Offenberg; Michael

Patent Applications and Registrations

Patent applications and USPTO patent grants for Offenberg; Michael.The latest application filed is for "micromechanical sensor element, method for manufacturing a micromechanical sensor element and method for operating a micromechanical sensor element".

Company Profile

0.27.4

Offenberg; Michael - Kirchentellinsfurt N/A DE
Offenberg; Michael - Tuebingen DE
Offenberg; Michael - Tubingen DE

*profile and listings may contain filings by different individuals or companies with the same name. Review application materials to confirm ownership/assignment.

Patent Activity

Patent	Date
Micromechanical sensor element, method for manufacturing a micromechanical sensor element and method for operating a micromechanical sensor element Grant 8,627,719 - Offenberg , et al. January 14, 2	2014-01-14
Micromechanical sensor element, method for manufacturing a micromechanical sensor element and method for operating a micromechanical sensor element App 20100011860 - Offenberg; Michael ; et al.	2010-01-21
Sensor with at least one micromechanical structure, and method for producing it Grant 7,273,764 - Reichenbach , et al. September 25, 2	2007-09-25
Micromechanical component and corresponding production method Grant 7,259,436 - Offenberg , et al. August 21, 2	2007-08-21
Sensor with at least one micromechanical structure, and method for producing it App 20050230708 - Reichenbach, Frank ; et al.	2005-10-20
Sensor with at least one micromechanical structure and method for production thereof Grant 6,936,902 - Reichenbach , et al. August 30, 2	2005-08-30
Sensor with at least one micromechanical structure and method for production thereof App 20040065932 - Reichenbach, Frank ; et al.	2004-04-08
Method of manufacturing micromechanical surface structures by vapor-phase etching Grant 6,558,559 - Becker , et al. May 6, 2	2003-05-06
Micromechanical component and corresponding production method App 20030049878 - Offenberg, Michael ; et al.	2003-03-13
Micromechanical sensor and method for the manufacture thereof Grant 6,318,175 - Muchow , et al. November 20, 2	2001-11-20
Manufacturing method for micromechanical component Grant 6,187,607 - Offenberg , et al. February 13, 2	2001-02-13
Method for manufacturing a rate-of-rotation sensor Grant 6,117,701 - Buchan , et al. September 12, 2	2000-09-12
Micromechanical component having closely spaced apart anchoring areas for a surface structure disposed thereon Grant 5,983,721 - Sulzberger , et al. November 16, 1	1999-11-16
Acceleration sensor Grant 5,959,208 - Muenzel , et al. September 28, 1	1999-09-28
Method of producing acceleration sensors Grant 5,937,275 - Munzel , et al. August 10, 1	1999-08-10
Sensor and method for manufacturing a sensor Grant 5,756,901 - Kurle , et al. May 26, 1	1998-05-26
Process for manufacturing a sensor Grant 5,723,353 - Muenzel , et al. March 3, 1	1998-03-03
Process for producing surface micromechanical structures Grant 5,683,591 - Offenberg November 4, 1	1997-11-04
Suspension for micromechanical structure and micromechanical acceleration sensor Grant 5,646,347 - Weiblen , et al. July 8, 1	1997-07-08
Sensor comprising multilayer substrate Grant 5,631,422 - Sulzberger , et al. May 20, 1	1997-05-20
Acceleration sensor Grant 5,627,317 - Offenberg , et al. May 6, 1	1997-05-06
Method of fabricating a micromechanical sensor Grant 5,616,514 - Muchow , et al. April 1, 1	1997-04-01
Method of manufacturing sensor Grant 5,616,523 - Benz , et al. April 1, 1	1997-04-01
Accelerometer sensor of crystalline material and method for manufacturing the same Grant 5,578,755 - Offenberg November 26, 1	1996-11-26
Acceleration sensor Grant 5,574,222 - Offenberg November 12, 1	1996-11-12
Capacitive accelerometer sensor and method for its manufacture Grant 5,569,852 - Marek , et al. October 29, 1	1996-10-29
Method for manufacturing micro-mechanical components using selective anodization of silicon Grant 5,542,558 - Benz , et al. August 6, 1	1996-08-06
Acceleration sensor Grant 5,461,917 - Marek , et al. October 31, 1	1995-10-31
Mass-flow sensor Grant 5,452,610 - Kleinhans , et al. September 26, 1	1995-09-26
Method of making an acceleration sensor Grant 5,310,450 - Offenberg , et al. May 10, 1	1994-05-10

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