Patent | Date |
---|
Method Of Manufacturing Semiconductor Device App 20220299874 - KOH; Chawon ;   et al. | 2022-09-22 |
Photoresist Compositions And Methods For Fabricating Semiconductor Devices Using The Same App 20220260906 - KOH; CHAWON ;   et al. | 2022-08-18 |
Photoresist compositions and methods for fabricating semiconductor devices using the same Grant 11,327,398 - Koh , et al. May 10, 2 | 2022-05-10 |
Method Of Manufacturing Integrated Circuit Device Using A Metal-containing Photoresist Composition App 20220059345 - Koh; Chawon ;   et al. | 2022-02-24 |
Photoresist Compositions App 20210380612 - Koh; Chawon ;   et al. | 2021-12-09 |
Resist Compositions And Semiconductor Fabrication Methods Using The Same App 20210181628 - NGUYEN; THANH CUONG ;   et al. | 2021-06-17 |
Photoresist Compositions And Methods For Fabricating Semiconductor Devices Using The Same App 20200348594 - KOH; CHAWON ;   et al. | 2020-11-05 |
Positive resist compositions and patterning process Grant 8,921,025 - Kaneko , et al. December 30, 2 | 2014-12-30 |
Pattern forming process, chemically amplified positive resist composition, and resist-modifying composition Grant 8,658,346 - Watanabe , et al. February 25, 2 | 2014-02-25 |
Resist-modifying composition and pattern forming process Grant 8,426,105 - Watanabe , et al. April 23, 2 | 2013-04-23 |
Acetal compounds and their preparation, polymers, resist compositions and patterning process Grant 8,420,290 - Hasegawa , et al. April 16, 2 | 2013-04-16 |
Pattern forming process and resist-modifying composition Grant 8,367,310 - Watanabe , et al. February 5, 2 | 2013-02-05 |
Resist-modifying composition and pattern forming process Grant 8,329,384 - Watanabe , et al. December 11, 2 | 2012-12-11 |
Double patterning process Grant 8,247,166 - Takemura , et al. August 21, 2 | 2012-08-21 |
Double patterning process Grant 8,129,099 - Takemura , et al. March 6, 2 | 2012-03-06 |
Carboxyl-containing lactone compound, polymer, resist composition, and patterning process Grant 8,062,831 - Shinachi , et al. November 22, 2 | 2011-11-22 |
Positive resist composition and patterning process Grant 7,985,528 - Nishi , et al. July 26, 2 | 2011-07-26 |
Fluorinated monomer, fluorinated polymer, resist composition and patterning process Grant 7,981,589 - Hasegawa , et al. July 19, 2 | 2011-07-19 |
Resist Polymer, Preparing Method, Resist Composition And Patterning Process App 20110054133 - Tachibana; Seiichiro ;   et al. | 2011-03-03 |
Pattern Forming Process, Chemically Amplified Positive Resist Composition, And Resist-modifying Composition App 20110033799 - Watanabe; Takeru ;   et al. | 2011-02-10 |
Lactone-containing compound, polymer, resist composition, and patterning process Grant 7,871,752 - Hasegawa , et al. January 18, 2 | 2011-01-18 |
Fluoroalcohol preparation method, fluorinated monomer, polymer, resist composition and patterning process Grant 7,868,199 - Hasegawa , et al. January 11, 2 | 2011-01-11 |
Positive Resist Compositions And Patterning Process App 20100310986 - KANEKO; Tatsushi ;   et al. | 2010-12-09 |
Resist-modifying Composition And Pattern Forming Process App 20100297554 - Watanabe; Takeru ;   et al. | 2010-11-25 |
Resist-modifying Composition And Pattern Forming Process App 20100297563 - Watanabe; Takeru ;   et al. | 2010-11-25 |
Lactone-containing compound, polymer, resist composition, and patterning process Grant 7,833,694 - Hasegawa , et al. November 16, 2 | 2010-11-16 |
Lactone-containing compounds, polymers, resist compositions, and patterning method Grant RE41,580 - Hasegawa , et al. August 24, 2 | 2010-08-24 |
Pattern Forming Process And Resist-modifying Composition App 20100209849 - Watanabe; Takeru ;   et al. | 2010-08-19 |
Acetal Compounds And Their Preparation, Polymers, Resist Compositions And Patterning Process App 20100136485 - HASEGAWA; Koji ;   et al. | 2010-06-03 |
Positive resist compositions and patterning process Grant 7,727,704 - Taniguchi , et al. June 1, 2 | 2010-06-01 |
Polymers, resist compositions and patterning process Grant 7,718,342 - Funatsu , et al. May 18, 2 | 2010-05-18 |
Positive resist compositions and patterning process Grant 7,691,561 - Taniguchi , et al. April 6, 2 | 2010-04-06 |
Double Patterning Process App 20100062380 - Takemura; Katsuya ;   et al. | 2010-03-11 |
Positive Resist Composition And Patterning Process App 20100062366 - Nishi; Tsunehiro ;   et al. | 2010-03-11 |
Positive resist compositions and patterning process Grant 7,638,260 - Seki , et al. December 29, 2 | 2009-12-29 |
Positive resist composition and patterning process Grant 7,618,765 - Nishi , et al. November 17, 2 | 2009-11-17 |
Positive resist compositions and patterning process Grant 7,618,764 - Tanaka , et al. November 17, 2 | 2009-11-17 |
Carboxyl-containing Lactone Compound, Polymer, Resist Composition, And Patterning Process App 20090274984 - SHINACHI; Satoshi ;   et al. | 2009-11-05 |
Positive resist compositions and patterning process Grant 7,611,821 - Nishi , et al. November 3, 2 | 2009-11-03 |
Polymer, resist composition and patterning process Grant 7,601,479 - Tachibana , et al. October 13, 2 | 2009-10-13 |
Polymer, resist composition and patterning process Grant 7,598,015 - Tachibana , et al. October 6, 2 | 2009-10-06 |
Lactone-containing Compound, Polymer, Resist Composition, And Patterning Process App 20090233242 - HASEGAWA; Koji ;   et al. | 2009-09-17 |
Double Patterning Process App 20090208886 - TAKEMURA; Katsuya ;   et al. | 2009-08-20 |
Positive resist composition and patterning process Grant 7,541,133 - Nishi , et al. June 2, 2 | 2009-06-02 |
Fluorinated Monomer, Fluorinated Polymer, Resist Composition And Patterning Process App 20090035699 - HASEGAWA; Koji ;   et al. | 2009-02-05 |
Positive resist compositions and patterning process App 20080268370 - Tanaka; Shigeo ;   et al. | 2008-10-30 |
Positive resist composition and patterning process App 20080254386 - Nishi; Tsunehiro ;   et al. | 2008-10-16 |
Positive resist composition and patterning process App 20080124652 - Nishi; Tsunehiro ;   et al. | 2008-05-29 |
Positive resist compositions and patterning process App 20080124653 - Seki; Akihiro ;   et al. | 2008-05-29 |
Lactone-containing compound, polymer, resist composition, and patterning process App 20080026331 - HASEGAWA; Koji ;   et al. | 2008-01-31 |
Positive Resist Compositions And Patterning Process App 20080008961 - NISHI; Tsunehiro ;   et al. | 2008-01-10 |
Positive Resist Compositions And Patterning Process App 20080008959 - TANIGUCHI; Ryosuke ;   et al. | 2008-01-10 |
Positive Resist Compositions And Patterning Process App 20080008960 - TANIGUCHI; Ryosuke ;   et al. | 2008-01-10 |
Resist polymer, preparing method, resist composition and patterning process App 20070264592 - Tachibana; Seiichiro ;   et al. | 2007-11-15 |
Resist composition and patterning process App 20070231741 - Nishi; Tsunehiro ;   et al. | 2007-10-04 |
Fluoroalcohol preparation method, fluorinated monomer, polymer, resist composition and patterning process App 20070179309 - Hasegawa; Koji ;   et al. | 2007-08-02 |
Polymers, resist compositions and patterning process App 20070148594 - Funatsu; Kenji ;   et al. | 2007-06-28 |
Photo acid generator, chemical amplification resist material Grant 7,211,367 - Kobayashi , et al. May 1, 2 | 2007-05-01 |
Polymer, resist material and patterning processing Grant 7,157,207 - Funatsu , et al. January 2, 2 | 2007-01-02 |
Resist polymer, resist composition and patterning process Grant 7,135,270 - Watanabe , et al. November 14, 2 | 2006-11-14 |
Photo acid generator, chemical amplification resist material and pattern formation method Grant 7,090,961 - Kobayashi , et al. August 15, 2 | 2006-08-15 |
Photo acid generator, chemical amplification resist material and pattern formation method App 20060160023 - Kobayashi; Tomohiro ;   et al. | 2006-07-20 |
Polymer, resist composition and patterning process App 20050282083 - Funatsu, Kenji ;   et al. | 2005-12-22 |
Polymer, resist composition and patterning process App 20050282082 - Tachibana, Seiichiro ;   et al. | 2005-12-22 |
Acetal compound, polymer, resist composition and patterning process Grant 6,962,767 - Watanabe , et al. November 8, 2 | 2005-11-08 |
Polymer, resist composition and patterning process App 20050208424 - Hasegawa, Koji ;   et al. | 2005-09-22 |
Polymer, resist material and patterning method Grant 6,946,233 - Nishi , et al. September 20, 2 | 2005-09-20 |
Epoxy compound having alicyclic structure, polymer, resist composition and patterning process Grant 6,899,990 - Hasegawa , et al. May 31, 2 | 2005-05-31 |
Polymer, resist material and patterning processing App 20050089796 - Funatsu, Kenji ;   et al. | 2005-04-28 |
Polymer, resist composition and patterning process App 20050058938 - Tachibana, Seiichiro ;   et al. | 2005-03-17 |
Resist polymer, resist composition and patterning process App 20050031988 - Watanabe, Takeru ;   et al. | 2005-02-10 |
Resist polymer, resist composition and patterning process App 20050031989 - Watanabe, Takeru ;   et al. | 2005-02-10 |
Polymer, resist composition and patterning process Grant 6,844,133 - Nishi , et al. January 18, 2 | 2005-01-18 |
Polymer, resist composition and patterning process Grant 6,835,525 - Nishi , et al. December 28, 2 | 2004-12-28 |
Resist composition and patterning process Grant 6,830,866 - Kobayashi , et al. December 14, 2 | 2004-12-14 |
Polymers, resist compositions and patterning process, novel tetrahydrofuran compounds and their preparation Grant 6,794,111 - Nishi , et al. September 21, 2 | 2004-09-21 |
Ether, polymer, resist composition and patterning process Grant 6,784,268 - Tachibana , et al. August 31, 2 | 2004-08-31 |
Polymer, resist composition and patterning process Grant 6,780,563 - Hasegawa , et al. August 24, 2 | 2004-08-24 |
Cyclic acetal compound, polymer, resist composition and patterning process Grant 6,743,566 - Nakashima , et al. June 1, 2 | 2004-06-01 |
Polymer, resist composition and patterning process Grant 6,703,183 - Nishi , et al. March 9, 2 | 2004-03-09 |
Ether, polymer, resist composition and patterning process App 20040013973 - Tachibana, Seiichiro ;   et al. | 2004-01-22 |
Polymers, resist materials, and pattern formation method Grant 6,677,101 - Nishi , et al. January 13, 2 | 2004-01-13 |
Polymer, resist composition and patterning process Grant 6,673,515 - Nishi , et al. January 6, 2 | 2004-01-06 |
Polymer, resist composition and patterning process Grant 6,673,518 - Nishi , et al. January 6, 2 | 2004-01-06 |
Polymer, resist composition and patterning process Grant 6,673,517 - Nishi , et al. January 6, 2 | 2004-01-06 |
Polymer, resist composition and patterning process Grant 6,670,094 - Nishi , et al. December 30, 2 | 2003-12-30 |
Ester compounds, polymers, resist compositions and patterning process Grant 6,670,498 - Nishi , et al. December 30, 2 | 2003-12-30 |
Resist composition and patterning process Grant 6,667,145 - Nishi , et al. December 23, 2 | 2003-12-23 |
Polymer, resist composition and patterning process Grant 6,660,448 - Tachibana , et al. December 9, 2 | 2003-12-09 |
Photo acid generator, chemical amplification resist material and pattern formation method App 20030224290 - Kobayashi, Tomohiro ;   et al. | 2003-12-04 |
Chemical amplification type resist composition Grant 6,653,044 - Takeda , et al. November 25, 2 | 2003-11-25 |
Novel ester compounds polymers, resist compositions and patterning process App 20030198891 - Hasegawa, Koji ;   et al. | 2003-10-23 |
Ether, polymer, resist composition and patterning process Grant 6,624,335 - Tachibana , et al. September 23, 2 | 2003-09-23 |
Acetal compound, polymer, resist composition and patterning response App 20030153706 - Watanabe, Takeru ;   et al. | 2003-08-14 |
Resist composition and patterning process Grant 6,605,408 - Nishi , et al. August 12, 2 | 2003-08-12 |
Polymer, resist composition and patterning process Grant 6,605,678 - Nishi , et al. August 12, 2 | 2003-08-12 |
Polymer, resist composition and patterning process App 20030120009 - Nishi, Tsunehiro ;   et al. | 2003-06-26 |
Polymers, resist compositions and patterning process Grant 6,566,038 - Nishi , et al. May 20, 2 | 2003-05-20 |
Polymer, resist composition and patterning process App 20030091929 - Nishi, Tsunehiro ;   et al. | 2003-05-15 |
Polymer, resist composition and patterning process App 20030087183 - Nishi, Tsunehiro ;   et al. | 2003-05-08 |
Novel ester compounds, polymers, resist compositions and patterning process App 20030088115 - Nishi, Tsunehiro ;   et al. | 2003-05-08 |
Polymers, resist compositions and patterning process App 20030087181 - Nishi, Tsunehiro ;   et al. | 2003-05-08 |
Polymer, resist material and patterning method App 20030054290 - Nishi, Tsunehiro ;   et al. | 2003-03-20 |
Polymer, resist composition and patterning process App 20030054289 - Nishi, Tsunehiro ;   et al. | 2003-03-20 |
Cyclic acetal compound, polymer, resist composition and patterning process App 20030045731 - Nakashima, Mutsuo ;   et al. | 2003-03-06 |
Polymer, resist composition and patterning process Grant 6,524,765 - Nishi , et al. February 25, 2 | 2003-02-25 |
Novel epoxy compound having alicyclic structure, polymer, resist composition and patterning process App 20030036603 - Hasegawa, Koji ;   et al. | 2003-02-20 |
Resist composition and patterning process App 20030013039 - Kobayashi, Tomohiro ;   et al. | 2003-01-16 |
Polymers, resist compositions and patterning process, novel tetrahydrofuran compounds and their preparation App 20020197559 - Nishi, Tsunehiro ;   et al. | 2002-12-26 |
Ether, polymer, resist composition and patterning process App 20020161150 - Tachibana, Seiichiro ;   et al. | 2002-10-31 |
Polymer, resist composition and patterning process App 20020150835 - Nishi, Tsunehiro ;   et al. | 2002-10-17 |
Cyclic acetal compound, polymer, resist composition and patterning process App 20020147290 - Nakashima, Mutsuo ;   et al. | 2002-10-10 |
Polymers, resist materials, and pattern formation method App 20020132182 - Nishi, Tsunehiro ;   et al. | 2002-09-19 |
Acetal compound, polymer, resist composition and patterning response App 20020132970 - Watanabe, Takeru ;   et al. | 2002-09-19 |
Acid-decomposable ester compound suitable for use in resist material Grant 6,448,420 - Kinsho , et al. September 10, 2 | 2002-09-10 |
Ester compounds, polymers, resist composition and patterning process Grant 6,444,396 - Watanabe , et al. September 3, 2 | 2002-09-03 |
Acid-decomposable Ester Compound Suitable For Use In Resist Material App 20020115874 - Kinsho, Takeshi ;   et al. | 2002-08-22 |
Polymer, resist composition and patterning process App 20020115821 - Nishi, Tsunehiro ;   et al. | 2002-08-22 |
Polymer, resist composition and patterning process App 20020115807 - Nishi, Tsunehiro ;   et al. | 2002-08-22 |
Polymer, resist composition and patterning process App 20020102493 - Nishi, Tsunehiro ;   et al. | 2002-08-01 |
Polymer, resist composition and patterning process App 20020091215 - Tachibana, Seiichiro ;   et al. | 2002-07-11 |
Polymer, resist composition and patterning process App 20020061463 - Nishi, Tsunehiro ;   et al. | 2002-05-23 |
Polymer, resist composition and patterning process App 20020061465 - Hasegawa, Koji ;   et al. | 2002-05-23 |
Novel ester compounds having alicyclic and oxirane structures and method for preparing the same App 20020035279 - Watanabe, Takeru ;   et al. | 2002-03-21 |
Novel lactone compounds having alicyclic structure and their manufacturing method App 20020019545 - Kinsho, Takeshi ;   et al. | 2002-02-14 |
Novel lactone compounds having alicyclic structure and their manufacturing method App 20020016477 - Kinsho, Takeshi ;   et al. | 2002-02-07 |
Novel ester compounds, polymers, resist compositions and patterning process App 20020007031 - Nishi, Tsunehiro ;   et al. | 2002-01-17 |
Novel ester compounds, polymers, resist compositions and patterning process App 20020004178 - Hasegawa, Koji ;   et al. | 2002-01-10 |
Resist composition and patterning process App 20020001772 - Nishi, Tsunehiro ;   et al. | 2002-01-03 |
Polymers, resist compositions and patterning process App 20010051315 - Nishi, Tsunehiro ;   et al. | 2001-12-13 |
Novel ester compounds having alicyclic structure and method for preparing same App 20010051742 - Hasegawa, Koji ;   et al. | 2001-12-13 |
Polymers, resist compositions and patterning process App 20010051316 - Nishi, Tsunehiro ;   et al. | 2001-12-13 |
Novel ester compounds having alicyclic structure and method for preparing same App 20010051741 - Watanabe, Takeru ;   et al. | 2001-12-13 |
Novel ester compounds, polymers, resist compositions and patterning process App 20010044071 - Hasegawa, Koji ;   et al. | 2001-11-22 |
Ester compounds, polymers, resist compositions and patterning process Grant 6,312,867 - Kinsho , et al. November 6, 2 | 2001-11-06 |
Chemical amplification type resist composition App 20010036593 - Takeda, Takanobu ;   et al. | 2001-11-01 |
Resist compositions and patterning process App 20010033990 - Hatakeyama, Jun ;   et al. | 2001-10-25 |
Polymer, resist composition and patterning process App 20010031424 - Nishi, Tsunehiro ;   et al. | 2001-10-18 |
Polymer, resist composition and patterning process App 20010026904 - Nishi, Tsunehiro ;   et al. | 2001-10-04 |
Ester compounds, polymers, resist composition and patterning process Grant 6,147,249 - Watanabe , et al. November 14, 2 | 2000-11-14 |
Polymeric compounds, chemically amplified positive type resist materials and process for pattern formation Grant 6,048,661 - Nishi , et al. April 11, 2 | 2000-04-11 |
Di- and triphenyl monoterpene hydrocarbon derivatives, dissolution inhibitors, and chemically amplified positive resist compositions Grant 6,030,746 - Nagata , et al. February 29, 2 | 2000-02-29 |
Bisphenol carboxylic acid tertiary ester derivatives and chemically amplified positive resist compositions Grant 5,856,561 - Nagata , et al. January 5, 1 | 1999-01-05 |