| Patent | Date |
|---|
Frequency tuning for a matchless plasma source
Grant 11,437,219 - Long , et al. September 6, 2 | 2022-09-06 |
Control of on-wafer cd uniformity with movable edge ring and gas injection adjustment
Grant 11,424,103 - Zhang , et al. August 23, 2 | 2022-08-23 |
Rf Pulsing Within Pulsing For Semiconductor Rf Plasma Processing
App 20220254608 - Long; Maolin ; et al. | 2022-08-11 |
RF pulsing within pulsing for semiconductor RF plasma processing
Grant 11,342,159 - Long , et al. May 24, 2 | 2022-05-24 |
Matchless Plasma Source For Semiconductor Wafer Fabrication
App 20220117074 - Long; Maolin ; et al. | 2022-04-14 |
Matchless plasma source for semiconductor wafer fabrication
Grant 11,224,116 - Long , et al. January 11, 2 | 2022-01-11 |
Internal plasma grid for semiconductor fabrication
Grant 11,171,021 - Singh , et al. November 9, 2 | 2021-11-09 |
Systems And Methods For Achieving Peak Ion Energy Enhancement With A Low Angular Spread
App 20210313149 - Shoeb; Juline ; et al. | 2021-10-07 |
Integrated Atomic Layer Passivation In Tcp Etch Chamber And In-situ Etch-alp Method
App 20210287909 - Zhou; Xiang ; et al. | 2021-09-16 |
Systems for removing and replacing consumable parts from a semiconductor process module in situ
Grant 11,112,773 - Trussell , et al. September 7, 2 | 2021-09-07 |
Systems and methods for achieving peak ion energy enhancement with a low angular spread
Grant 11,049,693 - Shoeb , et al. June 29, 2 | 2021-06-29 |
Edge Ring Arrangement With Moveable Edge Rings
App 20210183687 - Yan; Haoquan ; et al. | 2021-06-17 |
Integrated atomic layer passivation in TCP etch chamber and in-situ etch-ALP method
Grant 10,950,454 - Zhou , et al. March 16, 2 | 2021-03-16 |
Rf Pulsing Within Pulsing For Semiconductor Rf Plasma Processing
App 20200335305 - Long; Maolin ; et al. | 2020-10-22 |
Air Cooled Faraday Shield and Methods for Using the Same
App 20200318852 - Sriraman; Saravanapriyan ; et al. | 2020-10-08 |
RF voltage sensor incorporating multiple voltage dividers for detecting RF voltages at a pickup device of a substrate support
Grant 10,784,083 - Long , et al. Sept | 2020-09-22 |
Frequency Tuning for a Matchless Plasma Source
App 20200286713 - Long; Maolin ; et al. | 2020-09-10 |
Automated replacement of consumable parts using interfacing chambers
Grant 10,770,339 - Genetti , et al. Sep | 2020-09-08 |
Multi-level pulsing of DC and RF signals
Grant 10,755,896 - Shoeb , et al. A | 2020-08-25 |
Matchless Plasma Source For Semiconductor Wafer Fabrication
App 20200253034 - Kind Code | 2020-08-06 |
Systems and methods for transformer coupled plasma pulsing with transformer coupled capacitive tuning switching
Grant 10,734,195 - Long , et al. | 2020-08-04 |
Radiofrequency (RF) filter for multi-frequency RF bias
Grant 10,715,095 - Long , et al. | 2020-07-14 |
Air cooled faraday shield and methods for using the same
Grant 10,690,374 - Sriraman , et al. | 2020-06-23 |
Systems and methods for applying frequency and match tuning in a non-overlapping manner for processing substrate
Grant 10,679,825 - Wu , et al. | 2020-06-09 |
Multi-level Parameter And Frequency Pulsing With A Low Angular Spread
App 20200176222 - Shoeb; Juline ; et al. | 2020-06-04 |
Frequency tuning for a matchless plasma source
Grant 10,672,590 - Long , et al. | 2020-06-02 |
Multi-level Pulsing Of Dc And Rf Signals
App 20200168438 - Shoeb; Juline ; et al. | 2020-05-28 |
Moveable edge coupling ring for edge process control during semiconductor wafer processing
Grant 10,658,222 - Yan , et al. | 2020-05-19 |
Cathode RF asymmetry detection probe for semiconductor RF plasma processing equipment
Grant 10,649,006 - Long , et al. | 2020-05-12 |
Matchless plasma source for semiconductor wafer fabrication
Grant 10,638,593 - Long , et al. | 2020-04-28 |
Temperature control in RF chamber with heater and air amplifier
Grant 10,600,620 - McChesney , et al. | 2020-03-24 |
Photoresist design layout pattern proximity correction through fast edge placement error prediction via a physics-based etch profile modeling framework
Grant 10,585,347 - Sriraman , et al. | 2020-03-10 |
Multi-level pulsing of DC and RF signals
Grant 10,580,618 - Shoeb , et al. | 2020-03-03 |
Multi-level parameter and frequency pulsing with a low angular spread
Grant 10,573,494 - Shoeb , et al. Feb | 2020-02-25 |
Control Of On-wafer Cd Uniformity With Movable Edge Ring And Gas Injection Adjustment
App 20190362940 - Zhang; Yiting ; et al. | 2019-11-28 |
Systems And Methods For Achieving Peak Ion Energy Enhancement With A Low Angular Spread
App 20190362942 - Shoeb; Juline ; et al. | 2019-11-28 |
Gas reaction trajectory control through tunable plasma dissociation for wafer by-product distribution and etch feature profile uniformity
Grant 10,460,951 - Sriraman , et al. Oc | 2019-10-29 |
Automated replacement of consumable parts using end effectors interfacing with plasma processing system
Grant 10,427,307 - Genetti , et al. October 1, 2 | 2019-10-01 |
Powered grid for plasma chamber
Grant 10,431,434 - Long , et al. O | 2019-10-01 |
Gas plenum arrangement for improving etch non-uniformity in transformer-coupled plasma systems
Grant 10,431,426 - Kamp , et al. O | 2019-10-01 |
Multi-level Parameter And Frequency Pulsing With A Low Angular Spread
App 20190295820 - Shoeb; Juline ; et al. | 2019-09-26 |
Multi-level Pulsing Of Dc And Rf Signals
App 20190295821 - Shoeb; Juline ; et al. | 2019-09-26 |
Controlling ion energy within a plasma chamber
Grant 10,424,461 - Lill , et al. Sept | 2019-09-24 |
Frequency Tuning for a Matchless Plasma Source
App 20190287764 - Long; Maolin ; et al. | 2019-09-19 |
Control of on-wafer CD uniformity with movable edge ring and gas injection adjustment
Grant 10,410,832 - Zhang , et al. Sept | 2019-09-10 |
Systems and methods for achieving peak ion energy enhancement with a low angular spread
Grant 10,395,894 - Shoeb , et al. A | 2019-08-27 |
Methods and apparatuses for etch profile matching by surface kinetic model optimization
Grant 10,386,828 - Tetiker , et al. A | 2019-08-20 |
Automated Replacement of Consumable Parts Using Interfacing Chambers
App 20190252234 - Genetti; Damon Tyrone ; et al. | 2019-08-15 |
Photoresist Design Layout Pattern Proximity Correction Through Fast Edge Placement Error Prediction Via A Physics-based Etch Pro
App 20190250501 - Sriraman; Saravanapriyan ; et al. | 2019-08-15 |
Gas distribution system for ceramic showerhead of plasma etch reactor
Grant 10,366,865 - Kang , et al. July 30, 2 | 2019-07-30 |
Matchless Plasma Source For Semiconductor Wafer Fabrication
App 20190215942 - Long; Maolin ; et al. | 2019-07-11 |
Plasma processing systems including side coils and methods related to the plasma processing systems
Grant 10,340,121 - Long , et al. | 2019-07-02 |
Systems and methods for reversing RF current polarity at one output of a multiple output RF matching network
Grant 10,332,725 - Sato , et al. | 2019-06-25 |
Methods and apparatuses for etch profile optimization by reflectance spectra matching and surface kinetic model optimization
Grant 10,303,830 - Tetiker , et al. | 2019-05-28 |
Multi-level pulsing of DC and RF signals
Grant 10,304,660 - Shoeb , et al. | 2019-05-28 |
Automated replacement of consumable parts using interfacing chambers
Grant 10,304,717 - Genetti , et al. | 2019-05-28 |
Systems and Methods for Applying Frequency and Match Tuning in a Non-Overlapping Manner for Processing Substrate
App 20190148114 - Wu; Ying ; et al. | 2019-05-16 |
Matchless Plasma Source for Semiconductor Wafer Fabrication
App 20190116656 - Long; Maolin ; et al. | 2019-04-18 |
Matchless plasma source for semiconductor wafer fabrication
Grant 10,264,663 - Long , et al. | 2019-04-16 |
Radiofrequency (RF) Filter for Multi-Frequency RF Bias
App 20190109576 - Long; Maolin ; et al. | 2019-04-11 |
Cathode Rf Asymmetry Detection Probe For Semiconductor Rf Plasma Processing Equipment
App 20190107558 - Long; Maolin ; et al. | 2019-04-11 |
Controlling Ion Energy Within A Plasma Chamber
App 20190103253 - Lill; Thorsten ; et al. | 2019-04-04 |
Rotating RF electric field antenna for uniform plasma generation
Grant 10,242,844 - McChesney , et al. | 2019-03-26 |
Near-substrate supplemental plasma density generation with low bias voltage within inductively coupled plasma processing chamber
Grant 10,242,845 - Tan , et al. | 2019-03-26 |
Multi-level parameter and frequency pulsing with a low angular spread
Grant 10,224,183 - Shoeb , et al. | 2019-03-05 |
Internal plasma grid for semiconductor fabrication
Grant 10,224,221 - Singh , et al. | 2019-03-05 |
Systems And Methods For Achieving Peak Ion Energy Enhancement With A Low Angular Spread
App 20190066979 - Shoeb; Juline ; et al. | 2019-02-28 |
Rf Voltage Sensor Incorporating Multiple Voltage Dividers For Detecting Rf Voltages At A Pickup Device Of A Substrate Support
App 20190051497 - Long; Maolin ; et al. | 2019-02-14 |
Methods And Apparatuses For Etch Profile Optimization By Reflectance Spectra Matching And Surface Kinetic Model Optimization
App 20190049937 - Tetiker; Mehmet Derya ; et al. | 2019-02-14 |
Integrated Atomic Layer Passivation In Tcp Etch Chamber And In-situ Etch-alp Method
App 20190043728 - Zhou; Xiang ; et al. | 2019-02-07 |
Photoresist design layout pattern proximity correction through fast edge placement error prediction via a physics-based etch profile modeling framework
Grant 10,197,908 - Sriraman , et al. Fe | 2019-02-05 |
Moveable Edge Ring Design
App 20190013232 - YAN; Haoquan ; et al. | 2019-01-10 |
Systems And Methods For Transformer Coupled Plasma Pulsing With Transformer Coupled Capacitive Tuning Switching
App 20180358205 - Long; Maolin ; et al. | 2018-12-13 |
Hollow RF feed with coaxial DC power feed
Grant 10,153,136 - Augustino , et al. Dec | 2018-12-11 |
Controlling ion energy within a plasma chamber
Grant 10,141,163 - Lill , et al. Nov | 2018-11-27 |
Automated replacement of consumable parts using end effectors interfacing with plasma processing system
Grant 10,124,492 - Genetti , et al. November 13, 2 | 2018-11-13 |
Large dynamic range RF voltage sensor and method for voltage mode RF bias application of plasma processing systems
Grant 10,121,641 - Long , et al. November 6, 2 | 2018-11-06 |
Methods And Apparatuses For Etch Profile Optimization By Reflectance Spectra Matching And Surface Kinetic Model Optimization
App 20180260509 - Tetiker; Mehmet Derya ; et al. | 2018-09-13 |
Automated replacement of consumable parts using interfacing chambers
Grant 10,062,599 - Genetti , et al. August 28, 2 | 2018-08-28 |
Front opening ring pod
Grant 10,062,589 - Wong , et al. August 28, 2 | 2018-08-28 |
Front opening ring pod
Grant 10,062,590 - Wong , et al. August 28, 2 | 2018-08-28 |
Gas Reaction Trajectory Control Through Tunable Plasma Dissociation For Wafer By-product Distribution And Etch Feature Profile Uniformity
App 20180240677 - Sriraman; Saravanapriyan ; et al. | 2018-08-23 |
TCCT match circuit for plasma etch chambers
Grant 10,056,231 - Long , et al. August 21, 2 | 2018-08-21 |
Powered Grid for Plasma Chamber
App 20180226233 - Long; Maolin ; et al. | 2018-08-09 |
Near-Substrate Supplemental Plasma Density Generation with Low Bias Voltage within Inductively Coupled Plasma Processing Chamber
App 20180204708 - Tan; Zhongkui ; et al. | 2018-07-19 |
Methods and apparatuses for etch profile optimization by reflectance spectra matching and surface kinetic model optimization
Grant 9,996,647 - Tetiker , et al. June 12, 2 | 2018-06-12 |
Air Cooled Faraday Shield and Methods for Using the Same
App 20180156489 - Sriraman; Saravanapriyan ; et al. | 2018-06-07 |
Systems for cooling RF heated chamber components
Grant 9,978,565 - McChesney , et al. May 22, 2 | 2018-05-22 |
Gas reaction trajectory control through tunable plasma dissociation for wafer by-product distribution and etch feature profile uniformity
Grant 9,966,270 - Sriraman , et al. May 8, 2 | 2018-05-08 |
Powered grid for plasma chamber
Grant 9,966,236 - Long , et al. May 8, 2 | 2018-05-08 |
Gas distribution showerhead for inductively coupled plasma etch reactor
Grant 9,934,979 - Kang , et al. April 3, 2 | 2018-04-03 |
Front Opening Ring Pod
App 20180068879 - Wong; Scott ; et al. | 2018-03-08 |
Control Of On-wafer Cd Uniformity With Movable Edge Ring And Gas Injection Adjustment
App 20180053629 - Zhang; Yiting ; et al. | 2018-02-22 |
Front Opening Ring Pod
App 20180040492 - Wong; Scott ; et al. | 2018-02-08 |
Air cooled faraday shield and methods for using the same
Grant 9,885,493 - Sriraman , et al. February 6, 2 | 2018-02-06 |
Systems for Removing and Replacing Consumable Parts from a Semiconductor Process Module in Situ
App 20180032062 - Trussell; David D. ; et al. | 2018-02-01 |
Front opening ring pod
Grant 9,881,820 - Wong , et al. January 30, 2 | 2018-01-30 |
Front Opening Ring Pod
App 20180019142 - Wong; Scott ; et al. | 2018-01-18 |
Methods And Apparatuses For Etch Profile Optimization By Reflectance Spectra Matching And Surface Kinetic Model Optimization
App 20170371991 - Tetiker; Mehmet Derya ; et al. | 2017-12-28 |
Systems and Methods for Reverse Pulsing
App 20170372912 - Long; Maolin ; et al. | 2017-12-28 |
Photoresist Design Layout Pattern Proximity Correction Through Fast Edge Placement Error Prediction Via A Physics-based Etch Profile Modeling Framework
App 20170363950 - Sriraman; Saravanapriyan ; et al. | 2017-12-21 |
Automated Replacement of Consumable Parts Using End Effectors Interfacing with Plasma Processing System
App 20170334074 - Genetti; Damon Tyrone ; et al. | 2017-11-23 |
Automated Replacement of Consumable Parts Using Interfacing Chambers
App 20170330786 - Genetti; Damon Tyrone ; et al. | 2017-11-16 |
Electrostatic chuck with thermal choke
Grant 9,805,963 - Long , et al. October 31, 2 | 2017-10-31 |
Methods and apparatuses for etch profile optimization by reflectance spectra matching and surface kinetic model optimization
Grant 9,792,393 - Tetiker , et al. October 17, 2 | 2017-10-17 |
Systems and methods for reverse pulsing
Grant 9,761,459 - Long , et al. September 12, 2 | 2017-09-12 |
Methods And Apparatuses For Etch Profile Optimization By Reflectance Spectra Matching And Surface Kinetic Model Optimization
App 20170228482 - Tetiker; Mehmet Derya ; et al. | 2017-08-10 |
Methods And Apparatuses For Etch Profile Matching By Surface Kinetic Model Optimization
App 20170176983 - Tetiker; Mehmet Derya ; et al. | 2017-06-22 |
Chamber filler kit for plasma etch chamber useful for fast gas switching
Grant 9,679,751 - McChesney , et al. June 13, 2 | 2017-06-13 |
Systems for Removing and Replacing Consumable Parts from a Semiconductor Process Module in Situ
App 20170115657 - Trussell; David D. ; et al. | 2017-04-27 |
Automated Replacement of Consumable Parts Using End Effectors Interfacing with Plasma Processing System
App 20170113355 - Genetti; Damon Tyrone ; et al. | 2017-04-27 |
Automated Replacement of Consumable Parts Using Interfacing Chambers
App 20170117172 - Genetti; Damon Tyrone ; et al. | 2017-04-27 |
Front Opening Ring Pod
App 20170117170 - Wong; Scott ; et al. | 2017-04-27 |
Internal plasma grid applications for semiconductor fabrication
Grant 9,633,846 - Paterson , et al. April 25, 2 | 2017-04-25 |
Temperature Control in RF Chamber with Heater and Air Amplifier
App 20170103875 - McChesney; Jon ; et al. | 2017-04-13 |
Electrostatic Chuck With Thermal Choke
App 20170098566 - Long; Maolin ; et al. | 2017-04-06 |
Systems and methods for reverse pulsing
Grant 9,583,357 - Long , et al. February 28, 2 | 2017-02-28 |
Systems And Methods For Reverse Pulsing
App 20170040174 - Long; Maolin ; et al. | 2017-02-09 |
Hollow Rf Feed With Coaxial Dc Power Feed
App 20170040148 - Augustino; Jason ; et al. | 2017-02-09 |
Systems And Methods For Reverse Pulsing
App 20170040176 - Long; Maolin ; et al. | 2017-02-09 |
Gas Plenum Arrangement For Improving Etch Non-uniformity In Transformer-coupled Plasma Systems
App 20170032931 - KAMP; Tom ; et al. | 2017-02-02 |
Controlling Ion Energy Within A Plasma Chamber
App 20160379804 - Lill; Thorsten ; et al. | 2016-12-29 |
Temperature control in RF chamber with heater and air amplifier
Grant 9,530,656 - McChesney , et al. December 27, 2 | 2016-12-27 |
Large Dynamic Range Rf Voltage Sensor And Method For Voltage Mode Rf Bias Application Of Plasma Processing Systems
App 20160358755 - Long; Maolin ; et al. | 2016-12-08 |
Transformer coupled capacitive tuning circuit with fast impedance switching for plasma etch chambers
Grant 9,515,633 - Long , et al. December 6, 2 | 2016-12-06 |
Internal Faraday shield having distributed chevron patterns and correlated positioning relative to external inner and outer TCP coil
Grant 9,490,106 - Drewery , et al. November 8, 2 | 2016-11-08 |
Systems and methods for improving wafer etch non-uniformity when using transformer-coupled plasma
Grant 9,484,214 - Kamp , et al. November 1, 2 | 2016-11-01 |
Gas Reaction Trajectory Control Through Tunable Plasma Dissociation For Wafer By-product Distribution And Etch Feature Profile Uniformity
App 20160293431 - Sriraman; Saravanapriyan ; et al. | 2016-10-06 |
Systems And Methods For Reversing Rf Current Polarity At One Output Of A Multpile Output Rf Matching Network
App 20160293382 - Sato; Arthur H. ; et al. | 2016-10-06 |
Controlling ion energy within a plasma chamber
Grant 9,460,894 - Lill , et al. October 4, 2 | 2016-10-04 |
Plasma Processing Systems Including Side Coils And Methods Related To The Plasma Processing Systems
App 20160225584 - LONG; Maolin ; et al. | 2016-08-04 |
Gas Distribution System For Ceramic Showerhead of Plasma Etch Reactor
App 20160217977 - Kang; Michael ; et al. | 2016-07-28 |
Moveable Edge Coupling Ring For Edge Process Control During Semiconductor Wafer Processing
App 20160211166 - Yan; Haoquan ; et al. | 2016-07-21 |
Ion Beam Etching System
App 20160211156 - Singh; Harmeet ; et al. | 2016-07-21 |
Moveable Edge Coupling Ring For Edge Process Control During Semiconductor Wafer Processing
App 20160211165 - McChesney; Jon ; et al. | 2016-07-21 |
Internal Plasma Grid For Semiconductor Fabrication
App 20160203990 - Singh; Harmeet ; et al. | 2016-07-14 |
Hammerhead TCP coil support for high RF power conductor etch systems
Grant 9,384,948 - Long , et al. July 5, 2 | 2016-07-05 |
Internal Plasma Grid For Semiconductor Fabrication
App 20160181130 - Singh; Harmeet ; et al. | 2016-06-23 |
Faraday Shield Having Plasma Density Decoupling Structure Between TCP Coil Zones
App 20160163569 - Long; Maolin ; et al. | 2016-06-09 |
Internal Plasma Grid For Semiconductor Fabrication
App 20160141188 - Singh; Harmeet ; et al. | 2016-05-19 |
Plasma processing systems including side coils and methods related to the plasma processing systems
Grant 9,336,996 - Long , et al. May 10, 2 | 2016-05-10 |
Rotating RF Electric Field Antenna For Uniform Plasma Generation
App 20160093471 - McChesney; Jon ; et al. | 2016-03-31 |
Internal Plasma Grid Applications For Semiconductor Fabrication
App 20160086795 - Paterson; Alex ; et al. | 2016-03-24 |
Ion beam etching system
Grant 9,257,295 - Singh , et al. February 9, 2 | 2016-02-09 |
Internal plasma grid for semiconductor fabrication
Grant 9,245,761 - Singh , et al. January 26, 2 | 2016-01-26 |
Gas distribution system for ceramic showerhead of plasma etch reactor
Grant 9,245,717 - Kang , et al. January 26, 2 | 2016-01-26 |
Internal plasma grid applications for semiconductor fabrication in context of ion-ion plasma processing
Grant 9,230,819 - Paterson , et al. January 5, 2 | 2016-01-05 |
Gas Distribution Showerhead For Inductively Coupled Plasma Etch Reactor
App 20150318147 - KANG; Michael ; et al. | 2015-11-05 |
Tcct Match Circuit For Plasma Etch Chambers
App 20150235810 - Long; Maolin ; et al. | 2015-08-20 |
Systems And Methods For Improving Wafer Etch Non-uniformity When Using Transformer-coupled Plasma
App 20150235808 - Kamp; Tom ; et al. | 2015-08-20 |
Gas distribution showerhead for inductively coupled plasma etch reactor
Grant 9,099,398 - Kang , et al. August 4, 2 | 2015-08-04 |
Ion Beam Etching System
App 20150179465 - Singh; Harmeet ; et al. | 2015-06-25 |
TCCT match circuit for plasma etch chambers
Grant 9,059,678 - Long , et al. June 16, 2 | 2015-06-16 |
Ion beam etching system
Grant 9,017,526 - Singh , et al. April 28, 2 | 2015-04-28 |
Air Cooled Faraday Shield and Methods for Using the Same
App 20150020969 - Sriraman; Saravanapriyan ; et al. | 2015-01-22 |
Ion Beam Etching System
App 20150011093 - Singh; Harmeet ; et al. | 2015-01-08 |
Controlling Ion Energy Within A Plasma Chamber
App 20150002018 - Lill; Thorsten ; et al. | 2015-01-01 |
Hammerhead TCP Coil Support for High RF Power Conductor Etch Systems
App 20140367045 - Long; Maolin ; et al. | 2014-12-18 |
Internal Plasma Grid For Semiconductor Fabrication
App 20140302680 - Singh; Harmeet ; et al. | 2014-10-09 |
Internal Plasma Grid Applications For Semiconductor Fabrication
App 20140302678 - Paterson; Alex ; et al. | 2014-10-09 |
Internal Plasma Grid For Semiconductor Fabrication
App 20140302681 - Paterson; Alex ; et al. | 2014-10-09 |
Gas Distribution Showerhead For Inductively Coupled Plasma Etch Reactor
App 20140065827 - Kang; Michael ; et al. | 2014-03-06 |
Gas distribution showerhead for inductively coupled plasma etch reactor
Grant 8,562,785 - Kang , et al. October 22, 2 | 2013-10-22 |
Methods And Apparatuses For Controlling Plasma In A Plasma Processing Chamber
App 20130256271 - Panagopoulos; Theodoros ; et al. | 2013-10-03 |
Chamber Filler Kit For Plasma Etch Chamber Useful For Fast Gas Switching
App 20130244440 - McChesney; Jon ; et al. | 2013-09-19 |
Temperature Control in RF Chamber with Heater and Air Amplifier
App 20130228283 - McChesney; Jon ; et al. | 2013-09-05 |
Faraday Shield Having Plasma Density Decoupling Structure Between TCP Coil Zones
App 20130186568 - Long; Maolin ; et al. | 2013-07-25 |
Tcct Match Circuit For Plasma Etch Chambers
App 20130135058 - Long; Maolin ; et al. | 2013-05-30 |
Systems For Cooling RF Heated Chamber Components
App 20130087283 - McChesney; Jon ; et al. | 2013-04-11 |
Powered Grid For Plasma Chamber
App 20120322270 - Long; Maolin ; et al. | 2012-12-20 |
Gas Distribution Showerhead For Inductively Coupled Plasma Etch Reactor
App 20120309204 - Kang; Michael ; et al. | 2012-12-06 |
Gas Distribution System For Ceramic Showerhead Of Plasma Etch Reactor
App 20120305190 - Kang; Michael ; et al. | 2012-12-06 |
Internal Faraday Shield Having Distributed Chevron Patterns and Correlated Positioning Relative to External Inner and Outer TCP Coil
App 20120273130 - Drewery; John ; et al. | 2012-11-01 |
Plasma Processing Systems Including Side Coils And Methods Related To The Plasma Processing Systems
App 20120217222 - Long; Maolin ; et al. | 2012-08-30 |
Integrated circuit memory cells and methods of forming
Grant 7,605,034 - Paterson October 20, 2 | 2009-10-20 |
Methods of forming memory cells
Grant 7,473,596 - Paterson January 6, 2 | 2009-01-06 |
Integrated circuit memory cells and methods of forming
Grant 7,453,112 - Paterson November 18, 2 | 2008-11-18 |
Plasma generation and control using a dual frequency RF source
Grant 7,431,857 - Shannon , et al. October 7, 2 | 2008-10-07 |
Plasma Generation And Control Using A Dual Frequency Rf Source
App 20070006971 - Shannon; Steven C. ; et al. | 2007-01-11 |
Integrated circuit memory cells and methods of forming
App 20060258083 - Paterson; Alex | 2006-11-16 |
Methods Of Forming Memory Cells
App 20050133844 - Paterson, Alex | 2005-06-23 |
Integrated circuit memory cells and methods of forming
App 20050133845 - Paterson, Alex | 2005-06-23 |
Plasma generation and control using a dual frequency RF source
App 20050034816 - Shannon, Steven C. ; et al. | 2005-02-17 |
Method and apparatus to monitor electrical states at a workpiece in a semiconductor processing chamber
Grant 6,727,655 - McChesney , et al. April 27, 2 | 2004-04-27 |
Method and apparatus to monitor electrical states at a workpiece in a semiconductor processing chamber
App 20030082835 - McChesney, Jon ; et al. | 2003-05-01 |
Method For Providing Pulsed Plasma During A Portion Of A Semiconductor Wafer Process
App 20020052111 - PATERSON, ALEX ; et al. | 2002-05-02 |
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