Patent | Date |
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ADHESION LAYER AND MULTIPHASE ULTRA-LOW k DIELECTRIC MATERIAL App 20140203336 - GRILL; ALFRED ;   et al. | 2014-07-24 |
Process to form an adhesion layer and multiphase ultra-low k dielectric material using PECVD Grant 8,637,412 - Grill , et al. January 28, 2 | 2014-01-28 |
Hydrogenated oxidized silicon carbon material Grant 6,953,984 - Grill , et al. October 11, 2 | 2005-10-11 |
Hydrogenated oxidized silicon carbon material App 20040195659 - Grill, Alfred ;   et al. | 2004-10-07 |
Stabilization of fluorine-containing low-k dielectrics in a metal/insulator wiring structure by ultraviolet irradiation Grant 6,759,321 - Babich , et al. July 6, 2 | 2004-07-06 |
Hydrogenated oxidized silicon carbon material Grant 6,724,086 - Grill , et al. April 20, 2 | 2004-04-20 |
Tunable vapor deposited materials as antireflective coatings, hardmasks and as combined antireflective coating/hardmasks and methods of fabrication thereof and applications thereof Grant 6,514,667 - Angelopoulos , et al. February 4, 2 | 2003-02-04 |
Hydrogenated oxidized silicon carbon material Grant 6,497,963 - Grill , et al. December 24, 2 | 2002-12-24 |
Stabilization of fluorine-containing low-k dielectrics in a metal/insulator wiring structure by ultraviolet irradiation App 20020185741 - Babich, Katherina ;   et al. | 2002-12-12 |
Multiphase low dielectric constant material and method of deposition Grant 6,479,110 - Grill , et al. November 12, 2 | 2002-11-12 |
Dual damascene processing for semiconductor chip interconnects Grant 6,448,176 - Grill , et al. September 10, 2 | 2002-09-10 |
Multiphase low dielectric constant material and method of deposition Grant 6,437,443 - Grill , et al. August 20, 2 | 2002-08-20 |
Tunable and removable plasma deposited antireflective coatings Grant 6,428,894 - Babich , et al. August 6, 2 | 2002-08-06 |
Multiphase low dielectric constant material and method of deposition App 20020037442 - Grill, Alfred ;   et al. | 2002-03-28 |
Multiphase low dielectric constant material and method of deposition App 20020034625 - Grill, Alfred ;   et al. | 2002-03-21 |
Stabilization Of Fluorine-containing Low-k Dielectrics In A Metal/insulator Wiring Structure By Ultraviolet Irradiation App 20020033535 - BABICH, KATHERINA ;   et al. | 2002-03-21 |
Method for fabricating a thermally stable diamond-like carbon film as an intralevel or interlevel dielectric in a semiconductor device and device made Grant 6,346,747 - Grill , et al. February 12, 2 | 2002-02-12 |
Tunable vapor deposited materials as antireflective coatings, hardmasks and as combined antireflective coating/hardmasks and methods of fabrication thereof and applications thereof App 20020012876 - Angelopoulos, Marie ;   et al. | 2002-01-31 |
Tunabale vapor deposited materials as antireflective coatings, hardmasks and as combined antireflective coating/hardmasks and methods of fabrication thereof and application thereof Grant 6,316,167 - Angelopoulos , et al. November 13, 2 | 2001-11-13 |
Multiphase low dielectric constant material Grant 6,312,793 - Grill , et al. November 6, 2 | 2001-11-06 |
Method and materials for integration of fluorine-containing low-k dielectrics App 20010022398 - Grill, Alfred ;   et al. | 2001-09-20 |
Method and material for integration of fuorine-containing low-k dielectrics Grant 6,265,779 - Grill , et al. July 24, 2 | 2001-07-24 |
Hydrogenated oxidized silicon carbon material Grant 6,147,009 - Grill , et al. November 14, 2 | 2000-11-14 |
Dual damascene processing for semiconductor chip interconnects Grant 6,140,226 - Grill , et al. October 31, 2 | 2000-10-31 |
Suspension bent by stressed patch Grant 6,049,443 - Grill , et al. April 11, 2 | 2000-04-11 |
Stabilization of low-k carbon-based dielectrics Grant 6,030,904 - Grill , et al. February 29, 2 | 2000-02-29 |
Method for fabricating a thermally stable diamond-like carbon film Grant 5,981,000 - Grill , et al. November 9, 1 | 1999-11-09 |
Low dielectric constant amorphous fluorinated carbon and method of preparation Grant 5,945,155 - Grill , et al. August 31, 1 | 1999-08-31 |
Low dielectric constant amorphous fluorinated carbon and method of preparation Grant 5,942,769 - Grill , et al. August 24, 1 | 1999-08-24 |
Plating of noble metal electrodes for DRAM and FRAM Grant 5,789,320 - Andricacos , et al. August 4, 1 | 1998-08-04 |
Diamond-like carbon for use in VLSI and ULSI interconnect systems Grant 5,679,269 - Cohen , et al. October 21, 1 | 1997-10-21 |
Prebent ceramic suspension Grant 5,663,854 - Grill , et al. September 2, 1 | 1997-09-02 |