| Patent | Date |
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Method For Manufacturing Semiconductor Structure And Semiconductor Structure
App 20220293611 - PING; ER-XUAN ; et al. | 2022-09-15 |
Semiconductor Structure And Forming Method Thereof
App 20220293722 - Won; Daejoong ; et al. | 2022-09-15 |
Manufacturing Method Of Semiconductor Structure And Semiconductor Structure
App 20220293610 - PING; ER-XUAN ; et al. | 2022-09-15 |
Semiconductor Structure And Method For Forming Same
App 20220254874 - PING; Er-Xuan ; et al. | 2022-08-11 |
Method Of Manufacturing Semiconductor Structure And Semiconductor Structure
App 20220223603 - Ping; Er-Xuan ; et al. | 2022-07-14 |
Semiconductor Structure And Storage Circuit
App 20220190028 - Ping; Er-Xuan ; et al. | 2022-06-16 |
Method For Manufacturing Memory And Same
App 20220093607 - PING; Er-Xuan ; et al. | 2022-03-24 |
Method For Manufacturing Memory And Same
App 20220093608 - Ping; Er-Xuan ; et al. | 2022-03-24 |
Manufacturing Method Of A Memory And A Memory
App 20220085032 - PING; Er-Xuan ; et al. | 2022-03-17 |
Method For Manufacturing Memory And Same
App 20220068937 - Ping; Er-Xuan ; et al. | 2022-03-03 |
Semiconductor Device And Fabrication Method Thereof
App 20220069139 - WANG; Lianhong ; et al. | 2022-03-03 |
Method For Manufacturing Buried Gate And Method For Manufacturing Semiconductor Device
App 20210343846 - Ping; Er-Xuan ; et al. | 2021-11-04 |
Semiconductor Structure And Method Of Manufacturing Same
App 20210343720 - PING; Er-Xuan ; et al. | 2021-11-04 |
Semiconductor Structure And Fabrication Method Thereof
App 20210320107 - PING; Er Xuan ; et al. | 2021-10-14 |
Method and system for three-dimensional (3D) structure fill
Grant 10,943,779 - Yieh , et al. March 9, 2 | 2021-03-09 |
PVD deposition and anneal of multi-layer metal-dielectric film
Grant 10,879,177 - Yu , et al. December 29, 2 | 2020-12-29 |
Multi-layer Stacks For 3d Nand Extendability
App 20200295041 - HAN; Xinhai ; et al. | 2020-09-17 |
Method and apparatus for depositing cobalt in a feature
Grant 10,714,388 - Park , et al. | 2020-07-14 |
Multi-layer stacks for 3D NAND extendibility
Grant 10,700,087 - Han , et al. | 2020-06-30 |
Self-aligned nanodots for 3D NAND flash memory
Grant 10,446,392 - Jun , et al. Oc | 2019-10-15 |
Hybrid carbon hardmask for lateral hardmask recess reduction
Grant 10,410,864 - Kwon , et al. Sept | 2019-09-10 |
Method And Apparatus For Depositing Cobalt In A Feature
App 20190122924 - PARK; JIN HEE ; et al. | 2019-04-25 |
Multi-layer Stacks For 3d Nand Extendability
App 20190115365 - HAN; Xinhai ; et al. | 2019-04-18 |
Method and apparatus for depositing cobalt in a feature
Grant 10,157,787 - Park , et al. Dec | 2018-12-18 |
Hybrid Carbon Hardmask For Lateral Hardmask Recess Reduction
App 20180277370 - KWON; Thomas Jongwan ; et al. | 2018-09-27 |
Self-aligned Nanodots For 3d Nand Flash Memory
App 20180233359 - JUN; Sungwon ; et al. | 2018-08-16 |
Hybrid carbon hardmask for lateral hardmask recess reduction
Grant 9,991,118 - Kwon , et al. June 5, 2 | 2018-06-05 |
Method and apparatus for microwave assisted chalcogen radicals generation for 2-D materials
Grant 9,879,341 - Singh , et al. January 30, 2 | 2018-01-30 |
Methods for forming low resistivity interconnects
Grant 9,812,328 - Singh , et al. November 7, 2 | 2017-11-07 |
Hybrid Carbon Hardmask For Lateral Hardmask Recess Reduction
App 20170207088 - KWON; Thomas Jongwan ; et al. | 2017-07-20 |
Method And Apparatus For Depositing Cobalt In A Feature
App 20170178956 - PARK; Jin Hee ; et al. | 2017-06-22 |
Vertical transistor having a vertical gate structure having a top or upper surface defining a facet formed between a vertical source and a vertical drain
Grant 9,685,536 - Ping , et al. June 20, 2 | 2017-06-20 |
Method And System For Three-dimensional (3d) Structure Fill
App 20170069488 - Yieh; Ellie ; et al. | 2017-03-09 |
Methods of doping substrates with ALD
Grant 9,570,307 - Nainani , et al. February 14, 2 | 2017-02-14 |
Method and system for three-dimensional (3D) structure fill
Grant 9,530,674 - Yieh , et al. December 27, 2 | 2016-12-27 |
Pvd Deposition And Anneal Of Multi-layer Metal-dielectric Film
App 20160372330 - YU; Minrui ; et al. | 2016-12-22 |
Methods For Forming Low Resistivity Interconnects
App 20160372371 - SINGH; Kaushal K. ; et al. | 2016-12-22 |
Method And Apparatus For Microwave Assisted Chalcogen Radicals Generation For 2-d Materials
App 20160372351 - SINGH; Kaushal K. ; et al. | 2016-12-22 |
Methods Of Doping Substrates With ALD
App 20160079064 - Nainani; Aneesh ; et al. | 2016-03-17 |
Methods of doping substrates with ALD
Grant 9,218,973 - Nainani , et al. December 22, 2 | 2015-12-22 |
Methods for epitaxial silicon growth
Grant 9,217,209 - Zhang , et al. December 22, 2 | 2015-12-22 |
Method of fabricating a gate-all-around word line for a vertical channel DRAM
Grant 9,023,723 - Chang , et al. May 5, 2 | 2015-05-05 |
Methods for depositing oxygen deficient metal films
Grant 9,011,973 - Chu , et al. April 21, 2 | 2015-04-21 |
Method And System For Three-dimensional (3d) Structure Fill
App 20150093907 - YIEH; Ellie ; et al. | 2015-04-02 |
Method of fabricating a self-aligned buried bit line for a vertical channel DRAM
Grant 8,895,432 - Chang , et al. November 25, 2 | 2014-11-25 |
Diodes with native oxide regions for use in memory arrays and methods of forming the same
Grant 8,866,124 - Maxwell , et al. October 21, 2 | 2014-10-21 |
Selective Deposition By Light Exposure
App 20140273504 - Nainani; Aneesh ; et al. | 2014-09-18 |
Semiconductor processing methods
Grant 8,735,292 - Liu-Norrod , et al. May 27, 2 | 2014-05-27 |
Methods and apparatus for increasing memory density using diode layer sharing
Grant 8,633,528 - Xu , et al. January 21, 2 | 2014-01-21 |
Methods For Depositing Oxygen Deficient Metal Films
App 20140017403 - Chu; Schubert ; et al. | 2014-01-16 |
Methods Of Doping Substrates With ALD
App 20140004689 - Nainani; Aneesh ; et al. | 2014-01-02 |
Method of fabricating a gate-all-around word line for a vertical channel dram
App 20130323920 - Chang; Chorng-Ping ; et al. | 2013-12-05 |
Method of fabricating a self-aligned buried bit line for a vertical channel dram
App 20130320542 - Chang; Chorng-Ping ; et al. | 2013-12-05 |
Methods And Apparatus For Increasing Memory Density Using Diode Layer Sharing
App 20130313503 - Xu; Huiwen ; et al. | 2013-11-28 |
Carbon-based interface layer for a memory device and methods of forming the same
Grant 8,569,730 - Xu , et al. October 29, 2 | 2013-10-29 |
Memory cell that includes a carbon-based reversible resistance switching element compatible with a steering element, and methods of forming the same
Grant 8,551,855 - Xu , et al. October 8, 2 | 2013-10-08 |
Semiconductor Processing Methods
App 20130237056 - Liu-Norrod; Junting ; et al. | 2013-09-12 |
Methods and systems for controlling temperature during microfeature workpiece processing, E.G., CVD deposition
Grant 8,518,184 - Beaman , et al. August 27, 2 | 2013-08-27 |
Memory cell that includes a carbon-based reversible resistance switching element compatible with a steering element, and methods of forming the same
Grant 8,481,396 - Xu , et al. July 9, 2 | 2013-07-09 |
Methods For Forming Small-scale Capacitor Structures
App 20130166057 - Zheng; Lingyi A. ; et al. | 2013-06-27 |
Modulation of resistivity in carbon-based read-writeable materials
Grant 8,470,646 - Xu , et al. June 25, 2 | 2013-06-25 |
Memory cell with carbon switching material having a reduced cross-sectional area and methods for forming the same
Grant 8,471,360 - Kreupl , et al. June 25, 2 | 2013-06-25 |
Semiconductor processing methods
Grant 8,440,567 - Liu , et al. May 14, 2 | 2013-05-14 |
Electronic devices including carbon nano-tube films having carbon-based liners, and methods of forming the same
Grant 8,421,050 - Ping , et al. April 16, 2 | 2013-04-16 |
Methods for forming small-scale capacitor structures
Grant 8,384,192 - Zheng , et al. February 26, 2 | 2013-02-26 |
Methods and apparatus for increasing memory density using diode layer sharing
Grant 8,309,415 - Xu , et al. November 13, 2 | 2012-11-13 |
Methods For Increasing Bottom Electrode Performance In Carbon-based Memory Devices
App 20120223414 - Schricker; April D. ; et al. | 2012-09-06 |
Vertical Transistor Having A Gate Structure Formed On A Buried Drain Region And A Source Region Overlying The Upper Most Layer Of The Gate Structure
App 20120211824 - PING; Er-Xuan ; et al. | 2012-08-23 |
Diodes With Native Oxide Regions For Use In Memory Arrays And Methods Of Forming The Same
App 20120193756 - Maxwell; Steven ; et al. | 2012-08-02 |
Applying epitaxial silicon in disposable spacer flow
Grant 8,232,167 - Cho , et al. July 31, 2 | 2012-07-31 |
Methods For Epitaxial Silicon Growth
App 20120180716 - Zhang; Jingyan ; et al. | 2012-07-19 |
Methods for epitaxial silicon growth
Grant 8,152,918 - Zhang , et al. April 10, 2 | 2012-04-10 |
Ultra thin TCS (SiCl.sub.4) cell nitride for DRAM capacitor with DCS (SiH.sub.2Cl.sub.2) interface seeding layer
Grant 8,120,124 - Zheng , et al. February 21, 2 | 2012-02-21 |
Self-aligned three-dimensional non-volatile memory fabrication
Grant 8,105,867 - Matamis , et al. January 31, 2 | 2012-01-31 |
Integration methods for carbon films in two- and three-dimensional memories formed therefrom
Grant 8,093,123 - Xu , et al. January 10, 2 | 2012-01-10 |
Method of making nonvolatile memory cell containing carbon resistivity switching as a storage element by low temperature processing
Grant 8,048,474 - Kumar , et al. November 1, 2 | 2011-11-01 |
Memory Cell With Carbon Switching Material Having A Reduced Cross-sectional Area And Methods For Forming The Same
App 20110254126 - Kreupl; Franz ; et al. | 2011-10-20 |
Nonvolatile memory cell including carbon storage element formed on a silicide layer
Grant 8,023,310 - Fu , et al. September 20, 2 | 2011-09-20 |
Ultra thin TCS (SiCl.sub.4) cell nitride for DRAM capacitor with DCS (SiH.sub.2Cl.sub.2) interface seeding layer
Grant 8,013,371 - Zheng , et al. September 6, 2 | 2011-09-06 |
Memory Cell That Includes A Carbon-based Memory Element And Methods Of Forming The Same
App 20110210306 - Li; Yubao ; et al. | 2011-09-01 |
Methods for enhancing capacitors having roughened features to increase charge-storage capacity
Grant 7,989,864 - Thakur , et al. August 2, 2 | 2011-08-02 |
Methods For Forming Small-scale Capacitor Structures
App 20110163416 - Zheng; Lingyi A. ; et al. | 2011-07-07 |
MIIM diodes having stacked structure
Grant 7,969,011 - Sekar , et al. June 28, 2 | 2011-06-28 |
Semiconductor Processing Methods
App 20110143538 - Liu; Junting ; et al. | 2011-06-16 |
Applying Epitaxial Silicon In Disposable Spacer Flow
App 20110124171 - Cho; Chin-Chen ; et al. | 2011-05-26 |
Memory Cell That Includes A Carbon-based Reversible Resistance Switching Element Compatible With A Steering Element, And Methods Of Forming The Same
App 20110095258 - Xu; Huiwen ; et al. | 2011-04-28 |
Memory Cell That Includes A Carbon-based Reversible Resistance Switching Element Compatible With A Steering Element, And Methods Of Forming The Same
App 20110095257 - Xu; Huiwen ; et al. | 2011-04-28 |
Method of forming a capacitor
Grant 7,923,322 - Nuttall , et al. April 12, 2 | 2011-04-12 |
Semiconductor processing methods
Grant 7,915,168 - Liu , et al. March 29, 2 | 2011-03-29 |
Methods for forming small-scale capacitor structures
Grant 7,906,393 - Zheng , et al. March 15, 2 | 2011-03-15 |
Applying epitaxial silicon in disposable spacer flow
Grant 7,884,427 - Cho , et al. February 8, 2 | 2011-02-08 |
Methods And Systems For Controlling Temperature During Microfeature Workpiece Processing, E.g., Cvd Deposition
App 20100282164 - Beaman; Kevin L. ; et al. | 2010-11-11 |
Multilevel nonvolatile memory device containing a carbon storage material and methods of making and using same
Grant 7,830,698 - Chen , et al. November 9, 2 | 2010-11-09 |
Methods and systems for controlling temperature during microfeature workpiece processing, E.G. CVD deposition
Grant 7,771,537 - Beaman , et al. August 10, 2 | 2010-08-10 |
Nonvolatile memory cell including carbon storage element formed on a silicide layer
App 20100176366 - Fu; Chu-Chen ; et al. | 2010-07-15 |
Modulation Of Resistivity In Carbon-based Read-writeable Materials
App 20100163824 - Xu; Huiwen ; et al. | 2010-07-01 |
Semiconductor Processing Methods
App 20100167521 - Liu; Junting ; et al. | 2010-07-01 |
Multilevel nonvolatile memory device containing a carbon storage material and methods of making and using same
Grant 7,723,180 - Chen , et al. May 25, 2 | 2010-05-25 |
Self-Aligned Three-Dimensional Non-Volatile Memory Fabrication
App 20100124813 - Matamis; George ; et al. | 2010-05-20 |
Electronic Devices Including Carbon Nano-tube Films Having Carbon-based Liners, And Methods Of Forming The Same
App 20100108982 - Ping; Er-Xuan ; et al. | 2010-05-06 |
Semiconductor processing methods
Grant 7,704,884 - Liu , et al. April 27, 2 | 2010-04-27 |
Miim Diodes Having Stacked Structure
App 20100078759 - Sekar; Deepak C. ; et al. | 2010-04-01 |
Integration Methods For Carbon Films In Two- And Three-dimensional Memories And Memories Formed Therefrom
App 20100038620 - Xu; Huiwen ; et al. | 2010-02-18 |
Methods And Apparatus For Increasing Memory Density Using Diode Layer Sharing
App 20100038623 - Xu; Huiwen ; et al. | 2010-02-18 |
Carbon-based Resistivity-switching Materials And Methods Of Forming The Same
App 20100012914 - Xu; Huiwen ; et al. | 2010-01-21 |
Systems for depositing material onto workpieces in reaction chambers and methods for removing byproducts from reaction chambers
Grant 7,647,886 - Kubista , et al. January 19, 2 | 2010-01-19 |
Carbon-based Resistivity-switching Materials And Methods Of Forming The Same
App 20100006812 - Xu; Huiwen ; et al. | 2010-01-14 |
Carbon-based Interface Layer For A Memory Device And Methods Of Forming The Same
App 20100006811 - Xu; Huiwen ; et al. | 2010-01-14 |
Container Capacitor Structure And Method Of Formation Thereof
App 20090311843 - Durcan; D. Mark ; et al. | 2009-12-17 |
Methods For Enhancing Capacitors Having Roughened Features To Increase Charge-storage Capacity
App 20090294819 - Thakur; Randhir P.S. ; et al. | 2009-12-03 |
Container capacitor structure and method of formation thereof
Grant 7,625,795 - Durcan , et al. December 1, 2 | 2009-12-01 |
Multilevel nonvolatile memory device containing a carbon storage material and methods of making and using same
App 20090258489 - Chen; Xiying ; et al. | 2009-10-15 |
Semiconductor Processing Methods
App 20090258485 - Liu; Junting ; et al. | 2009-10-15 |
Method of making nonvolatile memory cell containing carbon resistivity switching as a storage element by low temperature processing
App 20090258135 - Kumar; Tanmay ; et al. | 2009-10-15 |
Multilevel nonvolatile memory device containing a carbon storage material and methods of making and using same
App 20090257265 - Chen; Xiying ; et al. | 2009-10-15 |
Container capacitor structure and method of formation thereof
Grant 7,579,235 - Durcan , et al. August 25, 2 | 2009-08-25 |
Method of making a nonvolatile memory device including forming a pillar shaped semiconductor device and a shadow mask
Grant 7,579,232 - Ping , et al. August 25, 2 | 2009-08-25 |
Methods for enhancing capacitors having roughened features to increase charge-storage capacity
Grant 7,576,380 - Thakur , et al. August 18, 2 | 2009-08-18 |
Semiconductor constructions
Grant 7,528,435 - Zheng , et al. May 5, 2 | 2009-05-05 |
Electronic systems
Grant 7,528,430 - Chen , et al. May 5, 2 | 2009-05-05 |
Capacitor constructions and methods of forming
Grant 7,440,255 - McClure , et al. October 21, 2 | 2008-10-21 |
Methods and apparatus for processing microfeature workpieces, e.g., for depositing materials on microfeature workpieces
Grant 7,422,635 - Zheng , et al. September 9, 2 | 2008-09-09 |
Capacitor constructions and semiconductor structures
Grant 7,405,438 - Chen , et al. July 29, 2 | 2008-07-29 |
Applying Epitaxial Silicon In Disposable Spacer Flow
App 20080128820 - Cho; Chin-Chen ; et al. | 2008-06-05 |
Memory devices with dual-sided capacitors
Grant 7,355,232 - Ping , et al. April 8, 2 | 2008-04-08 |
Methods and apparatus for processing microfeature workpieces; methods for conditioning ALD reaction chambers
Grant 7,344,755 - Beaman , et al. March 18, 2 | 2008-03-18 |
Applying epitaxial silicon in disposable spacer flow
Grant 7,342,273 - Cho , et al. March 11, 2 | 2008-03-11 |
Capacitor constructions and rugged silicon-containing surfaces
Grant 7,321,148 - Blalock , et al. January 22, 2 | 2008-01-22 |
Even nucleation between silicon and oxide surfaces for thin silicon nitride film growth
Grant 7,317,220 - Ping January 8, 2 | 2008-01-08 |
Microfeature workpiece processing apparatus and methods for controlling deposition of materials on microfeature workpieces
Grant 7,279,398 - Basceri , et al. October 9, 2 | 2007-10-09 |
DRAM cells
Grant 7,268,382 - Chen , et al. September 11, 2 | 2007-09-11 |
Methods and systems for controlling temperature during microfeature workpiece processing, e.g., CVD deposition
Grant 7,258,892 - Beaman , et al. August 21, 2 | 2007-08-21 |
Ultra thin TCS (SiCl4) cell nitride for DRAM capacitor with DCS (SiH2cl2) interface seeding layer
App 20070170552 - Zheng; Lingyi A. ; et al. | 2007-07-26 |
Methods for treating pluralities of discrete semiconductor substrates
Grant 7,247,581 - Doan , et al. July 24, 2 | 2007-07-24 |
Methods of forming semiconductor constructions
Grant 7,244,648 - Ping , et al. July 17, 2 | 2007-07-17 |
Diffusion-enhanced crystallization of amorphous materials to improve surface roughness
Grant 7,238,613 - Ping , et al. July 3, 2 | 2007-07-03 |
Microfeature workpiece processing apparatus and methods for batch deposition of materials on microfeature workpieces
Grant 7,235,138 - Zheng , et al. June 26, 2 | 2007-06-26 |
Methods for treating semiconductor substrates
Grant 7,220,312 - Doan , et al. May 22, 2 | 2007-05-22 |
Methods of forming semiconductor circuitry
Grant 7,199,017 - Gonzalez , et al. April 3, 2 | 2007-04-03 |
Methods for treating pluralities of discrete semiconductor substrates
Grant 7,183,208 - Doan , et al. February 27, 2 | 2007-02-27 |
Method for forming raised structures by controlled selective epitaxial growth of facet using spacer
Grant 7,176,109 - Ping , et al. February 13, 2 | 2007-02-13 |
Container capacitor structure and method of formation thereof
App 20070032035 - Durcan; D. Mark ; et al. | 2007-02-08 |
Method for forming raised structures by controlled selective epitaxial growth of facet using spacer
App 20060289902 - Ping; Er-Xuan ; et al. | 2006-12-28 |
Method for forming raised structures by controlled selective epitaxial growth of facet using spacer
App 20060284269 - Ping; Er-Xuan ; et al. | 2006-12-21 |
Methods of forming metal nitride, and methods of forming capacitor constructions
Grant 7,148,118 - Zheng , et al. December 12, 2 | 2006-12-12 |
Methods for enhancing capacitors having roughened features to increase charge-storage capacity
App 20060275983 - Thakur; Randhir P.S. ; et al. | 2006-12-07 |
Methods for epitaxial silicon growth
App 20060243196 - Zhang; Jingyan ; et al. | 2006-11-02 |
Semiconductor constructions
App 20060244092 - Zheng; Lingyi A. ; et al. | 2006-11-02 |
Electronic systems
App 20060237763 - Chen; Shenlin ; et al. | 2006-10-26 |
DRAM cells
App 20060228857 - Chen; Shenlin ; et al. | 2006-10-12 |
FET having epitaxial silicon growth
Grant 7,119,369 - Wang , et al. October 10, 2 | 2006-10-10 |
Methods and apparatus for processing microfeature workpieces, e.g., for depositing materials on microfeature workpieces
App 20060213440 - Zheng; Lingyi A. ; et al. | 2006-09-28 |
Method of atomic layer deposition on plural semiconductor substrates simultaneously
Grant 7,112,544 - Doan , et al. September 26, 2 | 2006-09-26 |
Methods of forming semiconductor constructions
App 20060205142 - Ping; Er-Xuan ; et al. | 2006-09-14 |
Methods and systems for controlling temperature during microfeature workpiece processing, E.G. CVD deposition
App 20060204649 - Beaman; Kevin L. ; et al. | 2006-09-14 |
Methods and apparatus for processing microfeature workpieces, e.g., for depositing materials on microfeature workpieces
App 20060205187 - Zheng; Lingyi A. ; et al. | 2006-09-14 |
Systems for depositing material onto workpieces in reaction chambers and methods for removing byproducts from reaction chambers
App 20060196538 - Kubista; David J. ; et al. | 2006-09-07 |
Microfeature workpiece processing apparatus and methods for batch deposition of materials on microfeature workpieces
App 20060198955 - Zheng; Lingyi A. ; et al. | 2006-09-07 |
Methods for enhancing capacitors having roughened features to increase charge-storage capacity
Grant 7,101,756 - Thakur , et al. September 5, 2 | 2006-09-05 |
Methods for epitaxial silicon growth
Grant 7,101,435 - Zhang , et al. September 5, 2 | 2006-09-05 |
Nanometer engineering of metal-support catalysts
Grant 7,090,815 - Hu , et al. August 15, 2 | 2006-08-15 |
Method of forming a dual-sided capacitor
Grant 7,071,056 - Ping , et al. July 4, 2 | 2006-07-04 |
Microfeature workpiece processing apparatus and methods for controlling deposition of materials on microfeature workpieces
App 20060121689 - Basceri; Cem ; et al. | 2006-06-08 |
Microfeature workpiece processing apparatus and methods for controlling deposition of materials on microfeature workpieces
Grant 7,056,806 - Basceri , et al. June 6, 2 | 2006-06-06 |
Microfeature workpiece processing apparatus and methods for controlling deposition of materials on microfeature workpieces
App 20060115957 - Basceri; Cem ; et al. | 2006-06-01 |
Methods of forming capacitors
Grant 7,049,231 - Nuttall , et al. May 23, 2 | 2006-05-23 |
Applying epitaxial silicon in disposable spacer flow
App 20060091479 - Cho; Chih-Chen ; et al. | 2006-05-04 |
Applying epitaxial silicon in disposable spacer flow
Grant 7,037,775 - Cho , et al. May 2, 2 | 2006-05-02 |
Methods for enhancing capacitors having roughened features to increase charge-storage capacity
Grant 7,034,353 - Thakur , et al. April 25, 2 | 2006-04-25 |
Capacitor structures with dual-sided electrode
Grant 7,023,039 - Chen , et al. April 4, 2 | 2006-04-04 |
Nanometer engineering of metal-support catalysts
App 20060062710 - Hu; Yongjun Jeff ; et al. | 2006-03-23 |
Methods for treating pluralities of discrete semiconductor substrates
App 20060057800 - Doan; Trung Tri ; et al. | 2006-03-16 |
Semiconductor constructions
Grant 7,012,294 - Ping , et al. March 14, 2 | 2006-03-14 |
Method of depositing polysilicon
App 20060019475 - Nuttall; Michael ; et al. | 2006-01-26 |
Method of forming a capacitor
App 20060019442 - Nuttall; Michael ; et al. | 2006-01-26 |
Container capacitor structure and method of formation thereof
App 20060006445 - Durcan; D. Mark ; et al. | 2006-01-12 |
Methods of forming metal nitride, and methods of forming capacitor constructions
App 20060009019 - Zheng; Lingyi A. ; et al. | 2006-01-12 |
Semiconductor Constructions
App 20060001066 - Ping; Er-Xuan ; et al. | 2006-01-05 |
Dual-sided capacitor and method of formation
App 20060001052 - Ping; Er-Xuan ; et al. | 2006-01-05 |
Methods of forming semiconductor circuitry
App 20060003512 - Gonzalez; Fernando ; et al. | 2006-01-05 |
Methods of forming semiconductor circuitry
Grant 6,979,631 - Gonzalez , et al. December 27, 2 | 2005-12-27 |
Even nucleation between silicon and oxide surfaces for thin silicon nitride film growth
Grant 6,977,407 - Ping December 20, 2 | 2005-12-20 |
Capacitor constructions and methods of forming
App 20050269669 - McClure, Brent A. ; et al. | 2005-12-08 |
Even nucleation between silicon and oxide surfaces for thin silicon nitride film growth
App 20050269649 - Ping, Er-Xuan | 2005-12-08 |
Use of atomic oxygen process for improved barrier layer
Grant 6,972,223 - Weimer , et al. December 6, 2 | 2005-12-06 |
Methods of forming nitrogen-containing masses, silicon nitride layers, and capacitor constructions
Grant 6,967,134 - Ping , et al. November 22, 2 | 2005-11-22 |
Methods of forming semiconductor circuitry
Grant 6,967,132 - Gonzalez , et al. November 22, 2 | 2005-11-22 |
Diffusion-enhanced crystallization of amorphous materials to improve surface roughness
App 20050239263 - Ping, Er-Xuan ; et al. | 2005-10-27 |
Nanometer engineering of metal-support catalysts
Grant 6,951,636 - Hu , et al. October 4, 2 | 2005-10-04 |
Methods of forming a capacitor structure
Grant 6,949,427 - Chen , et al. September 27, 2 | 2005-09-27 |
Method and structure for reducing leakage current in capacitors
Grant 6,943,078 - Zheng , et al. September 13, 2 | 2005-09-13 |
Diffusion-enhanced crystallization of amorphous materials to improve surface roughness
Grant 6,930,015 - Ping , et al. August 16, 2 | 2005-08-16 |
Methods for forming small-scale capacitor structures
App 20050164466 - Zheng, Lingyi A. ; et al. | 2005-07-28 |
Method, structure and process flow to reduce line-line capacitance with low-K material
Grant 6,919,638 - Huang , et al. July 19, 2 | 2005-07-19 |
Methods of forming rugged semiconductor-containing surfaces
Grant 6,916,723 - Chen , et al. July 12, 2 | 2005-07-12 |
Methods of forming semiconductive materials having flattened surfaces; methods of forming isolation regions; and methods of forming elevated source/drain regions
Grant 6,911,367 - Blomiley , et al. June 28, 2 | 2005-06-28 |
Methods and systems for controlling temperature during microfeature workpiece processing, e.g., CVD deposition
App 20050126489 - Beaman, Kevin L. ; et al. | 2005-06-16 |
Nanometer Engineering Of Metal-support Catalysts
App 20050123464 - Hu, Yongjun Jeff ; et al. | 2005-06-09 |
Semiconductor constructions comprising monocrystalline silicon together with semiconductive materials comprising elements other than silicon
Grant 6,894,310 - Gonzalez , et al. May 17, 2 | 2005-05-17 |
Methods of forming semiconductor capacitors and memory devices
Grant 6,890,818 - Zheng , et al. May 10, 2 | 2005-05-10 |
Reduction of damage in semiconductor container capacitors
Grant 6,888,186 - Zheng , et al. May 3, 2 | 2005-05-03 |
Systems for depositing material onto workpieces in reaction chambers and methods for removing byproducts from reaction chambers
App 20050081786 - Kubista, David J. ; et al. | 2005-04-21 |
Method to fabricate an intrinsic polycrystalline silicon film
Grant 6,881,652 - Ping April 19, 2 | 2005-04-19 |
Method and structure for reducing leakage current in capacitors
Grant 6,881,682 - Zheng , et al. April 19, 2 | 2005-04-19 |
Even nucleation between silicon and oxide surfaces for thin silicon nitride film growth
App 20050077558 - Ping, Er-Xuan | 2005-04-14 |
An improved method, structure and process flow to reduce line-line capacitance with low-K material
App 20050077595 - Huang, Ying ; et al. | 2005-04-14 |
Dual-sided capacitor
Grant 6,870,210 - Ping , et al. March 22, 2 | 2005-03-22 |
Microfeature workpiece processing apparatus and methods for controlling deposition of materials on microfeature workpieces
App 20050059261 - Basceri, Cem ; et al. | 2005-03-17 |
Capacitor constructions and rugged silicon-containing surfaces
App 20050051827 - Blalock, Guy T. ; et al. | 2005-03-10 |
Methods and apparatus for processing microfeature workpieces, e.g., for depositing materials on microfeature workpieces
App 20050045102 - Zheng, Lingyi A. ; et al. | 2005-03-03 |
Methods of forming semiconductor circuitry
Grant 6,861,326 - Gonzalez , et al. March 1, 2 | 2005-03-01 |
Semiconductor structures, DRAM cells and electronic systems
App 20050042824 - Chen, Shenlin ; et al. | 2005-02-24 |
Methods and apparatus for processing microfeature workpieces; methods for conditioning ALD reaction chambers
App 20050039680 - Beaman, Kevin L. ; et al. | 2005-02-24 |
Method of forming a dual-sided capacitor
Grant 6,858,493 - Ping , et al. February 22, 2 | 2005-02-22 |
Capacitor constructions and methods of forming
App 20050018381 - McClure, Brent A. ; et al. | 2005-01-27 |
Method, structure and process flow to reduce line-line capacitance with low-K material
App 20050006775 - Huang, Ying ; et al. | 2005-01-13 |
Apparatuses for treating pluralities of discrete semiconductor substrates; and methods for treating pluralities of discrete semiconductor substrates
App 20050009335 - Dean, Trung Tri ; et al. | 2005-01-13 |
Dual-sided capacitor and method of formation
App 20040264102 - Ping, Er-Xuan ; et al. | 2004-12-30 |
Methods for treating pluralities of discrete semiconductor substrates
Grant 6,835,674 - Doan , et al. December 28, 2 | 2004-12-28 |
Methods for epitaxial silicon growth
App 20040237881 - Zhang, Jingyan ; et al. | 2004-12-02 |
Method of atomic layer deposition on plural semiconductor substrates simultaneously
App 20040235302 - Doan, Trung Tri ; et al. | 2004-11-25 |
FET having epitaxial silicon growth
App 20040229414 - Wang, Zhongze ; et al. | 2004-11-18 |
Methods of forming capacitors
App 20040224485 - Nuttall, Michael ; et al. | 2004-11-11 |
Applying epitaxial silicon in disposable spacer flow
App 20040219756 - Cho, Chih-Chen ; et al. | 2004-11-04 |
Semiconductor structures, and methods of forming rugged semiconductor-containing surfaces
App 20040212048 - Chen, Shenlin ; et al. | 2004-10-28 |
Methods of forming semiconductive materials having flattened surfaces; methods of forming isolation regions; and methods of forming elevated source/drain regions
App 20040209446 - Blomiley, Eric R. ; et al. | 2004-10-21 |
Methods for treating pluralities of discrete semiconductor substrates
App 20040203232 - Doan, Trung Tri ; et al. | 2004-10-14 |
Methods of forming a capacitor with substantially selective deposite of polysilicon on a substantially crystalline capacitor dielectric layer
Grant 6,797,558 - Nuttall , et al. September 28, 2 | 2004-09-28 |
Methods of forming semiconductor circuitry
App 20040183134 - Gonzalez, Fernando ; et al. | 2004-09-23 |
Methods of forming semiconductor circuitry
App 20040185606 - Gonzalez, Fernando ; et al. | 2004-09-23 |
Capacitor constructions comprising a nitrogen-containing layer over a rugged polysilicon layer
Grant 6,791,113 - Moradi , et al. September 14, 2 | 2004-09-14 |
Use of atomic oxygen process for improved barrier layer
Grant 6,791,138 - Weimer , et al. September 14, 2 | 2004-09-14 |
Even nucleation between silicon and oxide surfaces for thin silicon nitride film growth
Grant 6,787,834 - Ping September 7, 2 | 2004-09-07 |
Ultra thin TCS (SiCl4) cell nitride for DRAM capacitor with DCS (SiH2CI2) interface seeding layer
App 20040169259 - Zheng, Lingyi A. ; et al. | 2004-09-02 |
Atomic layer deposition of capacitor dielectric
App 20040166647 - Zheng, Lingyi A. ; et al. | 2004-08-26 |
Method to fabricate an intrinsic polycrystalline silicon film
App 20040161912 - Ping, Er-Xuan | 2004-08-19 |
Methods for enhancing capacitors having roughened features to increase charge-storage capacity
App 20040161893 - Thakur, Randhir P.S. ; et al. | 2004-08-19 |
Applying epitaxial silicon in disposable spacer flow
Grant 6,756,264 - Cho , et al. June 29, 2 | 2004-06-29 |
Capacitor array structure for semiconductor devices
Grant 6,756,266 - Ping June 29, 2 | 2004-06-29 |
Methods of forming a capacitor structure
Grant 6,756,265 - Chen , et al. June 29, 2 | 2004-06-29 |
Nanometer engineering of metal-support catalysts
Grant 6,750,172 - Hu , et al. June 15, 2 | 2004-06-15 |
Methods of forming DRAM assemblies, transistor devices, and openings in substrates
Grant 6,740,574 - Gonzalez , et al. May 25, 2 | 2004-05-25 |
FET having epitaxial silicon growth
Grant 6,716,687 - Wang , et al. April 6, 2 | 2004-04-06 |
Even nucleation between silicon and oxide surfaces for thin silicon nitride film growth
Grant 6,716,716 - Ping April 6, 2 | 2004-04-06 |
Method to fabricate an intrinsic polycrystalline silicon film
Grant 6,703,268 - Ping March 9, 2 | 2004-03-09 |
Ultra thin TCS (SiCL4) cell nitride for dram capacitor with DCS (SiH2Cl2) interface seeding layer
Grant 6,704,188 - Zheng , et al. March 9, 2 | 2004-03-09 |
Formation of conductive rugged silicon
Grant 6,699,752 - Ping , et al. March 2, 2 | 2004-03-02 |
Dual-sided capacitor and method of formation
App 20040036099 - Ping, Er-Xuan ; et al. | 2004-02-26 |
Dual-sided capacitor and method of formation
App 20040036097 - Ping, Er-Xuan ; et al. | 2004-02-26 |
Method and structure for reducing leakage current in capacitors
Grant 6,696,715 - Zheng , et al. February 24, 2 | 2004-02-24 |
Methods of utilizing a sacrificial layer during formation of a capacitor
Grant 6,693,007 - Chen , et al. February 17, 2 | 2004-02-17 |
Method Of Forming A Silicon Nitride Dielectric Layer
App 20040005788 - Gonzalez, Fernando ; et al. | 2004-01-08 |
Method of forming a silicon nitride dielectric layer
Grant 6,664,198 - Gonzalez , et al. December 16, 2 | 2003-12-16 |
Capacitor constructions comprising a nitrogen-containing layer over a rugged polysilicon layer
App 20030203581 - Moradi, Behnam ; et al. | 2003-10-30 |
Methods for simultaneously depositing layers over pluralities of discrete semiconductor substrate
App 20030186515 - Dean, Trung Tri ; et al. | 2003-10-02 |
Apparatuses For Treating Pluralities of Discrete Semiconductor Substrates
App 20030176061 - Doan, Trung Tri ; et al. | 2003-09-18 |
Methods For Treating Pluralities of Discrete Semiconductor Substrates
App 20030176062 - Doan, Trung Tri ; et al. | 2003-09-18 |
Methods for treating pluralities of discrete semiconductor substrates
App 20030176047 - Doan, Trung Tri ; et al. | 2003-09-18 |
Methods For Treating Pluralities Of Discrete Semiconductor Substrates
App 20030176060 - Doan, Trung Tri ; et al. | 2003-09-18 |
Methods for treating pluralities of discrete semiconductor substrates
App 20030176057 - Doan, Trung Tri ; et al. | 2003-09-18 |
Method for forming raised structures by controlled selective epitaxial growth of facet using spacer
App 20030164513 - Ping, Er-Xuan ; et al. | 2003-09-04 |
Atomic layer deposition of capacitor dielectric
App 20030166318 - Zheng, Lingyi A. ; et al. | 2003-09-04 |
Method and structure for reducing leakage current in capacitors
Grant 6,613,628 - Zheng , et al. September 2, 2 | 2003-09-02 |
Methods of forming capacitors
Grant 6,607,965 - Moradi , et al. August 19, 2 | 2003-08-19 |
Container capacitor structure and method of formation thereof
Grant 6,608,342 - Durcan , et al. August 19, 2 | 2003-08-19 |
Fet having epitaxial silicon growth
App 20030153155 - Wang, Zhongze ; et al. | 2003-08-14 |
Methods of forming semiconductor circuitry, and semiconductor constructions
App 20030151048 - Gonzalez, Fernando ; et al. | 2003-08-14 |
Structure to reduce line-line capacitance with low K material
Grant 6,600,207 - Huang , et al. July 29, 2 | 2003-07-29 |
Reduction of damage in semiconductor container capacitors
App 20030136988 - Zheng, Lingyi A. ; et al. | 2003-07-24 |
Methods of forming nitrogen-containing masses, silicon nitride layers, and capacitor constructions
App 20030134466 - Ping, Er-Xuan ; et al. | 2003-07-17 |
Diffusion-enhanced crystallization of amorphous materials to improve surface roughness
App 20030129807 - Ping, Er-Xuan ; et al. | 2003-07-10 |
Formation of conductive rugged silicon
App 20030124799 - Ping, Er-Xuan ; et al. | 2003-07-03 |
Method and structure for reducing leakage current in capacitors
App 20030104672 - Zheng, Lingyi A. ; et al. | 2003-06-05 |
Capacitor array structure for semiconductor devices
App 20030098481 - Ping, Er-Xuan | 2003-05-29 |
Reduction of damage in semiconductor container capacitors
App 20030098482 - Zheng, Lingyi A. ; et al. | 2003-05-29 |
Atomic layer deposition of capacitor dielectric
App 20030098480 - Zheng, Lingyi A. ; et al. | 2003-05-29 |
Methods of forming semiconductor circuitry, and semiconductor constructions
App 20030094641 - Gonzalez, Fernando ; et al. | 2003-05-22 |
Nanometer engineering of metal-support catalysts
App 20030091474 - Hu, Yongjun Jeff ; et al. | 2003-05-15 |
Methods of Forming a Capacitor Structure
App 20030075754 - Chen, Shenlin ; et al. | 2003-04-24 |
Atomic layer deposition of capacitor dielectric
Grant 6,551,893 - Zheng , et al. April 22, 2 | 2003-04-22 |
Even nucleation between silicon and oxide surfaces for thin silicon nitride film growth
App 20030073285 - Ping, Er-Xuan | 2003-04-17 |
Even nucleation between silicon and oxide surfaces for thin silicon nitride film growth
App 20030073284 - Ping, Er-Xuan | 2003-04-17 |
Methods of forming DRAM assemblies, transistor devices, and openings in substrates
App 20030073298 - Gonzalez, Fernando ; et al. | 2003-04-17 |
Reduction of damage in semiconductor container capacitors
Grant 6,538,274 - Zheng , et al. March 25, 2 | 2003-03-25 |
Use of atomic oxygen process for improved barrier layer
App 20030054623 - Weimer, Ronald A. ; et al. | 2003-03-20 |
Capacitor Structures
App 20030034515 - Chen, Shenlin ; et al. | 2003-02-20 |
Methods of utilizing a sacrificial layer during formation of a capacitor
App 20030034514 - Chen, Shenlin ; et al. | 2003-02-20 |
Methods of forming a capacitor structure
App 20030034513 - Chen, Shenlin ; et al. | 2003-02-20 |
Applying epitaxial silicon in disposable spacer flow
App 20020197786 - Cho, Chih-Chen ; et al. | 2002-12-26 |
Methods of forming a capacitor
App 20020155684 - Nuttall, Michael ; et al. | 2002-10-24 |
Method to reduce floating grain defects in dual-sided container capacitor fabrication
App 20020142559 - Ping, Er-Xuan | 2002-10-03 |
Method for forming raised structures by controlled selective epitaxial growth of facet using spacer
App 20020135029 - Ping, Er-Xuan ; et al. | 2002-09-26 |
Method for forming raised structures by controlled selective epitaxial growth of facet using spacer
App 20020137269 - Ping, Er-Xuan ; et al. | 2002-09-26 |
Use of atomic oxygen process for improved barrier layer
App 20020132397 - Weimer, Ronald A. ; et al. | 2002-09-19 |
Container capacitor structure and method of formation thereof
App 20020125508 - Durcan, D. Mark ; et al. | 2002-09-12 |
Applying epitaxial silicon in disposable spacer flow
Grant 6,448,129 - Cho , et al. September 10, 2 | 2002-09-10 |
Method to fabricate an intrinsic polycrystalline silicon film
App 20020115243 - Ping, Er-Xuan | 2002-08-22 |
Semiconductor structure having a doped conductive layer
Grant 6,436,818 - Hu , et al. August 20, 2 | 2002-08-20 |
Reduction of shorts among electrical cells formed on a semiconductor substrate
App 20020109162 - Ping, Er-Xuan ; et al. | 2002-08-15 |
Reduction of damage in semiconductor container capacitors
App 20020079523 - Zheng, Lingyi A. ; et al. | 2002-06-27 |
Ultra thin TCS (SiCL4) cell nitride for dram capacitor with DCS (SiH2Cl2) interface seeding layer
App 20020081864 - Zheng, Lingyi A. ; et al. | 2002-06-27 |
Methods of forming dielectric materials, methods of forming capacitors, and capacitor constructions
App 20020076938 - Moradi, Behnam ; et al. | 2002-06-20 |
Methods Of Forming Dram Assemblies, Transistor Devices, And Openings In Substrates
App 20020072208 - GONZALEZ, FERNANDO ; et al. | 2002-06-13 |
Methods of forming dielectric materials, methods of forming capacitors, and capacitor constructions
App 20020066920 - Moradi, Behnam ; et al. | 2002-06-06 |
A Structure To Reduce Line-line Capacitance With Low K Material
App 20020058405 - Huang, Ying ; et al. | 2002-05-16 |
Method and structure for reducing leakage current in capacitors
App 20020052078 - Zheng, Lingyi A. ; et al. | 2002-05-02 |
Methods of forming a contact to a substrate, and methods of forming a capacitor
App 20020048911 - Nuttall, Michael ; et al. | 2002-04-25 |
Method and structure for reducing leakage current in capacitors
App 20020045312 - Zheng, Lingyi A. ; et al. | 2002-04-18 |
Semiconductor Structure Having A Doped Conductive Layer
App 20020045342 - HU, YONGJUN ; et al. | 2002-04-18 |
Method To Reduce Floating Grain Defects In Dual-sided Container Capacitor Fabrication
App 20020031895 - PING, ER-XUAN | 2002-03-14 |
Methods for enhancing capacitors having roughened features to increase charge-storage capacity
App 20020025650 - Thakur, Randhir P.S. ; et al. | 2002-02-28 |
Microelectronic Contacts
App 20010029100 - Huang, Yin ; et al. | 2001-10-11 |
Selective silicon formation for semiconductor devices
App 20010024869 - Ping, Er-Xuan | 2001-09-27 |
Semiconductor processing methods, methods of forming hemispherical grain polysilicon, methods of forming capacitors, and methods of forming wordlines
App 20010016425 - Ping, Er-Xuan ; et al. | 2001-08-23 |
Method to fabricate an intrinsic polycrystalline silicon film
App 20010009799 - Ping, Er-Xuan | 2001-07-26 |
Selective silicon formation for semiconductor devices
Grant 6,235,605 - Ping May 22, 2 | 2001-05-22 |
Method of depositing polysilicon, method of fabricating a field effect transistor, method of forming a contact to a substrate, method of forming a capacitor
Grant 6,159,852 - Nuttall , et al. December 12, 2 | 2000-12-12 |
Capacitor array structure for semiconductor devices
Grant 6,153,899 - Ping November 28, 2 | 2000-11-28 |
Method of making integrated capacitor incorporating high K dielectric
Grant 6,124,164 - Al-Shareef , et al. September 26, 2 | 2000-09-26 |
Semiconductor structure having a doped conductive layer
Grant 6,015,997 - Hu , et al. January 18, 2 | 2000-01-18 |
Process for forming capacitor array structure for semiconductor devices
Grant 5,851,875 - Ping December 22, 1 | 1998-12-22 |
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