OHASHI; Naofumi

Patent Applications and Registrations

Patent applications and USPTO patent grants for OHASHI; Naofumi.The latest application filed is for "method of manufacturing semiconductor device".

Company Profile

42.69.98

OHASHI; Naofumi - Toyama JP
OHASHI; Naofumi - Toyama-shi JP
Ohashi; Naofumi - Tokyo JP
Ohashi; Naofumi - Hannou JP
Ohashi; Naofumi - Hannou-shi JP
Ohashi; Naofumi - Hanno JP
Ohashi; Naofumi - Tsukuba JP
Ohashi, Naofumi - Hanno-shi JP

*profile and listings may contain filings by different individuals or companies with the same name. Review application materials to confirm ownership/assignment.

Patent Activity

Patent	Date
Method Of Manufacturing Semiconductor Device App 20220310386 - KIKUCHI; Toshiyuki ; et al.	2022-09-29
Method Of Manufacturing Semiconductor Device, Substrate Processing Apparatus, And Recording Medium App 20220301864 - ABURATANI; Yukinori ; et al.	2022-09-22
Substrate Processing Apparatus App 20220282369 - YANAGISAWA; Yoshihiko ; et al.	2022-09-08
Substrate processing system, method of manufacturing semiconductor device, and recording medium Grant 11,422,528 - Mizuguchi , et al. August 23, 2	2022-08-23
Substrate Processing Apparatus, Substrate Processing Method, Method Of Manufacturing Semiconductor Device And Non-transitory Computer-readable Recording Medium App 20220262604 - OHASHI; Naofumi	2022-08-18
Method Of Manufacturing Semiconductor Device, Substrate Processing Method, Substrate Processing Apparatus, And Recording Medium App 20220262632 - YAHATA; Takashi ; et al.	2022-08-18
Substrate Processing Apparatus, Method Of Manufacturing Semiconductor Device, And Recording Medium App 20220244707 - OHASHI; Naofumi ; et al.	2022-08-04
Substrate Processing Apparatus App 20220230897 - Yoshino; Teruo ; et al.	2022-07-21
Substrate processing apparatus Grant 11,380,540 - Nakagawa , et al. July 5, 2	2022-07-05
Method of manufacturing semiconductor device by setting process chamber to maintenance enable state Grant 11,355,372 - Mizuguchi , et al. June 7, 2	2022-06-07
Method of manufacturing semiconductor device by setting process chamber maintenance enable state Grant 11,342,212 - Mizuguchi , et al. May 24, 2	2022-05-24
Method of manufacturing semiconductor device Grant 11,322,370 - Itatani , et al. May 3, 2	2022-05-03
Substrate processing apparatus, method of manufacturing semiconductor device, and recording medium Grant 11,314,234 - Ohashi , et al. April 26, 2	2022-04-26
Method of manufacturing semiconductor device, substrate processing apparatus and program Grant 11,305,986 - Yahata , et al. April 19, 2	2022-04-19
Method Of Manufacturing Semiconductor Device By Setting Process Chamber Maintenance Enable State App 20220115254 - MIZUGUCHI; Yasuhiro ; et al.	2022-04-14
Method Of Manufacturing Semiconductor Device App 20220102114 - OHASHI; Naofumi ; et al.	2022-03-31
Method of manufacturing semiconductor device Grant 11,289,350 - Aburatani , et al. March 29, 2	2022-03-29
Substrate Processing System App 20220090263 - YAHATA; Takashi ; et al.	2022-03-24
Substrate Processing Apparatus, Method Of Manufacturing Semiconductor Device And Non-transitory Computer-readable Recording Medium App 20220093447 - OHASHI; Naofumi ; et al.	2022-03-24
Substrate Processing Apparatus, Method Of Manufacturing Semiconductor Device, And Recording Medium App 20220090259 - OHASHI; Naofumi ; et al.	2022-03-24
Substrate Processing Apparatus App 20220090264 - YAHATA; Takashi ; et al.	2022-03-24
Substrate Processing Apparatus App 20220028669 - OHASHI; Naofumi	2022-01-27
Substrate Processing Apparatus App 20210395887 - OHASHI; Naofumi ; et al.	2021-12-23
Method of manufacturing semiconductor device, substrate processing method, substrate processing apparatus, and recording medium Grant 11,145,505 - Yahata , et al. October 12, 2	2021-10-12
Substrate Processing Apparatus App 20210301397 - OHASHI; Naofumi ; et al.	2021-09-30
Substrate processing apparatus Grant 11,104,995 - Yahata , et al. August 31, 2	2021-08-31
Method of Manufacturing Semiconductor Device App 20210217616 - OHASHI; Naofumi ; et al.	2021-07-15
Method of manufacturing semiconductor device Grant 11,043,377 - Ohashi , et al. June 22, 2	2021-06-22
Method of manufacturing semiconductor device Grant 11,037,823 - Takeda , et al. June 15, 2	2021-06-15
Method of manufacturing semiconductor device Grant 11,027,970 - Ohashi , et al. June 8, 2	2021-06-08
Substrate processing apparatus and recording medium Grant 10,978,361 - Sasaki , et al. April 13, 2	2021-04-13
Method of manufacturing semiconductor device and non-transitory computer-readable recording medium capable of adjusting substrate temperature Grant 10,978,310 - Kamakura , et al. April 13, 2	2021-04-13
Method Of Manufacturing Semiconductor Device By Supplying Gas App 20210098251 - NAKAGAWA; Takashi ; et al.	2021-04-01
Substrate Processing Apparatus App 20210098250 - NAKAGAWA; Takashi ; et al.	2021-04-01
Method of manufacturing semiconductor device by supplying gas Grant 10,964,531 - Nakagawa , et al. March 30, 2	2021-03-30
Substrate Processing Apparatus, Method Of Manufacturing Semiconductor Device And Non-transitory Computer-readable Recording Medium App 20210079525 - OHASHI; Naofumi ; et al.	2021-03-18
Substrate processing apparatus Grant 10,934,622 - Yoshino , et al. March 2, 2	2021-03-02
Substrate processing apparatus, substrate processing system and method of manufacturing semiconductor device Grant 10,930,533 - Mizuguchi , et al. February 23, 2	2021-02-23
Method Of Manufacturing Semiconductor Device App 20210028041 - MIZUGUCHI; Yasuhiro ; et al.	2021-01-28
Method Of Manufacturing Semiconductor Device App 20210028042 - MIZUGUCHI; Yasuhiro ; et al.	2021-01-28
Substrate Processing System, Method Of Manufacturing Semiconductor Device, And Recording Medium App 20210003990 - MIZUGUCHI; Yasuhiro ; et al.	2021-01-07
Method of manufacturing lithography template Grant 10,883,172 - Ohashi January 5, 2	2021-01-05
Method Of Manufacturing Semiconductor Device, Substrate Processing Apparatus And Program App 20200346924 - YAHATA; Takashi ; et al.	2020-11-05
Substrate processing apparatus Grant 10,818,476 - Toyoda , et al. October 27, 2	2020-10-27
Method Of Manufacturing Semiconductor Device App 20200286731 - OHASHI; Naofumi ; et al.	2020-09-10
Substrate processing apparatus Grant 10,685,832 - Inada , et al.	2020-06-16
Method of manufacturing semiconductor device by setting process chamber to maintenance enable state Grant 10,651,068 - Mizuguchi , et al.	2020-05-12
Method Of Manufacturing Semiconductor Device And Non-transitory Computer-readable Recording Medium App 20200123654 - OHASHI; Naofumi ; et al.	2020-04-23
Method Of Manufacturing Semiconductor Device App 20200115227 - OHASHI; Naofumi ; et al.	2020-04-16
Substrate Processing Apparatus And Recording Medium App 20200098653 - SASAKI; Takafumi ; et al.	2020-03-26
Method of Manufacturing Semiconductor Device App 20200095120 - OHASHI; Naofumi ; et al.	2020-03-26
Substrate Processing Apparatus, Method Of Manufacturing Semiconductor Device, And Recording Medium App 20200089196 - OHASHI; Naofumi ; et al.	2020-03-19
Method Of Manufacturing Semiconductor Device App 20200051838 - ITATANI; Hideharu ; et al.	2020-02-13
Method Of Manufacturing Semiconductor Device App 20200035523 - ABURATANI; Yukinori ; et al.	2020-01-30
Substrate processing apparatus and method of manufacturing semiconductor device Grant 10,541,170 - Yahata , et al. Ja	2020-01-21
Method of manufacturing semiconductor device Grant 10,533,250 - Ohashi , et al. Ja	2020-01-14
Substrate Processing Apparatus App 20190393057 - SHIMAMOTO; Satoshi ; et al.	2019-12-26
Method of manufacturing semiconductor device Grant 10,503,152 - Ohashi , et al. Dec	2019-12-10
Method of manufacturing semiconductor device Grant 10,453,720 - Aburatani , et al. Oc	2019-10-22
Method of Manufacturing Semiconductor Device and Non-Transitory Computer-Readable Recording Medium App 20190295854 - KAMAKURA; Tsukasa ; et al.	2019-09-26
Method of Manufacturing Semiconductor Device App 20190294151 - OHASHI; Naofumi ; et al.	2019-09-26
Method of manufacturing semiconductor device Grant 10,424,520 - Sasaki , et al. Sept	2019-09-24
Substrate Processing Apparatus And Method Of Manufacturing Semiconductor Device App 20190287843 - YAHATA; Takashi ; et al.	2019-09-19
Substrate Processing Apparatus, Substrate Processing System And Method Of Manufacturing Semiconductor Device App 20190287831 - MIZUGUCHI; Yasuhiro ; et al.	2019-09-19
Method Of Manufacturing Semiconductor Device App 20190242015 - OHASHI; Naofumi ; et al.	2019-08-08
Substrate Processing Apparatus App 20190221468 - OHASHI; Naofumi ; et al.	2019-07-18
Method Of Manufacturing A Semiconductor Device App 20190221460 - MIZUGUCHI; Yasuhiro ; et al.	2019-07-18
Method of manufacturing semiconductor device Grant 10,340,237 - Itatani , et al.	2019-07-02
Substrate Processing Apparatus App 20190085455 - YOSHINO; Teruo ; et al.	2019-03-21
Method Of Manufacturing Semiconductor Device App 20190081014 - ITATANI; Hideharu ; et al.	2019-03-14
Method of processing substrate Grant 10,224,227 - Ohashi , et al.	2019-03-05
Substrate processing apparatus Grant 10,156,798 - Ohashi Dec	2018-12-18
Method of manufacturing semiconductor device having air gap between wirings for low dielectric constant Grant 10,128,128 - Takeda , et al. November 13, 2	2018-11-13
Method Of Manufacturing Semiconductor Device App 20180315651 - TAKEDA; Tsuyoshi ; et al.	2018-11-01
Method of manufacturing semiconductor device Grant 10,115,583 - Shimamoto , et al. October 30, 2	2018-10-30
Method Of Processing Substrate App 20180286727 - OHASHI; Naofumi ; et al.	2018-10-04
Substrate Processing Apparatus App 20180277405 - SHIMAMOTO; Satoshi ; et al.	2018-09-27
Method Of Manufacturing Semiconductor Device App 20180233348 - SHIMAMOTO; Satoshi ; et al.	2018-08-16
Substrate Processing Apparatus App 20180226228 - TOYODA; Kazuyuki ; et al.	2018-08-09
Method of Manufacturing Lithography Template App 20180216226 - OHASHI; Naofumi	2018-08-02
Method of manufacturing semiconductor device Grant 10,014,171 - Aburatani , et al. July 3, 2	2018-07-03
Substrate Processing Apparatus App 20180164702 - OHASHI; Naofumi	2018-06-14
Method of manufacturing semiconductor device Grant 9,991,179 - Ohashi , et al. June 5, 2	2018-06-05
Method of manufacturing semiconductor device Grant 9,966,261 - Yamamoto , et al. May 8, 2	2018-05-08
Method of Manufacturing Semiconductor Device App 20170372894 - ABURATANI; Yukinori ; et al.	2017-12-28
Method For Manufacturing Semiconductor Device And Recording Medium App 20170365459 - OHASHI; Naofumi	2017-12-21
Method Of Manufacturing Semiconductor Device App 20170358506 - OHASHI; Naofumi ; et al.	2017-12-14
Method of manufacturing semiconductor device, substrate processing apparatus, and recording medium Grant 9,786,493 - Ueda , et al. October 10, 2	2017-10-10
Substrate Processing Apparatus App 20170283949 - YAHATA; Takashi ; et al.	2017-10-05
Method Of Manufacturing Semiconductor Device App 20170287731 - TAKEDA; Tsuyoshi ; et al.	2017-10-05
Method of manufacturing semiconductor device Grant 9,735,068 - Ohashi , et al. August 15, 2	2017-08-15
Method of manufacturing semiconductor device Grant 9,728,431 - Ohashi , et al. August 8, 2	2017-08-08
Method of manufacturing semiconductor device Grant 9,698,050 - Ashihara , et al. July 4, 2	2017-07-04
Substrate Processing Apparatus App 20170186634 - YANAGISAWA; Yoshihiko ; et al.	2017-06-29
Method of manufacturing semiconductor device Grant 9,666,477 - Ohashi , et al. May 30, 2	2017-05-30
Method Of Manufacturing Semiconductor Device App 20170098561 - OHASHI; Naofumi ; et al.	2017-04-06
Method Of Manufacturing Semiconductor Device App 20170092517 - OHASHI; Naofumi ; et al.	2017-03-30
Substrate Processing Apparatus and Substrate Processing System App 20170040233 - OHASHI; Naofumi ; et al.	2017-02-09
Method of manufacturing semiconductor device Grant 9,484,249 - Ohashi , et al. November 1, 2	2016-11-01
Substrate Processing Apparatus And Substrate Processing System App 20160293460 - OHASHI; Naofumi ; et al.	2016-10-06
Method Of Manufacturing Semiconductor Device App 20160293480 - OHASHI; Naofumi ; et al.	2016-10-06
Method Of Manufacturing Semiconductor Device App 20160293500 - OHASHI; Naofumi ; et al.	2016-10-06
Method Of Manufacturing Semiconductor Device, Substrate Processing Apparatus, And Recording Medium App 20160284532 - UEDA; Tatsushi ; et al.	2016-09-29
Substrate Processing Apparatus App 20160276183 - OHASHI; Naofumi ; et al.	2016-09-22
Substrate processing apparatus and substrate processing system Grant 9,431,220 - Ohashi , et al. August 30, 2	2016-08-30
Substrate processing apparatus Grant 9,396,930 - Ohashi July 19, 2	2016-07-19
Substrate processing apparatus, method of manufacturing semiconductor device and non-transitory computer-readable recording medium Grant 9,355,866 - Suda , et al. May 31, 2	2016-05-31
Substrate Processing Apparatus App 20160090651 - ASHIHARA; Hiroshi ; et al.	2016-03-31
Substrate Processing Apparatus, Method of Manufacturing Semiconductor Device and Non-Transitory Computer-Readable Recording Medium App 20160093512 - SUDA; Atsuhiko ; et al.	2016-03-31
Method Of Manufacturing Semiconductor Device, Substrate Processing Apparatus, And Recording Medium App 20150294860 - Ohashi; Naofumi	2015-10-15
Substrate processing apparatus and method of manufacturing semiconductor device Grant 9,018,689 - Hirochi , et al. April 28, 2	2015-04-28
Optical Semiconductor Device And Manufacturing Method Thereof App 20120248422 - MINE; Toshiyuki ; et al.	2012-10-04
Process for manufacturing semiconductor integrated circuit device Grant 8,129,275 - Ohashi , et al. March 6, 2	2012-03-06
Manufacturing Method Of Semiconductor Device App 20110230061 - Ohashi; Naofumi ; et al.	2011-09-22
Manufacturing method of semiconductor device Grant 7,955,948 - Ohashi , et al. June 7, 2	2011-06-07
Process For Manufacturing Semiconductor Integrated Circuit Device App 20100136786 - Ohashi; Naofumi ; et al.	2010-06-03
Manufacturing Method Of Semiconductor Device App 20100055926 - Ohashi; Naofumi ; et al.	2010-03-04
Process for manufacturing semiconductor integrated circuit device Grant 7,659,201 - Ohashi , et al. February 9, 2	2010-02-09
Method of removing resist, semiconductor device thereby and method of manufacturing a semiconductor device Grant 7,538,038 - Matsushita , et al. May 26, 2	2009-05-26
Process for manufacturing semiconductor integrated circuit device Grant 7,510,970 - Ohashi , et al. March 31, 2	2009-03-31
Process For Manufacturing Semiconductor Integrated Circuit Device App 20080233736 - Ohashi; Naofumi ; et al.	2008-09-25
Semiconductor Integrated Circuit Device And Manufacturing Method Of Semiconductor Integrated Circuit Device App 20080138979 - NOGUCHI; Junji ; et al.	2008-06-12
Method for forming porous film Grant 7,205,030 - Misawa , et al. April 17, 2	2007-04-17
Process for manufacturing semiconductor integrated circuit device App 20060141792 - Ohashi; Naofumi ; et al.	2006-06-29
Method for manufacturing semiconductor device Grant 7,064,060 - Misawa , et al. June 20, 2	2006-06-20
Semiconductor device Grant 7,053,487 - Saito , et al. May 30, 2	2006-05-30
Method of removing resist, semiconductor device thereby and method of manufacturing a semiconductor device App 20050208756 - Matsushita, Atsushi ; et al.	2005-09-22
Resist removal method and semiconductor device manufactured by using the same App 20050199586 - Matsushita, Atsushi ; et al.	2005-09-15
Method for manufacturing semiconductor device App 20050191847 - Misawa, Kaori ; et al.	2005-09-01
Method for manufacturing semiconductor device App 20050170102 - Matsumoto, Isao ; et al.	2005-08-04
Method of manufacturing a semiconductor device having an interconnect embedded in an insulating film Grant 6,908,847 - Saito , et al. June 21, 2	2005-06-21
Semiconductor integrated circuit device and manufacturing method of semiconductor integrated circuit device Grant 6,864,169 - Noguchi , et al. March 8, 2	2005-03-08
Apparatus and method for producing substrate with electrical wire thereon Grant 6,855,035 - Homma , et al. February 15, 2	2005-02-15
Semiconductor integrated circuit device and manufacturing method of semiconductor integrated circuit device Grant 6,849,535 - Noguchi , et al. February 1, 2	2005-02-01
Semiconductor integrated circuit device and manufacturing method of semiconductor integrated circuit device Grant 6,815,330 - Noguchi , et al. November 9, 2	2004-11-09
Method for forming porous film App 20040213911 - Misawa, Kaori ; et al.	2004-10-28
Process for manufacturing semiconductor integrated circuit device Grant 6,800,557 - Ohashi , et al. October 5, 2	2004-10-05
Semiconductor integrated circuit device and manufacturing method of semiconductor integrated circuit device Grant 6,797,606 - Noguchi , et al. September 28, 2	2004-09-28
Semiconductor integrated circuit device and manufacturing method of semiconductor integrated circuit device Grant 6,797,609 - Noguchi , et al. September 28, 2	2004-09-28
Process for manufacturing semiconductor integrated circuit device App 20040152298 - Ohashi, Naofumi ; et al.	2004-08-05
Semiconductor integrated circuit device and manufacturing method of semiconductor integrated circuit device Grant 6,756,679 - Noguchi , et al. June 29, 2	2004-06-29
Semiconductor integrated circuit device and fabrication process thereof Grant 6,730,590 - Ohashi , et al. May 4, 2	2004-05-04
Semiconductor integrated circuit device and manufacturing method of semiconductor integrated circuit device Grant 6,716,749 - Noguchi , et al. April 6, 2	2004-04-06
Semiconductor device and method for manufacturing the same Grant 6,638,854 - Homma , et al. October 28, 2	2003-10-28
Process for manufacturing semiconductor integrated circuit device App 20030153187 - Ohashi, Naofumi ; et al.	2003-08-14
Semiconductor device App 20030109129 - Saito, Tatsuyuki ; et al.	2003-06-12
Semiconductor device App 20030089928 - Saito, Tatsuyuki ; et al.	2003-05-15
Apparatus and method for producing substrate with electrical wire thereon Grant 6,561,875 - Homma , et al. May 13, 2	2003-05-13
Semiconductor integrated circuit device and manufacturing method of semiconductor integrated circuit device App 20030045086 - Noguchi, Junji ; et al.	2003-03-06
Semiconductor integrated circuit device and manufacturing method of semiconductor integrated circuit device App 20030017692 - Noguchi, Junji ; et al.	2003-01-23
Semiconductor integrated circuit device and manufacturing method of semiconductor integrated circuit device App 20030001277 - Noguchi, Junji ; et al.	2003-01-02
Semiconductor integrated circuit device and fabrication process thereof App 20030003733 - Ohashi, Naofumi ; et al.	2003-01-02
Semiconductor integrated circuit device and manufacturing method of semiconductor integrated circuit device App 20030001280 - Noguchi, Junji ; et al.	2003-01-02
Semiconductor integrated circuit device and manufacturing method of semiconductor integrated circuit device App 20030001183 - Noguchi, Junji ; et al.	2003-01-02
Semiconductor device and method for manufacturing the same App 20030003713 - Homma, Yoshio ; et al.	2003-01-02
Process for manufacturing semiconductor integrated circuit device App 20020192967 - Ohashi, Naofumi ; et al.	2002-12-19
Apparatus and method for producing substrate with electrical wire thereon App 20020193051 - Homma, Yoshio ; et al.	2002-12-19
Semiconductor integrated circuit device and manufacturing method of semiconductor integrated circuit device App 20020142576 - Noguchi, Junji ; et al.	2002-10-03
Semiconductor integrated circuit device and manufacturing method of semiconductor integrated circuit device App 20020127843 - Noguchi, Junji ; et al.	2002-09-12
Semiconductor integrated circuit device and manufacturing method of semiconductor integrated circuit device App 20020127842 - Noguchi, Junji ; et al.	2002-09-12
Semiconductor integrated circuit device and manufacturing method of semiconductor integrated circuit device App 20020119651 - Noguchi, Junji ; et al.	2002-08-29
Semiconductor integrated circuit device and manufacturing method of semiconductor integrated circuit device App 20020113271 - Noguchi, Junji ; et al.	2002-08-22
Process for manufacturing semiconductor integrated circuit device App 20020058363 - Ohashi, Naofumi ; et al.	2002-05-16
Process for manufacturing semiconductor integrated circuit device Grant 6,376,345 - Ohashi , et al. April 23, 2	2002-04-23
Semiconductor device and method for manufacturing the same App 20020025605 - Homma, Yoshio ; et al.	2002-02-28
Method for manufacturing a semiconductor device Grant 6,326,299 - Homma , et al. December 4, 2	2001-12-04
Semiconductor integrated circuit device and fabrication process thereof Grant 6,184,143 - Ohashi , et al. February 6, 2	2001-02-06

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