| Patent | Date |
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Acoustic resonator structure having an electrode with a cantilevered portion
Grant 11,108,376 - Choy , et al. August 31, 2 | 2021-08-31 |
Bulk acoustic wave resonator
Grant 10,700,660 - Choy , et al. | 2020-06-30 |
Acoustic resonator structure having an electrode with a cantilevered portion
Grant 10,461,719 - Choy , et al. Oc | 2019-10-29 |
Acoustic resonator having integrated lateral feature and temperature compensation feature
Grant 10,367,472 - Burak , et al. July 30, 2 | 2019-07-30 |
Bulk acoustic wave devices with temperature-compensating niobium alloy electrodes
Grant 10,340,885 - Grannen , et al. | 2019-07-02 |
Acoustic resonator device with at least one air-ring and frame
Grant 10,284,173 - Burak , et al. | 2019-05-07 |
Bulk Acoustic Wave Resonator
App 20190123708 - Choy; John ; et al. | 2019-04-25 |
Acoustic Resonator Structure Having An Electrode With A Cantilevered Portion
App 20190036511 - Choy; John ; et al. | 2019-01-31 |
High-Dielectric Constant Capacitor Structures on III-V Substrates
App 20190006459 - Yeldandi; Satish ; et al. | 2019-01-03 |
Bulk acoustic wave (BAW) resonator structure
Grant 10,128,813 - Thalhammer , et al. November 13, 2 | 2018-11-13 |
Bulk Baw Resonator Having Electrically Insulating Substrate
App 20180183405 - Feng; Chris ; et al. | 2018-06-28 |
Bulk Acoustic Wave (baw) Resonator Structure
App 20170310303 - Thalhammer; Robert ; et al. | 2017-10-26 |
Baw Resonator Having Thin Seed Layer
App 20170288122 - Zou; Qiang ; et al. | 2017-10-05 |
Acoustic resonator comprising integrated structures for improved performance
Grant 9,748,918 - Burak , et al. August 29, 2 | 2017-08-29 |
Method of fabricating acoustic resonator with planarization layer
Grant 9,680,439 - Nikkel , et al. June 13, 2 | 2017-06-13 |
Solid mount bulk acoustic wave resonator structure comprising a bridge
Grant 9,673,778 - Feng , et al. June 6, 2 | 2017-06-06 |
Acoustic Resonator Structure Having An Electrode With A Cantilevered Portion
App 20170093368 - Choy; John ; et al. | 2017-03-30 |
Capacitive coupled resonator device with air-gap separating electrode and piezoelectric layer
Grant 9,608,594 - Burak , et al. March 28, 2 | 2017-03-28 |
Method of forming acoustic resonator using intervening seed layer
Grant 9,608,589 - Grannen , et al. March 28, 2 | 2017-03-28 |
Acoustic resonator comprising aluminum scandium nitride and temperature compensation feature
Grant 9,590,165 - Zou , et al. March 7, 2 | 2017-03-07 |
Acoustic resonator device with at least one air-ring and frame
Grant 9,571,064 - Burak , et al. February 14, 2 | 2017-02-14 |
Acoustic resonator structure having an electrode with a cantilevered portion
Grant 9,520,856 - Choy , et al. December 13, 2 | 2016-12-13 |
Bulk acoustic wave resonators having doped piezoelectric material and frame elements
Grant 9,520,855 - Feng , et al. December 13, 2 | 2016-12-13 |
Acoustic resonator comprising temperature compensating layer and perimeter distributed bragg reflector
Grant 9,490,770 - Burak , et al. November 8, 2 | 2016-11-08 |
Acoustic resonator comprising collar and frame
Grant 9,490,771 - Burak , et al. November 8, 2 | 2016-11-08 |
Acoustic Resonator Device With At Least One Air-ring And Frame
App 20160308509 - Burak; Dariusz ; et al. | 2016-10-20 |
Bulk acoustic wave resonator having doped piezoelectric layer
Grant 9,455,681 - Feng , et al. September 27, 2 | 2016-09-27 |
Bulk acoustic wave (BAW) resonator structure having an electrode with a cantilevered portion and a piezoelectric layer with varying amounts of dopant
Grant 9,450,561 - Choy , et al. September 20, 2 | 2016-09-20 |
Accoustic resonator having integrated lateral feature and temperature compensation feature
Grant 9,444,426 - Burak , et al. September 13, 2 | 2016-09-13 |
Accoustic resonator having composite electrodes with integrated lateral features
Grant 9,425,764 - Burak , et al. August 23, 2 | 2016-08-23 |
Acoustic resonator having collar structure
Grant 9,401,692 - Burak , et al. July 26, 2 | 2016-07-26 |
Acoustic resonator device with air-ring and temperature compensating layer
Grant 9,401,691 - Zou , et al. July 26, 2 | 2016-07-26 |
Acoustic resonator having guard ring
Grant 9,385,684 - Nikkel , et al. July 5, 2 | 2016-07-05 |
Acoustic Resonator Having Integrated Lateral Feature And Temperature Compensation Feature
App 20160182011 - Burak; Dariusz ; et al. | 2016-06-23 |
Acoustic resonator comprising collar, frame and perimeter distributed bragg reflector
Grant 9,246,473 - Burak , et al. January 26, 2 | 2016-01-26 |
Bulk acoustic wave (BAW) resonator structure having an electrode with a cantilevered portion and a piezoelectric layer with multiple dopants
Grant 9,219,464 - Choy , et al. December 22, 2 | 2015-12-22 |
Capacitive Coupled Resonator Device With Air-gap Separating Electrode And Piezoelectric Layer
App 20150349747 - Burak; Dariusz ; et al. | 2015-12-03 |
Film bulk acoustic resonator comprising a bridge
Grant 9,203,374 - Burak , et al. December 1, 2 | 2015-12-01 |
Bulk Acoustic Wave Devices with Temperature-Compensating Niobium Alloy Electrodes
App 20150326200 - Grannen; Kevin J. ; et al. | 2015-11-12 |
Acoustic Resonator Device With Air-ring And Temperature Compensating Layer
App 20150318837 - Zou; Qiang ; et al. | 2015-11-05 |
Fabricating Low-defect Rare-earth Doped Piezoelectric Layer
App 20150311046 - Yeh; Tangshiun ; et al. | 2015-10-29 |
Acoustic Resonator With Planarization Layer And Method Of Fabricating The Same
App 20150280679 - Nikkel; Phil ; et al. | 2015-10-01 |
Coupled resonator filter comprising a bridge and frame elements
Grant 9,148,117 - Burak , et al. September 29, 2 | 2015-09-29 |
Tuning the Piezoelectric Coefficient of a Doped Piezoelectric Material Using Multiple Noble Gases
App 20150247232 - Nikkel; Phil ; et al. | 2015-09-03 |
Bulk Acoustic Wave Resonator Having Doped Piezoelectric Layer
App 20150244347 - Feng; Chris ; et al. | 2015-08-27 |
Magnetron Sputtering Device And Method Of Fabricating Thin Film Using Magnetron Sputtering Device
App 20150240349 - Grannen; Kevin J. ; et al. | 2015-08-27 |
Bulk Acoustic Wave Resonators Having Doped Piezoelectric Material And Frame Elements
App 20150244346 - Feng; Chris ; et al. | 2015-08-27 |
Bulk acoustic wave resonator device comprising a bridge in an acoustic reflector
Grant 9,099,983 - Burak , et al. August 4, 2 | 2015-08-04 |
Stacked bulk acoustic resonator comprising a bridge and an acoustic reflector along a perimeter of the resonator
Grant 9,083,302 - Burak , et al. July 14, 2 | 2015-07-14 |
Film bulk acoustic resonator with multi-layers of different piezoelectric materials and method of making
Grant 9,065,421 - Feng , et al. June 23, 2 | 2015-06-23 |
Bulk acoustic wave resonator comprising bridge formed within piezoelectric layer
Grant 9,048,812 - Burak , et al. June 2, 2 | 2015-06-02 |
Acoustic resonator structure having an electrode with a cantilevered portion
Grant 8,902,023 - Choy , et al. December 2, 2 | 2014-12-02 |
Accoustic resonator having multiple lateral features
Grant 8,896,395 - Burak , et al. November 25, 2 | 2014-11-25 |
Acoustic Resonator Comprising Integrated Structures For Improved Performance
App 20140225683 - Burak; Dariusz ; et al. | 2014-08-14 |
Acoustic Resonator Comprising Aluminum Scandium Nitride And Temperature Compensation Feature
App 20140175950 - Zou; Qiang ; et al. | 2014-06-26 |
Acoustic Resonator Device With At Least One Air-ring And Frame
App 20140176261 - BURAK; Dariusz ; et al. | 2014-06-26 |
Scandium-aluminum Alloy Sputtering Targets
App 20140174908 - Feng; Chris ; et al. | 2014-06-26 |
Acoustic Resonator Comprising Temperature Compensating Layer And Perimeter Distributed Bragg Reflector
App 20140152152 - Burak; Dariusz ; et al. | 2014-06-05 |
Metal-oxide-semiconductor high electron mobility transistors and methods of fabrication
Grant 8,741,705 - Dungan , et al. June 3, 2 | 2014-06-03 |
Acoustic Resonator Structure Having An Electrode With A Cantilevered Portion
App 20140139077 - Choy; John ; et al. | 2014-05-22 |
Bulk Acoustic Wave (baw) Resonator Structure Having An Electrode With A Cantilevered Portion And A Piezoelectric Layer With Multiple Dopants
App 20140125202 - Choy; John ; et al. | 2014-05-08 |
Bulk Acoustic Wave (baw) Resonator Structure Having An Electrode With A Cantilevered Portion And A Piezoelectric Layer With Varying Amounts Of Dopant
App 20140125203 - Choy; John ; et al. | 2014-05-08 |
Accoustic Resonator Having Composite Electrodes With Integrated Lateral Features
App 20140118088 - Burak; Dariusz ; et al. | 2014-05-01 |
Accoustic Resonator Having Integrated Lateral Feature And Temperature Compensation Feature
App 20140118092 - Burak; Dariusz ; et al. | 2014-05-01 |
Acoustic Resonator Comprising Collar And Frame
App 20140118087 - BURAK; Dariusz ; et al. | 2014-05-01 |
Acoustic Resonator Having Collar Structure
App 20140118091 - BURAK; Dariusz ; et al. | 2014-05-01 |
Acoustic Resonator Having Guard Ring
App 20140111288 - NIKKEL; Phil ; et al. | 2014-04-24 |
Acoustic Resonator Comprising Collar, Frame And Perimeter Distributed Bragg Reflector
App 20130314177 - BURAK; Dariusz ; et al. | 2013-11-28 |
Acoustic coupling layer for coupled resonator filters and method of fabricating acoustic coupling layer
Grant 8,587,391 - Gilbert , et al. November 19, 2 | 2013-11-19 |
Film Bulk Acoustic Resonator With Multi-layers Of Different Piezoelectric Materials And Method Of Making
App 20130193808 - FENG; Chris ; et al. | 2013-08-01 |
Planarized Electrode For Improved Performance In Bulk Acoustic Resonators
App 20130106534 - BURAK; Dariusz ; et al. | 2013-05-02 |
Accoustic Resonator Having Multiple Lateral Features
App 20130063227 - Burak; Dariusz ; et al. | 2013-03-14 |
Bulk Acoustic Wave Resonator Device Comprising An Acoustic Reflector And A Bridge
App 20130038408 - Burak; Dariusz ; et al. | 2013-02-14 |
Bulk acoustic resonator comprising non-piezoelectric layer and bridge
Grant 8,350,445 - Shirakawa , et al. January 8, 2 | 2013-01-08 |
Acoustic Resonator Structure Having An Electrode With A Cantilevered Portion
App 20120326807 - Choy; John ; et al. | 2012-12-27 |
Bulk Acoustic Resonator Comprising Non-piezoelectric Layer And Bridge
App 20120319534 - SHIRAKAWA; Alexandre ; et al. | 2012-12-20 |
Bulk Acoustic Resonator Comprising Non-piezoelectric Layer
App 20120319530 - BURAK; Dariusz ; et al. | 2012-12-20 |
Bulk acoustic resonator comprising non-piezoelectric layer
Grant 8,330,325 - Burak , et al. December 11, 2 | 2012-12-11 |
Coupled Resonator Filter Comprising A Bridge And Frame Elements
App 20120218058 - BURAK; Dariusz ; et al. | 2012-08-30 |
Stacked Bulk Acoustic Resonator Comprising A Bridge And An Acoustic Reflector Along A Perimeter Of The Resonator
App 20120218059 - BURAK; Dariusz ; et al. | 2012-08-30 |
Bulk Acoustic Wave Resonator Comprising Bridge Formed Within Piezoelectric Layer
App 20120218060 - Burak; Dariusz ; et al. | 2012-08-30 |
Film Bulk Acoustic Resonator Comprising A Bridge
App 20120218057 - BURAK; Dariusz ; et al. | 2012-08-30 |
Acoustic resonator structure comprising a bridge
Grant 8,248,185 - Choy , et al. August 21, 2 | 2012-08-21 |
Acoustic Resonator Structure Comprising A Bridge
App 20120206015 - CHOY; John ; et al. | 2012-08-16 |
Acoustic Resonator Structure Comprising A Bridge
App 20120194297 - CHOY; John ; et al. | 2012-08-02 |
Solid Mount Bulk Acoustic Wave Resonator Structure Comprising A Bridge
App 20120161902 - FENG; Chris ; et al. | 2012-06-28 |
Method Of Forming Acoustic Resonator Using Intervening Seed Layer
App 20120096697 - GRANNEN; Kevin J. ; et al. | 2012-04-26 |
Acoustic Coupling Layer For Coupled Resonator Filters And Method Of Fabricating Acoustic Coupling Layer
App 20110204996 - Gilbert; Steve ; et al. | 2011-08-25 |
Acoustic resonator structure comprising a bridge
App 20100327697 - Choy; John ; et al. | 2010-12-30 |
Acoustic Resonator Structure Having An Electrode With A Cantilevered Portion
App 20100327994 - Choy; John ; et al. | 2010-12-30 |
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