Peh; Eng Sheng
Patent Applications and Registrations
Patent applications and USPTO patent grants for Peh; Eng Sheng.The latest application filed is for "hybrid wafer dicing approach using an actively-focused laser beam laser scribing process and plasma etch process".
- Peh; Eng Sheng - Singapore SG
| Patent | Date |
|---|---|
| Hybrid Wafer Dicing Approach Using An Actively-focused Laser Beam Laser Scribing Process And Plasma Etch Process App 20220246476 - Balakrishnan; Karthik ; et al. | 2022-08-04 |
| Hybrid wafer dicing approach using an actively-focused laser beam laser scribing process and plasma etch process Grant 11,342,226 - Balakrishnan , et al. May 24, 2 | 2022-05-24 |
| Substrate vacuum transport and storage apparatus Grant 11,302,549 - Thirunavukarasu , et al. April 12, 2 | 2022-04-12 |
| Shadow Ring Kit For Plasma Etch Wafer Singulation Process App 20220108908 - Elumalai; Karthik ; et al. | 2022-04-07 |
| Mainframe-less Wafer Transfer Platform For Wafer Processing Modules App 20220044968 - Thirunavukarasu; Sriskantharajah ; et al. | 2022-02-10 |
| Nozzle for uniform plasma processing Grant 11,053,590 - Mishra , et al. July 6, 2 | 2021-07-06 |
| Electrostatic Chuck With Reduced Current Leakage For Hybrid Laser Scribing And Plasma Etch Wafer Singulation Process App 20210175086 - Abhinand; Sai ; et al. | 2021-06-10 |
| Apparatus for handling various sized substrates Grant 10,930,542 - Thirunavukarasu , et al. February 23, 2 | 2021-02-23 |
| Hybrid Wafer Dicing Approach Using An Actively-focused Laser Beam Laser Scribing Process And Plasma Etch Process App 20210050262 - Balakrishnan; Karthik ; et al. | 2021-02-18 |
| Image based substrate mapper Grant 10,784,134 - Peh , et al. Sept | 2020-09-22 |
| Hybrid substrate carrier Grant 10,777,442 - Thirunavukarasu , et al. Sept | 2020-09-15 |
| Multi-cassette carrying case Grant 10,566,226 - Thirunavukarasu , et al. Feb | 2020-02-18 |
| Nozzle For Uniform Plasma Processing App 20200017972 - Mishra; Rohit ; et al. | 2020-01-16 |
| Bridging front opening unified pod (FOUP) Grant 10,504,762 - Parathithasan , et al. Dec | 2019-12-10 |
| Nozzle for uniform plasma processing Grant 10,465,288 - Mishra , et al. No | 2019-11-05 |
| Substrate Transfer Chamber App 20190326146 - THIRUNAVUKARASU; SRISKANTHARAJAH ; et al. | 2019-10-24 |
| Multi-cassette Carrying Case App 20190326147 - THIRUNAVUKARASU; SRISKANTHARAJAH ; et al. | 2019-10-24 |
| Next generation warpage measurement system Grant 10,446,423 - Su , et al. Oc | 2019-10-15 |
| Process Kit For Processing Reduced Sized Substrates App 20190259635 - PARATHITHASAN; KARRTHIK ; et al. | 2019-08-22 |
| Deposition Ring For Processing Reduced Size Substrates App 20190259647 - THIRUNAVUKARASU; SRISKANTHARAJAH ; et al. | 2019-08-22 |
| Apparatus For Handling Various Sized Substrates App 20190252235 - THIRUNAVUKARASU; SRISKANTHARAJAH ; et al. | 2019-08-15 |
| Bridging Front Opening Unified Pod (foup) App 20190244845 - PARATHITHASAN; KARRTHIK ; et al. | 2019-08-08 |
| Substrate transfer chamber Grant 10,347,516 - Thirunavukarasu , et al. July 9, 2 | 2019-07-09 |
| Methods and apparatus for correcting substrate deformity Grant 10,325,790 - Peh , et al. | 2019-06-18 |
| Methods and apparatus for transferring a substrate Grant 10,153,187 - Thirunavukarasu , et al. Dec | 2018-12-11 |
| Image Based Substrate Mapper App 20180323095 - Peh; Eng Sheng ; et al. | 2018-11-08 |
| Methods And Apparatus For Correcting Substrate Deformity App 20180218928 - PEH; Eng Sheng ; et al. | 2018-08-02 |
| Hybrid Substrate Carrier App 20180144969 - THIRUNAVUKARASU; SRISKANTHARAJAH ; et al. | 2018-05-24 |
| Next Generation Warpage Measurement System App 20180144960 - SU; JUN-LIANG ; et al. | 2018-05-24 |
| Methods and apparatus for correcting substrate deformity Grant 9,818,624 - Lew , et al. November 14, 2 | 2017-11-14 |
| Methods And Apparatus For Correcting Substrate Deformity App 20160322234 - LEW; Jen Sern ; et al. | 2016-11-03 |
| Substrate Transfer Chamber App 20160133494 - THIRUNAVUKARASU; SRISKANTHARAJAH ; et al. | 2016-05-12 |
| Methods And Apparatus For Transferring A Substrate App 20160133490 - THIRUNAVUKARASU; SRISKANTHARAJAH ; et al. | 2016-05-12 |
| Multi-cassette Carrying Case App 20160133491 - THIRUNAVUKARASU; SRISKANTHARAJAH ; et al. | 2016-05-12 |
| Nozzle For Uniform Plasma Processing App 20160047040 - MISHRA; ROHIT ; et al. | 2016-02-18 |
| Pedestal Fluid-based Thermal Control App 20150332942 - Peh; Eng Sheng ; et al. | 2015-11-19 |
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