| Patent | Date |
|---|
RF substrate bias with high power impulse magnetron sputtering (HIPIMS)
Grant 10,692,707 - Weichart , et al. | 2020-06-23 |
Transport and handing-over arrangement for disc-shaped substrates, vacuum treatment installation and method for manufacture treated substrates
Grant 9,694,990 - Voser , et al. July 4, 2 | 2017-07-04 |
Direct liquid deposition
Grant 9,593,407 - Voser , et al. March 14, 2 | 2017-03-14 |
Vacuum Treatment Apparatus
App 20140086711 - Scholte Von Mast; Bart ; et al. | 2014-03-27 |
Method For Manufacturing High Performance Multilayer Ceramic Capacitors
App 20140022694 - Reynolds; Glyn Jeremy ; et al. | 2014-01-23 |
Transport And Handing-over Arrangement For Disc-shaped Substrates, Vacuum Treatment Installation And Method For Manufacture Treated Substrates
App 20130343839 - Voser; Stephan ; et al. | 2013-12-26 |
Procedure and device for the production of a plasma
Grant 8,613,828 - Weichart , et al. December 24, 2 | 2013-12-24 |
Method of magnetron sputtering and a method for determining a power modulation compensation function for a power supply applied to a magnetron sputtering source
Grant 8,574,409 - Kadlec , et al. November 5, 2 | 2013-11-05 |
Vacuum Treatment Apparatus And A Method For Manufacturing
App 20130287527 - Scholte Von Mast; Bart ; et al. | 2013-10-31 |
Apparatus And Method For Depositing A Layer Onto A Substrate
App 20130288477 - Rieschl; Sven Uwe ; et al. | 2013-10-31 |
In-situ Conditioning For Vacuum Processing Of Polymer Substrates
App 20130248358 - Weichart; Juergen | 2013-09-26 |
Target arrangement for mounting / dismounting and method of manufacturing
Grant 8,540,850 - Neusch , et al. September 24, 2 | 2013-09-24 |
Rf Substrate Bias With High Power Impulse Magnetron Sputtering (hipims)
App 20130220802 - Weichart; Jurgen ; et al. | 2013-08-29 |
Gloss level adjustment
Grant 8,512,621 - Mumme August 20, 2 | 2013-08-20 |
Magnetron Sputtering Apparatus
App 20130180850 - Rohrmann; Hartmut ; et al. | 2013-07-18 |
Double Layer Antireflection Coating For Silicon Based Solar Cell Modules
App 20130167921 - Rattunde; Oliver | 2013-07-04 |
Vacuum Processing Device
App 20130133576 - Bazlen; Rolf | 2013-05-30 |
RF substrate bias with high power impulse magnetron sputtering (HIPIMS)
Grant 8,435,389 - Kadlec , et al. May 7, 2 | 2013-05-07 |
Direct Liquid Deposition
App 20130099020 - Voser; Stephan ; et al. | 2013-04-25 |
Wafer Holder And Temperature Conditioning Arrangement And Method Of Manufacturing A Wafer
App 20130052834 - Kielwein; Juergen ; et al. | 2013-02-28 |
Method Of Magnetron Sputtering And A Method For Determining A Power Modulation Compensation Function For A Power Supply Applied To A Magnetron Sputtering Source
App 20120279851 - Kadlec; Stanislav ; et al. | 2012-11-08 |
RF sputtering arrangement
Grant 8,268,142 - Weichart , et al. September 18, 2 | 2012-09-18 |
Process for the deposition of an anti-reflection film on a substrate
Grant 8,263,489 - Rattunde , et al. September 11, 2 | 2012-09-11 |
All Solid-state Electrochemical Double Layer Supercapacitor
App 20120216379 - Martienssen; Werner Oskar ; et al. | 2012-08-30 |
Fuel Cell/ Supercapacitor/ Battery Power System For Vehicular Propulsion
App 20120187906 - Martienssen; Werner Oskar ; et al. | 2012-07-26 |
Reactive Sputtering With Multiple Sputter Sources
App 20120031749 - Dubs; Martin ; et al. | 2012-02-09 |
Method Of Inline Manufacturing A Solar Cell Panel
App 20120009730 - Voser; Stephan ; et al. | 2012-01-12 |
Vacuum Treatment Apparatus
App 20120003064 - Voser; Stephan ; et al. | 2012-01-05 |
Target Shaping
App 20110203920 - Kadlec; Stanislav ; et al. | 2011-08-25 |
Magnetron Source And Method Of Manufacturing
App 20110192715 - Weichart; Juergen | 2011-08-11 |
Target Assembly For A Magnetron Sputtering Apparatus, A Magnetron Sputtering Apparatus And A Method Of Using The Magnetron Sputtering Apparatus
App 20110186421 - Friedli; Hanspeter ; et al. | 2011-08-04 |
Process For The Deposition Of An Anti-reflection Film On A Substrate
App 20110177649 - Rattunde; Oliver ; et al. | 2011-07-21 |
Apparatus And Method For Processing A Substrate
App 20110117702 - Rietzler; Wolfgang ; et al. | 2011-05-19 |
Plasma reactor for the treatment of large size substrates
Grant 7,784,426 - Schmitt August 31, 2 | 2010-08-31 |
Method for combination of light of different wavelengths
Grant 7,760,436 - Zueger July 20, 2 | 2010-07-20 |
Rf Sputtering Arrangement
App 20100155238 - Weichart; Jurgen ; et al. | 2010-06-24 |
Installation for processing a substrate
Grant 7,736,462 - Weichart June 15, 2 | 2010-06-15 |
Rf Sputtering Arrangement
App 20100126853 - Kratzer; Martin | 2010-05-27 |
Method for manufacturing sputter-coated substrates, magnetron source and sputtering chamber with such source
Grant 7,718,042 - Kadlec , et al. May 18, 2 | 2010-05-18 |
Method for positioning a wafer
Grant 7,706,908 - Scholte Van Mast , et al. April 27, 2 | 2010-04-27 |
Method for controlling plasma density or the distribution thereof
Grant 7,678,240 - Krassnitzer March 16, 2 | 2010-03-16 |
Apparatus For Sputtering And A Method Of Fabricating A Metallization Structure
App 20090263966 - Weichart; Juergen ; et al. | 2009-10-22 |
Processing Chamber
App 20090252892 - Weichart; Jurgen | 2009-10-08 |
Method of manufacturing vacuum plasma treated workpieces
Grant 7,595,096 - Elyaakoubi , et al. September 29, 2 | 2009-09-29 |
Reactive Sputtering With Hipims
App 20090173622 - Weichart; Juergen ; et al. | 2009-07-09 |
Method Of Magnetron Sputtering And A Method For Determining A Power Modulation Compensation Function For A Power Supply Applied To A Magnetron Sputtering Source
App 20090173621 - Kadlec; Stanislav ; et al. | 2009-07-09 |
Procedure and device for the production of a plasma
App 20090145554 - Weichart; Jurgen ; et al. | 2009-06-11 |
Method for producing a directional layer by cathode sputtering, and device for implementing the method
App 20090134011 - Rohrmann; Hartmut ; et al. | 2009-05-28 |
Color Wheel Fabrication
App 20090122273 - Menard; Jean Pierre ; et al. | 2009-05-14 |
Application Of Hipims To Through Silicon Via Metallization In Three-dimensional Wafer Packaging
App 20090111216 - Weichart; Jurgen ; et al. | 2009-04-30 |
Method For Manufacturing Workpieces And Apparatus
App 20090106968 - Heinz; Bernd | 2009-04-30 |
Diffusion Barrier Layer And Method For Manufacturing A Diffusion Barrier Layer
App 20090087998 - Kharrazi-Olsson; Maryam ; et al. | 2009-04-02 |
Laser Module For Projection Displays
App 20090059975 - Brilliant; Nathan ; et al. | 2009-03-05 |
Diffusion barrier layer and method for manufacturing a diffusion barrier layer
Grant 7,492,091 - Kharrazi-Olsson , et al. February 17, 2 | 2009-02-17 |
Color Wheel With Individual Balancing Masses Along A Guide
App 20090021851 - Janicek; Emil | 2009-01-22 |
Procedure and device for the production of a plasma
Grant 7,476,301 - Weichart , et al. January 13, 2 | 2009-01-13 |
High Oxidation Resistant Hard Coating for Cutting Tools
App 20080318062 - Endrino; Jose ; et al. | 2008-12-25 |
Multitarget Sputter Source And Method For The Deposition Of Multi-layers
App 20080308412 - Rohrmann; Hartmut | 2008-12-18 |
Method For Combination Of Light Of Different Wavelengths
App 20080297904 - ZUEGER; Othmar | 2008-12-04 |
Method for depositing electrically insulating layers
App 20080286496 - Ramm; Jurgen ; et al. | 2008-11-20 |
Test Equipment For Automated Quality Control Of Thin Film Solar Modules
App 20080258747 - Kluth; Oliver ; et al. | 2008-10-23 |
Method For Laser Scribing Of Solar Panels
App 20080237189 - Grunewald; Philipp ; et al. | 2008-10-02 |
Method for the production of a substrate
Grant 7,429,543 - Kadlec , et al. September 30, 2 | 2008-09-30 |
Method for Controlling Plasma Density or the Distribution Thereof
App 20080210548 - Krassnitzer; Siegfried | 2008-09-04 |
Method And Apparatus For Manufacturing A Substrate With A Magnetron Sputter Coating
App 20080210549 - ZUGER; OTHMAR | 2008-09-04 |
Mirror actuating device for projection systems
Grant 7,420,449 - Menard September 2, 2 | 2008-09-02 |
Device for combination of light of different wavelengths
Grant 7,420,740 - Zueger September 2, 2 | 2008-09-02 |
Spectral light division and recombination configuration as well as process for the spectrally selective modulation of light
Grant 7,413,310 - Heine August 19, 2 | 2008-08-19 |
Method for producing color-wheel segments
Grant 7,405,095 - Maissen July 29, 2 | 2008-07-29 |
Optical substrate for enhanced detectability of fluorescence
Grant 7,405,819 - Kraus , et al. July 29, 2 | 2008-07-29 |
Apparatus For Gas Handling In Vacuum Processes
App 20080163817 - Rattunde; Oliver | 2008-07-10 |
Method And Apparatus For Ensuring Quality In Storage Media Production
App 20080163974 - Heinz; Bernd ; et al. | 2008-07-10 |
Night Vision System For Motor Vehicles
App 20080158898 - Nguyes; Van Du | 2008-07-03 |
Component Comprising Submicron Hollow Spaces
App 20080152892 - Edlinger; Johannes ; et al. | 2008-06-26 |
Arc Suppression And Pulsing In High Power Impulse Magnetron Sputtering (hipims)
App 20080135400 - Kadlec; Stanislav ; et al. | 2008-06-12 |
Rf Substrate Bias With High Power Impulse Magnetron Sputtering (hipims)
App 20080135401 - Kadlec; Stanislav ; et al. | 2008-06-12 |
Multilayer Hard Coating For Tools
App 20080131726 - Derflinger; Volker | 2008-06-05 |
Work Piece With A Hard Film Of Alcr-containing Material, And Process For Its Production
App 20080131727 - Derflinger; Volker ; et al. | 2008-06-05 |
Method for the production of a substrate with a magnetron sputter coating and unit for the same
Grant 7,381,661 - Zuger June 3, 2 | 2008-06-03 |
Method for filtering particles from a fluid
Grant 7,371,329 - Edlinger , et al. May 13, 2 | 2008-05-13 |
Method for controlling plasma density or the distribution thereof
Grant 7,368,041 - Krassnitzer May 6, 2 | 2008-05-06 |
Layer system with at least one mixed crystal layer of a multi-oxide
App 20080090099 - Ramm; Jurgen ; et al. | 2008-04-17 |
Night vision system for motor vehicles
Grant 7,357,544 - Nguyes April 15, 2 | 2008-04-15 |
Vacuum process apparatus
Grant RE40,191 - Schertler April 1, 2 | 2008-04-01 |
Vacuum process apparatus
Grant RE40,192 - Schertler April 1, 2 | 2008-04-01 |
Method For Producing Semi-conducting Devices And Devices Obtained With This Method
App 20080076237 - Kroll; Ulrich ; et al. | 2008-03-27 |
Conductive Material Comprising an Me-Dlc Hard Material Coating
App 20080075625 - Jabs; Thomas ; et al. | 2008-03-27 |
Multilayer hard coating for tools
Grant 7,348,074 - Derflinger March 25, 2 | 2008-03-25 |
Method for producing semi-conducting devices and devices obtained with this method
Grant 7,344,909 - Kroll , et al. March 18, 2 | 2008-03-18 |
Coat-stripping unit and method for its operation
App 20080053841 - Baertsch; Hanspeter ; et al. | 2008-03-06 |
Method For The Bonding Of Disk-shaped Substrates And Apparatus For Carrying Out The Method
App 20080053620 - Eisenhammer; Thomas ; et al. | 2008-03-06 |
Color Wheel
App 20080049346 - Cusick; Mike ; et al. | 2008-02-28 |
Vacuum Processing Chamber for Very Large Area Substrates
App 20080050536 - Aing; Phannara ; et al. | 2008-02-28 |
Method for the production of multilayer discs
Grant 7,335,521 - Dubs , et al. February 26, 2 | 2008-02-26 |
Mirror Actuating Device For Projection Systems
App 20080042789 - Menard; Peter | 2008-02-21 |
Cleaning Means For Large Area Pecvd Devices Using A Remote Plasma Source
App 20080035169 - Farmakis; Filippos ; et al. | 2008-02-14 |
Apparatus For Vacuum Treating Two Dimensionally Extended Substrates And Method For Manufacturing Such Substrates
App 20080038095 - Ostermann; Rainer ; et al. | 2008-02-14 |
Method For Manufacturing Poorly Conductive Layers
App 20080020138 - Ramm; Jurgen ; et al. | 2008-01-24 |
Method for the bonding of disk-shaped substrates and apparatus for carrying out the method
Grant 7,311,795 - Eisenhammer , et al. December 25, 2 | 2007-12-25 |
Color Wheel
App 20070279779 - Milbourne; Michael John ; et al. | 2007-12-06 |
Color wheel with aligned segments
Grant 7,295,392 - Auell November 13, 2 | 2007-11-13 |
Adhesion Layer for Thin Film Transistors
App 20070254165 - Tran Quoc; Hai ; et al. | 2007-11-01 |
Capacitively Coupled Rf-Plasma Reactor
App 20070252529 - Belinger; Andy | 2007-11-01 |
Optical device for surface-generated fluorescence
Grant 7,285,789 - Wiki , et al. October 23, 2 | 2007-10-23 |
Balancing Method For Color Wheel
App 20070236816 - Auell; Adam ; et al. | 2007-10-11 |
Wavelength Selective Dielectric Filter And Its Application To Optical Disks
App 20070224385 - Dubs; Martin | 2007-09-27 |
Ellipsometry Device Provided With A Resonance Platform
App 20070216901 - Wiki; Max ; et al. | 2007-09-20 |
Gas Bearing Substrate-Loading Mechanism Process
App 20070215437 - Cassagne; Valerick | 2007-09-20 |
Method And Device For Holding And Centering Of Substrates
App 20070187040 - Edenhofer; Georg ; et al. | 2007-08-16 |
Optical Substrate For Enhanced Detectability Of Fluorescence
App 20070188746 - Kraus; Jorg ; et al. | 2007-08-16 |
Method Of Manufacturing At Least One Sputter-coated Substrate And Sputter Source
App 20070175748 - Atamny; Fachri ; et al. | 2007-08-02 |
Sputter target utilization
App 20070175749 - Schneider; Stefan ; et al. | 2007-08-02 |
Brushing System
App 20070167114 - Fromel; Norbert ; et al. | 2007-07-19 |
Apparatus for vacuum treating two dimensionally extended substrates and method for manufacturing such substrates
Grant 7,244,086 - Ostermann , et al. July 17, 2 | 2007-07-17 |
Ellipsometric biosensor comprising an amplification layer
App 20070159629 - Eing; Andreas ; et al. | 2007-07-12 |
Method For Producing A Space Layer In Between Two Disks With High Uniformity
App 20070154649 - Heinz; Bernd ; et al. | 2007-07-05 |
Optical substrate for enhanced detectability of fluorescence
Grant 7,227,633 - Kraus , et al. June 5, 2 | 2007-06-05 |
Work piece with a hard film of AlCr-containing material, and process for its production
Grant 7,226,670 - Derflinger , et al. June 5, 2 | 2007-06-05 |
Light Integrator Having Two Adhesives
App 20070110383 - Frei; Bertram ; et al. | 2007-05-17 |
Waveguide plate and process for its production and microtitre plate
Grant 7,215,850 - Maisenhoelder , et al. May 8, 2 | 2007-05-08 |
Lasermarkierung Nahe Der Oberflache Bei Innenbearbeiteten Transparenten Korpern
App 20070059455 - Smole; Philipp ; et al. | 2007-03-15 |
Vacuum treatment system and process for manufacturing workpieces
Grant 7,179,352 - Zueger February 20, 2 | 2007-02-20 |
Method for the assembly of light integrators
Grant 7,169,252 - Frei , et al. January 30, 2 | 2007-01-30 |
Method For Generating Electromagnetic Field Distributions
App 20070014017 - Thome-Forster; Heidi ; et al. | 2007-01-18 |
Wavelength-selective Metal Dielectric Filter And Its Application To Optical Discs
App 20070007357 - Dubs; Martin | 2007-01-11 |
Method For Manufacturing Flat Substrates
App 20070004220 - Tran Quoc; Hai ; et al. | 2007-01-04 |
Method and device for vacuum sputtering
Grant 7,155,115 - Cord December 26, 2 | 2006-12-26 |
Atomic layer deposition
Grant 7,153,363 - Ramm December 26, 2 | 2006-12-26 |
Surface acoustic wave device having improved performance and method of making the device
Grant 7,148,610 - Jacot , et al. December 12, 2 | 2006-12-12 |
Method of producing a substrate with a surface treated by a vacuum treatment process, use of said method for the production of coated workpieces and plasma treatment chamber
Grant 7,138,343 - Kadlec , et al. November 21, 2 | 2006-11-21 |
Vacuum treatment system and method of manufacturing same
Grant 7,105,080 - Mullis September 12, 2 | 2006-09-12 |
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