Nakayamada; Noriaki

Patent Applications and Registrations

Patent applications and USPTO patent grants for Nakayamada; Noriaki.The latest application filed is for "writing data generating method and multi charged particle beam writing apparatus".

Company Profile

0.22.27

Nakayamada; Noriaki - Kamakura-shi JP
Nakayamada; Noriaki - Kamakura JP
NAKAYAMADA; Noriaki - Yokohama-shi JP
Nakayamada; Noriaki - Yokohama JP
Nakayamada; Noriaki - Kanagawa JP
Nakayamada; Noriaki - Santa Clara CA
Nakayamada; Noriaki - Shizuoka-ken JP
Nakayamada; Noriaki - Numazu JP

*profile and listings may contain filings by different individuals or companies with the same name. Review application materials to confirm ownership/assignment.

Patent Activity

Patent	Date
Writing Data Generating Method And Multi Charged Particle Beam Writing Apparatus App 20220221800 - Yasui; Kenichi ; et al.	2022-07-14
Writing data generating method and multi charged particle beam writing apparatus Grant 11,327,408 - Yasui , et al. May 10, 2	2022-05-10
Writing Data Generating Method, Multi Charged Particle Beam Writing Apparatus, Pattern Inspecting Apparatus, And Computer-readable Recording Medium App 20220100099 - YASUI; Kenichi ; et al.	2022-03-31
Writing data generating method, multi charged particle beam writing apparatus, pattern inspecting apparatus, and computer-readable recording medium Grant 11,199,781 - Yasui , et al. December 14, 2	2021-12-14
Charged Particle Beam Writing Apparatus, Charged Particle Beam Writing Method, And A Non-transitory Computer-readable Storage Medium App 20210241995 - NOMURA; Haruyuki ; et al.	2021-08-05
Electron beam irradiation method, electron beam irradiation apparatus, and computer readable non-transitory storage medium Grant 10,950,413 - Nakayamada March 16, 2	2021-03-16
Writing Data Generating Method, Multi Charged Particle Beam Writing Apparatus, Pattern Inspecting Apparatus, And Computer-readab App 20200278612 - YASUI; Kenichi ; et al.	2020-09-03
Drawing data generating method Grant 10,685,435 - Hara , et al.	2020-06-16
Writing Data Generating Method And Multi Charged Particle Beam Writing Apparatus App 20200117095 - YASUI; Kenichi ; et al.	2020-04-16
Electron Beam Irradiation Method, Electron Beam Irradiation Apparatus, And Computer Readable Non-transitory Storage Medium App 20190362937 - NAKAYAMADA; Noriaki	2019-11-28
Charged particle beam apparatus and positional displacement correcting method of charged particle beam Grant 10,410,830 - Nakayamada Sept	2019-09-10
Electron beam apparatus and positional displacement correcting method of electron beam Grant 10,236,160 - Nakayamada	2019-03-19
Charged particle beam lithography apparatus and charged particle beam lithography method Grant 10,032,603 - Nakayamada , et al. July 24, 2	2018-07-24
Charged Particle Beam Apparatus And Positional Displacement Correcting Method Of Charged Particle Beam App 20180090299 - Nakayamada; Noriaki	2018-03-29
Electron Beam Apparatus And Positional Displacement Correcting Method Of Electron Beam App 20180090298 - NAKAYAMADA; Noriaki	2018-03-29
Charged particle beam writing method, and charged particle beam writing apparatus Grant 9,852,885 - Suganuma , et al. December 26, 2	2017-12-26
Charged particle beam drawing apparatus and drawing data generation method Grant 9,779,913 - Hara , et al. October 3, 2	2017-10-03
Charged Particle Beam Writing Method, And Charged Particle Beam Writing Apparatus App 20170278672 - SUGANUMA; Mizuna ; et al.	2017-09-28
Drawing Data Generating Method App 20170193650 - Hara; Shigehiro ; et al.	2017-07-06
Charged Particle Beam Lithography Apparatus And Charged Particle Beam Lithography Method App 20170069460 - NAKAYAMADA; Noriaki ; et al.	2017-03-09
Charged particle beam writing apparatus, and charged particle beam writing method Grant 9,484,185 - Suganuma , et al. November 1, 2	2016-11-01
Charged Particle Beam Drawing Apparatus And Drawing Data Generation Method App 20160284510 - HARA; Shigehiro ; et al.	2016-09-29
Charged Particle Beam Writing Apparatus, And Charged Particle Beam Writing Method App 20160148785 - SUGANUMA; Mizuna ; et al.	2016-05-26
Multi charged particle beam writing apparatus, and multi charged particle beam writing method Grant 9,336,988 - Nakayamada May 10, 2	2016-05-10
Charged particle beam lithography apparatus and charged particle beam pattern writing method Grant 9,268,234 - Nakayamada February 23, 2	2016-02-23
Charged particle beam writing apparatus and method for acquiring dose modulation coefficient of charged particle beam Grant 9,224,578 - Nakayamada , et al. December 29, 2	2015-12-29
Charged particle beam lithography apparatus, inspection apparatus and inspection method of pattern writing data Grant 9,164,044 - Hara , et al. October 20, 2	2015-10-20
Multi Charged Particle Beam Writing Apparatus, And Multi Charged Particle Beam Writing Method App 20150206709 - NAKAYAMADA; Noriaki	2015-07-23
Charged Particle Beam Writing Apparatus And Method For Acquiring Dose Modulation Coefficient Of Charged Particle Beam App 20140291553 - NAKAYAMADA; Noriaki ; et al.	2014-10-02
Charged Particle Beam Lithography Apparatus And Charged Particle Beam Pattern Writing Method App 20130316288 - NAKAYAMADA; Noriaki	2013-11-28
Charged particle beam writing apparatus and charged particle beam writing method Grant 8,563,953 - Nakayamada , et al. October 22, 2	2013-10-22
Charged Particle Beam Lithography Apparatus, Inspection Apparatus And Inspection Method Of Pattern Writing Data App 20130264478 - HARA; Shigehiro ; et al.	2013-10-10
Charged particle beam pattern forming apparatus and charged particle beam pattern forming method Grant 8,502,175 - Nakayamada , et al. August 6, 2	2013-08-06
Charged Particle Beam Drawing Apparatus And Electrical Charging Effect Correction Method Thereof App 20130032707 - NAKAYAMADA; Noriaki ; et al.	2013-02-07
Charged particle beam writing apparatus and method thereof Grant 8,178,856 - Nakayamada , et al. May 15, 2	2012-05-15
Charged Particle Beam Writing Apparatus And Charged Particle Beam Writing Method App 20120068089 - NAKAYAMADA; Noriaki ; et al.	2012-03-22
Charged-particle beam writing method and charged-particle beam writing apparatus Grant 8,129,698 - Nakayamada , et al. March 6, 2	2012-03-06
Charged Particle Beam Pattern Forming Apparatus And Charged Particle Beam Pattern Forming Method App 20120007002 - NAKAYAMADA; Noriaki ; et al.	2012-01-12
Charged Particle Beam Drawing Apparatus And Electrical Charging Effect Correction Method Thereof App 20110121208 - NAKAYAMADA; Noriaki ; et al.	2011-05-26
Charged Particle Beam Writing Apparatus And Method Thereof App 20110031387 - NAKAYAMADA; Noriaki ; et al.	2011-02-10
Beam shot position correction coefficient computation/updating technique for ultrafine pattern fabrication using variable shaped beam lithography Grant 7,705,327 - Horiuchi , et al. April 27, 2	2010-04-27
Charged-particle Beam Writing Method And Charged-particle Beam Writing Apparatus App 20090242787 - NAKAYAMADA; Noriaki ; et al.	2009-10-01
Beam Shot Position Correction Coefficient Computation/updating Technique For Ultrafine Pattern Fabrication Using Variable Shaped Beam Lithography App 20080078947 - HORIUCHI; Tomoyuki ; et al.	2008-04-03
Appartus and method for forming pattern App 20060147822 - Hirano; Ryoichi ; et al.	2006-07-06
Apparatus and method for forming pattern Grant 7,036,980 - Hirano , et al. May 2, 2	2006-05-02
Apparatus And Method For Forming Pattern App 20060034344 - Hirano; Ryoichi ; et al.	2006-02-16

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