Nakata; Hirohiko

Patent Applications and Registrations

Patent applications and USPTO patent grants for Nakata; Hirohiko.The latest application filed is for "heater unit, heating and cooling device, and apparatus comprising same".

Company Profile

0.50.107

Nakata; Hirohiko - Itami JP
NAKATA; Hirohiko - Itami-shi JP
Nakata; Hirohiko - Hyogo JP
Nakata; Hirohiko - Hyogo-Ken JP
Nakata, Hirohiko - Itami-shi Hyogo JP

*profile and listings may contain filings by different individuals or companies with the same name. Review application materials to confirm ownership/assignment.

Patent Activity

Patent	Date
Heating device for manufacturing semiconductor Grant 7,999,210 - Kuibira , et al. August 16, 2	2011-08-16
Heater Unit, Heating And Cooling Device, And Apparatus Comprising Same App 20110139399 - ITAKURA; Katsuhiro ; et al.	2011-06-16
Wafer holder for wafer prober and wafer prober equipped with the same Grant 7,855,569 - Natsuhara , et al. December 21, 2	2010-12-21
Semiconductor processing apparatus with a heat resistant hermetically sealed substrate support Grant 7,837,798 - Kuibira , et al. November 23, 2	2010-11-23
Semiconductor or liquid crystal producing device Grant 7,806,984 - Kuibira , et al. October 5, 2	2010-10-05
Holder For Semiconductor Manufacturing Equipment App 20100242844 - KUIBIRA; Akira ; et al.	2010-09-30
Heating Unit And The Apparatus Having The Same App 20100044364 - MIKUMO; Akira ; et al.	2010-02-25
Wafer Holder, Manufacturing Method Thereof And Semiconductor Manufacturing Apparatus App 20090283034 - Natsuhara; Masuhiro ; et al.	2009-11-19
Substrate holding structure and substrate processing device Grant 7,618,494 - Tanaka , et al. November 17, 2	2009-11-17
Wafer holder, and wafer prober provided therewith Grant 7,576,303 - Natsuhara , et al. August 18, 2	2009-08-18
Heater unit and semiconductor manufacturing apparatus including the same Grant 7,554,059 - Awazu , et al. June 30, 2	2009-06-30
Method of Manufacturing Semiconductor Device-Fabrication Wafer Holder App 20090142479 - Natsuhara; Masuhiro ; et al.	2009-06-04
Heat Transfer Member, Convex Structural Member, Electronic Apparatus, And Electric Product App 20090126903 - Kuibira; Akira ; et al.	2009-05-21
Wafer holder, heater unit used for wafer prober having the wafer holder, and wafer prober having the heater unit App 20090050621 - Awazu; Tomoyuki ; et al.	2009-02-26
Body for keeping a wafer, heater unit and wafer prober Grant 7,495,460 - Itakura , et al. February 24, 2	2009-02-24
Wafer holder for wafer prober and wafer prober equipped with same App 20090045829 - Awazu; Tomoyuki ; et al.	2009-02-19
Ceramic susceptor for semiconductor manufacturing equipment Grant 7,491,432 - Kachi , et al. February 17, 2	2009-02-17
Ceramic base material App 20080277841 - Natsuhara; Masuhiro ; et al.	2008-11-13
Body for keeping a wafer and wafer prober using the same Grant 7,425,838 - Itakura , et al. September 16, 2	2008-09-16
Wafer holder, heater unit used for wafer prober and having wafer holder, and wafer prober App 20080211526 - Shinma; Kenji ; et al.	2008-09-04
Holder for use in semiconductor or liquid-crystal manufacturing device and semiconductor or liquid-crystal manufacturing device in which the holder is installed Grant 7,414,823 - Hashikura , et al. August 19, 2	2008-08-19
Wafer holder and semiconductor manufacturing apparatus Grant 7,408,131 - Natsuhara , et al. August 5, 2	2008-08-05
Ceramic susceptor Grant 7,394,043 - Kuibira , et al. July 1, 2	2008-07-01
Substrate processing apparatus Grant 7,361,230 - Natsuhara , et al. April 22, 2	2008-04-22
Wafer holder and exposure apparatus equipped with wafer holder App 20080083732 - Shinma; Kenji ; et al.	2008-04-10
Wafer holder and semiconductor manufacturing apparatus equipped with wafer holder App 20080083979 - Natsuhara; Masuhiro ; et al.	2008-04-10
Wafer Holder for Semiconductor Manufacturing Device and Semiconductor Manufacturing Device in Which It Is Installed App 20080060576 - Natsuhara; Masuhiro ; et al.	2008-03-13
Aluminum nitride sintered body Grant 7,341,969 - Natsuhara , et al. March 11, 2	2008-03-11
Heater and heating device Grant 7,342,204 - Natsuhara , et al. March 11, 2	2008-03-11
Ceramic base material App 20080039312 - Natsuhara; Masuhiro ; et al.	2008-02-14
Aluminum nitride sintered body Grant 7,306,858 - Natsuhara , et al. December 11, 2	2007-12-11
Semiconductor manufacturing apparatus Grant 7,279,048 - Shinma , et al. October 9, 2	2007-10-09
Heating And Cooling Module App 20070215602 - Natsuhara; Masuhiro ; et al.	2007-09-20
Wafer holder and semiconductor manufacturing apparatus Grant 7,268,321 - Natsuhara , et al. September 11, 2	2007-09-11
Semiconductor heating apparatus Grant 7,268,322 - Kuibira , et al. September 11, 2	2007-09-11
Wafer holder, and heater unit and wafer prober provided therewith App 20070205787 - Natsuhara; Masuhiro ; et al.	2007-09-06
Wafer holder, and wafer prober provided therewith App 20070205788 - Natsuhara; Masuhiro ; et al.	2007-09-06
Workpiece holder for processing apparatus, and processing apparatus using the same Grant 7,264,699 - Natsuhara , et al. September 4, 2	2007-09-04
Wafer holder, and wafer prober and semiconductor manufacturing apparatus provided therewith App 20070182433 - Natsuhara; Masuhiro ; et al.	2007-08-09
Wafer Holder For Semiconductor Manufacturing Device And Semiconductor Manufacturing Device Equipped With The Same App 20070173185 - Natsuhara; Masuhiro ; et al.	2007-07-26
Fluid heating heater App 20070133964 - Natsuhara; Masuhiro ; et al.	2007-06-14
Wafer holder, and heating unit and wafer prober provided with the wafer holder App 20070126457 - Natsuhara; Masuhiro ; et al.	2007-06-07
Holder for Use in Semiconductor or Liquid-Crystal Manufacturing Device and Semiconductor or Liquid-Crystal Manufacturing Device in Which the Holder Is Installed App 20070095291 - Hashikura; Manabu ; et al.	2007-05-03
Ceramic joined body, substrate holding structure and substrate processing apparatus Grant 7,211,153 - Kuibira , et al. May 1, 2	2007-05-01
Wafer holder, heater unit having the wafer holder, and wafer prober having the heater unit App 20070082313 - Itakura; Katsuhiro ; et al.	2007-04-12
Heater Module for Semiconductor Manufacturing Equipment App 20070068921 - Kuibira; Akira ; et al.	2007-03-29
Composite and susceptor for semiconductor manufacturing device and power module with the same App 20070069174 - Natsuhara; Masuhiro ; et al.	2007-03-29
Heating unit and the apparatus having the same App 20070062929 - Mikumo; Akira ; et al.	2007-03-22
Heating unit and wafer prober having the same App 20070056952 - Itakura; Katsuhiro ; et al.	2007-03-15
Heater unit and semiconductor manufacturing apparatus including the same App 20070056953 - Awazu; Tomoyuki ; et al.	2007-03-15
Semiconductor heating heater holder and semiconductor manufacturing apparatus App 20070054424 - Natsuhara; Masuhiro ; et al.	2007-03-08
Wafer holder, heater unit used for wafer prober having the wafer holder, and wafer prober having the heater unit App 20070045778 - Itakura; Katsuhiro ; et al.	2007-03-01
Wafer holder, heater unit having the wafer holder, and wafer prober having the heater unit App 20070046306 - Awazu; Tomoyuki ; et al.	2007-03-01
Wafer holder and wafer prober having the same App 20070046305 - Awazu; Tomoyuki ; et al.	2007-03-01
Wafer Holder and Semiconductor Manufacturing Apparatus App 20070044718 - Natsuhara; Masuhiro ; et al.	2007-03-01
Body for keeping a wafer, heater unit and wafer prober App 20070046307 - Itakura; Katsuhiro ; et al.	2007-03-01
Fluid heating heater Grant 7,177,536 - Natsuhara , et al. February 13, 2	2007-02-13
Wafer holder for wafer prober and wafer prober equipped with same App 20070028834 - Awazu; Tomoyuki ; et al.	2007-02-08
Body for keeping a wafer, method of manufacturing the same and device using the same App 20070029740 - Natsuhara; Masuhiro ; et al.	2007-02-08
Chuck top, wafer holder having the chuck top, and wafer prober having the chuck top App 20070024313 - Itakura; Katsuhiro ; et al.	2007-02-01
Wafer holder, heater unit used for wafer prober and having wafer holder, and wafer prober App 20070024304 - Itakura; Katsuhiro ; et al.	2007-02-01
Body for keeping a wafer and wafer prober using the same App 20070024299 - Itakura; Katsuhiro ; et al.	2007-02-01
Wafer holder, heater unit having the wafer holder, and wafer prober having the heater unit App 20070023320 - Itakura; Katsuhira ; et al.	2007-02-01
Heater for semiconductor manufacturing device and heating device equipped with the same App 20060289448 - Natsuhara; Masuhiro ; et al.	2006-12-28
Heater module for semiconductor manufacturing equipment Grant 7,145,106 - Kuibira , et al. December 5, 2	2006-12-05
Workpiece Holder for Semiconductor Manufacturing Apparatus App 20060201422 - Kuibira; Akira ; et al.	2006-09-14
Heater for semiconductor manufacturing device App 20060201918 - Awazu; Tomoyuki ; et al.	2006-09-14
Substrate holding structure and substrate processing device App 20060191639 - Tanaka; Sumi ; et al.	2006-08-31
Wafer holder for wafer prober and wafer prober equipped with the same App 20060186904 - Natsuhara; Masuhiro ; et al.	2006-08-24
Temperature gauge and ceramic susceptor in which it is utilized Grant 7,090,394 - Hashikura , et al. August 15, 2	2006-08-15
Connecting structures Grant 7,090,423 - Natsuhara , et al. August 15, 2	2006-08-15
Ceramic Susceptor For Semiconductor Manufacturing Equipment App 20060177697 - Kachi; Yoshifumi ; et al.	2006-08-10
Aluminum nitride sintered body App 20060116272 - Natsuhara; Masuhiro ; et al.	2006-06-01
Semiconductor fabrication device heater and heating device equipped with the same App 20060102613 - Kuibira; Akira ; et al.	2006-05-18
Workpiece holder for processing apparatus, and processing apparatus using the same Grant 7,045,045 - Natsuhara , et al. May 16, 2	2006-05-16
Metallized substrate App 20060063024 - Natsuhara; Masuhiro ; et al.	2006-03-23
Workpiece holder for processing apparatus, and processing apparatus using the same App 20060037857 - Natsuhara; Masuhiro ; et al.	2006-02-23
Aluminum nitride sintered body App 20060035107 - Natsuhara; Masuhiro ; et al.	2006-02-16
Semiconductor heating apparatus App 20050274325 - Kuibira, Akira ; et al.	2005-12-15
Heating device App 20050263516 - Natsuhara, Masuhiro ; et al.	2005-12-01
Supporting unit for semiconductor manufacturing device and semiconductor manufacturing device with supporting unit installed App 20050253285 - Kuibira, Akira ; et al.	2005-11-17
Heater module for semiconductor manufacturing equipment Grant 6,963,052 - Kuibira , et al. November 8, 2	2005-11-08
Ceramics heater for semiconductor production system App 20050241584 - Kachi, Yoshifumi ; et al.	2005-11-03
Heater Module for Semiconductor Manufacturing Equipment App 20050242079 - Kuibira, Akira ; et al.	2005-11-03
Ceramic Susceptor App 20050242078 - Kuibira, Akira ; et al.	2005-11-03
Ceramic susceptor Grant 6,946,625 - Kuibira , et al. September 20, 2	2005-09-20
Ceramics heater for semiconductor production system App 20050184054 - Kachi, Yoshifumi ; et al.	2005-08-25
Heater and heating device App 20050184055 - Natsuhara, Masuhiro ; et al.	2005-08-25
Susceptor Unit and Apparatus in Which the Susceptor Is Installed App 20050178334 - Shinma, Kenji ; et al.	2005-08-18
Ceramics heater for semiconductor production system App 20050167422 - Kachi, Yoshifumi ; et al.	2005-08-04
Semiconductor manufacturing apparatus App 20050170651 - Shinma, Kenji ; et al.	2005-08-04
Wafer holder and semiconductor manufacturing apparatus App 20050166848 - Natsuhara, Masuhiro ; et al.	2005-08-04
Semiconductor-producing apparatus App 20050160988 - Shinma, Kenji ; et al.	2005-07-28
Workpiece Holder For Semiconductor Manufacturing Apparatus App 20050160989 - Kuibira, Akira ; et al.	2005-07-28
Gas heating method and gas heating device App 20050085057 - Hashikura, Manabu ; et al.	2005-04-21
Ceramics base plate and method for producing the same Grant 6,881,128 - Natsuhara , et al. April 19, 2	2005-04-19
Wafer holder and system for producing semiconductor App 20050077284 - Natsuhara, Masuhiro ; et al.	2005-04-14
Semiconductor Manufacturing Apparatus App 20050028739 - Natsuhara, Masuhiro ; et al.	2005-02-10
Susceptor for Semiconductor Manufacturing Equipment, and Semiconductor Manufacturing Equipment in Which the Susceptor Is Installed App 20050022744 - Natsuhara, Masuhiro ; et al.	2005-02-03
Ceramic Susceptor App 20050000956 - Kuibira, Akira ; et al.	2005-01-06
Holder for Use in Semiconductor or Liquid-Crystal Manufacturing Device and Semiconductor or Liquid-Crystal Manufacturing Device in Which the Holder Is Installed App 20040244695 - Hashikura, Manabu ; et al.	2004-12-09
Heater module for semiconductor production system App 20040238523 - Kuibira, Akira ; et al.	2004-12-02
Heating device for manufacturing semiconductor App 20040238520 - Kuibira, Akira ; et al.	2004-12-02
Wafer Holder for Semiconductor Manufacturing Equipment and Semiconductor Manufacturing Equipment in Which It Is Installed App 20040216678 - Natsuhara, Masuhiro ; et al.	2004-11-04
Temperature Gauge And Ceramic Susceptor In Which It Is Utilized App 20040208228 - Hashikura, Manabu ; et al.	2004-10-21
Ceramic susceptor Grant 6,806,443 - Kuibira , et al. October 19, 2	2004-10-19
Ceramic Susceptor and Semiconductor or Liquid-Crystal Manufacturing Apparatus in Which the Susceptor Is Installed App 20040188413 - Natsuhara, Masuhiro ; et al.	2004-09-30
Wafer Holder For Semiconductor Manufacturing Device And Semiconductor Manufacturing Device In Which It Is Installed App 20040188321 - Natsuhara, Masuhiro ; et al.	2004-09-30
Wafer Holder For Semiconductor Manufacturing Device And Semiconductor Manufacturing Device In Which It Is Installed App 20040187789 - Natsuhara, Masuhiro ; et al.	2004-09-30
Holder for semiconductor production system App 20040182321 - Kuibira, Akira ; et al.	2004-09-23
Wafer Holder For Semiconductor Manufacturing Device And Semiconductor Manufacturing Device In Which It Is Installed App 20040182322 - Natsuhara, Masuhiro ; et al.	2004-09-23
Wafer Holder For Semiconductor Manufacturing Device And Semiconductor Manufacturing Device In Which It Is Installed App 20040178114 - Natsuhara, Masuhiro ; et al.	2004-09-16
Holder for use in semiconductor or liquid-crystal manufacturing device and semiconductor or liquid-crystal manufacturing device in which the holder is installed App 20040169033 - Kuibira, Akira ; et al.	2004-09-02
Apparatus for manufacturing semiconductor or liquid crystal App 20040168641 - Kuibira, Akira ; et al.	2004-09-02
Member for semiconductor device using an aluminum nitride substrate material, and method of manufacturing the same Grant 6,783,867 - Sasaki , et al. August 31, 2	2004-08-31
Wafer Holder For Semiconductor Manufacturing Device And Semiconductor Manufacturing Device In Which The Holder Is Installed App 20040165871 - Natsuhara, Masuhiro ; et al.	2004-08-26
Wafer Holder For Semiconductor Manufacturing Device And Semiconductor Manufacturing Device In Which It Is Installed App 20040154543 - Natsuhara, Masuhiro ; et al.	2004-08-12
Susceptor for semiconductor manufacturing equipment and process for producing the same Grant 6,770,379 - Yushio , et al. August 3, 2	2004-08-03
Semiconductor or liquid crystal producing device App 20040144322 - Kuibira, Akira ; et al.	2004-07-29
Wafer holder for semiconductor manufacturing apparatus, and method of manufacturing the wafer holder Grant 6,716,304 - Kuibira , et al. April 6, 2	2004-04-06
Aluminium nitride ceramics and method for preparing the same Grant 6,696,103 - Shimoda , et al. February 24, 2	2004-02-24
Thermal fixing apparatus Grant 6,671,489 - Natsuhara , et al. December 30, 2	2003-12-30
Circuit pattern of resistance heating elements and substrate-treating apparatus incorporating the pattern Grant 6,664,515 - Natsuhara , et al. December 16, 2	2003-12-16
Connecting Structures App 20030221854 - Natsuhara, Masuhiro ; et al.	2003-12-04
Heater member for mounting heating object and substrate processing apparatus using the same Grant 6,653,604 - Natsuhara , et al. November 25, 2	2003-11-25
Member for semiconductor device using an aluminum nitride substrate material, and method of manufacturing the same App 20030207146 - Sasaki, Kazutaka ; et al.	2003-11-06
Ceramic Susceptor App 20030201264 - Kuibira, Akira ; et al.	2003-10-30
Heater module and optical waveguide module App 20030180030 - Hirose, Yoshiyuki ; et al.	2003-09-25
Joined ceramic article, substrate holding structure and apparatus for treating substrate App 20030150563 - Kuibara, Akira ; et al.	2003-08-14
High thermal conductivity composite material, and method for producing the same Grant 6,569,524 - Kawai , et al. May 27, 2	2003-05-27
Workpiece holder for processing apparatus, and processing apparatus using the same App 20030089600 - Natsuhara, Masuhiro ; et al.	2003-05-15
Wafer holder for semiconductor manufacturing apparatus, and method of manufacturing the wafer holder App 20030079684 - Kuibira, Akira ; et al.	2003-05-01
Wafer holder for semiconductor manufacturing apparatus and semiconductor manufacturing apparatus using the same Grant 6,554,906 - Kuibira , et al. April 29, 2	2003-04-29
Susceptor for semiconductor manufacturing equipment and process for producing the same App 20030066587 - Yushio, Yasuhisa ; et al.	2003-04-10
Semiconductor processing apparatus and electrode member therefor App 20030066608 - Natsuhara, Masuhiro ; et al.	2003-04-10
Thermal fixing apparatus App 20030042240 - Natshuhara, Masuhiro ; et al.	2003-03-06
Fluid heating heater App 20030044173 - Natsuhara, Masuhiro ; et al.	2003-03-06
Substrate processing apparatus App 20030029569 - Natsuhara, Masuhiro ; et al.	2003-02-13
Heater member for mounting heating object and substrate processing apparatus using the same App 20030015516 - Natsuhara, Masuhiro ; et al.	2003-01-23
Wafer holder for semiconductor manufacturing apparatus, method of manufacturing wafer holder, and semiconductor manufacturing apparatus Grant 6,508,884 - Kuibira , et al. January 21, 2	2003-01-21
Circuit pattern of resistance heating elements and substrate-treating apparatus incorporating the pattern App 20020185488 - Natsuhara, Masuhiro ; et al.	2002-12-12
Gas shower unit for semiconductor manufacturing apparatus and semiconductor manufacturing apparatus Grant 6,460,482 - Kuibira , et al. October 8, 2	2002-10-08
Susceptor for semiconductor manufacturing equipment and process for producing the same Grant 6,423,400 - Yushio , et al. July 23, 2	2002-07-23
Ceramic heater for toner-fixing units and method for manufacturing the heater Grant 6,384,378 - Natsuhara , et al. May 7, 2	2002-05-07
High thermal conductivity composite material, and method for producing the same App 20020041959 - Kawai, Chihiro ; et al.	2002-04-11
Method of polishing a ceramic substrate App 20020025409 - Natsuhara, Masuhiro ; et al.	2002-02-28
Wafer holder for semiconductor manufacturing apparatus, method of manufacturing wafer holder; and semiconductor manufacturing apparatus App 20020007911 - Kuibira, Akira ; et al.	2002-01-24
Ceramic heater for toner-fixing units and method for manufacturing the heater App 20020000431 - Natsuhara, Masuhiro ; et al.	2002-01-03
Ceramic heater for toner-fixing units and method for manufacturing the heater App 20010054609 - Natsuhara, Masuhiro ; et al.	2001-12-27
Aluminum nitride sintered body and method of preparing the same App 20010016551 - Yushio, Yasuhisa ; et al.	2001-08-23
Ceramic heater App 20010010310 - Natsuhara, Masuhiro ; et al.	2001-08-02
Copper circuit junction substrate and method of producing the same Grant 6,261,703 - Sasaki , et al. July 17, 2	2001-07-17
Heat fixing device for fixing a toner image Grant 6,049,064 - Natsuhara , et al. April 11, 2	2000-04-11
Heater and heating/fixing unit comprising the same Grant 5,732,318 - Natsuhara , et al. March 24, 1	1998-03-24
Metallized ceramic substrate having smooth plating layer and method for producing the same Grant 5,679,469 - Shimoda , et al. October 21, 1	1997-10-21
Ceramics-metal jointed body Grant 5,023,147 - Nakata , et al. June 11, 1	1991-06-11
Pressure self-combustion sintering method Grant 4,999,144 - Miyamoto , et al. March 12, 1	1991-03-12

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