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Silicon carbide substrate and method of manufacturing the same Grant 11,242,618 - Harada , et al. February 8, 2 | 2022-02-08 |
Silicon Carbide Epitaxial Substrate App 20210328024 - ENOKIZONO; Taro ;   et al. | 2021-10-21 |
Silicon Carbide Epitaxial Substrate And Method For Manufacturing Silicon Carbide Semiconductor Device App 20210296443 - Wada; Keiji ;   et al. | 2021-09-23 |
Silicon carbide epitaxial substrate and method for manufacturing silicon carbide semiconductor device Grant 11,053,607 - Wada , et al. July 6, 2 | 2021-07-06 |
Silicon carbide epitaxial substrate having grooves extending along main surface and method of manufacturing silicon carbide semiconductor device Grant 11,004,941 - Wada , et al. May 11, 2 | 2021-05-11 |
Silicon Carbide Epitaxial Substrate Having Grooves Extending Along Main Surface And Method Of Manufacturing Silicon Carbide Semiconductor Device App 20200365693 - Wada; Keiji ;   et al. | 2020-11-19 |
Silicon carbide epitaxial substrate having grooves extending along main surface and method of manufacturing silicon carbide semiconductor device Grant 10,770,550 - Wada , et al. Sep | 2020-09-08 |
Semiconductor device and method for manufacturing same Grant 10,741,683 - Harada , et al. A | 2020-08-11 |
Semiconductor stack Grant 10,734,222 - Nishiguchi , et al. | 2020-08-04 |
Semiconductor Stack App 20200152457 - Nishiguchi; Taro ;   et al. | 2020-05-14 |
Epitaxial wafer and method for manufacturing same Grant 10,612,160 - Nishiguchi , et al. | 2020-04-07 |
Semiconductor stack Grant 10,580,647 - Nishiguchi , et al. | 2020-03-03 |
Silicon Carbide Epitaxial Substrate And Method Of Manufacturing Silicon Carbide Semiconductor Device App 20200052074 - Wada; Keiji ;   et al. | 2020-02-13 |
Silicon carbide epitaxial substrate having a silicon carbide layer and method of manufacturing silicon carbide semiconductor device Grant 10,490,634 - Wada , et al. Nov | 2019-11-26 |
Epitaxial wafer and method for manufacturing same Grant 10472736 - | 2019-11-12 |
Semiconductor Stack App 20190341247 - NISHIGUCHI; Taro ;   et al. | 2019-11-07 |
Silicon carbide epitaxial substrate and method for manufacturing silicon carbide semiconductor device Grant 10,396,163 - Wada , et al. A | 2019-08-27 |
Semiconductor stack Grant 10,395,924 - Nishiguchi , et al. A | 2019-08-27 |
Semiconductor Stack App 20190088477 - NISHIGUCHI; Taro ;   et al. | 2019-03-21 |
Method for manufacturing silicon carbide epitaxial substrate, silicon carbide epitaxial substrate, method for manufacturing silicon carbide semiconductor device, and silicon carbide semiconductor device Grant 10,229,836 - Wada , et al. | 2019-03-12 |
Silicon Carbide Epitaxial Substrate And Method For Manufacturing Silicon Carbide Semiconductor Device App 20190019868 - Wada; Keiji ;   et al. | 2019-01-17 |
Silicon Carbide Epitaxial Substrate And Method For Manufacturing Silicon Carbide Semiconductor Device App 20190013198 - Itoh; Hironori ;   et al. | 2019-01-10 |
Silicon Carbide Epitaxial Substrate And Method For Manufacturing Silicon Carbide Semiconductor Device App 20180363166 - Wada; Keiji ;   et al. | 2018-12-20 |
Silicon Carbide Epitaxial Substrate And Method Of Manufacturing Silicon Carbide Semiconductor Device App 20180277635 - Wada; Keiji ;   et al. | 2018-09-27 |
Silicon Carbide Epitaxial Substrate App 20180233562 - NISHIGUCHI; Taro ;   et al. | 2018-08-16 |
Epitaxial Wafer And Method For Manufacturing Same App 20180209064 - Nishiguchi; Taro ;   et al. | 2018-07-26 |
Semiconductor Device And Method For Manufacturing Same App 20180204942 - Harada; Shin ;   et al. | 2018-07-19 |
Silicon carbide semiconductor substrate and method for manufacturing same Grant 9,966,249 - Tanaka , et al. May 8, 2 | 2018-05-08 |
Epitaxial wafer and method for manufacturing same Grant 9,957,641 - Nishiguchi , et al. May 1, 2 | 2018-05-01 |
Semiconductor device and method for manufacturing same Grant 9,947,782 - Harada , et al. April 17, 2 | 2018-04-17 |
Method For Manufacturing Silicon Carbide Epitaxial Substrate, Silicon Carbide Epitaxial Substrate, Method For Manufacturing Silicon Carbide Semiconductor Device, And Silicon Carbide Semiconductor Device App 20180096854 - Wada; Keiji ;   et al. | 2018-04-05 |
Method for manufacturing silicon carbide epitaxial substrate, and silicon carbide epitaxial substrate Grant 9,777,404 - Wada , et al. October 3, 2 | 2017-10-03 |
Silicon Carbide Epitaxial Substrate And Method For Manufacturing Silicon Carbide Semiconductor Device App 20170275779 - Nishiguchi; Taro ;   et al. | 2017-09-28 |
Silicon carbide semiconductor device and method for manufacturing same Grant 9,728,628 - Wada , et al. August 8, 2 | 2017-08-08 |
Method Of Manufacturing Silicon Carbide Substrate App 20170152609 - FUJIWARA; Shinsuke ;   et al. | 2017-06-01 |
Method of manufacturing silicon carbide substrate Grant 9,631,296 - Fujiwara , et al. April 25, 2 | 2017-04-25 |
Dislocation in SiC semiconductor substrate Grant 9,583,571 - Nishiguchi , et al. February 28, 2 | 2017-02-28 |
Method For Manufacturing Silicon Carbide Epitaxial Substrate, And Silicon Carbide Epitaxial Substrate App 20160355949 - Wada; Keiji ;   et al. | 2016-12-08 |
Silicon Carbide Semiconductor Device And Method For Manufacturing Same App 20160351667 - Wada; Keiji ;   et al. | 2016-12-01 |
Method And Apparatus For Manufacturing Silicon Carbide Substrate App 20160348274 - GENBA; Jun ;   et al. | 2016-12-01 |
Epitaxial Wafer And Method For Manufacturing Same App 20160326668 - Nishiguchi; Taro ;   et al. | 2016-11-10 |
Silicon Carbide Substrate, Silicon Carbide Ingot, And Method Of Manufacturing The Same App 20160273129 - SASAKI; Makoto ;   et al. | 2016-09-22 |
Dislocation in SiC semiconductor substrate Grant 9,450,054 - Nishiguchi , et al. September 20, 2 | 2016-09-20 |
Silicon Carbide Semiconductor Substrate And Method For Manufacturing Same App 20160233080 - Tanaka; So ;   et al. | 2016-08-11 |
Silicon Carbide Substrate And Method Of Manufacturing The Same App 20160108553 - HARADA; Shin ;   et al. | 2016-04-21 |
Silicon carbide substrate and method of manufacturing the same Grant 9,255,344 - Harada , et al. February 9, 2 | 2016-02-09 |
DISCLOCATION IN SiC SEMICONDUCTOR SUBSTRATE App 20160027879 - NISHIGUCHI; Taro ;   et al. | 2016-01-28 |
Silicon Carbide Epitaxial Substrate And Method Of Manufacturing Silicon Carbide Epitaxial Substrate App 20150233018 - Genba; Jun ;   et al. | 2015-08-20 |
Method Of Maufacturing Silicon Carbide Substrate App 20150225873 - FUJIWARA; Shinsuke ;   et al. | 2015-08-13 |
Method of manufacturing single crystal Grant 9,090,992 - Nishiguchi , et al. July 28, 2 | 2015-07-28 |
Method for manufacturing silicon carbide single crystal, and silicon carbide substrate Grant 9,082,621 - Nishiguchi , et al. July 14, 2 | 2015-07-14 |
Silicon carbide epitaxial substrate and method of manufacturing silicon carbide epitaxial substrate Grant 9,057,147 - Genba , et al. June 16, 2 | 2015-06-16 |
Silicon Carbide Epitaxial Substrate And Method Of Manufacturing Silicon Carbide Epitaxial Substrate App 20150072100 - Genba; Jun ;   et al. | 2015-03-12 |
Semiconductor Substrate App 20150060886 - NISHIGUCHI; Taro ;   et al. | 2015-03-05 |
Dislocations in SiC semiconductor substrate Grant 8,912,550 - Nishiguchi , et al. December 16, 2 | 2014-12-16 |
Silicon carbide crystal ingot, silicon carbide crystal wafer, and method for fabricating silicon carbide crystal ingot Grant 8,642,154 - Hori , et al. February 4, 2 | 2014-02-04 |
Single crystal silicon carbide substrate and method of manufacturing the same Grant 8,642,153 - Hori , et al. February 4, 2 | 2014-02-04 |
Method For Manufacturing Silicon Carbide Substrate App 20140030874 - HONKE; Tsubasa ;   et al. | 2014-01-30 |
Light-emitting device Grant 8,629,457 - Nishiguchi , et al. January 14, 2 | 2014-01-14 |
Ingot, Substrate, And Substrate Group App 20130161647 - FUJIWARA; Shinsuke ;   et al. | 2013-06-27 |
Semiconductor Substrate App 20130161646 - NISHIGUCHI; Taro ;   et al. | 2013-06-27 |
Method for manufacturing silicon carbide substrate Grant 8,435,866 - Nishiguchi , et al. May 7, 2 | 2013-05-07 |
Silicon Carbide Substrate, Silicon Carbide Ingot, And Method Of Manufacturing The Same App 20130095285 - SASAKI; Makoto ;   et al. | 2013-04-18 |
Silicon Carbide Ingot And Silicon Carbide Substrate, And Method Of Manufacturing The Same App 20130095294 - SASAKI; Makoto ;   et al. | 2013-04-18 |
Silicon Carbide Substrate And Method Of Manufacturing The Same App 20130071643 - HARADA; Shin ;   et al. | 2013-03-21 |
Method For Manufacturing Silicon Carbide Crystal App 20130061801 - FUJIWARA; Shinsuke ;   et al. | 2013-03-14 |
Semiconductor Device And Method For Manufacturing Same App 20130009171 - Harada; Shin ;   et al. | 2013-01-10 |
Single Crystal Silicon Carbide Substrate And Method Of Manufacturing The Same App 20120315427 - HORI; Tsutomu ;   et al. | 2012-12-13 |
Silicon Carbide Crystal Ingot, Silicon Carbide Crystal Wafer, And Method For Fabricating Silicon Carbide Crystal Ingot App 20120308758 - HORI; Tsutomu ;   et al. | 2012-12-06 |
Silicon Carbide Substrate, Silicon Carbide Ingot, And Methods For Manufacturing Silicon Carbide Substrate And Silicon Carbide Ingot App 20120294790 - SASAKI; Makoto ;   et al. | 2012-11-22 |
Method For Manufacturing Silicon Carbide Single Crystal, And Silicon Carbide Substrate App 20120275984 - Nishiguchi; Taro ;   et al. | 2012-11-01 |
Silicon Carbide Substrate App 20120244307 - HORI; Tsutomu ;   et al. | 2012-09-27 |
Method And Device For Manufacturing Silicon Carbide Substrate App 20120184113 - Inoue; Hiroki ;   et al. | 2012-07-19 |
Silicon Carbide Substrate App 20120161157 - Inoue; Hiroki ;   et al. | 2012-06-28 |
Method Of Producing Silicon Carbide Crystal, And Silicon Carbide Crystal App 20120156122 - Nishiguchi; Taro | 2012-06-21 |
Method For Manufacturing Silicon Carbide Substrate, Method For Manufacturing Semiconductor Device, Silicon Carbide Substrate, And Semiconductor Device App 20120126251 - Sasaki; Makoto ;   et al. | 2012-05-24 |
Silicon Carbide Substrate Fabrication Method, Semiconductor Device Fabrication Method, Silicon Carbide Substrate, And Semiconductor Device App 20120112209 - Nishiguchi; Taro ;   et al. | 2012-05-10 |
Production Method Of Silicon Carbide Crystal, Silicon Carbide Crystal, And Production Device Of Silicon Carbide Crystal App 20120107218 - Nishiguchi; Taro | 2012-05-03 |
Method for manufacturing semiconductor substrate Grant 8,168,515 - Sasaki , et al. May 1, 2 | 2012-05-01 |
Method For Manufacturing Silicon Carbide Substrate And Silicon Carbide Substrate App 20120068195 - Harada; Shin ;   et al. | 2012-03-22 |
Silicon Carbide Ingot, Silicon Carbide Substrate, Manufacturing Method Thereof, Crucible, And Semiconductor Substrate App 20120070605 - Sasaki; Makoto ;   et al. | 2012-03-22 |
Silicon Carbide Substrate, Semiconductor Device, And Method Of Manufacturing Silicon Carbide Substrate App 20120061686 - Nishiguchi; Taro ;   et al. | 2012-03-15 |
Silicon Carbide Substrate And Semiconductor Device App 20120061687 - Harada; Shin ;   et al. | 2012-03-15 |
Semiconductor Device App 20120056202 - Wada; Keiji ;   et al. | 2012-03-08 |
Insulated Gate Bipolar Transistor App 20120056201 - Wada; Keiji ;   et al. | 2012-03-08 |
Semiconductor Device App 20120056203 - Fujikawa; Kazuhiro ;   et al. | 2012-03-08 |
Semiconductor substrate Grant D655,256 - Nishiguchi , et al. March 6, 2 | 2012-03-06 |
Method For Manufacturing Silicon Carbide Substrate And Silicon Carbide Substrate App 20120032191 - Harada; Shin ;   et al. | 2012-02-09 |
Method For Manufacturing Silicon Carbide Substrate And Silicon Carbide Substrate App 20120025208 - Nishiguchi; Taro ;   et al. | 2012-02-02 |
Method For Manufacturing Silicon Carbide Substrate App 20120017826 - Nishiguchi; Taro ;   et al. | 2012-01-26 |
Method For Manufacturing Semiconductor Substrate App 20120015499 - Sasaki; Makoto ;   et al. | 2012-01-19 |
Method For Manufacturing Silicon Carbide Substrate, Silicon Carbide Substrate, And Semiconductor Device App 20120012862 - Nishiguchi; Taro ;   et al. | 2012-01-19 |
Method For Manufacturing Silicon Carbide Substrate App 20120009761 - Nishiguchi; Taro ;   et al. | 2012-01-12 |
Method Of Manufacturing Single Crystal App 20120006255 - Nishiguchi; Taro ;   et al. | 2012-01-12 |
Semiconductor substrate Grant D651,991 - Nishiguchi , et al. January 10, 2 | 2012-01-10 |
Semiconductor substrate Grant D651,992 - Nishiguchi , et al. January 10, 2 | 2012-01-10 |
Method Of Manufacturing Semiconductor Substrate App 20120003812 - Sasaki; Makoto ;   et al. | 2012-01-05 |
Method For Manufacturing Semiconductor Substrate App 20120003823 - Sasaki; Makoto ;   et al. | 2012-01-05 |
Method Of Manufacturing Silicon Carbide Substrate App 20110306181 - Sasaki; Makoto ;   et al. | 2011-12-15 |
Combined Substrate And Method For Manufacturing Same App 20110300354 - NISHIGUCHI; Taro | 2011-12-08 |
Silicon Carbide Substrate App 20110284873 - Nishiguchi; Taro ;   et al. | 2011-11-24 |
Method For Manufacturing Silicon Carbide Substrate, Method For Manufacturing Semiconductor Device, Silicon Carbide Substrate, And Semiconductor Device App 20110278594 - NISHIGUCHI; Taro ;   et al. | 2011-11-17 |
Method For Manufacturing Silicon Carbide Substrate, Method For Manufacturing Semiconductor Device, Silicon Carbide Substrate, And Semiconductor Device App 20110278595 - Nishiguchi; Taro ;   et al. | 2011-11-17 |
Method For Manufacturing Silicon Carbide Substrate, Method For Manufacturing Semiconductor Device, Silicon Carbide Substrate, And Semiconductor Device App 20110278593 - Nishiguchi; Taro ;   et al. | 2011-11-17 |
Silicon Carbide Substrate And Method For Manufacturing Silicon Carbide Substrate App 20110262680 - Nishiguchi; Taro ;   et al. | 2011-10-27 |
Silicon Carbide Substrate And Method For Manufacturing Silicon Carbide Substrate App 20110262681 - Nishiguchi; Taro ;   et al. | 2011-10-27 |
Manufacturing Method For Crystal, Crystal, And Semiconductor Device App 20110254017 - Nishiguchi; Taro ;   et al. | 2011-10-20 |
Semiconductor Substrate App 20110233561 - NISHIGUCHI; Taro ;   et al. | 2011-09-29 |
Crucible, Crystal Production Device, And Holder App 20110226182 - Sasaki; Makoto ;   et al. | 2011-09-22 |
Manufacturing Method For Crystal, Manufacturing Apparatus For Crystal, And Stacked Film App 20110229719 - NISHIGUCHI; Taro ;   et al. | 2011-09-22 |
Silicon Carbide Crystal, Method Of Manufacturing The Same, Apparatus For Manufacturing The Same, And Crucible App 20110217224 - NISHIGUCHI; Taro | 2011-09-08 |
Method For Manufacturing Silicon Carbide Substrate App 20110198027 - NISHIGUCHI; Taro ;   et al. | 2011-08-18 |
Light-emitting Device App 20110175108 - Nishiguchi; Taro ;   et al. | 2011-07-21 |
Silicon Carbide Substrate App 20110175107 - NISHIGUCHI; Taro ;   et al. | 2011-07-21 |
Method For Manufacturing Semiconductor Substrate App 20110165764 - Sasaki; Makoto ;   et al. | 2011-07-07 |