contact back end of line through-hole via integration Grant 8,187,968 - Boyd , et al. May 29, 2 | 2012-05-29 |
Methods and systems for barrier layer surface passivation Grant 8,133,812 - Dordi , et al. March 13, 2 | 2012-03-13 |
Apparatuses And Systems For Fabricating Three Dimensional Integrated Circuits App 20120024230 - Li; Shijian ;   et al. | 2012-02-02 |
Metallization Processes, Mixtures, And Electronic Devices App 20120013008 - Kolics; Artur ;   et al. | 2012-01-19 |
Methods, Devices, And Materials For Metallization App 20120007239 - Kolics; Artur ;   et al. | 2012-01-12 |
Methods and systems for low interfacial oxide contact between barrier and copper metallization Grant 8,053,355 - Redeker , et al. November 8, 2 | 2011-11-08 |
Methods, apparatuses, and systems for fabricating three dimensional integrated circuits Grant 8,034,409 - Li , et al. October 11, 2 | 2011-10-11 |
Integrated Tool Sets And Process To Keep Substrate Surface Wet During Plating And Clean In Fabrication Of Advanced Nano-electronic Devices App 20110143553 - Wang; Yaxin ;   et al. | 2011-06-16 |
Apparatus for Contained Chemical Surface Treatment App 20110061687 - Mikhaylichenko; Katrina ;   et al. | 2011-03-17 |
Methods of Fabricating a Barrier Layer Over Interconnect Structures in Atomic Deposition Environments App 20110065273 - YOON; Hyungsuk Alexander ;   et al. | 2011-03-17 |
Methods for contained chemical surface treatment Grant 7,897,213 - Mikhaylichenko , et al. March 1, 2 | 2011-03-01 |
Methods of fabricating a barrier layer with varying composition for copper metallization Grant 7,863,179 - Yoon , et al. January 4, 2 | 2011-01-04 |
Two-Phase Substrate Cleaning Material App 20100317556 - Korolik; Mikhail ;   et al. | 2010-12-16 |
Apparatus for Cleaning Contaminants from Substrate App 20100313918 - Korolik; Mikhail ;   et al. | 2010-12-16 |
Methods And Systems For Low Interfacial Oxide Contact Between Barrier And Copper Metallization App 20100267229 - Redeker; Fritz ;   et al. | 2010-10-21 |
Method and system for using a two-phases substrate cleaning compound Grant 7,799,141 - Korolik , et al. September 21, 2 | 2010-09-21 |
Apparatus for cleaning edge of substrate and method for using the same Grant 7,758,404 - Ryder , et al. July 20, 2 | 2010-07-20 |
Methods and systems for low interfacial oxide contact between barrier and copper metallization Grant 7,749,893 - Redeker , et al. July 6, 2 | 2010-07-06 |
Methods Of Post-contact Back End Of Line Through-hole Via Integration App 20100044867 - Boyd; John ;   et al. | 2010-02-25 |
Methods And Systems For Barrier Layer Surface Passivation App 20100009535 - Dordi; Yezdi ;   et al. | 2010-01-14 |
Apparatuses and methods for cleaning a substrate Grant 7,625,452 - de Larios , et al. December 1, 2 | 2009-12-01 |
Methods of post-contact back end of the line through-hole via integration Grant 7,615,480 - Boyd , et al. November 10, 2 | 2009-11-10 |
Methods and systems for barrier layer surface passivation Grant 7,592,259 - Dordi , et al. September 22, 2 | 2009-09-22 |
Wafer edge surface treatment with liquid meniscus Grant 7,584,761 - Yun , et al. September 8, 2 | 2009-09-08 |
Method and apparatus for cleaning semiconductor wafers using compressed and/or pressurized foams, bubbles, and/or liquids Grant 7,568,490 - de Larios , et al. August 4, 2 | 2009-08-04 |
Methods for processing wafer surfaces using thin, high velocity fluid layer Grant 7,534,307 - Ravkin , et al. May 19, 2 | 2009-05-19 |
System and method for contained chemical surface treatment App 20090114249 - Mikhaylichenko; Katrina ;   et al. | 2009-05-07 |
Method and Apparatus for Cleaning Semiconductor Wafers Using Compressed and/or Pressurized Foams, Bubbles, and/or Liquids App 20090078282 - de Larios; John M. ;   et al. | 2009-03-26 |
Cleaning Solution Formulations For Substrates App 20090065735 - KOLICS; Artur ;   et al. | 2009-03-12 |
Apparatuses And Methods For Cleaning A Substrate App 20090000044 - de Larios; John M. ;   et al. | 2009-01-01 |
Methods and apparatuses for three dimensional integrated circuits App 20080315422 - Boyd; John ;   et al. | 2008-12-25 |
Methods of post-contact back end of line through-hole via integration App 20080315418 - Boyd; John ;   et al. | 2008-12-25 |
Methods and systems for three-dimensional integrated circuit through hole via gapfill and overburden removal App 20080314756 - Boyd; John ;   et al. | 2008-12-25 |
Apparatuses and methods for cleaning a substrate Grant 7,441,299 - de Larios , et al. October 28, 2 | 2008-10-28 |
Methods for Processing Wafer Surfaces Using Thin, High Velocity Fluid Layer App 20080230097 - Ravkin; Michael ;   et al. | 2008-09-25 |
Methods, Apparatuses, And Systems For Fabricating Three Dimensional Integrated Circuits App 20080152464 - LI; Shijian ;   et al. | 2008-06-26 |
Methods and systems for barrier layer surface passivation App 20080146025 - Dordi; Yezdi ;   et al. | 2008-06-19 |
Methods and systems for low interfacial oxide contact between barrier and copper metallization App 20080142972 - Redeker; Fritz ;   et al. | 2008-06-19 |
Methods for drying semiconductor wafer surfaces using a plurality of inlets and outlets held in close proximity to the wafer surfaces Grant 7,387,689 - de Larios , et al. June 17, 2 | 2008-06-17 |
Method and apparatus for processing wafer surfaces using thin, high velocity fluid layer Grant 7,383,843 - Ravkin , et al. June 10, 2 | 2008-06-10 |
Methods of fabricating a barrier layer with varying composition for copper metallization App 20080102621 - Yoon; Hyungsuk Alexander ;   et al. | 2008-05-01 |
Methods For Drying Semiconductor Wafer Surfaces Using A Plurality Of Inlets And Outlets Held In Close Proximity To The Wafer Surfaces App 20070218653 - de Larios; John M. ;   et al. | 2007-09-20 |
Method and apparatus for drying semiconductor wafer surfaces using a plurality of inlets and outlets held in close proximity to the wafer surfaces Grant 7,234,477 - de Larios , et al. June 26, 2 | 2007-06-26 |
Method and system for using a two-phases substrate cleaning compound App 20070087950 - Korolik; Mikhail ;   et al. | 2007-04-19 |
Method and apparatus for cleaning a wafer bevel edge and notch using a pin and an abrasive film cassette Grant 7,179,154 - Boyd , et al. February 20, 2 | 2007-02-20 |
Advanced electrolytic polish (AEP) assisted metal wafer planarization method and apparatus Grant 7,077,725 - Sun , et al. July 18, 2 | 2006-07-18 |
Self-draining edge wheel system and method App 20060000494 - Garcia; James P. ;   et al. | 2006-01-05 |
Method and apparatus for processing wafer surfaces using thin, high velocity fluid layer App 20050145265 - Ravkin, Michael ;   et al. | 2005-07-07 |
Apparatuses and methods for cleaning a substrate App 20050133061 - de Larios, John M. ;   et al. | 2005-06-23 |
Method and apparatus for cleaning semiconductor wafers using compressed and/or pressurized foams, bubbles, and/or liquids App 20050133060 - Larios, John M. de ;   et al. | 2005-06-23 |
Method and apparatus for drying semiconductor wafer surfaces using a plurality of inlets and outlets held in close proximity to the wafer surfaces App 20040069329 - de Larios, John M. ;   et al. | 2004-04-15 |
Advanced electrolytic polish (AEP) assisted metal wafer planarization method and apparatus App 20040050817 - Sun, Lizhong ;   et al. | 2004-03-18 |
Method for abrasive-free metal CMP in passivation domain Grant 6,451,697 - Sun , et al. September 17, 2 | 2002-09-17 |
Method and apparatus for electrochemical-mechanical planarization App 20020111121 - Sun, Lizhong ;   et al. | 2002-08-15 |
Abrasive-free metal CMP in passivation domain App 20020092827 - Sun, Lizhong ;   et al. | 2002-07-18 |
Abrasive-free metal CMP in passivation domain App 20020022370 - Sun, Lizhong ;   et al. | 2002-02-21 |
Method For Cleaning Semiconductor Wafer Having Copper Structure Formed Thereon App 20010052351 - BROWN, BRIAN J. ;   et al. | 2001-12-20 |
Conditioning fixed abrasive articles Grant 6,322,427 - Li , et al. November 27, 2 | 2001-11-27 |
Advanced electrolytic polish (AEP) assisted metal wafer planarization method and apparatus Grant 6,299,741 - Sun , et al. October 9, 2 | 2001-10-09 |
Plasma cleaning of a CVD or etch reactor using a low or mixed frequency excitation field Grant 5,882,424 - Taylor , et al. March 16, 1 | 1999-03-16 |