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Exposure apparatus and device manufacturing method Grant 8,035,668 - Sugita , et al. October 11, 2 | 2011-10-11 |
Sample separating apparatus and method, and substrate manufacturing method Grant 7,579,257 - Yanagita , et al. August 25, 2 | 2009-08-25 |
Exposure apparatus and device manufacturing method App 20060158504 - Sugita; Mitsuro ;   et al. | 2006-07-20 |
Process for producing single crystal silicon wafers Grant 7,077,901 - Nakagawa , et al. July 18, 2 | 2006-07-18 |
Method and apparatus for processing composite member Grant 6,979,629 - Yanagita , et al. December 27, 2 | 2005-12-27 |
Sample processing system Grant 6,971,432 - Yanagita , et al. December 6, 2 | 2005-12-06 |
Sample processing system App 20050236114 - Yanagita, Kazutaka ;   et al. | 2005-10-27 |
Separating apparatus, separating method, and method of manufacturing semiconductor substrate Grant 6,900,114 - Ohmi , et al. May 31, 2 | 2005-05-31 |
Sample separating apparatus and method, and substrate manufacturing method App 20050045274 - Yanagita, Kazutaka ;   et al. | 2005-03-03 |
Method and apparatus for separating composite member using fluid App 20040171233 - Ohmi, Kazuaki ;   et al. | 2004-09-02 |
Method and apparatus for separating composite member using fluid Grant 6,746,559 - Ohmi , et al. June 8, 2 | 2004-06-08 |
Separating apparatus, separating method, and method of manufacturing semiconductor substrate App 20040082146 - Ohmi, Kazuaki ;   et al. | 2004-04-29 |
Method and apparatus for processing composite member App 20040067621 - Yanagita, Kazutaka ;   et al. | 2004-04-08 |
Sample processing system App 20040045679 - Yanagita, Kazutaka ;   et al. | 2004-03-11 |
Sample processing system Grant 6,672,358 - Yanagita , et al. January 6, 2 | 2004-01-06 |
Method of manufacturing semiconductor wafer method of using and utilizing the same Grant 6,656,271 - Yonehara , et al. December 2, 2 | 2003-12-02 |
Composite member separating method, thin film manufacturing method, and composite member separating apparatus Grant 6,653,205 - Yanagita , et al. November 25, 2 | 2003-11-25 |
Method and apparatus for processing composite member Grant 6,653,206 - Yanagita , et al. November 25, 2 | 2003-11-25 |
Semiconductor Substrate And Process For Producing The Same Using A Composite Member Having Porous Layers And Varying Thickness And Porosity App 20030190794 - OHMI, KAZUAKI ;   et al. | 2003-10-09 |
Sample processing system Grant 6,629,539 - Yanagita , et al. October 7, 2 | 2003-10-07 |
Process for producing single crystal silicon wafers App 20030183159 - Nakagawa, Katsumi ;   et al. | 2003-10-02 |
Substrate and method of manufacturing the same Grant 6,624,047 - Sakaguchi , et al. September 23, 2 | 2003-09-23 |
Method Of Manufacturing Semiconductor Wafer Method Of Using And Utilizing The Same App 20030159644 - YONEHARA, TAKAO ;   et al. | 2003-08-28 |
Separating apparatus, separating method, and method of manufacturing semiconductor substrate Grant 6,609,446 - Ohmi , et al. August 26, 2 | 2003-08-26 |
Method of separating composite member and process for producing thin film Grant 6,605,518 - Ohmi , et al. August 12, 2 | 2003-08-12 |
Composite member, its separation method, and preparation method of semiconductor substrate by utilization thereof Grant 6,597,039 - Ohmi , et al. July 22, 2 | 2003-07-22 |
Sample separating apparatus and method, and substrate manufacturing method App 20030116275 - Yanagita, Kazutaka ;   et al. | 2003-06-26 |
Method and apparatus for separating composite member using fluid App 20020179243 - Ohmi, Kazuaki ;   et al. | 2002-12-05 |
Method and apparatus for separating composite member using fluid Grant 6,475,323 - Ohmi , et al. November 5, 2 | 2002-11-05 |
Method of producing semiconductor member Grant 6,468,923 - Yonehara , et al. October 22, 2 | 2002-10-22 |
Sample processing system App 20020148570 - Yanagita, Kazutaka ;   et al. | 2002-10-17 |
Composite member, its separation method, and preparation method of semiconductor substrate by utilization thereof App 20020093047 - Ohmi, Kazuaki ;   et al. | 2002-07-18 |
Method and apparatus for separating composite member using fluid App 20020088558 - Ohmi, Kazuaki ;   et al. | 2002-07-11 |
Composite member and separating method therefor, bonded substrate stack and separating method therefor, transfer method for transfer layer, and SOI substrate manufacturing method App 20020081822 - Yanagita, Kazutaka ;   et al. | 2002-06-27 |
Method and apparatus for producing photoelectric conversion device Grant 6,391,743 - Iwane , et al. May 21, 2 | 2002-05-21 |
Method and apparatus for separating composite member using fluid Grant 6,382,292 - Ohmi , et al. May 7, 2 | 2002-05-07 |
Composite member and separating method therefor, bonded substrate stack and separating method therefor, transfer method for transfer layer, and SOI substrate manufacturing method Grant 6,376,332 - Yanagita , et al. April 23, 2 | 2002-04-23 |
Method And Apparatus For Separating Composite Member Using Fluid App 20020029849 - OHMI, KAZUAKI ;   et al. | 2002-03-14 |
Method and apparatus for processing composite member App 20020025652 - Yanagita, Kazutaka ;   et al. | 2002-02-28 |
Composite member separating method, thin film manufacturing method, and composite member separating apparatus App 20010003668 - Yanagita, Kazutaka ;   et al. | 2001-06-14 |
Process for forming an SOI substrate Grant 6,140,209 - Iwane , et al. October 31, 2 | 2000-10-31 |
Chemical vapor deposition apparatus Grant 5,776,255 - Asaba , et al. July 7, 1 | 1998-07-07 |
Process for forming hydrogenated amorphous silicon film Grant 5,723,034 - Ohmi March 3, 1 | 1998-03-03 |
Photoelectric conversion apparatus Grant 5,723,877 - Sugawa , et al. March 3, 1 | 1998-03-03 |
Method of producing a substrate for an amorphous semiconductor Grant 5,563,092 - Ohmi October 8, 1 | 1996-10-08 |
Process for forming metal deposited film containing aluminum as main component by use of alkyl aluminum hydride Grant 5,154,949 - Shindo , et al. October 13, 1 | 1992-10-13 |
Process for forming deposited film and process for producing semiconductor device Grant 5,134,092 - Matsumoto , et al. July 28, 1 | 1992-07-28 |
Luminescing member, process for preparation thereof, and electroluminescent device employing same Grant 4,931,692 - Takagi , et al. June 5, 1 | 1990-06-05 |