O'Neill; Robert Griffith

Patent Applications and Registrations

Patent applications and USPTO patent grants for O'Neill; Robert Griffith.The latest application filed is for "edge ring arrangement with moveable edge rings".

Company Profile

2.4.10

O'Neill; Robert Griffith - Hayward CA
O'Neill; Robert Griffith - Fremont CA

*profile and listings may contain filings by different individuals or companies with the same name. Review application materials to confirm ownership/assignment.

Patent Activity

Patent	Date
Edge Ring Arrangement With Moveable Edge Rings App 20210183687 - Yan; Haoquan ; et al.	2021-06-17
Moveable edge coupling ring for edge process control during semiconductor wafer processing Grant 10,658,222 - Yan , et al.	2020-05-19
Moveable Edge Ring Design App 20190013232 - YAN; Haoquan ; et al.	2019-01-10
Coating System And Method For Coating Interior Fluid Wetted Surfaces Of A Component Of A Semiconductor Substrate Processing Apparatus App 20180127868 - XU; Lin ; et al.	2018-05-10
Coating system and method for coating interior fluid wetted surfaces of a component of a semiconductor substrate processing apparatus Grant 9,873,940 - Xu , et al. January 23, 2	2018-01-23
Calculating power input to an array of thermal control elements to achieve a two-dimensional temperature output Grant 9,435,692 - Waldmann , et al. September 6, 2	2016-09-06
Moveable Edge Coupling Ring For Edge Process Control During Semiconductor Wafer Processing App 20160211166 - Yan; Haoquan ; et al.	2016-07-21
Calculating Power Input To An Array Of Thermal Control Elements To Achieve A Two-dimensional Temperature Output App 20150219499 - Waldmann; Ole ; et al.	2015-08-06
Component Of A Plasma Processing Apparatus Including An Electrically Conductive And Nonmagnetic Cold Sprayed Coating App 20150187615 - Daugherty; John ; et al.	2015-07-02
Coating System And Method For Coating Interior Fluid Wetted Surfaces Of A Component Of A Semiconductor Substrate Processing Apparatus App 20150184296 - Xu; Lin ; et al.	2015-07-02
Edge Ring Assembly For Plasma Processing Chamber And Method Of Manufacture Thereof App 20140034242 - Sant; Sanket P. ; et al.	2014-02-06
Method and system for centering wafer on chuck Grant 8,060,330 - O'Neill , et al. November 15, 2	2011-11-15
Method and System for Centering Wafer on Chuck App 20100150695 - O'Neill; Robert Griffith ; et al.	2010-06-17

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