Patent | Date |
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Use of metal phosphorus in metallization of photovoltaic devices and method of fabricating same Grant 10,269,993 - Fisher , et al. | 2019-04-23 |
Processes for uniform metal semiconductor alloy formation for front side contact metallization and photovoltaic device formed therefrom Grant 10,170,644 - Fisher , et al. J | 2019-01-01 |
Wet clean process for removing C.sub.xH.sub.yF.sub.z etch residue Grant 10,167,443 - Bruce , et al. J | 2019-01-01 |
Semiconductor device with ballistic gate length structure Grant 9,786,852 - Franklin , et al. October 10, 2 | 2017-10-10 |
Processes For Uniform Metal Semiconductor Alloy Formation For Front Side Contact Metallization And Photovoltaic Device Formed Therefrom App 20170200838 - Fisher; Kathryn C. ;   et al. | 2017-07-13 |
Processes for uniform metal semiconductor alloy formation for front side contact metallization and photovoltaic device formed therefrom Grant 9,608,134 - Fisher , et al. March 28, 2 | 2017-03-28 |
WET CLEAN PROCESS FOR REMOVING CxHyFz ETCH RESIDUE App 20170044470 - Bruce; Robert L. ;   et al. | 2017-02-16 |
Wet clean process for removing C.sub.xH.sub.yF.sub.z etch residue Grant 9,536,731 - Bruce , et al. January 3, 2 | 2017-01-03 |
Use Of Metal Phosphorus In Metallization Of Photovoltaic Devices And Method Of Fabricating Same App 20160197208 - Fisher; Kathryn C. ;   et al. | 2016-07-07 |
Semiconductor Device With Ballistic Gate Length Structure App 20160087232 - Franklin; Aaron D. ;   et al. | 2016-03-24 |
Use of metal phosphorus in metallization of photovoltaic devices and method of fabricating same Grant 9,284,656 - Fisher , et al. March 15, 2 | 2016-03-15 |
Photovoltaic device with aluminum plated back surface field and method of forming same Grant 9,246,024 - Fisher , et al. January 26, 2 | 2016-01-26 |
Semiconductor device with ballistic gate length structure Grant 9,246,112 - Franklin , et al. January 26, 2 | 2016-01-26 |
Nanogap device with capped nanowire structures Grant 9,188,578 - Astier , et al. November 17, 2 | 2015-11-17 |
Manufacturable sub-3 nanometer palladium gap devices for fixed electrode tunneling recognition Grant 9,182,369 - Astier , et al. November 10, 2 | 2015-11-10 |
Manufacturable sub-3 nanometer palladium gap devices for fixed electrode tunneling recognition Grant 9,128,078 - Astier , et al. September 8, 2 | 2015-09-08 |
Nanogap device with capped nanowire structures Grant 9,097,698 - Astier , et al. August 4, 2 | 2015-08-04 |
Semiconductor Device With Ballistic Gate Length Structure App 20150194619 - Franklin; Aaron D. ;   et al. | 2015-07-09 |
Manufacturable Sub-3 Nanometer Palladium Gap Devices For Fixed Electrode Tunneling Recognition App 20150153320 - Astier; Yann ;   et al. | 2015-06-04 |
Manufacturable Sub-3 Nanometer Palladium Gap Devices For Fixed Electrode Tunneling Recognition App 20150144887 - Astier; Yann ;   et al. | 2015-05-28 |
Manufacturable Sub-3 Nanometer Palladium Gap Devices For Fixed Electrode Tunneling Recognition App 20150144888 - Astier; Yann ;   et al. | 2015-05-28 |
Manufacturable Sub-3 Nanometer Palladium Gap Devices For Fixed Electrode Tunneling Recognition App 20150140716 - Astier; Yann ;   et al. | 2015-05-21 |
Processes For Uniform Metal Semiconductor Alloy Formation For Front Side Contact Metallization And Photovoltaic Device Formed Therefrom App 20150136228 - Fisher; Kathryn C. ;   et al. | 2015-05-21 |
Nanogap Device With Capped Nanowire Structures App 20150137069 - Astier; Yann A.N. ;   et al. | 2015-05-21 |
WET CLEAN PROCESS FOR REMOVING CxHyFz ETCH RESIDUE App 20150118839 - Bruce; Robert L. ;   et al. | 2015-04-30 |
Nanogap in-between noble metals Grant 9,012,329 - Astier , et al. April 21, 2 | 2015-04-21 |
Nanopore sensor device Grant 9,013,010 - Chang , et al. April 21, 2 | 2015-04-21 |
Processes for uniform metal semiconductor alloy formation for front side contact metallization and photovoltaic device formed therefrom Grant 8,969,122 - Fisher , et al. March 3, 2 | 2015-03-03 |
Integration of a titania layer in an anti-reflective coating Grant 8,962,374 - Papa Rao , et al. February 24, 2 | 2015-02-24 |
Integration of a titania layer in an anti-reflective coating Grant 8,946,844 - Papa Rao , et al. February 3, 2 | 2015-02-03 |
Nanogap Device With Capped Nanowire Structures App 20140374695 - Astier; Yann A. N. ;   et al. | 2014-12-25 |
Manufacturable Sub-3 Nanometer Palladium Gap Devices For Fixed Electrode Tunneling Recognition App 20140374694 - Astier; Yann ;   et al. | 2014-12-25 |
Manufacturable Sub-3 Nanometer Palladium Gap Devices For Fixed Electrode Tunneling Recognition App 20140377900 - Astier; Yann ;   et al. | 2014-12-25 |
Nanopore sensor device Grant 8,900,975 - Chang , et al. December 2, 2 | 2014-12-02 |
Solar cells with plated back side surface field and back side electrical contact and method of fabricating same Grant 8,865,502 - Fisher , et al. October 21, 2 | 2014-10-21 |
Silicon surface texturing method for reducing surface reflectance Grant 8,865,017 - Krishnan , et al. October 21, 2 | 2014-10-21 |
Nanogap in-between noble metals App 20140302675 - Astier; Yann ;   et al. | 2014-10-09 |
Nanopore Sensor Device App 20140183668 - Chang; Josephine B. ;   et al. | 2014-07-03 |
Nanopore Sensor Device App 20140183667 - Chang; Josephine B. ;   et al. | 2014-07-03 |
Silicon Surface Texturing Method For Reducing Surface Reflectance App 20140051201 - Krishnan; Mahadevaiyer ;   et al. | 2014-02-20 |
Silicon Surface Texturing Method For Reducing Surface Reflectance App 20140042360 - Krishnan; Mahadevaiyer ;   et al. | 2014-02-13 |
Silicon surface texturing method for reducing surface reflectance Grant 8,637,405 - Krishnan , et al. January 28, 2 | 2014-01-28 |
Integration Of A Titania Layer In An Anti-reflective Coating App 20140000691 - PAPA RAO; Satyavolu S. ;   et al. | 2014-01-02 |
Integration Of A Titania Layer In An Anti-reflective Coating App 20140000693 - Papa Rao; Satyavolu S. ;   et al. | 2014-01-02 |
Single-crystalline silicon alkaline texturing with glycerol or ethylene glycol additives Grant 8,440,494 - Fisher , et al. May 14, 2 | 2013-05-14 |
Photovoltaic Device With Aluminum Plated Back Surface Field And Method Of Forming Same App 20130014812 - Fisher; Kathryn C. ;   et al. | 2013-01-17 |
Solar Cells With Plated Back Side Surface Field And Back Side Electrical Contact And Method Of Fabricating Same App 20120325312 - Fisher; Kathryn C. ;   et al. | 2012-12-27 |
Silicon Surface Texturing Method For Reducing Surface Reflectance App 20120329200 - Krishnan; Mahadevaiyer ;   et al. | 2012-12-27 |
Processes For Uniform Metal Semiconductor Alloy Formation For Front Side Contact Metallization And Photovoltaic Device Formed Therefrom App 20120318341 - Fisher; Kathryn C. ;   et al. | 2012-12-20 |
Use Of Metal Phosphorus In Metallization Of Photovoltaic Devices And Method Of Fabricating Same App 20120305066 - Fisher; Kathryn C. ;   et al. | 2012-12-06 |
Single-crystalline Silicon Alkaline Texturing With Glycerol Or Ethylene Glycol Additives App 20120295390 - Fisher; Kathryn C. ;   et al. | 2012-11-22 |
Solar Cells With Plated Back Side Surface Field And Back Side Electrical Contact And Method Of Fabricating Same App 20110303274 - Fisher; Kathryn C. ;   et al. | 2011-12-15 |
Method to improve inductance with a high-permeability slotted plate core in an integrated circuit Grant 7,969,274 - Brennan , et al. June 28, 2 | 2011-06-28 |
Systems and methods that selectively modify liner induced stress Grant 7,939,400 - Tsui , et al. May 10, 2 | 2011-05-10 |
Capacitor Integration At Top-metal Level With A Protective Cladding For Copper Surface Protection App 20100117195 - BURKE; Edmund ;   et al. | 2010-05-13 |
Capacitor integration at top-metal level with a protective cladding for copper surface protection Grant 7,674,682 - Burke , et al. March 9, 2 | 2010-03-09 |
Use of supercritical fluid for low effective dielectric constant metallization Grant 7,485,963 - Papa Rao , et al. February 3, 2 | 2009-02-03 |
Systems And Methods That Selectively Modify Liner Induced Stress App 20090017588 - Tsui; Ting Y. ;   et al. | 2009-01-15 |
Method To Improve Inductance With A High-permeability Slotted Plate Core In An Integrated Circuit App 20090002115 - Brennan; Kenneth D. ;   et al. | 2009-01-01 |
Systems and methods that selectively modify liner induced stress Grant 7,442,597 - Tsui , et al. October 28, 2 | 2008-10-28 |
Method to improve inductance with a high-permeability slotted plate core in an integrated circuit Grant 7,436,281 - Brennan , et al. October 14, 2 | 2008-10-14 |
Ferromagnetic capacitor Grant 7,397,107 - Brennan , et al. July 8, 2 | 2008-07-08 |
One Mask High Density Capacitor for Integrated Circuits App 20080020538 - Rost; Timothy A. ;   et al. | 2008-01-24 |
One mask high density capacitor for integrated circuits Grant 7,291,897 - Rost , et al. November 6, 2 | 2007-11-06 |
Metal insulator metal (MIM) capacitor fabrication with sidewall spacers and aluminum cap (ALCAP) top electrode Grant 7,250,334 - Crenshaw , et al. July 31, 2 | 2007-07-31 |
Use of Supercritical Fluid for Low Effective Dielectric Constant Metallization App 20070102821 - Papa Rao; Satyavolu S. ;   et al. | 2007-05-10 |
Use of supercritical fluid for low effective dielectric constant metallization Grant 7,179,747 - Papa Rao , et al. February 20, 2 | 2007-02-20 |
Fabrication of a ferromagnetic inductor core and capacitor electrode in a single photo mask step Grant 7,118,925 - Brennan , et al. October 10, 2 | 2006-10-10 |
Metal insulator metal (MIM) capacitor fabrication with sidewall barrier removal aspect Grant 7,115,467 - Ajmera , et al. October 3, 2 | 2006-10-03 |
Systems and methods that selectively modify liner induced stress App 20060172481 - Tsui; Ting Y. ;   et al. | 2006-08-03 |
Fabrication of a ferromagnetic inductor core and capacitor electrode in a single photo mask step App 20060134809 - Brennan; Kenneth D. ;   et al. | 2006-06-22 |
Fabrication of a ferromagnetic inductor core and capacitor electrode in a single photo mask step App 20060128036 - Brennan; Kenneth D. ;   et al. | 2006-06-15 |
Contact resistance reduction by new barrier stack process App 20060121724 - Yue; Duofeng ;   et al. | 2006-06-08 |
Capacitor integration at top-metal level with a protection layer for the copper surface Grant 7,015,093 - Papa Rao , et al. March 21, 2 | 2006-03-21 |
Metal insulator metal (MIM) capacitor fabrication with sidewall spacers and aluminum cap (ALCAP) top electrode App 20060024899 - Crenshaw; Darius L. ;   et al. | 2006-02-02 |
Method to improve inductance with a high-permeability slotted plate core in an integrated circuit App 20060022787 - Brennan; Kenneth D. ;   et al. | 2006-02-02 |
Metal insulator metal (MIM) capacitor fabrication with sidewall barrier removal aspect App 20060024902 - Ajmera; Sameer Kumar ;   et al. | 2006-02-02 |
Partial plate anneal plate process for deposition of conductive fill material App 20060024962 - Leavy; Montray ;   et al. | 2006-02-02 |
Barrier for copper integrated circuits App 20050206000 - Aggarwal, Sanjeev ;   et al. | 2005-09-22 |
Use of supercritical fluid for low effective dielectric constant metallization App 20050167841 - Papa Rao, Satyavolu S. ;   et al. | 2005-08-04 |
Dual mask capacitor for integrated circuits Grant 6,924,208 - Rost , et al. August 2, 2 | 2005-08-02 |
MIM capacitors and methods for fabricating same Grant 6,919,233 - Papa Rao , et al. July 19, 2 | 2005-07-19 |
Multilayer integrated circuit copper plateable barriers Grant 6,900,127 - Papa Rao , et al. May 31, 2 | 2005-05-31 |
Dual mask capacitor for integrated circuits Grant 6,898,068 - Rost , et al. May 24, 2 | 2005-05-24 |
Capacitor integration at top-metal level with a protective cladding for copper surface protection App 20050093093 - Burke, Edmund ;   et al. | 2005-05-05 |
One mask high density capacitor for integrated circuits App 20050093050 - Rost, Timothy A. ;   et al. | 2005-05-05 |
Capacitor integration at top-metal level with a protection layer for the copper surface App 20050095781 - Papa Rao, Satyavolu S. ;   et al. | 2005-05-05 |
Low K dielectric integrated circuit interconnect structure App 20050082606 - Grunow, Stephan ;   et al. | 2005-04-21 |
Dual Mask Capacitor For Integrated Circuits App 20050063139 - Rost, Timothy A. ;   et al. | 2005-03-24 |
Dual mask capacitor for integrated circuits App 20050063138 - Rost, Timothy A. ;   et al. | 2005-03-24 |
Measurement of wafer temperature in semiconductor processing chambers Grant 6,864,108 - Papa Rao , et al. March 8, 2 | 2005-03-08 |
Integrated Circuit Copper Plateable Barriers App 20050048776 - Papa Rao, Satyavolu S. ;   et al. | 2005-03-03 |
MIM capacitors and methods for fabricating same Grant 6,803,641 - Papa Rao , et al. October 12, 2 | 2004-10-12 |