Nakasuji; Mamoru

Patent Applications and Registrations

Patent applications and USPTO patent grants for Nakasuji; Mamoru.The latest application filed is for "substrate inspection method and a substrate processing method".

Company Profile

0.105.74

Nakasuji; Mamoru - Tokyo JP
Nakasuji; Mamoru - Yokohama JP
Nakasuji; Mamoru - Yokohama-shi JP
Nakasuji; Mamoru - Kanagawa JP
Nakasuji; Mamoru - Kanagawa-ken JP
Nakasuji; Mamoru - Yokahama-shi JP

*profile and listings may contain filings by different individuals or companies with the same name. Review application materials to confirm ownership/assignment.

Patent Activity

Patent	Date
Electro-optical inspection apparatus using electron beam Grant 9,390,886 - Nakasuji , et al. July 12, 2	2016-07-12
Inspection system by charged particle beam and method of manufacturing devices using the system Grant 9,368,314 - Nakasuji , et al. June 14, 2	2016-06-14
Substrate Inspection Method And A Substrate Processing Method App 20140367570 - Kimba; Toshifumi ; et al.	2014-12-18
Inspection System By Charged Particle Beam And Method Of Manufacturing Devices Using The System App 20140319346 - Nakasuji; Mamoru ; et al.	2014-10-30
Apparatus for inspection with electron beam, method for operating same, and method for manufacturing semiconductor device using former Grant 8,822,919 - Kimba , et al. September 2, 2	2014-09-02
Charged particles beam apparatus and charged particles beam apparatus design method Grant 8,809,799 - Nakasuji August 19, 2	2014-08-19
Inspection system by charged particle beam and method of manufacturing devices using the system Grant 8,803,103 - Nakasuji , et al. August 12, 2	2014-08-12
Charged practicles beam apparatus and charged particles beam apparatus design method App 20140097352 - Nakasuji; Mamoru	2014-04-10
Inspection System By Charged Particle Beam And Method Of Manufacturing Devices Using The System App 20140034831 - Nakasuji; Mamoru ; et al.	2014-02-06
Electron Beam Apparatus And A Device Manufacturing Method By Using Said Electron Beam Apparatus App 20130032716 - Nakasuji; Mamoru ; et al.	2013-02-07
Inspection system by charged particle beam and method of manufacturing devices using the system Grant 8,368,031 - Nakasuji , et al. February 5, 2	2013-02-05
Electron beam apparatus and a device manufacturing method by using said electron beam apparatus Grant 8,368,016 - Nakasuji , et al. February 5, 2	2013-02-05
Inspection System By Charged Particle Beam And Method Of Manufacturing Devices Using The System App 20120032079 - Nakasuji; Mamoru ; et al.	2012-02-09
Electron beam apparatus Grant 8,067,732 - Nakasuji , et al. November 29, 2	2011-11-29
Inspection system by charged particle beam and method of manufacturing devices using the system Grant 8,053,726 - Nakasuji , et al. November 8, 2	2011-11-08
Apparatus For Inspection With Electron Beam, Method For Operating Same, And Method For Manufacturing Semiconductor Device Using Former App 20110104830 - Kimba; Toshifumi ; et al.	2011-05-05
Apparatus for inspection with electron beam, method for operating same, and method for manufacturing semiconductor device using former Grant 7,928,378 - Kimba , et al. April 19, 2	2011-04-19
Electron beam apparatus and method of manufacturing semiconductor device using the apparatus Grant 7,888,642 - Nakasuji , et al. February 15, 2	2011-02-15
Electron beam apparatus and an aberration correction optical apparatus Grant 7,863,580 - Hatakeyama , et al. January 4, 2	2011-01-04
Sheet beam-type testing apparatus Grant 7,829,871 - Nakasuji , et al. November 9, 2	2010-11-09
Electron Beam Apparatus App 20100213370 - Nakasuji; Mamoru ; et al.	2010-08-26
Electron beam apparatus and method of manufacturing semiconductor device using the apparatus Grant 7,745,784 - Nakasuji , et al. June 29, 2	2010-06-29
Inspection system by charged particle beam and method of manufacturing devices using the system Grant 7,601,972 - Nakasuji , et al. October 13, 2	2009-10-13
Method of electric discharge machining a cathode for an electron gun Grant 7,598,471 - Hamashima , et al. October 6, 2	2009-10-06
Electron Beam Apparatus App 20090218506 - Nakasuji; Mamoru ; et al.	2009-09-03
Projection Electron Beam Apparatus And Defect Inspection System Using The Apparatus App 20090212213 - Nakasuji; Mamoru ; et al.	2009-08-27
Electron beam inspection system and inspection method and method of manufacturing devices using the system Grant 7,569,838 - Watanabe , et al. August 4, 2	2009-08-04
Electron beam apparatus and method of manufacturing semiconductor device using the apparatus App 20090050822 - Nakasuji; Mamoru ; et al.	2009-02-26
Electron Beam Apparatus And Method Of Manufacturing Semiconductor Device Using The Apparatus App 20090039262 - NAKASUJI; Mamoru ; et al.	2009-02-12
Inspection system by charged particle beam and method of manufacturing devices using the system App 20090032708 - Nakasuji; Mamoru ; et al.	2009-02-05
Electron beam apparatus and device manufacturing method using the same Grant 7,479,634 - Nakasuji , et al. January 20, 2	2009-01-20
Electron Beam Apparatus App 20090014649 - Nakasuji; Mamoru ; et al.	2009-01-15
Electron beam apparatus, a device manufacturing method using the same apparatus, a pattern evaluation method, a device manufacturing method using the same method, and a resist pattern or processed wafer evaluation method App 20080315095 - Nakasuji; Mamoru ; et al.	2008-12-25
Objective lens, electron beam system and method of inspecting defect App 20080315090 - Nakasuji; Mamoru ; et al.	2008-12-25
Apparatus for inspection with electron beam, method for operating same, and method for manufacturing semiconductor device using former App 20080308729 - Kimba; Toshifumi ; et al.	2008-12-18
Sheet Beam-type Testing Apparatus App 20080302963 - NAKASUJI; Mamoru ; et al.	2008-12-11
Electron beam apparatus and device production method using the electron beam apparatus Grant 7,439,502 - Nakasuji , et al. October 21, 2	2008-10-21
Electron beam apparatus, a device manufacturing method using the same apparatus, a pattern evaluation method, a device manufacturing method using the same method, and a resist pattern or processed wafer evaluation method Grant 7,425,703 - Nakasuji , et al. September 16, 2	2008-09-16
Electron beam apparatus and method of manufacturing semiconductor device using the apparatus Grant 7,423,267 - Nakasuji , et al. September 9, 2	2008-09-09
Objective lens, electron beam system and method of inspecting defect Grant 7,420,164 - Nakasuji , et al. September 2, 2	2008-09-02
Sheet beam-type testing apparatus Grant 7,417,236 - Nakasuji , et al. August 26, 2	2008-08-26
Inspection system by charged particle beam and method of manufacturing devices using the system Grant 7,411,191 - Nakasuji , et al. August 12, 2	2008-08-12
Method and apparatus for inspecting samples, and method for manufacturing devices using method and apparatus for inspecting samples Grant 7,408,643 - Kimba , et al. August 5, 2	2008-08-05
Apparatus for inspection with electron beam, method for operating same, and method for manufacturing semiconductor device using former Grant 7,408,175 - Kimba , et al. August 5, 2	2008-08-05
Electron beam inspection system and inspection method and method of manufacturing devices using the system App 20080173814 - Watanabe; Kenji ; et al.	2008-07-24
Electron beam apparatus and device production method using the electron beam apparatus App 20080173815 - Nakasuji; Mamoru ; et al.	2008-07-24
Electron beam apparatus and a device manufacturing method using the same apparatus Grant 7,385,197 - Nakasuji , et al. June 10, 2	2008-06-10
Method for inspecting substrate, substrate inspecting system and electron App 20080121804 - Nakasuji; Mamoru ; et al.	2008-05-29
Electron beam apparatus and a device manufacturing method by using said electron beam apparatus Grant 7,361,895 - Nakasuji , et al. April 22, 2	2008-04-22
Electron beam inspection system and inspection method and method of manufacturing devices using the system Grant 7,351,969 - Watanabe , et al. April 1, 2	2008-04-01
Electron Beam Apparatus And An Aberration Correction Optical Apparatus App 20080067377 - Hatakeyama; Masahiro ; et al.	2008-03-20
Inspection system by charged particle beam and method of manufacturing devices using the system App 20080042060 - Nakasuji; Mamoru ; et al.	2008-02-21
Electron beam system and method of manufacturing devices using the system Grant 7,312,449 - Nakasuji , et al. December 25, 2	2007-12-25
Electron beam apparatus and device production method using the electron beam apparatus App 20070272859 - Nakasuji; Mamoru ; et al.	2007-11-29
Inspection system by charged particle beam and method of manufacturing devices using the system Grant 7,297,949 - Nakasuji , et al. November 20, 2	2007-11-20
Method and apparatus for inspecting samples, and method for manufacturing devices using method and apparatus for inspecting samples App 20070236690 - Kimba; Toshifumi ; et al.	2007-10-11
Inspection system by charged particle beam and method of manufacturing devices using the same App 20070235644 - Nakasuji; Mamoru ; et al.	2007-10-11
Apparatus for inspection with electron beam, method for operating same, and method for manufacturing semiconductor device using former App 20070194235 - Kimba; Toshifumi ; et al.	2007-08-23
Sample repairing apparatus, a sample repairing method and a device manufacturing method using the same method Grant 7,256,405 - Nakasuji , et al. August 14, 2	2007-08-14
Electron beam apparatus and method of manufacturing semiconductor device using the apparatus Grant 7,247,848 - Nakasuji , et al. July 24, 2	2007-07-24
Method and apparatus for inspecting samples, and method for manufacturing devices using method and apparatus for inspecting samples Grant 7,248,353 - Kimba , et al. July 24, 2	2007-07-24
Electron beam apparatus and device manufacturing method using the same App 20070164226 - Hamashima; Muneki ; et al.	2007-07-19
Electron beam apparatus, a pattern evaluation method and a device manufacturing method using the electron beam apparatus or pattern evaluation method Grant 7,244,933 - Nakasuji , et al. July 17, 2	2007-07-17
Electron beam apparatus and device fabrication method using the electron beam apparatus Grant 7,244,932 - Nakasuji , et al. July 17, 2	2007-07-17
Electron beam apparatus and device manufacturing method using the same App 20070158565 - Nakasuji; Mamoru ; et al.	2007-07-12
Inspection system by charged particle beam and method of manufacturing devices using the system Grant 7,241,993 - Nakasuji , et al. July 10, 2	2007-07-10
System and method for evaluation using electron beam and manufacture of devices Grant 7,235,799 - Nakasuji , et al. June 26, 2	2007-06-26
Electron beam apparatus Grant 7,227,141 - Nakasuji , et al. June 5, 2	2007-06-05
Apparatus for inspection with electron beam, method for operating same, and method for manufacturing semiconductor device using former Grant 7,223,973 - Kimba , et al. May 29, 2	2007-05-29
Electron beam apparatus and device manufacturing method using same Grant 7,205,540 - Nakasuji , et al. April 17, 2	2007-04-17
Electron beam apparatus and device manufacturing method using same Grant 7,205,559 - Hamashima , et al. April 17, 2	2007-04-17
Inspection system by charged particle beam and method of manufacturing devices using the system App 20070057186 - Nakasuji; Mamoru ; et al.	2007-03-15
Method for inspecting substrate, substrate inspecting system and electron beam apparatus App 20070045536 - Nakasuji; Mamoru ; et al.	2007-03-01
Electron beam apparatus Grant 7,176,459 - Watanabe , et al. February 13, 2	2007-02-13
Electron beam apparatus and method of manufacturing semiconductor device using the apparatus App 20070018101 - Nakasuji; Mamoru ; et al.	2007-01-25
Electron beam system Grant 7,157,703 - Nakasuji , et al. January 2, 2	2007-01-02
Inspection system by charged particle beam and method of manufacturing devices using the system Grant 7,135,676 - Nakasuji , et al. November 14, 2	2006-11-14
Electron beam apparatus and method of manufacturing semiconductor device using the apparatus Grant 7,129,485 - Nakasuji , et al. October 31, 2	2006-10-31
Method for inspecting substrate, substrate inspecting system and electron beam apparatus Grant 7,109,483 - Nakasuji , et al. September 19, 2	2006-09-19
Sheet beam-type inspection apparatus Grant 7,109,484 - Nakasuji , et al. September 19, 2	2006-09-19
Electron beam apparatus and method of manufacturing semiconductor device using the apparatus Grant 7,095,022 - Nakasuji , et al. August 22, 2	2006-08-22
Sheet beam-type testing apparatus App 20060138343 - Nakasuji; Mamoru ; et al.	2006-06-29
Electron beam inspection system and inspection method and method of manufacturing devices using the system App 20060118719 - Watanabe; Kenji ; et al.	2006-06-08
Sheet beam-type testing apparatus Grant 7,049,585 - Nakasuji , et al. May 23, 2	2006-05-23
Electron beam apparatus, a pattern evaluation method and a device manufacturing method using the electron beam apparatus or pattern evaluation method App 20060102838 - Nakasuji; Mamoru ; et al.	2006-05-18
Electron beam apparatus and a device manufacturing method by using said electron beam apparatus App 20060097200 - Nakasuji; Mamoru ; et al.	2006-05-11
System and method for evaluation using electron beam and manufacture of devices App 20060060790 - Nakasuji; Mamoru ; et al.	2006-03-23
Electron beam apparatus and device manufacturing method using same App 20060054819 - Nakasuji; Mamoru ; et al.	2006-03-16
Electron beam apparatus, a pattern evaluation method and a device manufacturing method using the electron beam apparatus or pattern evaluation method Grant 7,012,251 - Nakasuji , et al. March 14, 2	2006-03-14
Electron beam apparatus and a device manufacturing method by using said electron beam apparatus Grant 7,005,641 - Nakasuji , et al. February 28, 2	2006-02-28
Electron beam apparatus and device manufacturing method using same Grant 6,998,611 - Nakasuji , et al. February 14, 2	2006-02-14
Electron beam inspection system and inspection method and method of manufacturing devices using the system Grant 6,992,290 - Watanabe , et al. January 31, 2	2006-01-31
Electron beam apparatus and a device manufacturing method using the same apparatus App 20060016989 - Nakasuji; Mamoru ; et al.	2006-01-26
Objective lens, electron beam system and method of inspecting defect App 20050263715 - Nakasuji, Mamoru ; et al.	2005-12-01
Electron beam apparatus App 20050253066 - Watanabe, Kenji ; et al.	2005-11-17
Electron beam apparatus, a device manufacturing method using the same apparatus, a pattern evaluation method, a device manufacturing method using the same method, and a resist pattern or processed wafer evaluation method App 20050214958 - Nakasuji, Mamoru ; et al.	2005-09-29
Sample repairing apparatus, a sample repairing method and a device manufacturing method using the same method App 20050211925 - Nakasuji, Mamoru ; et al.	2005-09-29
Sample surface inspection method and inspection system App 20050194535 - Noji, Nobuharu ; et al.	2005-09-08
Electron beam system and method of manufacturing devices using the system App 20050133733 - Nakasuji, Mamoru ; et al.	2005-06-23
Apparatus for inspection with electron beam, method for operating same, and method for manufacturing semiconductor device using former App 20050121611 - Kimba, Toshifumi ; et al.	2005-06-09
Method and apparatus for inspecting samples, and method for manufacturing devices using method and apparatus for inspecting samples App 20050104017 - Kimba, Toshifumi ; et al.	2005-05-19
Sheet beam-type inspection apparatus App 20050092921 - Nakasuji, Mamoru ; et al.	2005-05-05
Electron beam apparatus, a pattern evaluation method and a device manufacturing method using the electron beam apparatus or pattern evaluation method App 20050051724 - Nakasuji, Mamoru ; et al.	2005-03-10
Apparatus for inspection with electron beam, method for operating same, and method for manufacturing semiconductor device using former Grant 6,855,929 - Kimba , et al. February 15, 2	2005-02-15
Electron beam system and method of manufacturing devices using the system Grant 6,853,143 - Nakasuji , et al. February 8, 2	2005-02-08
Methods and devices for detecting and canceling magnetic fields external to a charged-particle-beam (CPB) optical system, and CPB microlithography apparatus and methods comprising same Grant 6,831,281 - Nakasuji December 14, 2	2004-12-14
Electron beam apparatus and method of manufacturing semiconductor device using the apparatus App 20040183013 - Nakasuji, Mamoru ; et al.	2004-09-23
Electron beam system App 20040159787 - Nakasuji, Mamoru ; et al.	2004-08-19
Electron beam apparatus and device manufacturing method using same App 20040135515 - Hamashima, Muneki ; et al.	2004-07-15
Electron beam apparatus and a device manufacturing method by using said electron beam apparatus App 20040119023 - Nakasuji, Mamoru ; et al.	2004-06-24
Electron beam apparatus App 20040113073 - Nakasuji, Mamoru ; et al.	2004-06-17
Electron gun and electron beam exposure device Grant 6,707,240 - Nakasuji , et al. March 16, 2	2004-03-16
Electron beam apparatus and method of manufacturing semiconductor device using the apparatus App 20030207475 - Nakasuji, Mamoru ; et al.	2003-11-06
Charged particle beam adjusting method, pattern transfer method and device manufacturing method using the same method App 20030190822 - Nakasuji, Mamoru	2003-10-09
Charged-particle-beam microlithography apparatus and methods including shielding of the beam from extraneous magnetic fields Grant 6,614,034 - Nakasuji September 2, 2	2003-09-02
Electron beam system and method of manufacturing devices using the system App 20030155509 - Nakasuji, Mamoru ; et al.	2003-08-21
Charged-particle-beam (CPB)-optical systems with improved shielding against stray magnetic fields, and CPB microlithography apparatus comprising same Grant 6,608,317 - Nakasuji August 19, 2	2003-08-19
Electron beam apparatus and method of manufacturing semiconductor device using the apparatus Grant 6,593,152 - Nakasuji , et al. July 15, 2	2003-07-15
Electron beam apparatus and device manufacturing method using same App 20030042417 - Nakasuji, Mamoru ; et al.	2003-03-06
Electron beam apparatus and device production method using the electron beam apparatus App 20020148961 - Nakasuji, Mamoru ; et al.	2002-10-17
Apparatus for inspection with electron beam, method for operating same, and method for manufacturing semiconductor device using former App 20020148975 - Kimba, Toshifumi ; et al.	2002-10-17
High-throughput specimen-inspection apparatus and methods utilizing multiple parallel charged particle beams and an array of multiple secondary-electron-detectors Grant 6,465,783 - Nakasuji October 15, 2	2002-10-15
Electron beam apparatus and method of manufacturing semiconductor device using the apparatus App 20020142496 - Nakasuji, Mamoru ; et al.	2002-10-03
Method for inspecting substrate, substrate inspecting system and electron beam apparatus App 20020130262 - Nakasuji, Mamoru ; et al.	2002-09-19
Methods and devices for detecting and canceling magnetic fields external to a charged-particle-beam (CPB) optical system, and CPB microlithography apparatus and methods comprising same App 20020121615 - Nakasuji, Mamoru	2002-09-05
Methods for dividing a pattern in a segmented reticle for charged-particle-beam microlithography and reticles produced by such methods App 20020115309 - Nakasuji, Mamoru	2002-08-22
Electron beam apparatus and method of manufacturing semiconductor device using the apparatus App 20020109090 - Nakasuji, Mamoru ; et al.	2002-08-15
Charged-particle-beam microlithography apparatus and methods exhibiting variable beam velocity, and device-manufacturing methods using same Grant 6,429,441 - Nakasuji August 6, 2	2002-08-06
Electron beam inspection system and inspection method and method of manufacturing devices using the system App 20020088940 - Watanabe, Kenji ; et al.	2002-07-11
Sheet beam-type inspection apparatus App 20020036264 - Nakasuji, Mamoru ; et al.	2002-03-28
Inspection system by charged particle beam and method of manufacturing devices using the system App 20020033449 - Nakasuji, Mamoru ; et al.	2002-03-21
Inspection system by charged particle beam and method of manufacturing devices using the system App 20020028399 - Nakasuji, Mamoru ; et al.	2002-03-07
Charged-particle-beam microlithography apparatus and methods including shielding of the beam from extraneous magnetic fields App 20010025932 - Nakasuji, Mamoru	2001-10-04
Secondary electron filtering method, defect detection method and device manufacturing method using the same method App 20010025929 - Nakasuji, Mamoru	2001-10-04
Device fabrication methods using charged-particle-beam image-transfer apparatus exhibiting reduced space-charge effects App 20010008274 - Nakasuji, Mamoru	2001-07-19
Pattern formation methods combining light lithography and electron-beam lithography and manufacturing methods using the same Grant 6,235,450 - Nakasuji May 22, 2	2001-05-22
Charged-particle-beam image-transfer apparatus exhibiting reduced space-charge effects and device fabrication methods using the same Grant 6,218,676 - Nakasuji April 17, 2	2001-04-17
Pattern-transfer methods and masks Grant 6,194,102 - Nakasuji , et al. February 27, 2	2001-02-27
Charged particle beam pattern-transfer method utilizing non-uniform dose distribution in stitching region Grant 6,162,581 - Nakasuji , et al. December 19, 2	2000-12-19
Charged-particle-beam microlithography methods and reticles for same exhibiting reduced space-charge and proximity effects Grant 6,153,340 - Nakasuji November 28, 2	2000-11-28
Manufacturing method for electrostatic deflector Grant 6,125,522 - Nakasuji October 3, 2	2000-10-03
Charged-particle-beam projection apparatus and transfer methods Grant 6,124,596 - Nakasuji , et al. September 26, 2	2000-09-26
Charged-particle-beam transfer methods utilizing high and low resolution sub-patterns Grant 6,117,600 - Nakasuji September 12, 2	2000-09-12
Electron-beam transfer-exposure apparatus and method Grant 6,114,709 - Nakasuji September 5, 2	2000-09-05
Charged-particle-beam (CPB) lithography apparatus, evaluation method, and CPB source Grant 6,087,667 - Nakasuji , et al. July 11, 2	2000-07-11
Methods for forming microlithographic masks that compensate for proximity effects Grant 6,087,046 - Nakasuji July 11, 2	2000-07-11
Electron beam gun Grant 6,051,917 - Nakasuji April 18, 2	2000-04-18
Demagnifying projection-optical system for electron beam lithography with aberration control Grant 6,011,268 - Nakasuji January 4, 2	2000-01-04
Electromagnetic deflector Grant 5,994,704 - Nakasuji November 30, 1	1999-11-30
Demagnifying charged-particle lithography apparatus Grant 5,994,708 - Nakasuji November 30, 1	1999-11-30
Apparatus including compensation mask to correct particle beam proximity-effect Grant 5,986,765 - Nakasuji November 16, 1	1999-11-16
Apparatus for detecting or collecting secondary electrons, charged-particle beam exposure apparatus comprising same, and related methods Grant 5,981,947 - Nakasuji , et al. November 9, 1	1999-11-09
Charged-particle-beam pattern-transfer apparatus and methods Grant 5,973,333 - Nakasuji , et al. October 26, 1	1999-10-26
Mask used in charged particle beam projecting apparatus and method for dividing pattern Grant 5,958,626 - Nakasuji September 28, 1	1999-09-28
Electron-beam projection-microlithography apparatus and methods Grant 5,933,217 - Nakasuji , et al. August 3, 1	1999-08-03
Apparatus and methods for inspecting wafers and masks using multiple charged-particle beams Grant 5,892,224 - Nakasuji April 6, 1	1999-04-06
Method of using a compensation mask to correct particle beam proximity-effect Grant 5,888,682 - Nakasuji March 30, 1	1999-03-30
Magnetic deflectors and charged-particle-beam lithography systems incorporating same Grant 5,831,270 - Nakasuji November 3, 1	1998-11-03
Apparatus for image transfer with charged particle beam, and deflector and mask used with such apparatus Grant 5,831,274 - Nakasuji November 3, 1	1998-11-03
Masks for charged-particle beam microlithography Grant 5,798,194 - Nakasuji , et al. August 25, 1	1998-08-25
Apparatus for image transfer with charged particle beam, and deflector and mask used with such apparatus Grant 5,773,837 - Nakasuji June 30, 1	1998-06-30
Charged particle beam projection apparatus Grant 5,770,863 - Nakasuji June 23, 1	1998-06-23
Electron gun and electron-beam transfer apparatus comprising same Grant 5,763,893 - Nakasuji June 9, 1	1998-06-09
Mask holding device and method for holding mask Grant 5,751,538 - Nakasuji May 12, 1	1998-05-12
Charged particle beam transfer device exhibiting low aberration Grant 5,747,819 - Nakasuji , et al. May 5, 1	1998-05-05
Apparatus for image transfer with charged particle beam, and deflector and mask used with such apparatus Grant 5,689,117 - Nakasuji November 18, 1	1997-11-18
Method of drawing a desired pattern on a target through exposure thereof with an electron beam Grant 4,743,766 - Nakasuji , et al. May 10, 1	1988-05-10
Method of adjusting optical column in energy beam exposure system Grant 4,684,809 - Nakasuji August 4, 1	1987-08-04
Charged particle beam exposure apparatus Grant 4,647,782 - Wada , et al. March 3, 1	1987-03-03
Electron beam exposure system Grant 4,543,512 - Nakasuji , et al. September 24, 1	1985-09-24
Electron gun Grant 4,346,325 - Nakasuji , et al. August 24, 1	1982-08-24
Electron beam exposure apparatus Grant 4,218,621 - Nakasuji , et al. August 19, 1	1980-08-19