| Patent | Date |
|---|
Initiation modulation for plasma deposition
Grant 11,430,654 - Mutyala , et al. August 30, 2 | 2022-08-30 |
Doped Silicon Nitride For 3d Nand
App 20220216048 - Li; Tianyang ; et al. | 2022-07-07 |
Film stack overlay improvement
Grant 11,339,475 - Han , et al. May 24, 2 | 2022-05-24 |
Silicon Oxide Gap Fill Using Capacitively Coupled Plasmas
App 20220157602 - Mutyala; Madhu Santosh Kumar ; et al. | 2022-05-19 |
Analyzing In-plane Distortion
App 20220138396 - Wang; Wenjiao ; et al. | 2022-05-05 |
Tensile Nitride Deposition Systems And Methods
App 20220130661 - Tsiang; Michael Wenyoung ; et al. | 2022-04-28 |
Systems And Methods Of Seasoning Electrostatic Chucks With Dielectric Seasoning Films
App 20220122872 - Singhal; Akhil ; et al. | 2022-04-21 |
Profile Shaping For Control Gate Recesses
App 20220123114 - Singhal; Akhil ; et al. | 2022-04-21 |
Electric Arc Mitigating Faceplate
App 20220122811 - Mutyala; Madhu Santosh Kumar ; et al. | 2022-04-21 |
Method Of Reducing Defects In A Multi-layer Pecvd Teos Oxide Film
App 20220119952 - Howlader; Rana ; et al. | 2022-04-21 |
Power Supply Signal Conditioning For An Electrostatic Chuck
App 20220102179 - Ye; Zheng John ; et al. | 2022-03-31 |
Low-k dielectric with self-forming barrier layer
Grant 11,289,369 - Ding , et al. March 29, 2 | 2022-03-29 |
Deposition of Silicon Boron Nitride Films
App 20220084809 - Yang; Chuanxi ; et al. | 2022-03-17 |
On stack overlay improvement for 3D NAND
Grant 11,276,569 - Lin , et al. March 15, 2 | 2022-03-15 |
Multi zone electrostatic chuck
Grant 11,270,903 - Mutyala , et al. March 8, 2 | 2022-03-08 |
Systems And Methods For Depositing High Density And High Tensile Stress Films
App 20220068630 - Yang; Chuanxi ; et al. | 2022-03-03 |
Sequential deposition and high frequency plasma treatment of deposited film on patterned and un-patterned substrates
Grant 11,217,443 - Vats , et al. January 4, 2 | 2022-01-04 |
Process development visualization tool
Grant 11,157,661 - Vats , et al. October 26, 2 | 2021-10-26 |
Method of forming film stacks with reduced defects
Grant 11,145,504 - Jiang , et al. October 12, 2 | 2021-10-12 |
Shadow ring for modifying wafer edge and bevel deposition
Grant 11,136,665 - Bois , et al. October 5, 2 | 2021-10-05 |
Systems And Methods For Depositing Low-k Dielectric Films
App 20210272800 - Mukherjee; Shaunak ; et al. | 2021-09-02 |
Methods For Pressure Ramped Plasma Purge
App 20210242016 - Mutyala; Madhu Santosh Kumar ; et al. | 2021-08-05 |
Method to enable high temperature processing without chamber drifting
Grant 11,060,189 - Tsiang , et al. July 13, 2 | 2021-07-13 |
Multi Zone Electrostatic Chuck
App 20210183678 - Mutyala; Madhu Santosh Kumar ; et al. | 2021-06-17 |
Initiation Modulation For Plasma Deposition
App 20210159073 - Mutyala; Madhu Santosh Kumar ; et al. | 2021-05-27 |
SiBN film for conformal hermetic dielectric encapsulation without direct RF exposure to underlying structure material
Grant 11,011,371 - Gadre , et al. May 18, 2 | 2021-05-18 |
Surface Encasing Material Layer
App 20210134592 - Mutyala; Madhu Santosh Kumar ; et al. | 2021-05-06 |
Repulsion Mesh And Deposition Methods
App 20210082732 - Mutyala; Madhu Santosh Kumar ; et al. | 2021-03-18 |
Pulsed plasma deposition etch step coverage improvement
Grant 10,950,430 - Vats , et al. March 16, 2 | 2021-03-16 |
Chamber Configurations For Controlled Deposition
App 20210047730 - Addepalli; Sai Susmita ; et al. | 2021-02-18 |
Modified Stacks For 3d Nand
App 20210040607 - Han; Xinhai ; et al. | 2021-02-11 |
Semiconductor Substrate Supports With Improved High Temperature Chucking
App 20210035843 - Li; Jian ; et al. | 2021-02-04 |
Low-K Dielectric With Self-Forming Barrier Layer
App 20200388532 - Ding; Yi ; et al. | 2020-12-10 |
High deposition rate and high quality nitride
Grant 10,790,140 - Han , et al. September 29, 2 | 2020-09-29 |
Hydrophobic And Icephobic Coating
App 20200299834 - BAJAJ; Rajeev ; et al. | 2020-09-24 |
Multi-layer Stacks For 3d Nand Extendability
App 20200295041 - HAN; Xinhai ; et al. | 2020-09-17 |
Multi Channel Splitter Spool
App 20200251310 - Kind Code | 2020-08-06 |
Method Of Forming Film Stacks With Reduced Defects
App 20200227258 - JIANG; Zhijun ; et al. | 2020-07-16 |
Methods for depositing dielectric barrier layers and aluminum containing etch stop layers
Grant 10,707,122 - Kesapragada , et al. | 2020-07-07 |
Methods For Forming Films Containing Silicon Boron With Low Leakage Current
App 20200211834 - YANG; Chuanxi ; et al. | 2020-07-02 |
Multi-layer stacks for 3D NAND extendibility
Grant 10,700,087 - Han , et al. | 2020-06-30 |
Process Development Visualization Tool
App 20200202044 - Vats; Vinayak Veer ; et al. | 2020-06-25 |
Methods For Depositing Phosphorus-doped Silicon Nitride Films
App 20200190664 - HU; Kesong ; et al. | 2020-06-18 |
Sequential Deposition And High Frequency Plasma Treatment Of Deposited Film On Patterned And Un-patterned Substrates
App 20200176241 - Vats; Vinayak Veer ; et al. | 2020-06-04 |
Film Stack Overlay Improvement For 3d Nand Application
App 20200173022 - HAN; Xinhai ; et al. | 2020-06-04 |
Low Dielectric Constant Oxide And Low Resistance Op Stack For 3d Nand Application
App 20200126784 - HAN; Xinhai ; et al. | 2020-04-23 |
Method and system for high temperature clean
Grant 10,612,135 - Baluja , et al. | 2020-04-07 |
Method To Enable High Temperature Processing Without Chamber Drifting
App 20200095677 - TSIANG; Michael Wenyoung ; et al. | 2020-03-26 |
Oxide with higher utilization and lower cost
Grant 10,595,477 - Guo , et al. | 2020-03-24 |
Method of depositing doped amorphous silicon films with enhanced defect control, reduced substrate sensitivity to in-film defects and bubble-free film growth
Grant 10,593,543 - Gadre , et al. | 2020-03-17 |
Non-uv High Hardness Low K Film Deposition
App 20200075321 - MUKHERJEE; Shaunak ; et al. | 2020-03-05 |
On Stack Overlay Improvement For 3d Nand
App 20200043723 - LIN; Yongjing ; et al. | 2020-02-06 |
Low dielectric constant oxide and low resistance OP stack for 3D NAND application
Grant 10,553,427 - Han , et al. Fe | 2020-02-04 |
Dry etch rate reduction of silicon nitride films
Grant 10,515,796 - Tsiang , et al. Dec | 2019-12-24 |
Pulsed Plasma Deposition Etch Step Coverage Improvement
App 20190385844 - VATS; Vinayak Veer ; et al. | 2019-12-19 |
Sibn Film For Conformal Hermetic Dielectric Encapsulation Without Direct Rf Exposure To Underlying Structure Material
App 20190326110 - GADRE; Milind ; et al. | 2019-10-24 |
Borane mediated dehydrogenation process from silane and alkylsilane species for spacer and hardmask application
Grant 10,410,872 - Cheng , et al. Sept | 2019-09-10 |
Shadow Ring For Modifying Wafer Edge And Bevel Deposition
App 20190153592 - BOIS; Dale Du ; et al. | 2019-05-23 |
Dry Etch Rate Reduction Of Silicon Nitride Films
App 20190157077 - TSIANG; Michael Wenyoung ; et al. | 2019-05-23 |
Multi-layer Stacks For 3d Nand Extendability
App 20190115365 - HAN; Xinhai ; et al. | 2019-04-18 |
Conformal amorphous carbon for spacer and spacer protection applications
Grant 10,236,182 - Kim , et al. | 2019-03-19 |
Shadow ring for modifying wafer edge and bevel deposition
Grant 10,227,695 - Du Bois , et al. | 2019-03-12 |
Oxide With Higher Utilization And Lower Cost
App 20190074176 - GUO; Lei ; et al. | 2019-03-07 |
Methods For Depositing Dielectric Barrier Layers And Aluminum Containing Etch Stop Layers
App 20190027403 - KESAPRAGADA; Sree Rangasai V. ; et al. | 2019-01-24 |
Method Of Depositing Doped Amorphous Silicon Films With Enhanced Defect Control, Reduced Substrate Sensitivity To In-film Defects And Bubble-free Film Growth
App 20180350596 - GADRE; Milind ; et al. | 2018-12-06 |
Low Dielectric Constant Oxide And Low Resistance Op Stack For 3d Nand Application
App 20180315592 - HAN; Xinhai ; et al. | 2018-11-01 |
Methods for depositing dielectric barrier layers and aluminum containing etch stop layers
Grant 10,109,520 - Kesapragada , et al. October 23, 2 | 2018-10-23 |
Selective Poreseal Deposition Prevention And Residue Removal Using Sam
App 20180261500 - Bajaj; Geetika ; et al. | 2018-09-13 |
Selective poreseal deposition prevention and residue removal using SAM
Grant 10,074,559 - Bajaj , et al. September 11, 2 | 2018-09-11 |
Ultra-conformal carbon film deposition
Grant 10,074,534 - Behera , et al. September 11, 2 | 2018-09-11 |
High Deposition Rate And High Quality Nitride
App 20180233356 - HAN; Xinhai ; et al. | 2018-08-16 |
Method for selectively sealing ultra low-k porous dielectric layer using flowable dielectric film formed from vapor phase dielectric precursor
Grant 10,049,921 - Draeger , et al. August 14, 2 | 2018-08-14 |
Conformal strippable carbon film for line-edge-roughness reduction for advanced patterning
Grant 10,014,174 - Mebarki , et al. July 3, 2 | 2018-07-03 |
Interconnect structures and methods of formation
Grant 9,984,976 - Cheng , et al. May 29, 2 | 2018-05-29 |
Inhibitor plasma mediated atomic layer deposition for seamless feature fill
Grant 9,966,299 - Tang , et al. May 8, 2 | 2018-05-08 |
Borane Mediated Dehydrogenation Process From Silane And Alkylsilane Species For Spacer And Hardmask Application
App 20180076042 - CHENG; Rui ; et al. | 2018-03-15 |
A Method And System For High Temperature Clean
App 20180023193 - BALUJA; Sanjeev ; et al. | 2018-01-25 |
Ultra-conformal Carbon Film Deposition
App 20170301537 - BEHERA; Swayambhu P. ; et al. | 2017-10-19 |
Interconnect integration for sidewall pore seal and via cleanliness
Grant 9,793,108 - Ren , et al. October 17, 2 | 2017-10-17 |
Conformal Strippable Carbon Film For Line-edge-roughness Reduction For Advanced Patterning
App 20170278709 - MEBARKI; Bencherki ; et al. | 2017-09-28 |
Ultra-conformal carbon film deposition
Grant 9,721,784 - Behera , et al. August 1, 2 | 2017-08-01 |
Conformal Amorphous Carbon For Spacer And Spacer Protection Applications
App 20170170015 - KIM; Sungjin ; et al. | 2017-06-15 |
Method And Apparatus For Clamping And Declamping Substrates Using Electrostatic Chucks
App 20170162417 - YE; Zheng John ; et al. | 2017-06-08 |
Conformal strippable carbon film for line-edge-roughness reduction for advanced patterning
Grant 9,659,771 - Mebarki , et al. May 23, 2 | 2017-05-23 |
Aluminum nitride barrier layer
Grant 9,646,876 - Padhi , et al. May 9, 2 | 2017-05-09 |
Low Temp Single Precursor Arc Hard Mask For Multilayer Patterning Application
App 20170125241 - MUKHERJEE; Shaunak ; et al. | 2017-05-04 |
Methods For Depositing Dielectric Barrier Layers And Aluminum Containing Etch Stop Layers
App 20170098575 - KESAPRAGADA; Sree Rangasai V. ; et al. | 2017-04-06 |
Ultra-thin dielectric diffusion barrier and etch stop layer for advanced interconnect applications
Grant 9,613,908 - Padhi , et al. April 4, 2 | 2017-04-04 |
Enhancing electrical property and UV compatibility of ultrathin blok barrier film
Grant 9,580,801 - Ba , et al. February 28, 2 | 2017-02-28 |
Conformal amorphous carbon for spacer and spacer protection applications
Grant 9,570,303 - Kim , et al. February 14, 2 | 2017-02-14 |
Interconnect Integration For Sidewall Pore Seal And Via Cleanliness
App 20160379819 - REN; He ; et al. | 2016-12-29 |
Conformal Strippable Carbon Film For Line-edge-roughness Reduction For Advanced Patterning
App 20160365248 - MEBARKI; Bencherki ; et al. | 2016-12-15 |
UV assisted CVD AlN film for BEOL etch stop application
Grant 9,502,263 - Demos , et al. November 22, 2 | 2016-11-22 |
Inhibitor Plasma Mediated Atomic Layer Deposition For Seamless Feature Fill
App 20160329238 - Tang; Wei ; et al. | 2016-11-10 |
Dielectric Constant Recovery
App 20160300757 - Dash; Priyanka ; et al. | 2016-10-13 |
Aluminum Nitride Barrier Layer
App 20160254181 - Padhi; Deenesh ; et al. | 2016-09-01 |
Inhibitor plasma mediated atomic layer deposition for seamless feature fill
Grant 9,425,078 - Tang , et al. August 23, 2 | 2016-08-23 |
Interconnect Structures And Methods Of Formation
App 20160240483 - CHENG; YANA ; et al. | 2016-08-18 |
Selective Sealant Removal
App 20160172238 - Kumar; Bhaskar ; et al. | 2016-06-16 |
Ultra-thin Dielectric Diffusion Barrier And Etch Stop Layer For Advanced Interconnect Applications
App 20160172239 - PADHI; Deenesh ; et al. | 2016-06-16 |
Uv Assisted Cvd Aln Film For Beol Etch Stop Application
App 20160172211 - DEMOS; Alexandros T. ; et al. | 2016-06-16 |
Apparatus and method for substrate clamping in a plasma chamber
Grant 9,337,072 - Balasubramanian , et al. May 10, 2 | 2016-05-10 |
Method for critical dimension reduction using conformal carbon films
Grant 9,337,051 - Mebarki , et al. May 10, 2 | 2016-05-10 |
Nitrogen Doped Amorphous Carbon Hardmask
App 20160086794 - CHENG; Siu F. ; et al. | 2016-03-24 |
Enhancing Electrical Property And Uv Compatibility Of Ultrathin Blok Barrier Film
App 20160071724 - BA; Xiaolan ; et al. | 2016-03-10 |
Flowable Dielectric For Selective Ultra Low-k Pore Sealing
App 20160056071 - Draeger; Nerissa Sue ; et al. | 2016-02-25 |
Method For Critical Dimension Reduction Using Conformal Carbon Films
App 20160049305 - MEBARKI; Bencherki ; et al. | 2016-02-18 |
Ultra-conformal Carbon Film Deposition Layer-by-layer Deposition Of Carbon-doped Oxide Films
App 20160005596 - BEHERA; Swayambhu P. ; et al. | 2016-01-07 |
Conformal Amorphous Carbon For Spacer And Spacer Protection Applications
App 20150279676 - KIM; Sungjin ; et al. | 2015-10-01 |
Inhibitor Plasma Mediated Atomic Layer Deposition For Seamless Feature Fill
App 20150243545 - Tang; Wei ; et al. | 2015-08-27 |
Methods And Apparatus For Forming Flowable Dielectric Films Having Low Porosity
App 20150118863 - Rathod; Megha ; et al. | 2015-04-30 |
Ultra high selectivity doped amorphous carbon strippable hardmask development and integration
Grant 8,993,454 - Seamons , et al. March 31, 2 | 2015-03-31 |
Nitrogen Doped Amorphous Carbon Hardmask
App 20140370711 - CHENG; Siu F. ; et al. | 2014-12-18 |
Conformal Amorphous Carbon For Spacer And Spacer Protection Applications
App 20140349490 - Kim; Sungjin ; et al. | 2014-11-27 |
Confined process volume PECVD chamber
Grant 8,778,813 - Sankarakrishnan , et al. July 15, 2 | 2014-07-15 |
Conformal Sacrificial Film By Low Temperature Chemical Vapor Deposition Technique
App 20140162194 - XU; Jingjing ; et al. | 2014-06-12 |
Deposition of an amorphous carbon layer with high film density and high etch selectivity
Grant 8,679,987 - Reilly , et al. March 25, 2 | 2014-03-25 |
Ultra High Selectivity Doped Amorphous Carbon Strippable Hardmask Development And Integration
App 20140017897 - SEAMONS; Martin Jay ; et al. | 2014-01-16 |
Deposition Of An Amorphous Carbon Layer With High Film Density And High Etch Selectivity
App 20130302996 - REILLY; Patrick ; et al. | 2013-11-14 |
Passivating glue layer to improve amorphous carbon to metal adhesion
Grant 8,569,105 - Cheng , et al. October 29, 2 | 2013-10-29 |
Ultra high selectivity doped amorphous carbon strippable hardmask development and integration
Grant 8,536,065 - Seamons , et al. September 17, 2 | 2013-09-17 |
Conformal Amorphous Carbon For Spacer And Spacer Protection Applications
App 20130189845 - Kim; Sungjin ; et al. | 2013-07-25 |
Amorphous carbon deposition method for improved stack defectivity
Grant 8,349,741 - Yu , et al. January 8, 2 | 2013-01-08 |
Methods to improve the in-film defectivity of PECVD amorphous carbon films
Grant 8,282,734 - Padhi , et al. October 9, 2 | 2012-10-09 |
Passivating glue layer to improve amorphous carbon to metal adhesion
Grant 8,278,139 - Cheng , et al. October 2, 2 | 2012-10-02 |
Composite removable hardmask
Grant 8,252,699 - Konecni , et al. August 28, 2 | 2012-08-28 |
Amorphous Carbon Deposition Method For Improved Stack Defectivity
App 20120208374 - Yu; Hang ; et al. | 2012-08-16 |
Passivating Glue Layer To Improve Amorphous Carbon To Metal Adhesion
App 20120208339 - Cheng; Siu F. ; et al. | 2012-08-16 |
Methods To Improve The In-film Defectivity Of Pecvd Amorphous Carbon Films
App 20120204795 - Padhi; Deenesh ; et al. | 2012-08-16 |
Method For Depositing An Amorphous Carbon Film With Improved Density And Step Coverage
App 20120208373 - PADHI; DEENESH ; et al. | 2012-08-16 |
Amorphous carbon deposition method for improved stack defectivity
Grant 8,227,352 - Yu , et al. July 24, 2 | 2012-07-24 |
Composite Removable Hardmask
App 20120129351 - Konecni; Anthony ; et al. | 2012-05-24 |
Ultra High Selectivity Doped Amorphous Carbon Strippable Hardmask Development And Integration
App 20120080779 - SEAMONS; Martin Jay ; et al. | 2012-04-05 |
Variable Resistance Memory Element And Fabrication Methods
App 20120043518 - CHENG; Siu F. ; et al. | 2012-02-23 |
Method for depositing conformal amorphous carbon film by plasma-enhanced chemical vapor deposition (PECVD)
Grant 8,105,465 - Lee , et al. January 31, 2 | 2012-01-31 |
Amorphous Carbon Deposition Method For Improved Stack Defectivity
App 20120015521 - Yu; Hang ; et al. | 2012-01-19 |
Nonplanar faceplate for a plasma processing chamber
Grant 8,097,082 - Zhou , et al. January 17, 2 | 2012-01-17 |
Graphene Deposition
App 20110303899 - Padhi; Deenesh ; et al. | 2011-12-15 |
Confined Process Volume Pecvd Chamber
App 20110294303 - Sankarakrishnan; Ramprakash ; et al. | 2011-12-01 |
Nitrogen Doped Amorphous Carbon Hardmask
App 20110244142 - CHENG; SIU F. ; et al. | 2011-10-06 |
Shadow Ring For Modifying Wafer Edge And Bevel Deposition
App 20110159211 - Du Bois; Dale R. ; et al. | 2011-06-30 |
Plasma Surface Treatment To Prevent Pattern Collapse In Immersion Lithography
App 20110111604 - Kim; Eui Kyoon ; et al. | 2011-05-12 |
Method For Depositing An Amorphous Carbon Film With Improved Density And Step Coverage
App 20110104400 - Padhi; Deenesh ; et al. | 2011-05-05 |
Apparatus And Method For Substrate Clamping In A Plasma Chamber
App 20110090613 - Balasubramanian; Ganesh ; et al. | 2011-04-21 |
Passivating Glue Layer To Improve Amorphous Carbon To Metal Adhesion
App 20110076826 - Cheng; Siu F. ; et al. | 2011-03-31 |
Method for depositing an amorphous carbon film with improved density and step coverage
Grant 7,867,578 - Padhi , et al. January 11, 2 | 2011-01-11 |
Method to deposit functionally graded dielectric films via chemical vapor deposition using viscous precursors
Grant 7,802,538 - Padhi , et al. September 28, 2 | 2010-09-28 |
Method for Depositing Conformal Amorphous Carbon Film by Plasma-Enhanced Chemical Vapor Deposition (PECVD)
App 20100093187 - Lee; Kwangduk Douglas ; et al. | 2010-04-15 |
Nonplanar Faceplate For A Plasma Processing Chamber
App 20090269512 - Zhou; Jianhua ; et al. | 2009-10-29 |
Blocker plate bypass to distribute gases in a chemical vapor deposition system
Grant 7,572,337 - Rocha-Alvarez , et al. August 11, 2 | 2009-08-11 |
Plasma Surface Treatment To Prevent Pattern Collapse In Immersion Lithography
App 20090104541 - Kim; Eui Kyoon ; et al. | 2009-04-23 |
Methods to improve the in-film defectivity of PECVD amorphous carbon films
Grant 7,514,125 - Padhi , et al. April 7, 2 | 2009-04-07 |
Methods To Improve The In-film Defectivity Of Pecvd Amorphous Carbon Films
App 20090044753 - Padhi; Deenesh ; et al. | 2009-02-19 |
Liquid precursors for the CVD deposition of amorphous carbon films
Grant 7,407,893 - Seamons , et al. August 5, 2 | 2008-08-05 |
Method For Depositing An Amorphous Carbon Film With Improved Density And Step Coverage
App 20080153311 - Padhi; Deenesh ; et al. | 2008-06-26 |
Apparatus And Method For Substrate Clamping In A Plasma Chamber
App 20080084650 - Balasubramanian; Ganesh ; et al. | 2008-04-10 |
Method For Depositing an Amorphous Carbon Film with Improved Density and Step Coverage
App 20080003824 - Padhi; Deenesh ; et al. | 2008-01-03 |
Methods To Improve The In-film Defectivity Of Pecvd Amorphous Carbon Films
App 20070295272 - Padhi; Deenesh ; et al. | 2007-12-27 |
Interface engineering to improve adhesion between low k stacks
Grant 7,259,111 - Padhi , et al. August 21, 2 | 2007-08-21 |
Selective metal encapsulation schemes
Grant 7,205,228 - Padhi , et al. April 17, 2 | 2007-04-17 |
Method To Deposit Functionally Graded Dielectric Films Via Chemical Vapor Deposition Using Viscous Precursors
App 20070079753 - Padhi; Deenesh ; et al. | 2007-04-12 |
Chemical mechanical polishing techniques for integrated circuit fabrication
App 20070082479 - Padhi; Deenesh ; et al. | 2007-04-12 |
Strengthening the interface between dielectric layers and barrier layers with an oxide layer of varying composition profile
Grant 7,189,658 - Lakshmanan , et al. March 13, 2 | 2007-03-13 |
Method to deposit functionally graded dielectric films via chemical vapor deposition using viscous precursors
Grant 7,166,544 - Padhi , et al. January 23, 2 | 2007-01-23 |
Strengthening the interface between dielectric layers and barrier layers with an oxide layer of varying composition profile
App 20060252273 - Lakshmanan; Annamalai ; et al. | 2006-11-09 |
Interface engineering to improve adhesion between low k stacks
App 20060160376 - Padhi; Deenesh ; et al. | 2006-07-20 |
Method to deposit functionally graded dielectric films via chemical vapor deposition using viscous precursors
App 20060046520 - Padhi; Deenesh ; et al. | 2006-03-02 |
Liquid precursors for the CVD deposition of amorphous carbon films
App 20050287771 - Seamons, Martin Jay ; et al. | 2005-12-29 |
Blocker plate bypass to distribute gases in a chemical vapor deposition system
App 20050263248 - Rocha-Alvarez, Juan Carlos ; et al. | 2005-12-01 |
Electropolishing of metallic interconnects
Grant 6,951,599 - Yahalom , et al. October 4, 2 | 2005-10-04 |
Post rinse to improve selective deposition of electroless cobalt on copper for ULSI application
App 20050136185 - Ramanathan, Sivakami ; et al. | 2005-06-23 |
Electroless deposition method
Grant 6,905,622 - Padhi , et al. June 14, 2 | 2005-06-14 |
Electroless deposition method
Grant 6,899,816 - Padhi , et al. May 31, 2 | 2005-05-31 |
Method and apparatus for reducing organic depletion during non-processing time periods
Grant 6,878,245 - Gandikota , et al. April 12, 2 | 2005-04-12 |
Selective metal encapsulation schemes
App 20040248409 - Padhi, Deenesh ; et al. | 2004-12-09 |
Electroless deposition method over sub-micron apertures
Grant 6,824,666 - Gandikota , et al. November 30, 2 | 2004-11-30 |
Post rinse to improve selective deposition of electroless cobalt on copper for ULSI application
Grant 6,821,909 - Ramanathan , et al. November 23, 2 | 2004-11-23 |
Homogeneous copper-palladium alloy plating for enhancement of electro-migration resistance in interconnects
App 20040118699 - Padhi, Deenesh ; et al. | 2004-06-24 |
Post rinse to improve selective deposition of electroless cobalt on copper for ULSI application
App 20040087141 - Ramanathan, Sivakami ; et al. | 2004-05-06 |
Electro-chemical polishing apparatus
Grant 6,723,224 - Yahalom , et al. April 20, 2 | 2004-04-20 |
Oxide treatment and pressure control for electrodeposition
App 20040069651 - Herchen, Harald ; et al. | 2004-04-15 |
Planarization by chemical polishing for ULSI applications
App 20030209523 - Padhi, Deenesh ; et al. | 2003-11-13 |
Homogeneous copper-tin alloy plating for enhancement of electro-migration resistance in interconnects
App 20030188974 - Padhi, Deenesh ; et al. | 2003-10-09 |
Electroless deposition method
App 20030189026 - Padhi, Deenesh ; et al. | 2003-10-09 |
Electroless deposition method
App 20030190812 - Padhi, Deenesh ; et al. | 2003-10-09 |
Electroless deposition method
App 20030190426 - Padhi, Deenesh ; et al. | 2003-10-09 |
Method and apparatus for reducing organic depletion during non-processing time periods
App 20030159936 - Gandikota, Srinivas ; et al. | 2003-08-28 |
Method to reduce the depletion of organics in electroplating baths
App 20030159937 - Gandikota, Srinivas ; et al. | 2003-08-28 |
Electropolishing of metallic interconnects
App 20030155255 - Yahalom, Joseph ; et al. | 2003-08-21 |
Method for forming copper interconnects
App 20030146102 - Ramanathan, Sivakami ; et al. | 2003-08-07 |
Electroless deposition method over sub-micron apertures
App 20030140988 - Gandikota, Srinivas ; et al. | 2003-07-31 |
Method of depositing a catalytic layer
App 20030143837 - Gandikota, Srinivas ; et al. | 2003-07-31 |
Method for determining a concentration of conductive species in an aqueous system
App 20030127334 - Padhi, Deenesh ; et al. | 2003-07-10 |
Electro-chemical polishing apparatus
App 20030024826 - Yahalom, Joseph ; et al. | 2003-02-06 |
Process window for gap-fill on very high aspect ratio structures using additives in low acid copper baths
App 20020112964 - Gandikota, Srinivas ; et al. | 2002-08-22 |
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