Otaka; Tadashi

Patent Applications and Registrations

Patent applications and USPTO patent grants for Otaka; Tadashi.The latest application filed is for "charged particle beam apparatus".

Company Profile

0.42.32

Otaka; Tadashi - Hitachinaka JP
Otaka; Tadashi - Ibaraki JP
Otaka; Tadashi - Katsuta JP

*profile and listings may contain filings by different individuals or companies with the same name. Review application materials to confirm ownership/assignment.

Patent Activity

Patent	Date
Charged particle beam apparatus Grant 8,334,520 - Otaka , et al. December 18, 2	2012-12-18
Charged particle beam apparatus Grant 8,324,594 - Ito , et al. December 4, 2	2012-12-04
Sample dimension measuring method and scanning electron microscope Grant 8,080,789 - Nasu , et al. December 20, 2	2011-12-20
Charged Particle Beam Apparatus App 20110260057 - Otaka; Tadashi ; et al.	2011-10-27
Sample dimension measuring method and scanning electron microscope Grant 7,910,886 - Kawada , et al. March 22, 2	2011-03-22
Monochromator and scanning electron microscope using the same Grant 7,838,827 - Ose , et al. November 23, 2	2010-11-23
Image evaluation method and microscope Grant 7,805,023 - Ishitani , et al. September 28, 2	2010-09-28
Method of forming a sample image and charged particle beam apparatus Grant 7,800,059 - Sato , et al. September 21, 2	2010-09-21
Sample dimension measuring method and scanning electron microscope App 20100038535 - Nasu; Osamu ; et al.	2010-02-18
Method for measuring dimensions of sample and scanning electron microscope Grant 7,659,508 - Nasu , et al. February 9, 2	2010-02-09
Charged Particle Beam Alignment Method And Charged Particle Beam Apparatus App 20100006755 - Sato; Mitsugo ; et al.	2010-01-14
Charged particle beam alignment method and charged particle beam apparatus Grant 7,605,381 - Sato , et al. October 20, 2	2009-10-20
Charged Particle Beam Apparatus App 20090218509 - Ito; Hiroyuki ; et al.	2009-09-03
Sample dimension-measuring method and charged particle beam apparatus Grant 7,476,856 - Watanabe , et al. January 13, 2	2009-01-13
Monochromator and scanning electron microscope using the same App 20080237463 - Ose; Yoichi ; et al.	2008-10-02
Method of forming a sample image and charged particle beam apparatus App 20080217535 - Sato; Mitsugu ; et al.	2008-09-11
Sample dimension measuring method and scanning electron microscope App 20080179517 - Kawada; Hiroki ; et al.	2008-07-31
Method and scanning electron microscope for measuring width of material on sample Grant 7,385,196 - Shimoma , et al. June 10, 2	2008-06-10
Method and apparatus for circuit pattern inspection Grant 7,369,703 - Yamaguchi , et al. May 6, 2	2008-05-06
Method of forming a sample image and charged particle beam apparatus Grant 7,361,894 - Sato , et al. April 22, 2	2008-04-22
Image evaluation method and microscope Grant 7,340,111 - Ishitani , et al. March 4, 2	2008-03-04
Monochromator and scanning electron microscope using the same Grant 7,315,024 - Ose , et al. January 1, 2	2008-01-01
Image evaluation method and microscope App 20070280559 - Ishitani; Tohru ; et al.	2007-12-06
Sample dimension measuring method and scanning electron microscope Grant 7,285,777 - Kawada , et al. October 23, 2	2007-10-23
Image evaluation method and microscope Grant 7,236,651 - Ishitani , et al. June 26, 2	2007-06-26
Method of forming a sample image and charged particle beam apparatus App 20070029478 - Sato; Mitsugu ; et al.	2007-02-08
Method of forming a sample image and charged particle beam apparatus Grant 7,164,126 - Sato , et al. January 16, 2	2007-01-16
Method and apparatus for circuit pattern inspection App 20060269121 - Yamaguchi; Atsuko ; et al.	2006-11-30
Micropattern shape measuring system and method Grant 7,130,063 - Mitsui , et al. October 31, 2	2006-10-31
Monochromator and scanning electron microscope using the same App 20060219910 - Ose; Yoichi ; et al.	2006-10-05
Method and apparatus for circuit pattern inspection Grant 7,095,884 - Yamaguchi , et al. August 22, 2	2006-08-22
Electron microscopic inspection apparatus Grant 7,091,496 - Takami , et al. August 15, 2	2006-08-15
Three-dimensional micropattern profile measuring system and method Grant 7,038,767 - Toyoshima , et al. May 2, 2	2006-05-02
Method of forming a sample image and charged particle beam apparatus Grant 7,034,296 - Sato , et al. April 25, 2	2006-04-25
Monochromator and scanning electron microscope using the same Grant 7,022,983 - Ose , et al. April 4, 2	2006-04-04
Sample dimension measuring method and scanning electron microscope App 20050247876 - Kawada, Hiroki ; et al.	2005-11-10
Image evaluation method and microscope App 20050199811 - Ishitani, Tohru ; et al.	2005-09-15
Electron microscope Grant 6,933,500 - Kaji , et al. August 23, 2	2005-08-23
Micropattern shape measuring system and method App 20050182595 - Mitsui, Yasuhiro ; et al.	2005-08-18
Electron microscope App 20050167589 - Kaji, Kazutoshi ; et al.	2005-08-04
Electron microscope App 20050127295 - Kaji, Kazutoshi ; et al.	2005-06-16
Micropattern shape measuring system and method Grant 6,894,790 - Mitsui , et al. May 17, 2	2005-05-17
Sample dimension-measuring method and charged particle beam apparatus App 20050051721 - Watanabe, Kenji ; et al.	2005-03-10
Charged particle beam alignment method and charged particle beam apparatus Grant 6,864,493 - Sato , et al. March 8, 2	2005-03-08
Method and scanning electron microscope for measuring width of material on sample App 20050006581 - Shimoma, Goroku ; et al.	2005-01-13
Monochromator and scanning electron microscope using the same App 20040188607 - Ose, Yoichi ; et al.	2004-09-30
Method and scanning electron microscope for measuring dimension of material on sample Grant 6,791,084 - Shimoma , et al. September 14, 2	2004-09-14
Charged particle beam alignment method and charged particle beam apparatus App 20040124364 - Sato, Mitsugu ; et al.	2004-07-01
Electron microscope App 20040094712 - Kaji, Kazutoshi ; et al.	2004-05-20
Method for measuring dimensions of sample and scanning electron microscope App 20040051040 - Nasu, Osamu ; et al.	2004-03-18
Electron microscopic inspection apparatus App 20040036489 - Takami, Sho ; et al.	2004-02-26
Apparatus using charged particle beam Grant 6,667,483 - Kobaru , et al. December 23, 2	2003-12-23
Method of measuring length with scanning type electron microscope Grant 6,653,634 - Otaka , et al. November 25, 2	2003-11-25
Method of forming a sample image and charged particle beam apparatus App 20030141451 - Sato, Mitsugu ; et al.	2003-07-31
Method of forming a sample image and charged particle beam apparatus App 20030111602 - Sato, Mitsugu ; et al.	2003-06-19
Micropattern shape measuring system and method App 20030090684 - Mitsui, Yasuhiro ; et al.	2003-05-15
Three-dimensional micropattern profile measuring system and method App 20030090651 - Toyoshima, Yuya ; et al.	2003-05-15
Method and scanning electron microscope for measuring width of material on sample App 20030071214 - Shimoma, Goroku ; et al.	2003-04-17
Image evaluation method and microscope App 20030039386 - Ishitani, Tohru ; et al.	2003-02-27
Method and apparatus for circuit pattern inspection App 20030021463 - Yamaguchi, Atsuko ; et al.	2003-01-30
Charged particle beam alignment method and charged particle beam apparatus App 20020179851 - Sato, Mitsugu ; et al.	2002-12-05
Apparatus using charged particle beam App 20010050343 - Kobaru, Atsushi ; et al.	2001-12-13
Scanning electron microscope and method for dimension measuring by using the same Grant 6,114,695 - Todokoro , et al. September 5, 2	2000-09-05
Scanning electron microscope and method for dimension measuring by using the same Grant 5,969,357 - Todokoro , et al. October 19, 1	1999-10-19
Scanning electron microscope and method for dimension measuring by using the same Grant 5,866,904 - Todokoro , et al. February 2, 1	1999-02-02
Scanning electron microscope Grant 5,614,713 - Kobaru , et al. March 25, 1	1997-03-25
Electron beam apparatus Grant 5,598,002 - Todokoro , et al. January 28, 1	1997-01-28
Scanning electron microscope and method for dimension measuring by using the same Grant 5,594,245 - Todokoro , et al. January 14, 1	1997-01-14
Electron beam apparatus Grant 5,412,209 - Otaka , et al. May 2, 1	1995-05-02
Charged particle beam apparatus Grant 5,324,950 - Otaka , et al. June 28, 1	1994-06-28
Scanning microscope and a method of operating such a scanning microscope Grant 5,276,325 - Todokoro , et al. January 4, 1	1994-01-04
Charged particle beam apparatus having particular electrostatic objective lens and vacuum pump systems Grant 5,254,856 - Matsui , et al. October 19, 1	1993-10-19
Electronic microscope Grant D332,616 - Hashimoto , et al. January 19, 1	1993-01-19
Scanning electron microscope for observing and measuring minute pattern of sample Grant 4,916,315 - Otaka April 10, 1	1990-04-10