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Focused Ion Beam Processing Apparatus App 20210296080 - OBA; Hiroshi ;   et al. | 2021-09-23 |
Charged particle beam apparatus Grant 11,017,988 - Oba , et al. May 25, 2 | 2021-05-25 |
Composite charged particle beam apparatus and control method thereof Grant 11,017,982 - Sugiyama , et al. May 25, 2 | 2021-05-25 |
Composite Charged Particle Beam Apparatus And Control Method Thereof App 20200266029 - SUGIYAMA; Yasuhiko ;   et al. | 2020-08-20 |
Method of manufacturing emitter Grant 10,658,143 - Nakajima , et al. | 2020-05-19 |
Charged Particle Beam Apparatus App 20200135437 - OBA; Hiroshi ;   et al. | 2020-04-30 |
Method Of Manufacturing Emitter App 20190267208 - NAKAJIMA; Yoko ;   et al. | 2019-08-29 |
Focused ion beam apparatus Grant 10,176,964 - Sugiyama , et al. J | 2019-01-08 |
Charged particle beam apparatus and plasma ignition method Grant 10,056,232 - Oba , et al. August 21, 2 | 2018-08-21 |
Focused ion beam apparatus Grant 9,793,085 - Yasaka , et al. October 17, 2 | 2017-10-17 |
Charged Particle Beam Apparatus And Plasma Ignition Method App 20170278678 - Oba; Hiroshi ;   et al. | 2017-09-28 |
Iridium tip, gas field ion source, focused ion beam apparatus, electron source, electron microscope, electron beam applied analysis apparatus, ion-electron multi-beam apparatus, scanning probe microscope, and mask repair apparatus Grant 9,773,634 - Kozakai , et al. September 26, 2 | 2017-09-26 |
Plasma ion source and charged particle beam apparatus Grant 9,773,637 - Oba , et al. September 26, 2 | 2017-09-26 |
Plasma ion source and charged particle beam apparatus Grant 9,773,646 - Oba , et al. September 26, 2 | 2017-09-26 |
Iridium Tip, Gas Field Ion Source, Focused Ion Beam Apparatus, Electron Source, Electron Microscope, Electron Beam Applied Analysis Apparatus, Ion-Electron Multi-Beam Apparatus, Scanning Probe Microscope, and Mask Repair Apparatus App 20170148603 - Kozakai; Tomokazu ;   et al. | 2017-05-25 |
Emitter structure, gas ion source and focused ion beam system Grant 9,640,361 - Yasaka , et al. May 2, 2 | 2017-05-02 |
Focused Ion Beam Apparatus App 20170069456 - SUGIYAMA; Yasuhiko ;   et al. | 2017-03-09 |
Iridium tip, gas field ion source, focused ion beam apparatus, electron source, electron microscope, electron beam applied analysis apparatus, ion-electron multi-beam apparatus, scanning probe microscope, and mask repair apparatus Grant 9,583,299 - Kozakai , et al. February 28, 2 | 2017-02-28 |
Repair Apparatus App 20160322123 - Aramaki; Fumio ;   et al. | 2016-11-03 |
Plasma Ion Source And Charged Particle Beam Apparatus App 20160240354 - OBA; Hiroshi ;   et al. | 2016-08-18 |
Plasma Ion Source And Charged Particle Beam Apparatus App 20160240346 - OBA; Hiroshi ;   et al. | 2016-08-18 |
Focused ion beam apparatus and control method thereof Grant 9,418,817 - Aramaki , et al. August 16, 2 | 2016-08-16 |
Focused Ion Beam Apparatus App 20160225574 - YASAKA; Anto ;   et al. | 2016-08-04 |
Repair apparatus Grant 9,378,858 - Aramaki , et al. June 28, 2 | 2016-06-28 |
Emitter Structure, Gas Ion Source And Focused Ion Beam System App 20150357147 - YASAKA; Anto ;   et al. | 2015-12-10 |
Emitter structure, gas ion source and focused ion beam system Grant 9,129,771 - Yasaka , et al. September 8, 2 | 2015-09-08 |
Ion beam apparatus Grant 9,111,717 - Asahata , et al. August 18, 2 | 2015-08-18 |
Repair Apparatus App 20150053866 - Aramaki; Fumio ;   et al. | 2015-02-26 |
Iridium Tip, Gas Field Ion Source, Focused Ion Beam Apparatus, Electron Source, Electron Microscope, Electron Beam Applied Analysis Apparatus, Ion-Electron Multi-Beam Apparatus, Scanning Probe Microscope, and Mask Repair Apparatus App 20150047079 - Kozakai; Tomokazu ;   et al. | 2015-02-12 |
Focused Ion Beam Apparatus And Control Method Thereof App 20140292189 - ARAMAKI; Fumio ;   et al. | 2014-10-02 |
Emitter Structure, Gas Ion Source And Focused Ion Beam System App 20140291542 - YASAKA; Anto ;   et al. | 2014-10-02 |
Focused ion beam apparatus and method of adjusting ion beam optics Grant 8,822,911 - Sugiyama , et al. September 2, 2 | 2014-09-02 |
Ion Beam Apparatus App 20130248732 - ASAHATA; Tatsuya ;   et al. | 2013-09-26 |
Focused Ion Beam Apparatus And Method Of Adjusting Ion Beam Optics App 20130240720 - SUGIYAMA; Yasuhiko ;   et al. | 2013-09-19 |
Defect repair apparatus and method for EUV mask using a hydrogen ion beam Grant 8,460,842 - Ogawa , et al. June 11, 2 | 2013-06-11 |
Defect repair apparatus and method for EUV mask App 20110189593 - Ogawa; Takashi ;   et al. | 2011-08-04 |
Photosensitive composition for electrophotography Grant 4,184,871 - Oba , et al. January 22, 1 | 1980-01-22 |
Process for forming vesicular photographic images by employing simultaneous actinic light and infra-red reflex exposure Grant 4,042,391 - Fukutani , et al. August 16, 1 | 1977-08-16 |