Patent | Date |
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Apparatus for and method of net trace prior level subtraction Grant 10,649,026 - Patterson , et al. | 2020-05-12 |
Angled Beam Inspection System For Semiconductor Devices App 20190113469 - Patterson; Oliver D. ;   et al. | 2019-04-18 |
Apparatus For And Method Of Net Trace Prior Level Subtraction App 20180284184 - PATTERSON; OLIVER D. ;   et al. | 2018-10-04 |
Sram-like Ebi Structure Design And Implementation To Capture Mosfet Source-drain Leakage Eariler App 20170154687 - Song; Zhigang ;   et al. | 2017-06-01 |
Voltage contrast characterization structures and methods for within chip process variation characterization Grant 9,519,210 - Patterson , et al. December 13, 2 | 2016-12-13 |
Method of inspecting a semiconductor substrate Grant 9,390,884 - Harley , et al. July 12, 2 | 2016-07-12 |
Voltage Contrast Characterization Structures And Methods For Within Chip Process Variation Characterization App 20160148849 - Patterson; Oliver D. ;   et al. | 2016-05-26 |
Voltage contrast inspection of deep trench isolation Grant 9,293,382 - Arnold , et al. March 22, 2 | 2016-03-22 |
Evaluating transistors with e-beam inspection Grant 9,291,665 - Patterson , et al. March 22, 2 | 2016-03-22 |
Probe-able voltage contrast test structures Grant 9,213,060 - Cote , et al. December 15, 2 | 2015-12-15 |
Inspection tool and methodology for three dimensional voltage contrast inspection Grant 9,207,279 - Patterson December 8, 2 | 2015-12-08 |
Semiconductor Inspection System Including Reference Image Generator App 20150325406 - Harley; Eric C. ;   et al. | 2015-11-12 |
Probe-able voltage contrast test structures Grant 9,103,875 - Cote , et al. August 11, 2 | 2015-08-11 |
Probe-able voltage contrast test structures Grant 9,097,760 - Cote , et al. August 4, 2 | 2015-08-04 |
Voltage Contrast Inspection Of Deep Trench Isolation App 20150041809 - Arnold; Norbert ;   et al. | 2015-02-12 |
Voltage contrast inspection of deep trench isolation Grant 8,927,989 - Arnold , et al. January 6, 2 | 2015-01-06 |
Inspection tool and methodology for three dimensional voltage contrast inspection Grant 8,841,933 - Patterson September 23, 2 | 2014-09-23 |
Static random access memory test structure Grant 8,787,074 - Patterson , et al. July 22, 2 | 2014-07-22 |
Test structure for detection of gap in conductive layer of multilayer gate stack Grant 8,766,259 - Mo , et al. July 1, 2 | 2014-07-01 |
Robust inspection alignment of semiconductor inspection tools using design information Grant 8,750,597 - Patterson , et al. June 10, 2 | 2014-06-10 |
Inspection Tool And Methodology For Three Dimensional Voltage Contrast Inspection App 20140153815 - Patterson; Oliver D. | 2014-06-05 |
Voltage Contrast Inspection Of Deep Trench Isolation App 20140145191 - Arnold; Norbert ;   et al. | 2014-05-29 |
Evaluating Transistors With E-beam Inspection App 20130300451 - Patterson; Oliver D. ;   et al. | 2013-11-14 |
Test Structure For Detection Of Gap In Conductive Layer Of Multilayer Gate Stack App 20130140565 - Mo; Renee T. ;   et al. | 2013-06-06 |
Robust Inspection Alignment Of Semiconductor Inspection Tools Using Design Information App 20130129189 - Wu; Kevin T. ;   et al. | 2013-05-23 |
Static Random Access Memory Test Structure App 20130094315 - Patterson; Oliver D. ;   et al. | 2013-04-18 |
Test structure for detection of gap in conductive layer of multilayer gate stack Grant 8,399,266 - Mo , et al. March 19, 2 | 2013-03-19 |
Probe-able voltage contrast test structures Grant 8,350,583 - Cote , et al. January 8, 2 | 2013-01-08 |
Probe-able Voltage Contrast Test Structures App 20120319714 - Cote; William J. ;   et al. | 2012-12-20 |
Probe-able Voltage Contrast Test Structures App 20120319715 - Cote; William J. ;   et al. | 2012-12-20 |
Probe-able Voltage Contrast Test Structures App 20120319716 - Cote; William J. ;   et al. | 2012-12-20 |
Test Structure For Detection Of Gap In Conductive Layer Of Multilayer Gate Stack App 20120187400 - Mo; Renee T. ;   et al. | 2012-07-26 |
Inspection Tool And Methodology For Three Dimensional Voltage Contrast Inspection App 20120062269 - Patterson; Oliver D. | 2012-03-15 |
In-line voltage contrast detection of PFET silicide encroachment Grant 8,039,837 - Patterson , et al. October 18, 2 | 2011-10-18 |
Varying capacitance voltage contrast structures to determine defect resistance Grant 7,927,895 - Lavoie , et al. April 19, 2 | 2011-04-19 |
Varying Capacitance Voltage Contrast Structures To Determine Defect Resistance App 20110080180 - Lavoie; Christian ;   et al. | 2011-04-07 |
Probe-able Voltage Contrast Test Structures App 20110037493 - Cote; William J. ;   et al. | 2011-02-17 |
Body Contact Structure For In-line Voltage Contrast Detection Of Pfet Silicide Encroachment App 20100301331 - Patterson; Oliver D. ;   et al. | 2010-12-02 |
Structure and method of mapping signal intensity to surface voltage for integrated circuit inspection Grant 7,772,866 - Patterson , et al. August 10, 2 | 2010-08-10 |
Grounding front-end-of-line structures on a SOI substrate Grant 7,732,866 - Cote , et al. June 8, 2 | 2010-06-08 |
Test structure for resistive open detection using voltage contrast inspection and related methods Grant 7,733,109 - Ahsan , et al. June 8, 2 | 2010-06-08 |
Semiconductor integrated test structures for electron beam inspection of semiconductor wafers Grant 7,679,083 - Sun , et al. March 16, 2 | 2010-03-16 |
Grounding Front-end-of-line Structures On A Soi Substrate App 20090146211 - Cote; William J. ;   et al. | 2009-06-11 |
Test Structure And Method For Resistive Open Detection Using Voltage Contrast Inspection App 20090096461 - Ahsan; Ishtiaq ;   et al. | 2009-04-16 |
Grounding front-end-of-line structures on a SOI substrate Grant 7,518,190 - Cote , et al. April 14, 2 | 2009-04-14 |
Buried short location determination using voltage contrast inspection Grant 7,474,107 - Patterson , et al. January 6, 2 | 2009-01-06 |
Test structures and method of defect detection using voltage contrast inspection Grant 7,456,636 - Patterson , et al. November 25, 2 | 2008-11-25 |
Semiconductor Integrated Test Structures For Electron Beam Inspection of Semiconductor Wafers App 20080237586 - Sun; Min Chul ;   et al. | 2008-10-02 |
Method, Apparatus, And Computer Program Product For Optimizing Inspection Recipes Using Programmed Defects App 20080225284 - Patterson; Oliver D. ;   et al. | 2008-09-18 |
Structure And Method Of Mapping Signal Intensity To Surface Voltage For Integrated Circuit Inspection App 20080217612 - Patterson; Oliver D. ;   et al. | 2008-09-11 |
Method, apparatus, and computer program product for optimizing inspection recipes using programmed defects Grant 7,397,556 - Patterson , et al. July 8, 2 | 2008-07-08 |
Method, Apparatus, And Computer Program Product For Optimizing Inspection Recipes Using Programmed Defects App 20080100831 - Patterson; Oliver D. ;   et al. | 2008-05-01 |
Test Structures And Method Of Defect Detection Using Voltage Contrast Inspection App 20070229092 - Patterson; Oliver D. ;   et al. | 2007-10-04 |
Buried Short Location Determination Using Voltage Contrast Inspection App 20070222470 - Patterson; Oliver D. ;   et al. | 2007-09-27 |
Grounding Front-end-of-line Structures On A Soi Substrate App 20070221990 - Cote; William J. ;   et al. | 2007-09-27 |
Hierarchical control system for molecular beam epitaxy Grant 5,461,559 - Heyob , et al. October 24, 1 | 1995-10-24 |