| Patent | Date |
|---|
Silicon implantation in substrates and provision of silicon precursor compositions therefor
Grant 11,062,906 - Tang , et al. July 13, 2 | 2021-07-13 |
Smart package
Grant 10,845,006 - Sweeney , et al. November 24, 2 | 2020-11-24 |
Smart Package
App 20200011482 - SWEENEY; Joseph D. ; et al. | 2020-01-09 |
Smart package
Grant 10,508,773 - Sweeney , et al. Dec | 2019-12-17 |
Smart Package
App 20190170302 - SWEENEY; Joseph D. ; et al. | 2019-06-06 |
Smart package
Grant 10,247,363 - Sweeney , et al. | 2019-04-02 |
Gas Cabinets
App 20180149315 - DESPRES; Joseph R. ; et al. | 2018-05-31 |
Smart Package
App 20180023765 - SWEENEY; Joseph D. ; et al. | 2018-01-25 |
Ion implantation compositions, systems, and methods
Grant 9,831,063 - Byl , et al. November 28, 2 | 2017-11-28 |
Method And Apparatus For Enhanced Lifetime And Performance Of Ion Source In An Ion Implantation System
App 20170330756 - Kaim; Robert ; et al. | 2017-11-16 |
Alternate materials and mixtures to minimize phosphorus buildup in implant applications
Grant 9,812,291 - Ray November 7, 2 | 2017-11-07 |
Method and apparatus for enhanced lifetime and performance of ion source in an ion implantation system
Grant 9,754,786 - Kaim , et al. September 5, 2 | 2017-09-05 |
Isotopically-enriched boron-containing compounds, and methods of making and using same
Grant 9,685,304 - Kaim , et al. June 20, 2 | 2017-06-20 |
Silicon Implantation In Substrates And Provision Of Silicon Precursor Compositions Therefor
App 20160211137 - Tang; Ying ; et al. | 2016-07-21 |
Cluster ion implantation of arsenic and phosphorus
Grant 9,269,582 - Byl , et al. February 23, 2 | 2016-02-23 |
Enriched Silicon Precursor Compositions And Apparatus And Processes For Utilizing Same
App 20160046849 - Mayer; James J. ; et al. | 2016-02-18 |
Isotopically-enriched Boron-containing Compounds, And Methods Of Making And Using Same
App 20160013018 - Kaim; Robert ; et al. | 2016-01-14 |
Ion Implantation Compositions, Systems, And Methods
App 20150380212 - Byl; Oleg ; et al. | 2015-12-31 |
Enriched silicon precursor compositions and apparatus and processes for utilizing same
Grant 9,171,725 - Mayer , et al. October 27, 2 | 2015-10-27 |
Isotopically-enriched boron-containing compounds, and methods of making and using same
Grant 9,142,387 - Kaim , et al. September 22, 2 | 2015-09-22 |
Method And Apparatus For Enhanced Lifetime And Performance Of Ion Source In An Ion Implantation System
App 20150228486 - Kaim; Robert ; et al. | 2015-08-13 |
Method and apparatus for enhanced lifetime and performance of ion source in an ion implantation system
Grant 9,012,874 - Kaim , et al. April 21, 2 | 2015-04-21 |
Alternate Materials And Mixtures To Minimize Phosphorus Buildup In Implant Applications
App 20150037511 - Ray; Richard S. | 2015-02-05 |
Method And Apparatus For Enhanced Lifetime And Performance Of Ion Source In An Ion Implantation System
App 20140326896 - Kaim; Robert ; et al. | 2014-11-06 |
Enriched Silicon Precursor Compositions And Apparatus And Processes For Utilizing Same
App 20140322903 - Mayer; James J. ; et al. | 2014-10-30 |
Method and apparatus for enhanced lifetime and performance of ion source in an ion implantation system
Grant 8,785,889 - Kaim , et al. July 22, 2 | 2014-07-22 |
Enriched silicon precursor compositions and apparatus and processes for utilizing same
Grant 8,779,383 - Mayer , et al. July 15, 2 | 2014-07-15 |
Isotopically-enriched Boron-containing Compounds, And Methods Of Making And Using Same
App 20140090598 - Kaim; Robert ; et al. | 2014-04-03 |
Cluster Ion Implantation Of Arsenic And Phosphorus
App 20140011346 - Byl; Oleg ; et al. | 2014-01-09 |
Isotopically-enriched boron-containing compounds, and methods of making and using same
Grant 8,598,022 - Kaim , et al. December 3, 2 | 2013-12-03 |
Enriched Silicon Precursor Compositions And Apparatus And Processes For Utilizing Same
App 20130264492 - Mayer; James J. ; et al. | 2013-10-10 |
Method And Apparatus For Enhanced Lifetime And Performance Of Ion Source In An Ion Implantation System
App 20130206788 - Kaim; Robert ; et al. | 2013-08-15 |
Method and apparatus for enhanced lifetime and performance of ion source in an ion implantation system
Grant 8,399,865 - Kaim , et al. March 19, 2 | 2013-03-19 |
Method And Apparatus For Enhanced Lifetime And Performance Of Ion Source In An Ion Implantation System
App 20120313047 - Kaim; Robert ; et al. | 2012-12-13 |
Method and apparatus for enhanced lifetime and performance of ion source in an ion implantation system
Grant 8,237,134 - Kaim , et al. August 7, 2 | 2012-08-07 |
Method And Apparatus For Enhanced Lifetime And Performance Of Ion Source In An Ion Implantation System
App 20120142174 - KAIM; Robert ; et al. | 2012-06-07 |
Ion Implantation Tool Cleaning Apparatus And Method
App 20120111374 - Despres; Joseph R. ; et al. | 2012-05-10 |
Isotopically-enriched Boron-containing Compounds, And Methods Of Making And Using Same
App 20120108044 - Kaim; Robert ; et al. | 2012-05-03 |
Isotopically-enriched boron-containing compounds, and methods of making and using same
Grant 8,138,071 - Kaim , et al. March 20, 2 | 2012-03-20 |
Isotopically-enriched boron-containing compounds, and methods of making and using same
Grant 8,062,965 - Kaim , et al. November 22, 2 | 2011-11-22 |
Isotopically-enriched Boron-containing Compounds, And Methods Of Making And Using Same
App 20110159671 - KAIM; Robert ; et al. | 2011-06-30 |
Isotopically-enriched Boron-containing Compounds, And Methods Of Making And Using Same
App 20110097882 - Kaim; Robert ; et al. | 2011-04-28 |
Ion implanter in-situ mass spectrometer
Grant 6,670,624 - Adams , et al. December 30, 2 | 2003-12-30 |
Method to reduce downtime while implanting GeF4
Grant 6,559,462 - Carpenter , et al. May 6, 2 | 2003-05-06 |
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