Osterheld; Thomas H.

Patent Applications and Registrations

Patent applications and USPTO patent grants for Osterheld; Thomas H..The latest application filed is for "control of processing parameters for substrate polishing with substrate precession".

Company Profile

13.58.76

Osterheld; Thomas H. - Mountain View CA
Osterheld; Thomas H - Mountain View CA

*profile and listings may contain filings by different individuals or companies with the same name. Review application materials to confirm ownership/assignment.

Patent Activity

Patent	Date
Chemical mechanical polishing apparatus and methods Grant 11,453,097 - Bajaj , et al. September 27, 2	2022-09-27
Active Acoustic Monitoring For Chemical Mechanical Polishing App 20220281058 - Wiswell; Nicholas A. ; et al.	2022-09-08
Control Of Processing Parameters For Substrate Polishing With Angularly Distributed Zones Using Cost Function App 20220281053 - Lau; Eric ; et al.	2022-09-08
Passive Acoustic Monitoring And Acoustic Sensors For Chemical Mechanical Polishing App 20220281057 - Wiswell; Nicholas A. ; et al.	2022-09-08
Control Of Processing Parameters For Substrate Polishing With Substrate Precession App 20220283554 - Lau; Eric ; et al.	2022-09-08
Imaging For Monitoring Thickness In A Substrate Cleaning System App 20220270889 - Benvegnu; Dominic J. ; et al.	2022-08-25
Monitoring Of Polishing Pad Texture In Chemical Mechanical Polishing App 20200298368 - Osterheld; Thomas H. ; et al.	2020-09-24
Polishing System With Support Post And Annular Platen Or Polishing Pad App 20200114487 - Butterfield; Paul D. ; et al.	2020-04-16
Machine Vision As Input To A Cmp Process Control Algorithm App 20200094370 - Cherian; Benjamin ; et al.	2020-03-26
Chemical Mechanical Polishing Apparatus and Methods App 20200086452 - Bajaj; Rajeev ; et al.	2020-03-19
Textured small pad for chemical mechanical polishing Grant 10,589,399 - Oh , et al.	2020-03-17
Polishing system with annular platen or polishing pad for substrate monitoring Grant 10,562,147 - Butterfield , et al. Feb	2020-02-18
Training Spectrum Generation for Machine Learning System for Spectrographic Monitoring App 20200005140 - Cherian; Benjamin ; et al.	2020-01-02
Training Spectrum Generation for Machine Learning System for Spectrographic Monitoring App 20200005139 - Cherian; Benjamin ; et al.	2020-01-02
Chemical mechanical polishing apparatus and methods Grant 10,500,694 - Bajaj , et al. Dec	2019-12-10
Acoustic emission monitoring and endpoint for chemical mechanical polishing Grant 10,478,937 - Tang , et al. Nov	2019-11-19
Consumable Part Monitoring in Chemical Mechanical Polisher App 20190283209 - Osterheld; Thomas H. ; et al.	2019-09-19
Monitoring of Vibrations During Chemical Mechanical Polishing App 20190283204 - Swedek; Boguslaw A. ; et al.	2019-09-19
Chemical mechanical polishing automated recipe generation Grant 10,256,111 - Lau , et al.	2019-04-09
Polishing System With Annular Platen Or Polishing Pad For Substrate Monitoring App 20180056477 - Butterfield; Paul D. ; et al.	2018-03-01
Chemical Mechanical Polishing Automated Recipe Generation App 20180005842 - LAU; Eric ; et al.	2018-01-04
Chemical Mechanical Polishing Apparatus And Methods App 20170309494 - Osterheld; Thomas H. ; et al.	2017-10-26
Chemical Mechanical Polishing Apparatus And Methods App 20170297163 - Bajaj; Rajeev ; et al.	2017-10-19
Textured Small Pad For Chemical Mechanical Polishing App 20170274498 - Oh; Jeonghoon ; et al.	2017-09-28
Acoustic Emission Monitoring and Endpoint for Chemical Mechanical Polishing App 20160256978 - Tang; Jianshe ; et al.	2016-09-08
Multi-Platen Multi-Head Polishing Architecture App 20160101497 - David; Jeffrey Drue ; et al.	2016-04-14
Chemical Mechanical Polishing Apparatus And Methods App 20160027668 - Osterheld; Thomas H. ; et al.	2016-01-28
Dynamic residue clearing control with in-situ profile control (ISPC) Grant 9,242,337 - Qian , et al. January 26, 2	2016-01-26
Multi-platen multi-head polishing architecture Grant 9,227,293 - David , et al. January 5, 2	2016-01-05
Endpointing with selective spectral monitoring Grant 9,221,147 - Qian , et al. December 29, 2	2015-12-29
Thin polishing pad with window and molding process Grant 9,138,858 - Benvegnu , et al. September 22, 2	2015-09-22
Path for probe of spectrographic metrology system Grant 9,056,383 - David , et al. June 16, 2	2015-06-16
Retaining ring monitoring and control of pressure Grant 9,017,138 - Chen , et al. April 28, 2	2015-04-28
Temperature control of chemical mechanical polishing Grant 9,005,999 - Xu , et al. April 14, 2	2015-04-14
Weighted regression of thickness maps from spectral data Grant 8,992,286 - Cherian , et al. March 31, 2	2015-03-31
Selecting reference libraries for monitoring of multiple zones on a substrate Grant 8,954,186 - Qian , et al. February 10, 2	2015-02-10
Methods And Apparatus Using Energized Fluids To Clean Chemical Mechanical Planarization Polishing Pads App 20140323017 - Tang; Jianshe ; et al.	2014-10-30
Dynamic Residue Clearing Control With In-situ Profile Control (ispc) App 20140273749 - QIAN; Jun ; et al.	2014-09-18
Pad Conditioning Process Control Using Laser Conditioning App 20140273752 - BAJAJ; Rajeev ; et al.	2014-09-18
Path For Probe Of Spectrographic Metrology System App 20140242879 - David; Jeffrey Drue ; et al.	2014-08-28
Determination Of Wafer Angular Position For In-sequence Metrology App 20140242883 - Cherian; Benjamin ; et al.	2014-08-28
Feed Forward Parameter Values For Use In Theoretically Generating Spectra App 20140242881 - David; Jeffrey Drue ; et al.	2014-08-28
Weighted Regression Of Thickness Maps From Spectral Data App 20140242878 - Cherian; Benjamin ; et al.	2014-08-28
Chemical Mechanical Polishing Apparatus And Methods App 20140199840 - Bajaj; Rajeev ; et al.	2014-07-17
Retaining ring for chemical mechanical polishing Grant 8,771,460 - Zuniga , et al. July 8, 2	2014-07-08
Polishing System with In-Sequence Sensor App 20140141696 - David; Jeffrey Drue ; et al.	2014-05-22
Multi-Platen Multi-Head Polishing Architecture App 20140141695 - David; Jeffrey Drue ; et al.	2014-05-22
Endpointing With Selective Spectral Monitoring App 20140113524 - Qian; Jun ; et al.	2014-04-24
Temperature Control Of Chemical Mechanical Polishing App 20140004626 - XU; KUN ; et al.	2014-01-02
Thin Polishing Pad With Window And Molding Process App 20130309951 - Benvegnu; Dominic J. ; et al.	2013-11-21
Retaining Ring For Chemical Mechanical Polishing App 20130276979 - Zuniga; Steven M. ; et al.	2013-10-24
Thin polishing pad with window and molding process Grant 8,562,389 - Benvegnu , et al. October 22, 2	2013-10-22
Retaining Ring Monitoring And Control Of Pressure App 20130203321 - Chen; Hung Chih ; et al.	2013-08-08
Engineering Dielectric Films For Cmp Stop App 20130189841 - Balseanu; Mihaela ; et al.	2013-07-25
Method of assembly of retaining ring for CMP Grant 8,486,220 - Zuniga , et al. July 16, 2	2013-07-16
Multilayer retaining ring for chemical mechanical polishing Grant 8,470,125 - Zuniga , et al. June 25, 2	2013-06-25
Brush Box Module For Chemical Mechanical Polishing Cleaner App 20130111678 - Chen; Hui ; et al.	2013-05-09
Eddy current gain compensation Grant 8,408,965 - Bennett , et al. April 2, 2	2013-04-02
Polishing pad and system with window support Grant 8,393,933 - Qian , et al. March 12, 2	2013-03-12
Method Of Assembly Of Retaining Ring For Cmp App 20120325395 - Zuniga; Steven M. ; et al.	2012-12-27
Endpoint control of multiple-wafer chemical mechanical polishing Grant 8,295,967 - Zhang , et al. October 23, 2	2012-10-23
Use of pad conditioning in temperature controlled CMP Grant 8,292,691 - Xu , et al. October 23, 2	2012-10-23
Selecting Reference Libraries For Monitoring Of Multiple Zones On A Substrate App 20120028813 - Qian; Jun ; et al.	2012-02-02
Real-time Monitoring Of Retaining Ring Thickness And Lifetime App 20120021671 - McReynolds; Peter ; et al.	2012-01-26
Multilayer Retaining Ring For Chemical Mechanical Polishing App 20120018093 - Zuniga; Steven M. ; et al.	2012-01-26
Multilayer retaining ring for chemical mechanical polishing Grant 8,029,640 - Zuniga , et al. October 4, 2	2011-10-04
Temperature Control Of Chemical Mechanical Polishing App 20100279435 - Xu; Kun ; et al.	2010-11-04
Pad conditioner Grant 7,815,495 - Xu , et al. October 19, 2	2010-10-19
Polishing Pad and System with Window Support App 20100184357 - Qian; Jun ; et al.	2010-07-22
Endpoint Control Of Multiple-wafer Chemical Mechanical Polishing App 20100120330 - Zhang; Jimin ; et al.	2010-05-13
Endpoint Control Of Multiple-wafer Chemical Mechanical Polishing App 20100120331 - Carlsson; Ingemar ; et al.	2010-05-13
Eddy Current Gain Compensation App 20100099334 - Bennett; Doyle E. ; et al.	2010-04-22
Use Of Pad Conditioning In Temperature Controlled Cmp App 20100081360 - Xu; Kun ; et al.	2010-04-01
Endpoint Detection In Chemical Mechanical Polishing Using Multiple Spectra App 20090275265 - Qian; Jun ; et al.	2009-11-05
Multilayer Retaining Ring For Chemical Mechanical Polishing App 20090221223 - Zuniga; Steven M. ; et al.	2009-09-03
Methods for a multilayer retaining ring Grant 7,534,364 - Zuniga , et al. May 19, 2	2009-05-19
Carrier head with a multilayer retaining ring for chemical mechanical polishing Grant 7,520,955 - Zuniga , et al. April 21, 2	2009-04-21
Thin Polishing Pad With Window And Molding Process App 20080305729 - Benvegnu; Dominic J. ; et al.	2008-12-11
Pad Conditioner App 20080254722 - Xu; Kun ; et al.	2008-10-16
Chemical mechanical polishing a substrate having a filler layer and a stop layer Grant 7,201,636 - Jin , et al. April 10, 2	2007-04-10
Profile control platen Grant 7,115,024 - Chen , et al. October 3, 2	2006-10-03
Polishing processes for shallow trench isolation substrates Grant 7,063,597 - Prabhu , et al. June 20, 2	2006-06-20
Profile control platen App 20050186892 - Chen, Hung Chih ; et al.	2005-08-25
Chemical mechanical polishing a substrate having a filler layer and a stop layer App 20050153561 - Jin, Raymond R. ; et al.	2005-07-14
Profile control platen Grant 6,913,518 - Chen , et al. July 5, 2	2005-07-05
Chemical mechanical polishing a substrate having a filler layer and a stop layer Grant 6,863,593 - Jin , et al. March 8, 2	2005-03-08
Carrier head with a modified flexible membrane Grant 6,855,043 - Tang , et al. February 15, 2	2005-02-15
Closed loop control over delivery of liquid material to semiconductor processing tool Grant 6,834,777 - Osterheld , et al. December 28, 2	2004-12-28
Polishing pad having a grooved pattern for use in a chemical mechanical polishing apparatus Grant 6,824,455 - Osterheld , et al. November 30, 2	2004-11-30
Profile control platen App 20040224615 - Chen, Hung Chih ; et al.	2004-11-11
Methods and compositions for chemical mechanical polishing shallow trench isolation substrates Grant 6,811,470 - Bonner , et al. November 2, 2	2004-11-02
Methods for a multilayer retaining ring App 20040209556 - Zuniga, Steven M. ; et al.	2004-10-21
Polishing processes for shallow trench isolation substrates App 20040142640 - Prabhu, Gopalakrishna B. ; et al.	2004-07-22
Platen with patterned surface for chemical mechanical polishing App 20040072518 - Prabhu, Gopalakrishna B. ; et al.	2004-04-15
Polishing pad having a grooved pattern for use in chemical mechanical polishing apparatus App 20040072516 - Osterheld, Thomas H. ; et al.	2004-04-15
Polishing pad having a grooved pattern for use in a chemical mechanical polishing apparatus Grant 6,699,115 - Osterheld , et al. March 2, 2	2004-03-02
Grid relief in CMP polishing pad to accurately measure pad wear, pad profile and pad wear profile App 20040033760 - Osterheld, Thomas H.	2004-02-19
Polishing pad having a grooved pattern for use in chemical mechanical polishing Grant 6,645,061 - Bennett , et al. November 11, 2	2003-11-11
Closed loop control over delivery of liquid material to semiconductor processing tool App 20030189060 - Osterheld, Thomas H. ; et al.	2003-10-09
Grid relief in CMP polishing pad to accurately measure pad wear, pad profile and pad wear profile Grant 6,616,513 - Osterheld September 9, 2	2003-09-09
Chemical mechanical polishing pad conditioning element with discrete points and compliant membrane Grant 6,572,446 - Osterheld , et al. June 3, 2	2003-06-03
Polishing pad having a grooved pattern for use in a chemical mechanical polishing apparatus App 20030092371 - Osterheld, Thomas H. ; et al.	2003-05-15
Closed loop control over delivery of liquid material to semiconductor processing tool Grant 6,561,381 - Osterheld , et al. May 13, 2	2003-05-13
Methods and compositions for chemical mechanical polishing shallow trench isolation substrates App 20030036339 - Bonner, Benjamin A. ; et al.	2003-02-20
Polishing pad having a grooved pattern for use in chemical mechanical polishing Grant 6,520,847 - Osterheld , et al. February 18, 2	2003-02-18
Polishing pad having a grooved pattern for use in chemical mechanical polishing apparatus App 20020137450 - Osterheld, Thomas H. ; et al.	2002-09-26
Multi-step polish process to control uniformity when using a selective slurry on patterned wafers App 20020100743 - Bonner, Benjamin A. ; et al.	2002-08-01
Utility wafer for chemical mechanical polishing Grant 6,361,405 - David , et al. March 26, 2	2002-03-26
Utility wafer for chemical mechanical polishing App 20020028635 - David, Jeffrey D. ; et al.	2002-03-07
Method of post CMP defect stability improvement Grant 6,319,098 - Osterheld , et al. November 20, 2	2001-11-20
Polishing pad having a grooved pattern for use in a chemical mechanical polishing apparatus Grant 6,273,806 - Bennett , et al. August 14, 2	2001-08-14
Carrier head with a multilayer retaining ring for chemical mechanical polishing Grant 6,251,215 - Zuniga , et al. June 26, 2	2001-06-26
Method and apparatus for chemical mechanical polishing using a patterned pad Grant 6,241,596 - Osterheld , et al. June 5, 2	2001-06-05
Technique for chemical mechanical polishing silicon App 20010000586 - Li, Shijian ; et al.	2001-05-03
Method of post CMP defect stability improvement Grant 6,220,941 - Fishkin , et al. April 24, 2	2001-04-24
Technique for chemical mechanical polishing silicon Grant 6,162,368 - Li , et al. December 19, 2	2000-12-19
Polishing pad having a grooved pattern for use in a chemical mechanical polishing apparatus Grant 5,984,769 - Bennett , et al. November 16, 1	1999-11-16

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