Patent | Date |
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Substrate Drying Apparatus And Semiconductor Device Manufacturing Method Using Same App 20220189765 - JEONG; JI HOON ;   et al. | 2022-06-16 |
Substrate Processing Apparatus And Apparatus For Manufacturing Integrated Circuit Device App 20210217635 - Kim; Young-hoo ;   et al. | 2021-07-15 |
Substrate processing apparatus and apparatus for manufacturing integrated circuit device Grant 10,985,036 - Kim , et al. April 20, 2 | 2021-04-20 |
Process chamber for a supercritical process and apparatus for treating substrates having the same Grant 10,818,522 - Park , et al. October 27, 2 | 2020-10-27 |
Semiconductor device and method for fabricating the same Grant 10,734,380 - Jeong , et al. | 2020-08-04 |
Substrate Processing Apparatus App 20200194284 - Park; Sang-jine ;   et al. | 2020-06-18 |
Semiconductor devices including a dummy gate structure on a fin Grant 10,446,561 - Park , et al. Oc | 2019-10-15 |
Integrated circuit device Grant 10,438,891 - Park , et al. O | 2019-10-08 |
Methods of fabricating semiconductor devices including support patterns Grant 10,438,799 - Park , et al. O | 2019-10-08 |
Chemical supplier, processing apparatus including the chemical supplier Grant 10,297,474 - Park , et al. | 2019-05-21 |
Process Chamber For A Supercritical Process And Apparatus For Treating Substrates Having The Same App 20190096712 - PARK; Sang-Jine ;   et al. | 2019-03-28 |
Semiconductor Device And Method For Fabricating The Same App 20190043860 - Jeong; Ji-Min ;   et al. | 2019-02-07 |
Methods of forming semiconductor devices including trench walls having multiple slopes Grant 10,192,973 - Park , et al. Ja | 2019-01-29 |
Semiconductor Devices Including A Dummy Gate Structure On A Fin App 20180374859 - Park; Sang-Jine ;   et al. | 2018-12-27 |
Substrate Processing Apparatus and Apparatus for Manufacturing Integrated Circuit Device App 20180358242 - Kim; Young-hoo ;   et al. | 2018-12-13 |
Semiconductor devices including an isolation layer on a fin and methods of forming semiconductor devices including an isolation layer on a fin Grant 10,128,246 - Park , et al. November 13, 2 | 2018-11-13 |
Semiconductor device and method for fabricating the same Grant 10,128,236 - Jeong , et al. November 13, 2 | 2018-11-13 |
Semiconductor devices including a dummy gate structure on a fin Grant 10,096,605 - Park , et al. October 9, 2 | 2018-10-09 |
Integrated Circuit Device App 20180254246 - PARK; Sang-jine ;   et al. | 2018-09-06 |
Semiconductor Devices Including Varied Depth Recesses For Contacts App 20180197861 - Park; Sang Jine ;   et al. | 2018-07-12 |
Semiconductor devices utilizing spacer structures Grant 9,985,106 - Park , et al. May 29, 2 | 2018-05-29 |
Semiconductor devices including a dummy gate structure on a fin Grant 9,947,672 - Park , et al. April 17, 2 | 2018-04-17 |
Semiconductor Devices Utilizing Spacer Structures App 20180040707 - Park; Sang Jine ;   et al. | 2018-02-08 |
Methods of Fabricating Semiconductor Devices Including Support Patterns App 20180040483 - Park; Sang Jine ;   et al. | 2018-02-08 |
Semiconductor Devices Including A Dummy Gate Structure On A Fin App 20170345825 - Park; Sang-Jine ;   et al. | 2017-11-30 |
Semiconductor Devices Including An Isolation Layer On A Fin And Methods Of Forming Semiconductor Devices Including An Isolation Layer On A Fin App 20170271336 - Park; Sang-Jine ;   et al. | 2017-09-21 |
Semiconductor devices including insulating gates and methods for fabricating the same Grant 9,755,079 - Park , et al. September 5, 2 | 2017-09-05 |
Semiconductor devices including a contact structure and methods of manufacturing the same Grant 9,754,880 - Baek , et al. September 5, 2 | 2017-09-05 |
Semiconductor devices including an isolation layer on a fin and methods of forming semiconductor devices including an isolation layer on a fin Grant 9,704,864 - Park , et al. July 11, 2 | 2017-07-11 |
Methods of manufacturing semiconductor devices Grant 9,613,811 - Baek , et al. April 4, 2 | 2017-04-04 |
Semiconductor Devices Including A Dummy Gate Structure On A Fin App 20170084617 - Park; Sang-Jine ;   et al. | 2017-03-23 |
Semiconductor devices including a dummy gate structure on a fin Grant 9,548,309 - Park , et al. January 17, 2 | 2017-01-17 |
Methods Of Forming Semiconductor Devices Including Trench Walls Having Multiple Slopes App 20160359017 - PARK; Sang-Jine ;   et al. | 2016-12-08 |
Semiconductor Devices Including Varied Depth Recesses For Contacts App 20160351570 - Park; Sang Jine ;   et al. | 2016-12-01 |
Semiconductor Devices Including A Contact Structure And Methods Of Manufacturing The Same App 20160315045 - BAEK; Jae-Jik ;   et al. | 2016-10-27 |
Semiconductor devices and methods of manufacturing the same Grant 9,466,697 - Park , et al. October 11, 2 | 2016-10-11 |
Semiconductor Device And Methods For Fabricating The Same App 20160284699 - Jeong; Ji-Min ;   et al. | 2016-09-29 |
Semiconductor Devices Including Insulating Gates and Methods for Fabricating the Same App 20160268414 - PARK; Sang-Jine ;   et al. | 2016-09-15 |
Semiconductor devices including trench walls having multiple slopes Grant 9,443,979 - Park , et al. September 13, 2 | 2016-09-13 |
Semiconductor Devices Including A Dummy Gate Structure On A Fin App 20160163718 - Park; Sang-Jine ;   et al. | 2016-06-09 |
Semiconductor devices including a dummy gate structure on a fin Grant 9,299,700 - Park , et al. March 29, 2 | 2016-03-29 |
Semiconductor Devices Including An Isolation Layer On A Fin And Methods Of Forming Semiconductor Devices Including An Isolation Layer On A Fin App 20160043170 - Park; Sang-Jine ;   et al. | 2016-02-11 |
Semiconductor Devices Including A Dummy Gate Structure On A Fin App 20150325575 - Park; Sang-Jine ;   et al. | 2015-11-12 |
Semiconductor Devices And Methods Of Manufacturing The Same App 20150279991 - PARK; Sang-Jine ;   et al. | 2015-10-01 |
Semiconductor Devices Including Trench Walls Having Multiple Slopes App 20150187946 - PARK; Sang-Jine ;   et al. | 2015-07-02 |
Methods Of Manufacturing Semiconductor Devices App 20150162197 - BAEK; Jae-Jik ;   et al. | 2015-06-11 |
Method of fabricating semiconductor device Grant 9,054,210 - Park , et al. June 9, 2 | 2015-06-09 |
Semiconductor device and method of fabricating the same Grant 9,040,415 - Park , et al. May 26, 2 | 2015-05-26 |
Semiconductor Device And Method Of Fabricating The Same App 20150050793 - PARK; Sang-Jine ;   et al. | 2015-02-19 |
Semiconductor Devices And Methods Of Manufacturing The Same App 20140322881 - Park; Sang-Jine ;   et al. | 2014-10-30 |
Chemical Supplier, Processing Apparatus Including The Chemical Supplier App 20140231010 - PARK; Sang-Jine ;   et al. | 2014-08-21 |
Semiconductor devices and methods of manufacturing the same Grant 8,803,248 - Park , et al. August 12, 2 | 2014-08-12 |
Methods for fabricating semiconductor devices Grant 8,709,942 - Park , et al. April 29, 2 | 2014-04-29 |
Methods of fabricating semiconductor devices Grant 8,673,724 - Park , et al. March 18, 2 | 2014-03-18 |
Methods of fabricating semiconductor devices using preliminary trenches with epitaxial growth Grant 8,652,915 - Ahn , et al. February 18, 2 | 2014-02-18 |
Methods of Fabricating Semiconductor Devices App 20130115759 - Park; Sang-Jine ;   et al. | 2013-05-09 |
Methods for fabricating semiconductor devices Grant 8,404,580 - Park , et al. March 26, 2 | 2013-03-26 |
Method Of Fabricating Semiconductor Device App 20130023100 - PARK; Sang-Jine ;   et al. | 2013-01-24 |
Methods For Fabricating Semiconductor Devices App 20130023119 - Park; Sang-Jine ;   et al. | 2013-01-24 |
Methods For Fabricating Semiconductor Devices App 20120309189 - Park; Sang-Jine ;   et al. | 2012-12-06 |
Semiconductor Devices and Methods of Manufacturing the Same App 20120104514 - Park; Sang-Jine ;   et al. | 2012-05-03 |
Methods Of Fabricating Semiconductor Devices Using Preliminary Trenches With Epitaxial Growth App 20120058616 - Ahn; Kevin ;   et al. | 2012-03-08 |
Semiconductor Integrated Circuit Device Including an Epitaxial Layer App 20120049250 - Park; Sang-Jine ;   et al. | 2012-03-01 |
Field Effect Transistors Having Gate Electrode Silicide Layers with Reduced Surface Damage App 20110156110 - Kim; Jun-jung ;   et al. | 2011-06-30 |
Methods of forming field effect transistors having stress-inducing sidewall insulating spacers thereon Grant 7,923,365 - Kim , et al. April 12, 2 | 2011-04-12 |
Method of forming field effect transistors using diluted hydrofluoric acid to remove sacrificial nitride spacers Grant 7,902,082 - Park , et al. March 8, 2 | 2011-03-08 |
Cleaning Equipment and Cleaning Method App 20100139715 - Park; Sang-Jine ;   et al. | 2010-06-10 |
Methods of fabricating integrated circuit devices using anti-reflective coating as implant blocking layer Grant 7,585,763 - Park , et al. September 8, 2 | 2009-09-08 |
Methods of Forming Field Effect Transistors Having Stress-Inducing Sidewall Insulating Spacers Thereon and Devices Formed Thereby App 20090101979 - Kim; Jun-jung ;   et al. | 2009-04-23 |
Method of Forming Field Effect Transistors Using Diluted Hydrofluoric Acid to Remove Sacrificial Nitride Spacers App 20090081840 - Park; Sang-jine ;   et al. | 2009-03-26 |
Methods of fabricating integrated circuit devices using anti-reflective coating as implant blocking layer App 20070105293 - Park; Sang Jine ;   et al. | 2007-05-10 |
Photoresist stripping composition and methods of fabricating semiconductor device using the same App 20060163208 - Park; Kwang-Myeon ;   et al. | 2006-07-27 |