| Patent | Date |
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EUV chamber apparatus, extreme ultraviolet light generation system, and electronic device manufacturing method
Grant 11,452,196 - Kouge , et al. September 20, 2 | 2022-09-20 |
Target supply device, extreme ultraviolet light generation apparatus, and electronic device manufacturing method
Grant 11,363,706 - Shiraishi , et al. June 14, 2 | 2022-06-14 |
Target supply device, target supply method, and electronic device manufacturing method
Grant 11,320,740 - Hori , et al. May 3, 2 | 2022-05-03 |
Extreme Ultraviolet Light Generation Apparatus And Electronic Device Manufacturing Method
App 20220082927 - HOSHINO; Yusuke ; et al. | 2022-03-17 |
Target Supply Device, Extreme Ultraviolet Light Generation Apparatus, And Electronic Device Manufacturing Method
App 20220015218 - SHIRAISHI; Yutaka ; et al. | 2022-01-13 |
Target Supply Device, Target Supply Method, And Electronic Device Manufacturing Method
App 20210364927 - HORI; Tsukasa ; et al. | 2021-11-25 |
Mount, extreme ultraviolet light generation system, and device manufacturing method
Grant 11,061,340 - Nishisaka July 13, 2 | 2021-07-13 |
Euv Chamber Apparatus, Extreme Ultraviolet Light Generation System, And Electronic Device Manufacturing Method
App 20210029811 - KOUGE; Kouichiro ; et al. | 2021-01-28 |
Mount, Extreme Ultraviolet Light Generation System, And Device Manufacturing Method
App 20200363733 - NISHISAKA; Toshihiro | 2020-11-19 |
Target generation device replacement trolley, target generation device replacement system, and target generation device replacement method
Grant 10,698,316 - Nishisaka | 2020-06-30 |
Tank, target generation device, and extreme-UV-light generation device
Grant 10,674,590 - Hirashita , et al. | 2020-06-02 |
Extreme ultraviolet light generation apparatus
Grant 10,524,343 - Ishihara , et al. Dec | 2019-12-31 |
Extreme Ultraviolet Light Generation Apparatus
App 20190289705 - ISHIHARA; Takanobu ; et al. | 2019-09-19 |
Target Generation Device Replacement Trolley, Target Generation Device Replacement System, And Target Generation Device Replacem
App 20190271914 - NISHISAKA; Toshihiro | 2019-09-05 |
Target generation device and extreme ultraviolet light generation device
Grant 10,372,041 - Shiraishi , et al. | 2019-08-06 |
Target storage device
Grant 10,349,508 - Shiraishi , et al. July 9, 2 | 2019-07-09 |
Target Generation Device And Extreme Ultraviolet Light Generation Device
App 20190155163 - SHIRAISHI; Yutaka ; et al. | 2019-05-23 |
Tank, Target Generation Device, And Extreme-uv-light Generation Device
App 20190008026 - HIRASHITA; Toshiyuki ; et al. | 2019-01-03 |
Extreme ultraviolet light generation device
Grant 10,136,510 - Nagai , et al. November 20, 2 | 2018-11-20 |
Target supply apparatus and EUV light generating apparatus
Grant 10,009,991 - Nishisaka , et al. June 26, 2 | 2018-06-26 |
Target Storage Device
App 20180160518 - SHIRAISHI; Yutaka ; et al. | 2018-06-07 |
Extreme Ultraviolet Light Generation Device
App 20170238407 - NAGAI; Shinji ; et al. | 2017-08-17 |
Extreme ultraviolet light source apparatus
Grant 9,429,847 - Nishisaka , et al. August 30, 2 | 2016-08-30 |
Extreme Ultraviolet Light Source Apparatus
App 20160187787 - NISHISAKA; Toshihiro ; et al. | 2016-06-30 |
Target Supply Apparatus And Euv Light Generating Apparatus
App 20160165708 - NISHISAKA; Toshihiro ; et al. | 2016-06-09 |
Extreme ultraviolet light source apparatus
Grant 9,332,625 - Nishisaka , et al. May 3, 2 | 2016-05-03 |
Target supply device
Grant 9,233,782 - Ishihara , et al. January 12, 2 | 2016-01-12 |
Extreme Ultraviolet Light Source Apparatus
App 20150245457 - NISHISAKA; Toshihiro ; et al. | 2015-08-27 |
Extreme ultraviolet light source apparatus
Grant 9,052,615 - Nishisaka , et al. June 9, 2 | 2015-06-09 |
Chamber and extreme ultraviolet light generation apparatus
Grant 9,040,943 - Nishisaka May 26, 2 | 2015-05-26 |
Target supply device
Grant 8,872,145 - Hirashita , et al. October 28, 2 | 2014-10-28 |
Chamber And Extreme Ultraviolet Light Generation Apparatus
App 20140217311 - NISHISAKA; Toshihiro | 2014-08-07 |
Target Supply Device
App 20140217310 - HIRASHITA; Toshiyuki ; et al. | 2014-08-07 |
Target supply apparatus, chamber, and extreme ultraviolet light generation apparatus
Grant 8,785,895 - Umeda , et al. July 22, 2 | 2014-07-22 |
Target supply device
Grant 8,779,402 - Yabu , et al. July 15, 2 | 2014-07-15 |
Target supply unit
Grant 8,779,401 - Mizoguchi , et al. July 15, 2 | 2014-07-15 |
Chamber apparatus and extreme ultraviolet light generation system
Grant 8,759,804 - Nishisaka , et al. June 24, 2 | 2014-06-24 |
Extreme ultraviolet light generation system
Grant 8,698,111 - Nishisaka , et al. April 15, 2 | 2014-04-15 |
Target Supply Apparatus, Chamber, And Extreme Ultraviolet Light Generation Apparatus
App 20140008552 - UMEDA; Hiroshi ; et al. | 2014-01-09 |
Chamber Apparatus And Extreme Ultraviolet Light Generation System
App 20140001369 - NISHISAKA; Toshihiro ; et al. | 2014-01-02 |
Target Supply Device
App 20130240645 - Ishihara; Takanobu ; et al. | 2013-09-19 |
Target Supply Device
App 20130206863 - YABU; Takayuki ; et al. | 2013-08-15 |
Target Supply Unit And Extreme Ultraviolet Light Generation Apparatus
App 20130075625 - YABU; Takayuki ; et al. | 2013-03-28 |
Apparatus And Method For Measuring And Controlling Target Trajectory In Chamber Apparatus
App 20130062539 - HAYASHI; Hideyuki ; et al. | 2013-03-14 |
Target Supply Unit
App 20130048878 - MIZOGUCHI; Hakaru ; et al. | 2013-02-28 |
Apparatus and method for measuring and controlling target trajectory in chamber apparatus
Grant 8,324,600 - Hayashi , et al. December 4, 2 | 2012-12-04 |
Extreme Ultra Violet Light Source Apparatus
App 20120228527 - ABE; Tamotsu ; et al. | 2012-09-13 |
Extreme ultra violet light source apparatus
Grant 8,212,228 - Abe , et al. July 3, 2 | 2012-07-03 |
Extreme Ultraviolet Light Source System
App 20120119118 - WATANABE; Yukio ; et al. | 2012-05-17 |
Extreme Ultraviolet Light Generation System
App 20120104290 - Nishisaka; Toshihiro ; et al. | 2012-05-03 |
Chamber Apparatus And Extreme Ultraviolet Light Generation System
App 20110309260 - Nishisaka; Toshihiro ; et al. | 2011-12-22 |
Apparatus And Method For Measuring And Controlling Target Trajectory In Chamber Apparatus
App 20100294958 - HAYASHI; Hideyuki ; et al. | 2010-11-25 |
Extreme Ultraviolet Light Source System
App 20100193711 - WATANABE; Yukio ; et al. | 2010-08-05 |
Extreme Ultraviolet Light Source Apparatus
App 20100051832 - NISHISAKA; Toshihiro ; et al. | 2010-03-04 |
Extreme ultra violet light source apparatus
App 20090224181 - Abe; Tamotsu ; et al. | 2009-09-10 |
Excimer laser device
Grant 6,577,664 - Nara , et al. June 10, 2 | 2003-06-10 |
Discharge Circuit For Pulsed Laser And Pulsed Power Source
App 20020003820 - YOSHIDA, DAISUKE ; et al. | 2002-01-10 |
Laser gas controller and charging/discharging device for discharge-excited laser
Grant 5,754,579 - Mizoguchi , et al. May 19, 1 | 1998-05-19 |
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