| Patent | Date |
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Apparatus and methods for improving chemical utilization rate in deposition process
Grant 11,396,703 - Griffin , et al. July 26, 2 | 2022-07-26 |
Apparatus and Methods for Improving Chemical Utilization Rate in Deposition Process
App 20220195600 - Griffin; Kevin ; et al. | 2022-06-23 |
Paired Dynamic Parallel Plate Capacitively Coupled Plasmas
App 20220165540 - Ponnekanti; Hari ; et al. | 2022-05-26 |
Paired dynamic parallel plate capacitively coupled plasmas
Grant 11,282,676 - Ponnekanti , et al. March 22, 2 | 2022-03-22 |
RF Power Source Operation In Plasma Enhanced Processes
App 20210125820 - Moghadam; Farhad ; et al. | 2021-04-29 |
Vacuum Pumps For Single And Multi-Process Chamber Flow Stream Sharing
App 20200256228 - A1 | 2020-08-13 |
Paired Dynamic Parallel Plate Capacitively Coupled Plasmas
App 20190385819 - Ponnekanti; Hari ; et al. | 2019-12-19 |
Integrated Atomic Layer Deposition Tool
App 20180155834 - Srinivasan; Mukund ; et al. | 2018-06-07 |
Dynamic Phased Array Plasma Source For Complete Plasma Coverage Of A Moving Substrate
App 20180138023 - Ponnekanti; Hari ; et al. | 2018-05-17 |
Homing device for magnetron rotating on two arms
Grant 8,900,427 - Miller , et al. December 2, 2 | 2014-12-02 |
Electrostatic chuck assembly
Grant 8,390,980 - Sansoni , et al. March 5, 2 | 2013-03-05 |
Surface cleaning and texturing process for crystalline solar cells
Grant 8,129,212 - Wijekoon , et al. March 6, 2 | 2012-03-06 |
Homing device for magnetron rotating on two arms
App 20110297538 - Miller; Keith A. ; et al. | 2011-12-08 |
Surface cleaning and texturing process for crystalline solar cells
App 20110272625 - Wijekoon; Kapila ; et al. | 2011-11-10 |
Coaxial shafts for radial positioning of rotating magnetron
Grant 8,021,527 - Miller , et al. September 20, 2 | 2011-09-20 |
Method And Apparatus For Deposition On Large Area Substrates Having Reduced Gas Usage
App 20110033638 - Ponnekanti; Hari ; et al. | 2011-02-10 |
Electrostatic Chuck Assembly
App 20100039747 - Sansoni; Steven V. ; et al. | 2010-02-18 |
Surface cleaning and texturing process for crystalline solar cells
App 20090280597 - Wijekoon; Kapila ; et al. | 2009-11-12 |
Coaxial Shafts for Radial Positioning of Rotating Magnetron
App 20080060938 - MILLER; Keith A. ; et al. | 2008-03-13 |
Wafer fab
App 20060102078 - Fairbairn; Kevin P. ; et al. | 2006-05-18 |
Process and an integrated tool for low k dielectric deposition including a pecvd capping module
App 20040020601 - Zhao, Jun ; et al. | 2004-02-05 |
Heater/lift assembly for high temperature processing chamber
Grant 6,645,303 - Frankel , et al. November 11, 2 | 2003-11-11 |
Substrate transfer apparatus
App 20030202865 - Ponnekanti, Hari ; et al. | 2003-10-30 |
Heated electrostatic particle trap for in-situ vacuum line cleaning of a substrated processing
Grant 6,354,241 - Tanaka , et al. March 12, 2 | 2002-03-12 |
Heater/lift assembly for high temperature processing chamber
App 20010054387 - Frankel, Jonathan ; et al. | 2001-12-27 |
Apparatus and methods for upgraded substrate processing system with microwave plasma source
Grant 6,230,652 - Tanaka , et al. May 15, 2 | 2001-05-15 |
Microwave apparatus for in-situ vacuum line cleaning for substrate processing equipment
Grant 6,045,618 - Raoux , et al. April 4, 2 | 2000-04-04 |
Apparatus and methods for upgraded substrate processing system with microwave plasma source
Grant 6,039,834 - Tanaka , et al. March 21, 2 | 2000-03-21 |
Method and apparatus for elastographic measurement and imaging
Grant 5,293,870 - Ophir , et al. March 15, 1 | 1994-03-15 |
Method and apparatus for elastographic measurement and imaging
Grant 5,178,147 - Ophir , et al. January 12, 1 | 1993-01-12 |
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