Owada; Tamotsu

Patent Applications and Registrations

Patent applications and USPTO patent grants for Owada; Tamotsu.The latest application filed is for "semiconductor device and manufacturing method of semiconductor device".

Company Profile

0.28.38

Owada; Tamotsu - Yokohama JP
Owada; Tamotsu - Kawasaki JP
Owada; Tamotsu - Tokyo JP
Owada; Tamotsu - Shinjuku N/A JP
Owada; Tamotsu - Kawasaki-shi JP

*profile and listings may contain filings by different individuals or companies with the same name. Review application materials to confirm ownership/assignment.

Patent Activity

Patent	Date
Semiconductor device and manufacturing method of semiconductor device Grant 9,236,302 - Ohira , et al. January 12, 2	2016-01-12
Semiconductor device and method for manufacturing semiconductor device Grant 9,123,728 - Kono , et al. September 1, 2	2015-09-01
Semiconductor Device And Manufacturing Method Of Semiconductor Device App 20150235901 - Ohira; Hikaru ; et al.	2015-08-20
Semiconductor device manufacturing method Grant 9,087,873 - Owada July 21, 2	2015-07-21
Semiconductor Device And Method Of Manufacturing The Same App 20150069586 - Owada; Tamotsu ; et al.	2015-03-12
Semiconductor Device Manufacturing Method And Support Substrate-attached Wafer App 20150014820 - Owada; Tamotsu	2015-01-15
Semiconductor device and method of manufacturing the same Grant 8,916,423 - Owada , et al. December 23, 2	2014-12-23
Manufacturing method of semiconductor device, processing method of semiconductor wafer, semiconductor wafer Grant 8,883,613 - Owada November 11, 2	2014-11-11
Semiconductor Device And Manufacturing Method Of Semiconductor Device App 20140306339 - Ohira; Hikaru ; et al.	2014-10-16
Silicon oxycarbide, growth method of silicon oxycarbide layer, semiconductor device and manufacture method for semiconductor device Grant 8,778,814 - Owada , et al. July 15, 2	2014-07-15
Semiconductor Device And Method For Manufacturing Semiconductor Device App 20140131873 - Kouno; Takahiro ; et al.	2014-05-15
Semiconductor device and method for manufacturing semiconductor device Grant 8,669,177 - Kouno , et al. March 11, 2	2014-03-11
Silicon Oxycarbide, Growth Method Of Silicon Oxycarbide Layer, Semiconductor Device And Manufacture Method For Semiconductor Device App 20130330912 - Owada; Tamotsu ; et al.	2013-12-12
Semiconductor device and method for fabricating semiconductor device Grant 8,604,552 - Owada , et al. December 10, 2	2013-12-10
Semiconductor Device And Method Of Manufacturing The Same App 20130320508 - Owada; Tamotsu ; et al.	2013-12-05
Method Of Manufacturing Semiconductor Device And Semiconductor Device Manufacturing Apparatus App 20130247825 - Owada; Tamotsu	2013-09-26
Manufacturing Method Of Semiconductor Device, Processing Method Of Semiconductor Wafer, Semiconductor Wafer App 20130161795 - Owada; Tamotsu	2013-06-27
Silicon oxycarbide, growth method of silicon oxycarbide layer, semiconductor device and manufacture method for semiconductor device Grant 8,349,722 - Owada , et al. January 8, 2	2013-01-08
Semiconductor Device And Method For Fabricating Semiconductor Device App 20120322272 - Owada; Tamotsu ; et al.	2012-12-20
Silicon Oxycarbide, Growth Method Of Silicon Oxycarbide Layer, Semiconductor Device And Manufacture Method For Semiconductor Device App 20120252227 - Owada; Tamotsu ; et al.	2012-10-04
Method of manufacturing a semiconductor device Grant 8,105,935 - Ohara , et al. January 31, 2	2012-01-31
Method Of Manufacturing Semiconductor Device And Semiconductor Device Manufacturing Apparatus App 20110244677 - Owada; Tamotsu	2011-10-06
Semiconductor device and method of manufacturing the same Grant 8,026,164 - Takesako , et al. September 27, 2	2011-09-27
Semiconductor Device And Method Of Manufacturing The Same App 20110183515 - Kudo; Hiroshi ; et al.	2011-07-28
Semiconductor device and method of manufacturing the same Grant 7,928,476 - Kudo , et al. April 19, 2	2011-04-19
Method of manufacturing semiconductor device including forming two stress films and irradiation of one stress film Grant 7,763,509 - Pidin , et al. July 27, 2	2010-07-27
Method of manufacturing semiconductor device Grant 7,749,897 - Sugimoto , et al. July 6, 2	2010-07-06
Semiconductor Device And Method Of Manufacturing The Same App 20100164119 - Takesako; Satoshi ; et al.	2010-07-01
Semiconductor Device And Method For Fabricating Semiconductor Device App 20100012991 - OWADA; Tamotsu ; et al.	2010-01-21
Insulating film forming method capable of enhancing adhesion of silicon carbide film, etc. and semiconductor device Grant 7,642,185 - Owada , et al. January 5, 2	2010-01-05
Semiconductor Device And Method For Manufacturing Semiconductor Device App 20090278259 - KOUNO; Takahiro ; et al.	2009-11-12
Semiconductor device and method for fabricating the same Grant 7,579,277 - Owada , et al. August 25, 2	2009-08-25
Semiconductor Device And Method Of Manufacturing The Same App 20090146309 - KUDO; Hiroshi ; et al.	2009-06-11
Method for forming insulating film, method for forming multilayer structure and method for manufacturing semiconductor device Grant 7,541,296 - Owada , et al. June 2, 2	2009-06-02
Silicon oxycarbide, growth method of silicon oxycarbide layer, semiconductor device and manufacture method for semiconductor device App 20090093130 - Owada; Tamotsu ; et al.	2009-04-09
Silicon oxycarbide, growth method of silicon oxycarbide layer, semiconductor device and manufacture method for semiconductor device Grant 7,485,570 - Owada , et al. February 3, 2	2009-02-03
Method of manufacturing semiconductor device App 20080305645 - Sugimoto; Ken ; et al.	2008-12-11
Method Of Manufacturing A Semiconductor Device App 20080233734 - OHARA; Naoki ; et al.	2008-09-25
Method of manufacturing semiconductor device App 20080124856 - Pidin; Sergey ; et al.	2008-05-29
Semiconductor Device Manufacturing Method App 20080057717 - OWADA; Tamotsu ; et al.	2008-03-06
Semiconductor device and method for fabricating the same App 20070197032 - Owada; Tamotsu ; et al.	2007-08-23
Semiconductor device using low-K material as interlayer insulating film and its manufacture method Grant 7,256,118 - Fukuyama , et al. August 14, 2	2007-08-14
Insulating film forming method capable of enhancing adhesion of silicon carbide film, etc. and semiconductor device App 20070173054 - Owada; Tamotsu ; et al.	2007-07-26
Low dielectric constant film material, film and semiconductor device using such material Grant 7,235,866 - Nakata , et al. June 26, 2	2007-06-26
Method of manufacturing semiconductor device App 20070123035 - Sugimoto; Ken ; et al.	2007-05-31
Insulating film forming method capable of enhancing adhesion of silicon carbide film, etc. and semiconductor device Grant 7,208,405 - Owada , et al. April 24, 2	2007-04-24
Method for forming SiC-based film and method for fabricating semiconductor device App 20060205193 - Sugimoto; Ken ; et al.	2006-09-14
Method for forming insulating film, method for forming multilayer structure and method for manufacturing semiconductor device App 20060178017 - Owada; Tamotsu ; et al.	2006-08-10
Semiconductor device App 20060087041 - Fukuyama; Shun-ichi ; et al.	2006-04-27
Low dielectric constant film material, film and semiconductor device using such material App 20060022357 - Nakata; Yoshihiro ; et al.	2006-02-02
Silicon oxycarbide, growth method of silicon oxycarbide layer, semiconductor device and manufacture method for semiconductor device App 20050287790 - Owada, Tamotsu ; et al.	2005-12-29
Semiconductor device using low-K material as interlayer insulating film and its manufacture method App 20050250309 - Fukuyama, Shun-ichi ; et al.	2005-11-10
Insulating film forming method capable of enhancing adhesion of silicon carbide film, etc. and semiconductor device App 20050242440 - Owada, Tamotsu ; et al.	2005-11-03
Low dielectric constant film material, film and semiconductor device using such material Grant 6,958,525 - Nakata , et al. October 25, 2	2005-10-25
Silicon oxycarbide, growth method of silicon oxycarbide layer, semiconductor device and manufacture method for semiconductor device Grant 6,949,830 - Owada , et al. September 27, 2	2005-09-27
Semiconductor device using low-k material as interlayer insulating film and including a surface modifying layer Grant 6,943,431 - Fukuyama , et al. September 13, 2	2005-09-13
Silicon oxycarbide, growth method of silicon oxycarbide layer, semiconductor device and manufacture method for semiconductor device App 20040155340 - Owada, Tamotsu ; et al.	2004-08-12
Semiconductor device using low-k material as interlayer insulating film and its manufacture method App 20040021224 - Fukuyama, Shun-ichi ; et al.	2004-02-05
Low dielectric constant film material, film and semiconductor device using such material App 20030207131 - Nakata, Yoshihiro ; et al.	2003-11-06
Low dielectric constant film material, film and semiconductor device using such material Grant 6,613,834 - Nakata , et al. September 2, 2	2003-09-02
Semiconductor device including porous insulating material and manufacturing method therefor App 20030057561 - Fukuyama, Shun-Ichi ; et al.	2003-03-27
Composition for forming low dielectric constant insulating film, method of forming insulating film using the composition and electronic parts having the insulating film produced thereby App 20030010961 - Fukuyama, Shun-Ichi ; et al.	2003-01-16
Low dielectric constant film material, film and semiconductor device using such material App 20010033026 - Nakata, Yoshihiro ; et al.	2001-10-25
Excimer laser processing method and apparatus Grant 5,386,430 - Yamagishi , et al. January 31, 1	1995-01-31

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