| Patent | Date |
|---|
Synchronized Parallel Tile Computation for Large Area Lithography Simulation
App 20220291659 - Peng; Danping ; et al. | 2022-09-15 |
Machine Learning Based Model Builder And Its Applications For Pattern Transferring In Semiconductor Manufacturing
App 20220284166 - YU; Zhiru ; et al. | 2022-09-08 |
Multi-component kernels for vector optical image simulation
Grant 11,435,670 - Ho , et al. September 6, 2 | 2022-09-06 |
Multi-component Kernels For Vector Optical Image Simulation
App 20220276567 - HO; Kenneth Lik Kin ; et al. | 2022-09-01 |
Synchronized parallel tile computation for large area lithography simulation
Grant 11,340,584 - Peng , et al. May 24, 2 | 2022-05-24 |
Method of Modeling a Mask Having Patterns With Arbitrary Angles
App 20220026812 - Lai; Chien-Jen ; et al. | 2022-01-27 |
Method of modeling a mask having patterns with arbitrary angles
Grant 11,143,955 - Lai , et al. October 12, 2 | 2021-10-12 |
Sub-Resolution Assist Features
App 20210247689 - Yamazoe; Kenji ; et al. | 2021-08-12 |
Synchronized Parallel Tile Computation for Large Area Lithography Simulation
App 20210181713 - Peng; Danping ; et al. | 2021-06-17 |
Sub-resolution assist features
Grant 10,990,002 - Yamazoe , et al. April 27, 2 | 2021-04-27 |
Lithographic Mask Correction Using Volume Correction Techniques
App 20210072648 - YU; Zhiru ; et al. | 2021-03-11 |
Synchronized parallel tile computation for large area lithography simulation
Grant 10,915,090 - Peng , et al. February 9, 2 | 2021-02-09 |
Sub-Resolution Assist Features
App 20210026237 - Yamazoe; Kenji ; et al. | 2021-01-28 |
Lithographic mask correction using volume correction techniques
Grant 10,838,305 - Yu , et al. November 17, 2 | 2020-11-17 |
Synchronized Parallel Tile Computation for Large Area Lithography Simulation
App 20200293023 - Peng; Danping ; et al. | 2020-09-17 |
Method Of Modeling A Mask By Taking Into Account Of Mask Pattern Edge Interaction
App 20200293709 - Lai; Chien-Jen ; et al. | 2020-09-17 |
Synchronized parallel tile computation for large area lithography simulation
Grant 10,671,052 - Beylkin , et al. | 2020-06-02 |
Method of modeling a mask by taking into account of mask pattern edge interaction
Grant 10,671,786 - Lai , et al. | 2020-06-02 |
Method of Modeling a Mask Having Patterns With Arbitrary Angles
App 20200050101 - Lai; Chien-Jen ; et al. | 2020-02-13 |
Lithographic Mask Correction Using Volume Correction Techniques
App 20200004161 - YU; Zhiru ; et al. | 2020-01-02 |
Method of modeling a mask having patterns with arbitrary angles
Grant 10,466,586 - Lai , et al. No | 2019-11-05 |
Synchronized Parallel Tile Computation For Large Area Lithography Simulation
App 20190146455 - Beylkin; Daniel ; et al. | 2019-05-16 |
Method Of Modeling A Mask Having Patterns With Arbitrary Angles
App 20180149967 - Lai; Chien-Jen ; et al. | 2018-05-31 |
Method Of Modeling A Mask By Taking Into Account Of Mask Pattern Edge Interaction
App 20180150578 - Lai; Chien-Jen ; et al. | 2018-05-31 |
Photo-mask acceptance technique
Grant 8,458,622 - Pang , et al. June 4, 2 | 2013-06-04 |
Photo-Mask Acceptance Technique
App 20120134542 - Pang; Linyong ; et al. | 2012-05-31 |
Method for time-evolving rectilinear contours representing photo masks
Grant 8,056,021 - Abrams , et al. November 8, 2 | 2011-11-08 |
Method for time-evolving rectilinear contours representing photo masks
Grant 7,992,109 - Abrams , et al. August 2, 2 | 2011-08-02 |
Method for time-evolving rectilinear contours representing photo masks
Grant 7,984,391 - Abrams , et al. July 19, 2 | 2011-07-19 |
Method for Time-Evolving Rectilinear Contours Representing Photo Masks
App 20100275176 - Abrams; Daniel ; et al. | 2010-10-28 |
Method for Time-Evolving Rectilinear Contours Representing Photo Masks
App 20100275175 - Abrams; Daniel ; et al. | 2010-10-28 |
Method for Time-Evolving Rectilinear Contours Representing Photo Masks
App 20100251203 - Abrams; Daniel ; et al. | 2010-09-30 |
Physical-resist model using fast sweeping
Grant 7,805,700 - Peng September 28, 2 | 2010-09-28 |
Mask-patterns including intentional breaks
Grant 7,793,253 - Abrams , et al. September 7, 2 | 2010-09-07 |
Method for time-evolving rectilinear contours representing photo masks
Grant 7,757,201 - Abrams , et al. July 13, 2 | 2010-07-13 |
Systems, masks, and methods for photolithography
Grant 7,707,541 - Abrams , et al. April 27, 2 | 2010-04-27 |
Technique for determining a mask pattern corresponding to a photo-mask
Grant 7,703,068 - Abrams , et al. April 20, 2 | 2010-04-20 |
System, masks, and methods for photomasks optimized with approximate and accurate merit functions
Grant 7,703,049 - Abrams , et al. April 20, 2 | 2010-04-20 |
Optimized photomasks for photolithography
Grant 7,571,423 - Abrams , et al. August 4, 2 | 2009-08-04 |
Optimized photomasks for photolithography
Grant 7,480,889 - Abrams , et al. January 20, 2 | 2009-01-20 |
Physical-Resist Model Using Fast Sweeping
App 20090013304 - Peng; Danping | 2009-01-08 |
Method for time-evolving rectilinear contours representing photo masks
Grant 7,441,227 - Abrams , et al. October 21, 2 | 2008-10-21 |
Mask-Patterns Including Intentional Breaks
App 20070196742 - Abrams; Daniel S. ; et al. | 2007-08-23 |
Method for Time-Evolving Rectilinear Contours Representing Photo Masks
App 20070198966 - Abrams; Daniel ; et al. | 2007-08-23 |
Method for Time-Evolving Rectilinear Contours Representing Photo Masks
App 20070192756 - Abrams; Daniel ; et al. | 2007-08-16 |
Systems, Masks, and Methods for Photolithography
App 20070184357 - Abrams; Daniel S. ; et al. | 2007-08-09 |
System, Masks, and Methods for Photomasks Optimized with Approximate and Accurate Merit Functions
App 20070186206 - Abrams; Daniel S. ; et al. | 2007-08-09 |
Method for Time-Evolving Rectilinear Contours Representing Photo Masks
App 20070136716 - Abrams; Daniel ; et al. | 2007-06-14 |
Method for time-evolving rectilinear contours representing photo masks
Grant 7,178,127 - Abrams , et al. February 13, 2 | 2007-02-13 |
Method For Time-evolving Rectilinear Contours Representing Photo Masks
App 20070011645 - Abrams; Daniel ; et al. | 2007-01-11 |
Optimized photomasks for photolithography
App 20070011647 - Abrams; Daniel ; et al. | 2007-01-11 |
Optimized photomasks for photolithography
App 20070011644 - Abrams; Daniel ; et al. | 2007-01-11 |
Method for time-evolving rectilinear contours representing photo masks
Grant 7,124,394 - Abrams , et al. October 17, 2 | 2006-10-17 |
Systems, masks and methods for printing contact holes and other patterns
App 20060172204 - Peng; Danping ; et al. | 2006-08-03 |
| 