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Organometallic Compounds For The Deposition Of High Purity Tin Oxide And Dry Etching Of The Tin Oxide Films And Deposition Reactors
App 20220306657 - FABULYAK; Diana ; et al. | 2022-09-29 |
Organometallic Compounds And Purification Of Such Organometallic Compounds
App 20210214379 - ODEDRA; Rajesh ; et al. | 2021-07-15 |
Organometallic Compound And Method
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Organometallic Compounds Useful For Chemical Phase Deposition
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Organometallic Compounds And Purification Of Such Organometallic Compounds
App 20200223877 - ODEDRA; Rajesh ; et al. | 2020-07-16 |
Organometallic Compounds And Methods For The Deposition Of High Purity Tin Oxide
App 20190337969 - ODEDRA; Rajesh ; et al. | 2019-11-07 |
Process and method for in-situ dry cleaning of thin film deposition reactors and thin film layers
Grant 10,240,230 - Odedra | 2019-03-26 |
Organometallic Compounds Useful For Chemical Phase Deposition
App 20180155383 - ODEDRA; Rajesh ; et al. | 2018-06-07 |
Molybdenum (IV) amide precursors and use thereof in atomic layer deposition
Grant 9,802,220 - Heys , et al. October 31, 2 | 2017-10-31 |
Molybdenum allyl complexes and use thereof in thin film deposition
Grant 9,175,023 - Odedra , et al. November 3, 2 | 2015-11-03 |
Process And Method For In-situ Dry Cleaning Of Thin Film Deposition Reactors And Thin Film Layers
App 20150218695 - Odedra; Rajesh | 2015-08-06 |
High molecular weight alkyl-allyl cobalttricarbonyl complexes and use thereof for preparing dielectric thin films
Grant 9,028,917 - Odedra , et al. May 12, 2 | 2015-05-12 |
Alkyl-substituted allyl carbonyl metal complexes and use thereof for preparing dielectric thin films
Grant 8,927,748 - Odedra , et al. January 6, 2 | 2015-01-06 |
Molybdenum Allyl Complexes And Use Thereof In Thin Film Deposition
App 20140370192 - Odedra; Rajesh ; et al. | 2014-12-18 |
Methods of atomic layer deposition using titanium-based precursors
Grant RE45,124 - Heys , et al. September 9, 2 | 2014-09-09 |
Plasma Activated Deposition Of A Conformal Film On A Substrate Surface
App 20140209026 - LaVoie; Adrien ; et al. | 2014-07-31 |
Method of plasma activated deposition of a conformal film on a substrate surface
Grant 8,728,955 - LaVoie , et al. May 20, 2 | 2014-05-20 |
Precursors for Plasma Activated Conformal Film Deposition
App 20130210241 - LaVoie; Adrien ; et al. | 2013-08-15 |
Molybdenum (iv) Amide Precursors And Use Thereof In Atomic Layer Deposition
App 20130196065 - Heys; Peter Nicholas ; et al. | 2013-08-01 |
Methods of forming thin metal-containing films by chemical phase deposition
Grant 8,481,121 - Kanjolia , et al. July 9, 2 | 2013-07-09 |
Organometallic precursors for use in chemical phase deposition processes
Grant 8,476,467 - Kanjolia , et al. July 2, 2 | 2013-07-02 |
Alkyl-substituted Allyl Carbonyl Metal Complexes And Use Thereof For Preparing Dielectric Thin Films
App 20130041170 - Odedra; Rajesh ; et al. | 2013-02-14 |
Bubbler for the transportation of substances by a carrier gas
Grant 8,272,626 - Cunning , et al. September 25, 2 | 2012-09-25 |
Methods of atomic layer deposition using titanium-based precursors
Grant 8,221,852 - Heys , et al. July 17, 2 | 2012-07-17 |
High Molecular Weight Alkyl-allyl Cobalttricarbonyl Complexes And Use Thereof For Preparing Dielectric Thin Films
App 20120177845 - Odedra; Rajesh ; et al. | 2012-07-12 |
Compositions And Methods Of Use For Forming Titanium-containing Thin Films
App 20120178266 - Heys; Peter Nicholas ; et al. | 2012-07-12 |
Methods of atomic layer deposition using hafnium and zirconium-based precursors
Grant 8,039,062 - Heys , et al. October 18, 2 | 2011-10-18 |
Methods Of Forming Ruthenium-containing Films By Atomic Layer Deposition
App 20110165780 - Kanjolia; Ravi ; et al. | 2011-07-07 |
Methods Of Forming Thin Metal-containing Films By Chemical Phase Deposition
App 20100261350 - Kanjolia; Ravi ; et al. | 2010-10-14 |
Organometallic Precursors For Use In Chemical Phase Deposition Processes
App 20100256406 - Kanjolia; Ravi ; et al. | 2010-10-07 |
Methods Of Atomic Layer Deposition Using Hafnium And Zirconium-based Precursors
App 20090081385 - Heys; Peter Nicholas ; et al. | 2009-03-26 |
Methods Of Atomic Layer Deposition Using Titanium-based Precursors
App 20090074983 - Heys; Peter Nicholas ; et al. | 2009-03-19 |
Bubbler For the Transportation of Substances By a Carrier Gas
App 20080251016 - Cunning; Hugh ; et al. | 2008-10-16 |
Process and apparatus for the isolation of pure, or substantially pure, organometallic compounds
Grant 7,282,119 - Odedra , et al. October 16, 2 | 2007-10-16 |
Process and apparatus for the isolation of pure, or substantially pure, organometallic compounds
App 20040254389 - Odedra, Rajesh ; et al. | 2004-12-16 |
Method and apparatus for delivering precursors to a plurality of epitaxial reactor sites
App 20040164089 - Ravetz, Megan ; et al. | 2004-08-26 |
Method and apparatus for delivering precursors to a plurality of epitaxial reactor sites
Grant 6,698,728 - Ravetz , et al. March 2, 2 | 2004-03-02 |
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