Panavalappil Kumarankutty; Hanish Kumar

Patent Applications and Registrations

Patent applications and USPTO patent grants for Panavalappil Kumarankutty; Hanish Kumar.The latest application filed is for "electrostatic chuck with improved temperature control".

Company Profile

5.4.8

Panavalappil Kumarankutty; Hanish Kumar - Bangaluru IN
PANAVALAPPIL KUMARANKUTTY; Hanish Kumar - Bangalore IN
Panavalappil Kumarankutty; Hanish Kumar - Bengaluru IN

*profile and listings may contain filings by different individuals or companies with the same name. Review application materials to confirm ownership/assignment.

Patent Activity

Patent	Date
Electrostatic Chuck With Improved Temperature Control App 20220005723 - Panavalappil Kumarankutty; Hanish Kumar ; et al.	2022-01-06
Lid Assembly Apparatus And Methods For Substrate Processing Chambers App 20200291522 - PANAVALAPPIL KUMARANKUTTY; Hanish Kumar ; et al.	2020-09-17
Method and apparatus for semiconductor processing chamber isolation for reduced particles and improved uniformity Grant 10,679,827 - Krishna , et al.	2020-06-09
Integrated Substrate Temperature Measurement On High Temperature Ceramic Heater App 20200118850 - ZHANG; Yizhen ; et al.	2020-04-16
Amalgamated cover ring Grant 10,515,843 - Raj , et al. Dec	2019-12-24
Integrated substrate temperature measurement on high temperature ceramic heater Grant 10,510,567 - Zhang , et al. Dec	2019-12-17
Apparatus For Suppressing Parasitic Plasma In Plasma Enhanced Chemical Vapor Deposition Chamber App 20190378696 - ADDEPALLI; Sai Susmita ; et al.	2019-12-12
On-board metrology (OBM) design and implication in process tool Grant 10,388,549 - Paul , et al. A	2019-08-20
Integrated Substrate Temperature Measurement On High Temperature Ceramic Heater App 20180323093 - ZHANG; Yizhen ; et al.	2018-11-08
Method And Apparatus For Semiconductor Processing Chamber Isolation For Reduced Particles And Improved Uniformity App 20180211820 - KRISHNA; Gopu ; et al.	2018-07-26
Amalgamated Cover Ring App 20170162422 - RAJ; Govinda ; et al.	2017-06-08
On-board Metrology (obm) Design And Implication In Process Tool App 20170148654 - PAUL; Khokan C. ; et al.	2017-05-25

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