Pellemans; Henricus Petrus Maria

Patent Applications and Registrations

Patent applications and USPTO patent grants for Pellemans; Henricus Petrus Maria.The latest application filed is for "inspection method and apparatus, lithographic apparatus, lithographic processing cell and device manufacturing method".

Company Profile

10.35.33

Pellemans; Henricus Petrus Maria - Veldhoven NL
- Veldhoven NL

*profile and listings may contain filings by different individuals or companies with the same name. Review application materials to confirm ownership/assignment.

Patent Activity

Patent	Date
Position metrology apparatus and associated optical elements Grant 11,428,925 - Beukman , et al. August 30, 2	2022-08-30
Alignment method and associated metrology device Grant 11,372,343 - Van De Groes , et al. June 28, 2	2022-06-28
Inspection Method and Apparatus, Lithographic Apparatus, Lithographic Processing Cell and Device Manufacturing Method App 20220196393 - PELLEMANS; Henricus Petrus Maria ; et al.	2022-06-23
Metrology sensor for position metrology Grant 11,360,399 - Goorden , et al. June 14, 2	2022-06-14
Inspection method and apparatus, lithographic apparatus, lithographic processing cell and device manufacturing method Grant 11,307,024 - Pellemans , et al. April 19, 2	2022-04-19
Alignment Method And Associated Metrology Device App 20220100107 - VAN DE GROES; Henricus Martinus Johannes ; et al.	2022-03-31
Metrology Sensor For Position Metrology App 20220035257 - GOORDEN; Sebastianus Adrianus ; et al.	2022-02-03
Method and Apparatus for Angular-Resolved Spectroscopic Lithography Characterization App 20210208083 - DEN BOEF; Arie Jeffrey ; et al.	2021-07-08
Method and apparatus for angular-resolved spectroscopic lithography characterization Grant 10,955,353 - Den Boef , et al. March 23, 2	2021-03-23
Inspection Method and Apparatus, Lithographic Apparatus, Lithographic Processing Cell and Device Manufacturing Method App 20200217648 - PELLEMANS; Henricus Petrus Maria ; et al.	2020-07-09
Position Metrology Apparatus and Associated Optical Elements App 20200209608 - Beukman; Arjan Johannes Anton ; et al.	2020-07-02
Inspection method and apparatus, lithographic apparatus, lithographic processing cell and device manufacturing method Grant 10,591,283 - Pellemans , et al.	2020-03-17
Method and Apparatus for Angular-Resolved Spectroscopic Lithography Characterization App 20190170657 - DEN BOEF; Arie Jeffrey Maria ; et al.	2019-06-06
Method and apparatus for angular-resolved spectroscopic lithography characterization Grant 10,241,055 - Den Boef , et al.	2019-03-26
Inspection Method and Apparatus, Lithographic Apparatus, Lithographic Processing Cell and Device Manufacturing Method App 20190056216 - PELLEMANS; Henricus Petrus Maria ; et al.	2019-02-21
Inspection method and apparatus, lithographic apparatus, lithographic processing cell and device manufacturing method Grant 10,209,061 - Pellemans , et al. Feb	2019-02-19
Inspection Method and Apparatus, Lithographic Apparatus, Lithographic Processing Cell and Device Manufacturing Method App 20180195857 - Pellemans; Henricus Petrus Maria ; et al.	2018-07-12
Inspection method and apparatus, lithographic apparatus, lithographic processing cell and device manufacturing method Grant 9,933,250 - Pellemans , et al. April 3, 2	2018-04-03
Focus monitoring arrangement and inspection apparatus including such an arrangement Grant 9,921,489 - Singh , et al. March 20, 2	2018-03-20
Inspection apparatus and methods, methods of manufacturing devices Grant 9,753,379 - Singh , et al. September 5, 2	2017-09-05
Photon source, metrology apparatus, lithographic system and device manufacturing method Grant 9,357,626 - Pellemans , et al. May 31, 2	2016-05-31
Focus Monitoring Arrangement and Inspection Apparatus Including such an Arrangement App 20160097984 - SINGH; Amandev ; et al.	2016-04-07
Inspection Apparatus and Methods, Methods of Manufacturing Devices App 20160011523 - SINGH; Amandev ; et al.	2016-01-14
Metrology method and apparatus, and device manufacturing method Grant 9,158,194 - Koolen , et al. October 13, 2	2015-10-13
Inspection apparatus, lithographic apparatus, lithographic processing cell and inspection method Grant 9,128,065 - Cramer , et al. September 8, 2	2015-09-08
Inspection Method and Apparatus, Lithographic Apparatus, Lithographic Processing Cell and Device Manufacturing Method App 20150131076 - PELLEMANS; Henricus Petrus Maria ; et al.	2015-05-14
Photon Source, Metrology Apparatus, Lithographic System and Device Manufacturing Method App 20150108373 - PELLEMANS; Henricus Petrus Maria ; et al.	2015-04-23
Photon source, metrology apparatus, lithographic system and device manufacturing method Grant 8,921,814 - Pellemans , et al. December 30, 2	2014-12-30
Photon source, metrology apparatus, lithographic system and device manufacturing method Grant 08921814 -	2014-12-30
Inspection method and apparatus, lithographic apparatus, lithographic processing cell and device manufacturing method Grant 8,885,150 - Pellemans , et al. November 11, 2	2014-11-11
Method of assessing a model of a substrate, an inspection apparatus and a lithographic apparatus Grant 8,830,472 - Den Boef , et al. September 9, 2	2014-09-09
Method and Apparatus for Angular-Resolved Spectroscopic Lithography Characterization App 20140233025 - DEN BOEF; Arie Jeffrey Maria ; et al.	2014-08-21
Inspection Apparatus, Lithographic Apparatus, Lithographic Processing Cell and Inspection Method App 20140211185 - Cramer; Hugo Augustinus Joseph ; et al.	2014-07-31
Method and apparatus for angular-resolved spectroscopic lithography characterization Grant 8,760,662 - Den Boef , et al. June 24, 2	2014-06-24
Inspection apparatus, lithographic apparatus, lithographic processing cell and inspection method Grant 8,705,007 - Cramer , et al. April 22, 2	2014-04-22
Method and Apparatus for Angular-Resolved Spectroscopic Lithography Characterization App 20140055788 - DEN BOEF; Arie Jeffrey Maria ; et al.	2014-02-27
Photon Source, Metrology Apparatus, Lithographic System and Device Manufacturing Method App 20130329204 - PELLEMANS; Henricus Petrus Maria ; et al.	2013-12-12
Calibration method and apparatus Grant 8,553,218 - Tinnemans , et al. October 8, 2	2013-10-08
Method and apparatus for angular-resolved spectroscopic lithography characterization Grant 8,553,230 - Den Boef , et al. October 8, 2	2013-10-08
Metrology Method and Apparatus, and Device Manufacturing Method App 20130100427 - KOOLEN; Armand Eugene Albert ; et al.	2013-04-25
Metrology method and apparatus, lithographic apparatus, device manufacturing method and substrate Grant 8,411,287 - Smilde , et al. April 2, 2	2013-04-02
Method and Apparatus for Angular-Resolved Spectroscopic Lithography Characterization App 20120038929 - Den Boef; Arie Jeffrey Maria ; et al.	2012-02-16
Method and apparatus for angular-resolved spectroscopic lithography characterization Grant 8,054,467 - Den Boef , et al. November 8, 2	2011-11-08
Calibration Method and Apparatus App 20110178785 - TINNEMANS; Patricius Aloysius Jacobus ; et al.	2011-07-21
Inspection Method and Apparatus, Lithographic Apparatus, Lithographic Processing Cell and Device Manufacturing Method App 20110128512 - Pellemans; Henricus Petrus Maria ; et al.	2011-06-02
Metrology Method and Apparatus, Lithographic Apparatus, Device Manufacturing Method and Substrate App 20110043791 - Smilde; Hendrik Jan Hidde ; et al.	2011-02-24
Method of Assessing a Model of a Substrate, an Inspection Apparatus and a Lithographic Apparatus App 20110026032 - Den Boef; Arie Jeffrey ; et al.	2011-02-03
Method and apparatus for angular-resolved spectroscopic lithography characterization App 20110007314 - Den Boef; Arie Jeffrey Maria ; et al.	2011-01-13
Inspection method and apparatus lithographic apparatus, lithographic processing cell, device manufacturing method and distance measuring system Grant 7,869,022 - Van Boxmeer , et al. January 11, 2	2011-01-11
Method and apparatus for angular-resolved spectroscopic lithography characterization Grant 7,791,732 - Den Boef , et al. September 7, 2	2010-09-07
Inspection Apparatus, Lithographic Apparatus, Lithographic Processing Cell and Inspection Method App 20100201963 - Cramer; Hugo Augustinus Joseph ; et al.	2010-08-12
Inspection method and apparatus lithographic apparatus, lithographic processing cell, device manufacturing method and distance measuring system App 20090021708 - Boxmeer; Johan Maria Van ; et al.	2009-01-22
Lithographic apparatus, alignment system, and device manufacturing method Grant 7,440,079 - Den Boef , et al. October 21, 2	2008-10-21
Metrology apparatus, lithographic apparatus, process apparatus metrology method and device manufacturing method Grant 7,403,293 - Pellemans , et al. July 22, 2	2008-07-22
Metrology apparatus, lithographic apparatus, process apparatus metrology method and device manufacturing method App 20070013921 - Pellemans; Henricus Petrus Maria ; et al.	2007-01-18
Metrology apparatus, lithographic apparatus, process apparatus, metrology method and device manufacturing method App 20070002336 - Pellemans; Henricus Petrus Maria ; et al.	2007-01-04
Lithographic apparatus, alignment system, and device manufacturing method App 20060215161 - Den Boef; Arie Jeffrey ; et al.	2006-09-28
Method and apparatus for angular-resolved spectroscopic lithography characterization App 20060066855 - Boef; Arie Jeffrey Maria Den ; et al.	2006-03-30
Lithographic apparatus with alignment subsystem, device manufacturing method, and device manufactured thereby Grant 7,002,667 - Levasier , et al. February 21, 2	2006-02-21
Lithographic apparatus with alignment subsystem, device manufacturing method, using alignment, and alignment structure Grant 6,995,831 - Levasier , et al. February 7, 2	2006-02-07
Lithographic apparatus with alignment subsystem, device manufacturing method, and device manufactured thereby App 20050146699 - Levasier, Leon Martin ; et al.	2005-07-07
Lithographic apparatus with alignment subsystem, device manufacturing method, and device manufactured thereby App 20040179184 - Levasier, Leon Martin ; et al.	2004-09-16

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