Patent | Date |
---|
Semi-transparent film grayscale mask Grant 8,685,596 - Gao , et al. April 1, 2 | 2014-04-01 |
Multilayered barrier metal thin-films Grant 8,264,081 - Pan , et al. September 11, 2 | 2012-09-11 |
Error diffusion-derived sub-resolutional grayscale reticle Grant 7,897,302 - Ulrich , et al. March 1, 2 | 2011-03-01 |
Sub-resolutional grayscale reticle Grant 7,887,980 - Ulrich , et al. February 15, 2 | 2011-02-15 |
Method of fabricating grayscale mask using smart cut.RTM. wafer bonding process Grant 7,838,174 - Gao , et al. November 23, 2 | 2010-11-23 |
Terbium-doped, silicon-rich oxide electroluminescent devices and method of making the same Grant 7,811,837 - Li , et al. October 12, 2 | 2010-10-12 |
Method of fabricating a grayscale mask using a wafer bonding process Grant 7,682,761 - Gao , et al. March 23, 2 | 2010-03-23 |
Method of making a grayscale reticle using step-over lithography for shaping microlenses Grant 7,678,512 - Ono , et al. March 16, 2 | 2010-03-16 |
Sub-Resolutional Grayscale Reticle App 20100040958 - Ulrich; Bruce D. ;   et al. | 2010-02-18 |
Error Diffusion-Derived Sub-Resolutional Grayscale Reticle App 20100040959 - Ulrich; Bruce D. ;   et al. | 2010-02-18 |
ZnO film with C-axis orientation Grant 7,597,757 - Conley, Jr. , et al. October 6, 2 | 2009-10-06 |
Nanotip electrode electroluminescence device with contoured phosphor layer Grant 7,589,464 - Conley, Jr. , et al. September 15, 2 | 2009-09-15 |
Rare earth element-doped oxide precursor with silicon nanocrystals Grant 7,585,788 - Zhuang , et al. September 8, 2 | 2009-09-08 |
Silicon oxide thin-films with embedded nanocrystalline silicon Grant 7,544,625 - Joshi , et al. June 9, 2 | 2009-06-09 |
Semi-transparent Film Grayscale Mask App 20090142673 - Gao; Wei ;   et al. | 2009-06-04 |
Metal organic deposition precursor solution synthesis and terbium-doped SiO.sub.2 thin film deposition Grant 7,531,466 - Zhuang , et al. May 12, 2 | 2009-05-12 |
Method to manipulate selectivity of a metal oxide sensor Grant 7,528,695 - Conley, Jr. , et al. May 5, 2 | 2009-05-05 |
Zinc oxide N-I-N electroluminescence device Grant 7,473,150 - Hsu , et al. January 6, 2 | 2009-01-06 |
Reactive gate electrode conductive barrier Grant 7,473,640 - Conley, Jr. , et al. January 6, 2 | 2009-01-06 |
Method of making CMOS devices on strained silicon on glass Grant 7,470,573 - Lee , et al. December 30, 2 | 2008-12-30 |
Carbon nanotube with ZnO asperities Grant 7,462,499 - Conley, Jr. , et al. December 9, 2 | 2008-12-09 |
Method to fabricate combined UV light emitter and phosphor for white light generation Grant 7,442,568 - Ono , et al. October 28, 2 | 2008-10-28 |
Modulated temperature method of atomic layer deposition (ALD) of high dielectric constant films Grant 7,442,415 - Conley, Jr. , et al. October 28, 2 | 2008-10-28 |
Grayscale reticle for precise control of photoresist exposure Grant 7,439,187 - Ono , et al. October 21, 2 | 2008-10-21 |
Method of fabricating a grayscale mask using a wafer bonding process App 20080197107 - Gao; Wei ;   et al. | 2008-08-21 |
Method of making a grayscale reticle using step-over lithography for shaping microlenses App 20080176148 - Ono; Yoshi ;   et al. | 2008-07-24 |
Conductive niobium oxide gate MOSFET Grant 7,400,020 - Gao , et al. July 15, 2 | 2008-07-15 |
Terbium-doped, silicon-rich oxide electroluminescent devices and method of making the same App 20080164569 - Li; Tingkai ;   et al. | 2008-07-10 |
Grayscale reticle for precise control of photoresist exposure App 20080102641 - Ono; Yoshi ;   et al. | 2008-05-01 |
Strain control of epitaxial oxide films using virtual substrates Grant 7,364,989 - Tweet , et al. April 29, 2 | 2008-04-29 |
Rare earth element-doped silicon oxide film electroluminescence device App 20080035946 - Gao; Wei ;   et al. | 2008-02-14 |
Method of fabricating a terbium-doped electroluminescence device via metal organic deposition processes App 20080026494 - Zhuang; Wei-Wei ;   et al. | 2008-01-31 |
Metal organic deposition precursor solution synthesis and terbium-doped SiO2 thin film deposition App 20080026590 - Zhuang; Wei-Wei ;   et al. | 2008-01-31 |
Method to fabricate a nanowire CHEMFET sensor device using selective nanowire deposition Grant 7,309,621 - Conley, Jr. , et al. December 18, 2 | 2007-12-18 |
Sputter-deposited rare earth element-doped silicon oxide film with silicon nanocrystals for electroluminescence applications Grant 7,297,642 - Gao , et al. November 20, 2 | 2007-11-20 |
Method of forming a microlens array having a high fill factor Grant 7,297,473 - Ono , et al. November 20, 2 | 2007-11-20 |
Method for densifying sol-gel films to form microlens structures App 20070259127 - Ono; Yoshi ;   et al. | 2007-11-08 |
Rare earth element-doped oxide precursor with silicon nanocrystals App 20070238239 - Zhuang; Wei-Wei ;   et al. | 2007-10-11 |
Method to manipulate selectivity of a metal oxide sensor App 20070193974 - Conley; John F. JR. ;   et al. | 2007-08-23 |
Method of forming high-luminescence silicon electroluminescence device Grant 7,259,055 - Li , et al. August 21, 2 | 2007-08-21 |
Rare earth element-doped silicon/silicon dioxide lattice structure Grant 7,256,426 - Li , et al. August 14, 2 | 2007-08-14 |
ZnO film with C-axis orientation App 20070108866 - Conley; John F. JR. ;   et al. | 2007-05-17 |
Method of forming a microlens array having a high fill factor App 20070105056 - Ono; Yoshi ;   et al. | 2007-05-10 |
Carbon nanotube with ZnO asperities App 20070099441 - Conley; John F. JR. ;   et al. | 2007-05-03 |
Electroluminescent device Grant 7,208,768 - Ono , et al. April 24, 2 | 2007-04-24 |
Thin film oxide interface Grant 7,196,383 - Joshi , et al. March 27, 2 | 2007-03-27 |
Step-over lithography to produce parabolic photoresist profiles for microlens formation Grant 7,190,526 - Ulrich , et al. March 13, 2 | 2007-03-13 |
Method of SrCu2O2 spin-on precursor synthesis and low temperature p-type thin film deposition App 20070054042 - Zhuang; Wei-Wei ;   et al. | 2007-03-08 |
Method to perform selective atomic layer deposition of zinc oxide Grant 7,160,819 - Conley, Jr. , et al. January 9, 2 | 2007-01-09 |
Strain control of epitaxial oxide films using virtual substrates App 20070004226 - Tweet; Douglas J. ;   et al. | 2007-01-04 |
Nanowire sensor device structures App 20060281321 - Conley; John F. JR. ;   et al. | 2006-12-14 |
Zinc oxide N-I-N electroluminescence device App 20060250072 - Hsu; Sheng Teng ;   et al. | 2006-11-09 |
Conductive niobium oxide gate MOSFET App 20060244028 - Gao; Wei ;   et al. | 2006-11-02 |
MOSFET structures with conductive niobium oxide gates Grant 7,129,552 - Gao , et al. October 31, 2 | 2006-10-31 |
Method to perform selective atomic layer deposition of zinc oxide App 20060240662 - Conley; John F. JR. ;   et al. | 2006-10-26 |
Method to fabricate a nanowire CHEMFET sensor device using selective nanowire deposition App 20060240588 - Conley; John F. JR. ;   et al. | 2006-10-26 |
Silicon oxide thin-films with embedded nanocrystalline silicon App 20060211267 - Joshi; Pooran Chandra ;   et al. | 2006-09-21 |
Nanotip electrode electroluminescence device with contoured phosphor layer App 20060197438 - Conley; John F. JR. ;   et al. | 2006-09-07 |
ZnO nanotip electrode electroluminescence device on silicon substrate App 20060197436 - Conley; John F. JR. ;   et al. | 2006-09-07 |
Method of making CMOS devices on strained silicon on glass App 20060189111 - Lee; Jong-Jan ;   et al. | 2006-08-24 |
High-luminescence silicon electroluminescence device App 20060189014 - Li; Tingkai ;   et al. | 2006-08-24 |
Wide wavelength range silicon electroluminescence device App 20060180816 - Li; Tingkai ;   et al. | 2006-08-17 |
Sputter-deposited rare earth element-doped silicon oxide film with silicon nanocrystals for electroluminescence applications App 20060183305 - Gao; Wei ;   et al. | 2006-08-17 |
Method of fabricating a p-type CaO-doped SrCu.sub.2O.sub.2 thin film Grant 7,087,526 - Zhuang , et al. August 8, 2 | 2006-08-08 |
Method to make silicon nanoparticle from silicon rich-oxide by DC reactive sputtering for electroluminescence application App 20060172555 - Gao; Wei ;   et al. | 2006-08-03 |
Rare earth element-doped silicon/silicon dioxide lattice structure App 20060160335 - Li; Tingkai ;   et al. | 2006-07-20 |
Nanolaminate film atomic layer deposition method Grant 7,053,009 - Conley, Jr. , et al. May 30, 2 | 2006-05-30 |
Multilayered barrier metal thin-films App 20060091554 - Pan; Wei ;   et al. | 2006-05-04 |
Methods of forming a microlens array over a substrate employing a CMP stop Grant 7,029,944 - Conley, Jr. , et al. April 18, 2 | 2006-04-18 |
Methods Of Forming A Microlens Array Over A Substrate Employing A Cmp Stop App 20060073623 - Conley; John F. JR. ;   et al. | 2006-04-06 |
Multi-layered barrier metal thin films for Cu interconnect by ALCVD Grant 7,015,138 - Pan , et al. March 21, 2 | 2006-03-21 |
Directly patternable microlens App 20060046204 - Ono; Yoshi ;   et al. | 2006-03-02 |
Method of making a non-volatile memory using a plasma oxidized high-k charge-trapping layer Grant 6,998,317 - Ono February 14, 2 | 2006-02-14 |
Lens formation by pattern transfer of a photoresist profile App 20060029890 - Ulrich; Bruce D. ;   et al. | 2006-02-09 |
Electroluminescent device App 20050253136 - Ono, Yoshi ;   et al. | 2005-11-17 |
Methods of forming a microlens array App 20050211665 - Gao, Wei ;   et al. | 2005-09-29 |
Methods of forming a microlens array over a substrate App 20050208432 - Conley, John F. JR. ;   et al. | 2005-09-22 |
Charge trap non-volatile memory structure for 2 bits per transistor App 20050205969 - Ono, Yoshi ;   et al. | 2005-09-22 |
Method for depositing a nanolaminate film by atomic layer deposition Grant 6,930,059 - Conley, Jr. , et al. August 16, 2 | 2005-08-16 |
Nanolaminate film atomic layer deposition method App 20050170667 - Conley, John F. JR. ;   et al. | 2005-08-04 |
Method of making a non-volatile memory using a plasma oxidized high-k charge-trapping layer App 20050136586 - Ono, Yoshi | 2005-06-23 |
Thin film oxide interface App 20050136695 - Joshi, Pooran Chandra ;   et al. | 2005-06-23 |
Oxide interface and a method for fabricating oxide thin films Grant 6,902,960 - Joshi , et al. June 7, 2 | 2005-06-07 |
Low power flash memory cell and method App 20050088898 - Hsu, Sheng Teng ;   et al. | 2005-04-28 |
Method to control the interfacial layer for deposition of high dielectric constant films Grant 6,875,677 - Conley, Jr. , et al. April 5, 2 | 2005-04-05 |
MOSFET structures with conductive niobium oxide gates App 20050067664 - Gao, Wei ;   et al. | 2005-03-31 |
Method To Control The Interfacial Layer For Deposition Of High Dielectric Constant Films App 20050070079 - Conley, John F. JR. ;   et al. | 2005-03-31 |
System and method for integrating multiple metal gates for CMOS applications Grant 6,873,048 - Gao , et al. March 29, 2 | 2005-03-29 |
MOSFET threshold voltage tuning with metal gate stack control Grant 6,861,712 - Gao , et al. March 1, 2 | 2005-03-01 |
Low power flash memory cell and method Grant 6,858,514 - Hsu , et al. February 22, 2 | 2005-02-22 |
Low temperature nitridation of silicon App 20040259379 - Ono, Yoshi | 2004-12-23 |
Electrode materials with improved hydrogen degradation resistance Grant 6,833,572 - Zhang , et al. December 21, 2 | 2004-12-21 |
Method of depositing a conductive niobium monoxide film for MOSFET gates Grant 6,825,106 - Gao , et al. November 30, 2 | 2004-11-30 |
Modulated temperature method of atomic layer deposition (ALD) of high dielectric constant films App 20040203254 - Conley, John F. JR. ;   et al. | 2004-10-14 |
Method of low-temperature oxidation of silicon using nitrous oxide App 20040171279 - Ono, Yoshi | 2004-09-02 |
Atomic layer deposition of nanolaminate film App 20040171280 - Conley, John F. JR. ;   et al. | 2004-09-02 |
System and method for integrating multiple metal gates for CMOS applications App 20040171222 - Gao, Wei ;   et al. | 2004-09-02 |
Atomic layer deposition of oxide film App 20040168627 - Conley, John F. JR. ;   et al. | 2004-09-02 |
Reactive gate electrode conductive barrier App 20040164362 - Conley, John F. JR. ;   et al. | 2004-08-26 |
Method of fabricating deep sub-micron CMOS source/drain with MDD and selective CVD silicide Grant 6,780,700 - Iguchi , et al. August 24, 2 | 2004-08-24 |
Low power flash memory cell and method App 20040140504 - Hsu, Sheng Teng ;   et al. | 2004-07-22 |
MOSFET threshold voltage tuning with metal gate stack control App 20040137703 - Gao, Wei ;   et al. | 2004-07-15 |
Oxide interface and a method for fabricating oxide thin films App 20040094808 - Joshi, Pooran Chandra ;   et al. | 2004-05-20 |
Ferroelastic integrated circuit device Grant 6,737,693 - Li , et al. May 18, 2 | 2004-05-18 |
Method of fabricating a nickel silicide on a substrate Grant 6,720,258 - Maa , et al. April 13, 2 | 2004-04-13 |
Plasma method for fabricating oxide thin films Grant 6,689,646 - Joshi , et al. February 10, 2 | 2004-02-10 |
Method to deposit a stacked high-.kappa. gate dielectric for CMOS applications Grant 6,686,212 - Conley, Jr. , et al. February 3, 2 | 2004-02-03 |
Sub-micron MOS transistor App 20040014292 - Ma, Yanjun ;   et al. | 2004-01-22 |
Method for low temperature oxidation of silicon App 20030224619 - Ono, Yoshi ;   et al. | 2003-12-04 |
Dual metal gate CMOS devices App 20030205767 - Ma, Yanjun ;   et al. | 2003-11-06 |
Ferroelastic integrated circuit device App 20030205724 - Li, Tingkai ;   et al. | 2003-11-06 |
Structure and method of making a sub-micron MOS transistor Grant 6,632,731 - Ma , et al. October 14, 2 | 2003-10-14 |
Method of forming a multilayer dielectric stack Grant 6,627,503 - Ma , et al. September 30, 2 | 2003-09-30 |
C-axis oriented lead germanate film Grant 6,616,857 - Li , et al. September 9, 2 | 2003-09-09 |
Method of fabricating a nickel silicide on a substrate App 20030104694 - Maa, Jer-Shen ;   et al. | 2003-06-05 |
Dual metal gate CMOS devices and method for making the same Grant 6,573,134 - Ma , et al. June 3, 2 | 2003-06-03 |
Method and apparatus for radical oxidation of silicon App 20030082923 - Ono, Yoshi | 2003-05-01 |
Electrode materials with improved hydrogen degradation resistance App 20030007319 - Zhang, Fengyan ;   et al. | 2003-01-09 |
Capacitor utilizing c-axis oriented lead germanate film Grant 6,483,137 - Li , et al. November 19, 2 | 2002-11-19 |
Nickel silicide including iridium for use in ultra-shallow junctions with high thermal stability and method of manufacturing the same Grant 6,468,901 - Maa , et al. October 22, 2 | 2002-10-22 |
Dual metal gate CMOS devices and method for making the same App 20020140036 - Ma, Yanjun ;   et al. | 2002-10-03 |
Multi-layered barrier metal thin films for Cu interconnect by ALCVD App 20020140102 - Pan, Wei ;   et al. | 2002-10-03 |
Method of forming a multilayer dielectric stack App 20020130340 - Ma, Yanjun ;   et al. | 2002-09-19 |
Method of fabricating deep sub-micron CMOS source/drain with MDD and selective CVD silicide App 20020106850 - Iguchi, Katsuji ;   et al. | 2002-08-08 |
Methods of using atomic layer deposition to deposit a high dielectric constant material on a substrate Grant 6,420,279 - Ono , et al. July 16, 2 | 2002-07-16 |
Method of forming ferroelastic lead germanate thin films Grant 6,410,346 - Li , et al. June 25, 2 | 2002-06-25 |
Multilayer dielectric stack and method Grant 6,407,435 - Ma , et al. June 18, 2 | 2002-06-18 |
Dose control technique for plasma doping in ultra-shallow junction formations Grant 6,403,453 - Ono , et al. June 11, 2 | 2002-06-11 |
Method of forming ferroelastic lead germanate thin films App 20020063265 - Li, Tingkai ;   et al. | 2002-05-30 |
Ferroelastic Lead Germanate Thin Film And Deposition Method App 20020024072 - LI, TINGKAI ;   et al. | 2002-02-28 |
Capacitor utilizing C-axis oriented lead germanate film App 20020022278 - Li, Tingkai ;   et al. | 2002-02-21 |
Method for improving electrical properties of high dielectric constant films Grant 6,348,373 - Ma , et al. February 19, 2 | 2002-02-19 |
C-axis oriented lead germanate film App 20020018904 - Li, Tingkai ;   et al. | 2002-02-14 |
Doped zirconia, or zirconia-like, dielectric film transistor structure and deposition method for same Grant 6,297,539 - Ma , et al. October 2, 2 | 2001-10-02 |
Ferroelastic lead germanate thin film and deposition method App 20010024835 - Li, Tingkai ;   et al. | 2001-09-27 |
Structure and method of making a sub-micron MOS transistor App 20010009784 - Ma, Yanjun ;   et al. | 2001-07-26 |
Method of forming a doped metal oxide dielectric film Grant 6,207,589 - Ma , et al. March 27, 2 | 2001-03-27 |
Use of silicon germanium and other alloys as the replacement gate for the fabrication of MOSFET Grant 6,200,866 - Ma , et al. March 13, 2 | 2001-03-13 |
Epitaxially grown lead germanate film and deposition method Grant 6,190,925 - Li , et al. February 20, 2 | 2001-02-20 |
Method of forming nitrogen implanted ultrathin gate oxide for dual gate CMOS devices Grant 6,184,110 - Ono , et al. February 6, 2 | 2001-02-06 |
Aluminum-doped zirconium dielectric film transistor structure and deposition method for same Grant 6,060,755 - Ma , et al. May 9, 2 | 2000-05-09 |