Patent | Date |
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Method of Manufacturing Diamond Substrate, Diamond Substrate, and Diamond Composite Substrate App 20220267894 - Okahisa; Takuji ;   et al. | 2022-08-25 |
Method of manufacturing diamond substrate, diamond substrate, and diamond composite substrate Grant 11,359,275 - Okahisa , et al. June 14, 2 | 2022-06-14 |
Method Of Manufacturing Diamond Substrate, Diamond Substrate, And Diamond Composite Substrate App 20210010131 - Okahisa; Takuji ;   et al. | 2021-01-14 |
Method of manufacturing diamond substrate, diamond substrate, and diamond composite substrate Grant 10,822,693 - Okahisa , et al. November 3, 2 | 2020-11-03 |
Method Of Manufacturing Diamond Substrate, Diamond Substrate, And Diamond Composite Substrate App 20200040446 - Okahisa; Takuji ;   et al. | 2020-02-06 |
Method of manufacturing diamond substrate, diamond substrate, and diamond composite substrate Grant 10,487,395 - Okahisa , et al. Nov | 2019-11-26 |
Method Of Manufacturing Diamond Substrate, Diamond Substrate, And Diamond Composite Substrate App 20180209038 - Okahisa; Takuji ;   et al. | 2018-07-26 |
GaN-crystal free-standing substrate and method for producing the same Grant 9,153,742 - Fujiwara , et al. October 6, 2 | 2015-10-06 |
Composite of III-nitride crystal on laterally stacked substrates Grant 9,064,706 - Mizuhara , et al. June 23, 2 | 2015-06-23 |
Composite of III-Nitride Crystal on Laterally Stacked Substrates App 20150008563 - Mizuhara; Naho ;   et al. | 2015-01-08 |
Composite of III-nitride crystal on laterally stacked substrates Grant 8,872,309 - Mizuhara , et al. October 28, 2 | 2014-10-28 |
III-nitride single-crystal ingot, III-nitride single-crystal substrate, method of manufacturing III-nitride single-crystal ingot, and method of manufacturing III-nitride single-crystal substrate Grant 8,845,992 - Okahisa , et al. September 30, 2 | 2014-09-30 |
Composite of III-Nitride Crystal on Laterally Stacked Substrates App 20140175616 - Mizuhara; Naho ;   et al. | 2014-06-26 |
Method of manufacturing III-nitride crystal Grant 8,709,923 - Mizuhara , et al. April 29, 2 | 2014-04-29 |
Group III nitride semiconductor crystal substrate and semiconductor device Grant 8,698,282 - Okahisa , et al. April 15, 2 | 2014-04-15 |
GaN-CRYSTAL FREE-STANDING SUBSTRATE AND METHOD FOR PRODUCING THE SAME App 20130292737 - FUJIWARA; Shinsuke ;   et al. | 2013-11-07 |
GaN-crystal free-standing substrate and method for producing the same Grant 8,574,364 - Fujiwara , et al. November 5, 2 | 2013-11-05 |
Fabrication Method And Fabrication Apparatus Of Group Iii Nitride Crystal Substance App 20130244406 - KASAI; Hitoshi ;   et al. | 2013-09-19 |
COMPOSITE GaN SUBSTRATE, METHOD FOR MANUFACTURING COMPOSITE GaN SUBSTRATE, GROUP III NITRIDE SEMICONDUCTOR DEVICE, AND METHOD FOR MANUFACTURING GROUP III NITRIDE SEMICONDUCTOR DEVICE App 20130175543 - Kiyama; Makoto ;   et al. | 2013-07-11 |
Method of Manufacturing III-Nitride Crystal App 20130160699 - Mizuhara; Naho ;   et al. | 2013-06-27 |
Group III nitride semiconductor substrate and manufacturing method thereof Grant 8,421,190 - Okahisa , et al. April 16, 2 | 2013-04-16 |
Group-III nitride crystal composite Grant 8,404,042 - Mizuhara , et al. March 26, 2 | 2013-03-26 |
Fabrication method and fabrication apparatus of group III nitride crystal substance Grant 8,404,569 - Kasai , et al. March 26, 2 | 2013-03-26 |
Group-III Nitride Crystal Composite App 20120315445 - Mizuhara; Naho ;   et al. | 2012-12-13 |
Method of manufacturing III-nitride crystal, and semiconductor device utilizing the crystal Grant 8,258,051 - Mizuhara , et al. September 4, 2 | 2012-09-04 |
Method For Manufacturing Gallium Nitride Crystal And Gallium Nitride Wafer App 20120164058 - UEMURA; Tomoki ;   et al. | 2012-06-28 |
Al.sub.xIn.sub.yGa.sub.l-x-yN mixture crystal substrate, method of growing same and method of producing same Grant 8,198,177 - Nakahata , et al. June 12, 2 | 2012-06-12 |
Method for manufacturing gallium nitride crystal and gallium nitride wafer Grant 8,147,612 - Uemura , et al. April 3, 2 | 2012-04-03 |
AlxInyGa1-x-yN MIXTURE CRYSTAL SUBSTRATE, METHOD OF GROWING SAME AND METHOD OF PRODUCING SAME App 20120040511 - NAKAHATA; Seiji ;   et al. | 2012-02-16 |
GaN-CRYSTAL FREE-STANDING SUBSTRATE AND METHOD FOR PRODUCING THE SAME App 20120034149 - Fujiwara; Shinsuke ;   et al. | 2012-02-09 |
Manufacturing method of nitride substrate, nitride substrate, and nitride-based semiconductor device Grant 8,097,528 - Okahisa , et al. January 17, 2 | 2012-01-17 |
Al.sub.xIn.sub.yGa.sub.1-x-yN mixture crystal substrate, method of growing same and method of producing same Grant 8,067,300 - Nakahata , et al. November 29, 2 | 2011-11-29 |
GaN SINGLE CRYSTAL SUBSTRATE AND METHOD OF MAKING THE SAME App 20110163323 - Motoki; Kensaku ;   et al. | 2011-07-07 |
Al.sub.xGa.sub.yIn.sub.1-x-yN crystal substrate, semiconductor device, and method of manufacturing the same Grant 7,943,964 - Fujiwara , et al. May 17, 2 | 2011-05-17 |
Fabrication Method And Fabrication Apparatus Of Group Iii Nitride Crystal Substance App 20110065265 - KASAI; Hitoshi ;   et al. | 2011-03-17 |
Group Iii Nitride Semiconductor Substrate And Manufacturing Method Thereof App 20110018003 - OKAHISA; Takuji ;   et al. | 2011-01-27 |
Fabrication method and fabrication apparatus of group III nitride crystal substance Grant 7,858,502 - Kasai , et al. December 28, 2 | 2010-12-28 |
III-Nitride Single-Crystal Ingot, III-Nitride Single-Crystal Substrate, Method of Manufacturing III-Nitride Single-Crystal Ingot, and Method of Manufacturing III-Nitride Single-Crystal Substrate App 20100322841 - Okahisa; Takuji ;   et al. | 2010-12-23 |
Method of growing GaN crystal, method of producing single crystal GaN substrate, and single crystal GaN substrate Grant 7,794,543 - Motoki , et al. September 14, 2 | 2010-09-14 |
Group III Nitride Semiconductor Crystal Substrate and Semiconductor Device App 20100164070 - OKAHISA; Takuji ;   et al. | 2010-07-01 |
Manufacturing Method of Nitride Substrate, Nitride Substrate, and Nitride-Based Semiconductor Device App 20100155902 - Okahisa; Takuji ;   et al. | 2010-06-24 |
Growth method of GaN crystal, and GaN crystal substrate Grant 7,723,142 - Matsumoto , et al. May 25, 2 | 2010-05-25 |
Manufacturing method of nitride substrate, nitride substrate, and nitride-based semiconductor device Grant 7,691,732 - Okahisa , et al. April 6, 2 | 2010-04-06 |
A1.sub.xIn.sub.yGa.sub.1-x-yN mixture crystal substrate, method of growing same and method of producing same Grant 7,655,960 - Nakahata , et al. February 2, 2 | 2010-02-02 |
Fabrication Method And Fabrication Apparatus Of Group Iii Nitride Crystal Substance App 20100009526 - KASAI; Hitoshi ;   et al. | 2010-01-14 |
Manufacturing Method Of Nitride Substrate, Nitride Substrate, And Nitride-based Semiconductor Device App 20090315149 - OKAHISA; Takuji ;   et al. | 2009-12-24 |
GaN single crystal substrate and method of making the same App 20090263955 - Motoki; Kensaku ;   et al. | 2009-10-22 |
Method of Manufacturing III-Nitride Crystal, and Semiconductor Device Utilizing the Crystal App 20090236694 - Mizuhara; Naho ;   et al. | 2009-09-24 |
Fabrication method and fabrication apparatus of group III nitride crystal substance Grant 7,589,000 - Kasai , et al. September 15, 2 | 2009-09-15 |
AlxInyGa1-x-yN MIXTURE CRYSTAL SUBSTRATE, METHOD OF GROWING SAME AND METHOD OF PRODUCING SAME App 20090215248 - NAKAHATA; Seiji ;   et al. | 2009-08-27 |
Method For Manufacturing Gallium Nitride Crystal And Gallium Nitride Wafer App 20090194848 - Uemura; Tomoki ;   et al. | 2009-08-06 |
A1xGa yIn 1-x-yN CRYSTAL SUBSTRATE, SEMICONDUCTOR DEVICE, AND METHOD OF MANUFACTURING THE SAME App 20090194847 - Fujiwara; Shinsuke ;   et al. | 2009-08-06 |
Group Iii Nitride Semiconductor Crystal Growing Method, Group Iii Nitride Semiconductor Crystal Substrate Fabrication Method, And Group Iii Nitride Semiconductor Crystal Substrate App 20090127663 - Okahisa; Takuji ;   et al. | 2009-05-21 |
Group Iii Nitride Semiconductor Crystal Substrate And Semiconductor Device App 20090127662 - Okahisa; Takuji ;   et al. | 2009-05-21 |
Group Iii Nitride Semiconductor Crystal Growing Method, Group Iii Nitride Semiconductor Crystal Substrate Fabrication Method, And Group Iii Nitride Semiconductor Crystal Substrate App 20090127664 - OKAHISA; Takuji ;   et al. | 2009-05-21 |
Single crystal GaN substrate, method of growing single crystal GaN and method of producing single crystal GaN substrate Grant 7,534,310 - Motoki , et al. May 19, 2 | 2009-05-19 |
Epitaxial substrate and semiconductor element Grant 7,531,889 - Kiyama , et al. May 12, 2 | 2009-05-12 |
Method of Manufacturing GaN Crystal Substrate App 20090101063 - Okahisa; Takuji | 2009-04-23 |
GaN single crystal substrate and method of making the same Grant 7,521,339 - Motoki , et al. April 21, 2 | 2009-04-21 |
AlxInyGa1-x-yN MIXTURE CRYSTAL SUBSTRATE, METHOD OF GROWING AlxInyGa1-x-yN MIXTURE CRYSTAL SUBSTRATE AND METHOD OF PRODUCING AlxInyGa1-x-yN MIXTURE CRYSTAL SUBSTRATE App 20090071394 - NAKAHATA; Seiji ;   et al. | 2009-03-19 |
GaN single crystal substrate and method of making the same Grant 7,504,323 - Motoki , et al. March 17, 2 | 2009-03-17 |
Method for Producing GaxIn1-xN(0<x>) Crystal Gaxin1-xn(0<x<1) Crystalline Substrate, Method for Producing GaN Crystal, GaN Crystalline Substrate, and Product App 20090032907 - Uemura; Tomoki ;   et al. | 2009-02-05 |
Method of manufacturing GaN crystal substrate Grant 7,481,881 - Okahisa January 27, 2 | 2009-01-27 |
Al.sub.xIn.sub.yGa.sub.1-x-yN mixture crystal substrate, method of growing Al.sub.xIn.sub.yGa.sub.1-x-yN mixture crystal substrate and method of producing Al.sub.xIn.sub.yGa.sub.1-x-yN mixture crystal substrate Grant 7,473,315 - Nakahata , et al. January 6, 2 | 2009-01-06 |
GROWTH METHOD OF GaN CRYSTAL, AND GaN CRYSTAL SUBSTRATE App 20080296585 - MATSUMOTO; Naoki ;   et al. | 2008-12-04 |
Nitride Semiconductor Wafer App 20080217745 - Miyanaga; Michimasa ;   et al. | 2008-09-11 |
Method of growing GaN crystal, method of producing single crystal GaN substrate, and single crystal GaN substrate App 20080202409 - Motoki; Kensaku ;   et al. | 2008-08-28 |
Nitride semiconductor wafer Grant 7,390,359 - Miyanaga , et al. June 24, 2 | 2008-06-24 |
GaN single crystal substrate and method of making the same Grant 7,357,837 - Motoki , et al. April 15, 2 | 2008-04-15 |
Method of growing GaN crystal, method of producing single crystal GaN substrate, and single crystal GaN substrate Grant 7,354,477 - Motoki , et al. April 8, 2 | 2008-04-08 |
Gallium-nitride deposition substrate, method of manufacturing gallium-nitride deposition substrate, and method of manufacturing gallium nitride substrate Grant 7,351,347 - Akita , et al. April 1, 2 | 2008-04-01 |
Method of growing gallium nitride crystal App 20080006201 - Hirota; Ryu ;   et al. | 2008-01-10 |
Method of growing gallium nitride crystal and gallium nitride substrate App 20070280872 - Okahisa; Takuji ;   et al. | 2007-12-06 |
Method of growing GaN crystal, method of producing single crystal GaN substrate, and single crystal GaN substrate Grant 7,303,630 - Motoki , et al. December 4, 2 | 2007-12-04 |
Fabrication method and fabrication apparatus of group III nitride crystal substance App 20070148920 - Kasai; Hitoshi ;   et al. | 2007-06-28 |
GaN single crystal substrate and method of making the same App 20070105351 - Motoki; Kensaku ;   et al. | 2007-05-10 |
Nitride Semiconductor Wafer App 20070096117 - Miyanaga; Michimasa ;   et al. | 2007-05-03 |
Group III nitride semiconductor substrate and manufacturing method thereof App 20070012943 - Okahisa; Takuji ;   et al. | 2007-01-18 |
A1xInyGa1-x-yN mixture crystal substrate, method of growing same and method of producing same App 20060273343 - Nakahata; Seiji ;   et al. | 2006-12-07 |
Single crystal GaN substrate, method of growing single crystal GaN and method of producing single crystal GaN substrate App 20060213429 - Motoki; Kensaku ;   et al. | 2006-09-28 |
Single crystal GaN substrate semiconductor device Grant 7,112,826 - Motoki , et al. September 26, 2 | 2006-09-26 |
Al.sub.xIn.sub.yGa.sub.1-x-yN mixture crystal substrate Grant 7,105,865 - Nakahata , et al. September 12, 2 | 2006-09-12 |
Single crystal GaN substrate, method of growing single crystal GaN and method of producing single crystal GaN substrate Grant 7,087,114 - Motoki , et al. August 8, 2 | 2006-08-08 |
Epitaxial substrate and semiconductor element App 20060046331 - Kiyama; Makoto ;   et al. | 2006-03-02 |
AlxInyGa1-x-yN mixture crystal substrate, method of growing AlxInyGa1-x-yN mixture crystal substrate and method of producing AlxInyGa1-x-yN mixture crystal substrate App 20050183658 - Nakahata, Seiji ;   et al. | 2005-08-25 |
AlxInyGa1-x-yN mixture crystal substrate, method of growing same and method of producing same App 20050161697 - Nakahata, Seiji ;   et al. | 2005-07-28 |
Method of Manufacturing GaN Crystal Substrate App 20050155544 - Okahisa, Takuji | 2005-07-21 |
Method of growing GaN crystal, method of producing single crystal GaN substrate, and single crystal GaN substrate App 20050092234 - Motoki, Kensaku ;   et al. | 2005-05-05 |
Method of growing GaN crystal, method of producing single crystal GaN substrate, and single crystal GaN substrate App 20050076830 - Motoki, Kensaku ;   et al. | 2005-04-14 |
Gallium-nitride Deposition Substrate, Method Of Manufacturing Gallium-nitride Deposition Substrate,and Method Of Manufacturing App 20050064206 - Akita, Katsushi ;   et al. | 2005-03-24 |
GaN single crystal substrate and method of making the same App 20040089222 - Motoki, Kensaku ;   et al. | 2004-05-13 |
Single crystal GaN substrate, method of growing same and method of producing same App 20040089919 - Motoki, Kensaku ;   et al. | 2004-05-13 |
GaN single crystal substrate and method of making the same App 20040072410 - Motoki, Kensaku ;   et al. | 2004-04-15 |
GaN single crystal substrate and method of making the same Grant 6,693,021 - Motoki , et al. February 17, 2 | 2004-02-17 |
Single crystal GaN substrate, method of growing same and method of producing same Grant 6,667,184 - Motoki , et al. December 23, 2 | 2003-12-23 |
Single crystal GaN substrate, method of growing single crystal GaN and method of producing single crystal GaN substrate App 20030145783 - Motoki, Kensaku ;   et al. | 2003-08-07 |
Single crystal GaN substrate, method of growing same and method of producing same App 20030080345 - Motoki, Kensaku ;   et al. | 2003-05-01 |
Method of growing single crystal GaN, method of making single crystal GaN substrate and single crystal GaN substrate Grant 6,468,347 - Motoki , et al. October 22, 2 | 2002-10-22 |
Method of producing a single crystal gallium nitride substrate and single crystal gallium nitride substrate Grant 6,468,882 - Motoki , et al. October 22, 2 | 2002-10-22 |
GaN single crystal substrate and method of producing same Grant 6,413,627 - Motoki , et al. July 2, 2 | 2002-07-02 |
Method of producing a single crystal gallium nitride substrate and single crystal gallium nitride substrate App 20020028564 - Motoki, Kensaku ;   et al. | 2002-03-07 |
Gallium Nitride Single Crystal Substrate And Method Of Proucing Same App 20020011599 - MOTOKI, KENSAKU ;   et al. | 2002-01-31 |