Ramalingam; Chidambara A.
Patent Applications and Registrations
Patent applications and USPTO patent grants for Ramalingam; Chidambara A..The latest application filed is for "semiconductor chamber component cleaning systems".
- Ramalingam; Chidambara A. - Fremont CA
- Ramalingam; Chidambara A. - Santa Clara CA
| Patent | Date |
|---|---|
| Semiconductor Chamber Component Cleaning Systems App 20220130692 - Guyomard; Katty ; et al. | 2022-04-28 |
| Semiconductor Substrate Support Leveling Apparatus App 20220108907 - Woo; Katherine ; et al. | 2022-04-07 |
| Semiconductor Substrate Support With Wafer Backside Damage Control App 20210287924 - Li; Jian ; et al. | 2021-09-16 |
| Substrate Supports Including Metal-ceramic Interfaces App 20200173017 - RAMALINGAM; Chidambara A. ; et al. | 2020-06-04 |
| Enhanced Anodization For Processing Equipment App 20190376202 - HE; Xiao-Ming ; et al. | 2019-12-12 |
| Electrostatic Chuck Having Properties For Optimal Thin Film Deposition Or Etch Processes App 20170352569 - KHAJA; Abdul Aziz ; et al. | 2017-12-07 |
| Vapor dryer having hydrophilic end effector Grant 8,205,352 - Lewis , et al. June 26, 2 | 2012-06-26 |
| Vapor Dryer Having Hydrophilic End Effector App 20110266736 - LEWIS; JOHN S. ; et al. | 2011-11-03 |
| Vapor dryer having hydrophilic end effector Grant 7,980,000 - Lewis , et al. July 19, 2 | 2011-07-19 |
| Drive Roller For A Cleaning System App 20090217953 - CHEN; HUI ; et al. | 2009-09-03 |
| Vapor Dryer Having Hydrophilic End Effector App 20090084413 - LEWIS; JOHN S. ; et al. | 2009-04-02 |
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