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Spin coating apparatus and method Grant 10,549,312 - Nakazawa Fe | 2020-02-04 |
Information processing system, information processing apparatus, information processing method, and information processing program Grant 10,218,874 - Kitayama , et al. Feb | 2019-02-26 |
Information Processing System, Information Processing Apparatus, Information Processing Method, And Information Processing Program App 20180063367 - KITAYAMA; Akiko ;   et al. | 2018-03-01 |
Spin coating method and manufacturing method of electronic component Grant 9,793,111 - Nakazawa October 17, 2 | 2017-10-17 |
Vane-rotary gas compressor Grant 9,765,783 - Yanagawa , et al. September 19, 2 | 2017-09-19 |
Information Processing Apparatus, Image Processing Apparatus, Information Processing System, And Screen Display Method App 20170163826 - Nakazawa; Keisuke ;   et al. | 2017-06-08 |
Information processing system, information processing apparatus, information processing method, and recording medium Grant 9,628,665 - Okada , et al. April 18, 2 | 2017-04-18 |
Spin Coating Method And Manufacturing Method Of Electronic Component App 20170076941 - NAKAZAWA; Keisuke | 2017-03-16 |
Gas compressor formed with a high-pressure supply hole Grant 9,556,872 - Nakazawa , et al. January 31, 2 | 2017-01-31 |
Semiconductor Device And Manufacturing Method Of Semiconductor Device App 20160276291 - NAKAZAWA; Keisuke | 2016-09-22 |
Method of manufacturing semiconductor device including air gap between patterns Grant 9,437,476 - Nakazawa , et al. September 6, 2 | 2016-09-06 |
Method of making openings in a semiconductor device with reduced residue by transferring layers Grant 9,431,291 - Nakazawa August 30, 2 | 2016-08-30 |
Spin Coating Apparatus And Method App 20160158795 - Nakazawa; Keisuke | 2016-06-09 |
Image-forming-apparatus Control System, Control Method, And Computer Program Product App 20160155093 - SHIBATA; Yuto ;   et al. | 2016-06-02 |
Information Processing System, Information Processing Apparatus, Information Processing Method, And Recording Medium App 20160150123 - OKADA; Daisuke ;   et al. | 2016-05-26 |
Spin coating apparatus and method Grant 9,278,373 - Nakazawa March 8, 2 | 2016-03-08 |
Semiconductor Device And Method For Manufacturing The Same App 20160064272 - NAKAZAWA; Keisuke | 2016-03-03 |
Gas Compressor App 20150267703 - Yanagawa; Eiki ;   et al. | 2015-09-24 |
Semiconductor Device And Method Of Manufacturing Same App 20150263114 - Nakazawa; Keisuke ;   et al. | 2015-09-17 |
Gas Compressor App 20150252806 - Nakazawa; Keisuke ;   et al. | 2015-09-10 |
Manufacturing method of semiconductor device and manufacturing apparatus of semiconductor device Grant 8,975,196 - Nakazawa March 10, 2 | 2015-03-10 |
Compressor Grant 8,956,132 - Satou , et al. February 17, 2 | 2015-02-17 |
Method of manufacturing semiconductor device Grant 8,835,279 - Nakazawa September 16, 2 | 2014-09-16 |
Manufacturing Method Of Semiconductor Device And Manufacturing Apparatus Of Semiconductor Device App 20140213038 - NAKAZAWA; Keisuke | 2014-07-31 |
Spin Coating Method And Spin Coating Apparatus App 20140137796 - Nakazawa; Keisuke | 2014-05-22 |
Spin Coating Apparatus And Method App 20140072709 - NAKAZAWA; Keisuke | 2014-03-13 |
Semiconductor device Grant 8,659,114 - Nakazawa February 25, 2 | 2014-02-25 |
Spin coating method and spin coating apparatus Grant 8,652,571 - Nakazawa February 18, 2 | 2014-02-18 |
Semiconductor device and method of manufacturing the same Grant 8,642,409 - Nakazawa February 4, 2 | 2014-02-04 |
Method of manufacturing semiconductor device Grant 8,629,035 - Nakazawa January 14, 2 | 2014-01-14 |
Semiconductor device and manufacturing method thereof Grant 8,592,939 - Nakazawa November 26, 2 | 2013-11-26 |
Method Of Manufacturing Semiconductor Device App 20130115766 - NAKAZAWA; Keisuke | 2013-05-09 |
Method Of Manufacturing Semiconductor Device App 20130102124 - NAKAZAWA; Keisuke | 2013-04-25 |
Semiconductor Device And Method Of Manufacturing The Same App 20130043563 - NAKAZAWA; Keisuke | 2013-02-21 |
Method for manufacturing semiconductor device and NAND-type flash memory Grant 8,329,553 - Matsuo , et al. December 11, 2 | 2012-12-11 |
Compressor App 20120301343 - SATOU; Keita ;   et al. | 2012-11-29 |
Semiconductor Device And Method Of Manufacturing Semiconductor Device App 20120286346 - NAKAZAWA; Keisuke | 2012-11-15 |
Semiconductor Device And Manufacturing Method Thereof App 20120193596 - NAKAZAWA; Keisuke | 2012-08-02 |
Semiconductor Device Manufacaturing Method And Silicon Oxide Film Forming Method App 20120034754 - Iwasawa; Kazuaki ;   et al. | 2012-02-09 |
Semiconductor device manufacturing method and silicon oxide film forming method Grant 8,080,463 - Iwasawa , et al. December 20, 2 | 2011-12-20 |
Method For Manufacturing Semiconductor Device And Nand-type Flash Memory App 20100311220 - MATSUO; Shogo ;   et al. | 2010-12-09 |
Method of manufacturing semiconductor device Grant 7,781,341 - Nakazawa August 24, 2 | 2010-08-24 |
Semiconductor Device Manufacturing Method And Silicon Oxide Film Forming Method App 20100190317 - IWASAWA; Kazuaki ;   et al. | 2010-07-29 |
Spin Coating Method And Spin Coating Apparatus App 20090226615 - Nakazawa; Keisuke | 2009-09-10 |
Method of manufacturing a semiconductor device containing a Pb.sub.xSr.sub.(1-x)[Zr,Ti].sub.xRu.sub.(1-x)O.sub.3 film in a capacitor Grant 7,531,408 - Nakazawa , et al. May 12, 2 | 2009-05-12 |
Polysilazane Perhydride Solution And Method Of Manufacturing A Semiconductor Device Using The Same App 20090036629 - Kawasaki; Atsuko ;   et al. | 2009-02-05 |
Polysilazane perhydride solution and method of manufacturing a semiconductor device using the same Grant 7,407,864 - Kawasaki , et al. August 5, 2 | 2008-08-05 |
Method for manufacturing semiconductor device Grant 7,378,329 - Nakazawa , et al. May 27, 2 | 2008-05-27 |
Method for handling polysilazane or polysilazane solution, polysilazane or polysilazane solution, and method for producing semiconductor device App 20080090988 - Nakazawa; Keisuke ;   et al. | 2008-04-17 |
Semiconductor Device And Method Of Manufacturing The Same App 20070231948 - Nakazawa; Keisuke ;   et al. | 2007-10-04 |
Method of manufacturing semiconductor device App 20070212894 - Nakazawa; Keisuke | 2007-09-13 |
Apparatus and method for heat treating thin film Grant 7,259,094 - Natori , et al. August 21, 2 | 2007-08-21 |
Semiconductor device contains a Pb.sub.xSr.sub.(1-x)[Zr, Ti].sub.xRu.sub.(1-x)O.sub.3 film in a capacitor Grant 7,233,040 - Nakazawa , et al. June 19, 2 | 2007-06-19 |
Semiconductor device and method for manufacturing thereof Grant 7,183,601 - Nakazawa February 27, 2 | 2007-02-27 |
Polysilazane perhydride solution and method of manufacturing a semiconductor device using the same App 20060205165 - Kawasaki; Atsuko ;   et al. | 2006-09-14 |
Manufacturing method of semiconductor device Grant 7,105,400 - Imai , et al. September 12, 2 | 2006-09-12 |
Method for manufacturing semiconductor device App 20050277208 - Nakazawa, Keisuke ;   et al. | 2005-12-15 |
Semiconductor device and method for manufacturing thereof App 20050224851 - Nakazawa, Keisuke | 2005-10-13 |
Semiconductor device, apparatus and method for manufacturing the same App 20050186767 - Natori, Katsuaki ;   et al. | 2005-08-25 |
Semiconductor device and method of manufacturing the same App 20050093042 - Nakazawa, Keisuke ;   et al. | 2005-05-05 |
Manufacturing method of semiconductor device App 20050070031 - Imai, Keitaro ;   et al. | 2005-03-31 |
Semiconductor device and method for manufacturing the same App 20050070043 - Yamakawa, Koji ;   et al. | 2005-03-31 |
Semiconductor device and method of manufacturing the same App 20050051823 - Nakazawa, Keisuke ;   et al. | 2005-03-10 |
Halftone phase shifting photomask and blanks for halftone phase shifting photomask therefor and a method for forming pattern by using the halftone phase shifting photomask Grant 6,780,547 - Motonaga , et al. August 24, 2 | 2004-08-24 |
Semiconductor device, apparatus and method for manufacturing the same App 20040155278 - Natori, Katsuaki ;   et al. | 2004-08-12 |
Halftone phase shift photomask and blanks for halftone phase shift photomask for it and pattern forming method using this Grant 6,709,791 - Mohri , et al. March 23, 2 | 2004-03-23 |
Halftone phase shifting photomask and blanks for halftone phase shifting photomask therefor and a method for forming pattern by using the halftone phase shifting photomask App 20020015187 - Motonaga, Toshiaki ;   et al. | 2002-02-07 |