| Patent | Date |
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Information calculation method, exposure apparatus, exposure method, device manufacturing method, program, and recording medium
Grant 11,360,394 - Nishino , et al. June 14, 2 | 2022-06-14 |
Information Calculation Method, Exposure Apparatus, Exposure Method, Device Manufacturing Method, Program, And Recording Medium
App 20210191277 - NISHINO; Mineyuki ; et al. | 2021-06-24 |
Information calculation method, exposure apparatus, exposure method, device manufacturing method, program, and recording medium
Grant 10,942,457 - Nishino , et al. March 9, 2 | 2021-03-09 |
Information Calculation Method, Exposure Apparatus, Exposure Method, Device Manufacturing Method, Program, And Recording Medium
App 20200264519 - NISHINO; Mineyuki ; et al. | 2020-08-20 |
Information calculation method, exposure apparatus, exposure method, device manufacturing method, program, and recording medium
Grant 10,642,159 - Nishino , et al. | 2020-05-05 |
Information calculation method, exposure apparatus, exposure method, device manufacturing method, program, and recording medium
Grant 10317803 - | 2019-06-11 |
Exposure Apparatus, Exposure Method, Exposure Apparatus Maintenance Method, Exposure Apparatus Adjustment Method And Device Manufacturing Method
App 20180364597 - YAMAKAWA; Natsuko ; et al. | 2018-12-20 |
Substrate Holding Device, Exposure Apparatus, And Device Manufacturing Method
App 20180292759 - Nagasaka; Hiroyuki ; et al. | 2018-10-11 |
Exposure apparatus, exposure method, exposure apparatus maintenance method, exposure apparatus adjustment method and device manufacturing method
Grant 10,061,214 - Sagawa , et al. August 28, 2 | 2018-08-28 |
Exposure Apparatus And Method For Producing Device
App 20170329239 - KOHNO; Hirotaka ; et al. | 2017-11-16 |
Information Calculation Method, Exposure Apparatus, Exposure Method, Device Manufacturing Method, Program, And Recording Medium
App 20170307984 - NISHINO; Mineyuki ; et al. | 2017-10-26 |
Exposure apparatus and method for producing device
Grant 9,746,781 - Kohno , et al. August 29, 2 | 2017-08-29 |
Information calculation method, exposure apparatus, exposure method, device manufacturing method, program, and recording medium
Grant 9,720,332 - Nishino , et al. August 1, 2 | 2017-08-01 |
Substrate Holding Device, Exposure Apparatus, And Device Manufacturing Method
App 20160231653 - NAGASAKA; Hiroyuki ; et al. | 2016-08-11 |
Immersion lithographic apparatus rinsing outer contour of substrate with immersion space
Grant 8,941,808 - Nakano , et al. January 27, 2 | 2015-01-27 |
Information Calculation Method, Exposure Apparatus, Exposure Method, Device Manufacturing Method, Program, And Recording Medium
App 20140362354 - NISHINO; Mineyuki ; et al. | 2014-12-11 |
Exposure Apparatus And Method For Producing Device
App 20140307238 - KOHNO; Hirotaka ; et al. | 2014-10-16 |
Exposure apparatus and method for producing device
Grant 8,780,327 - Kobayashi , et al. July 15, 2 | 2014-07-15 |
Exposure apparatus and method for producing device
Grant 8,760,617 - Kobayashi , et al. June 24, 2 | 2014-06-24 |
Exposure Method And Apparatus, Maintenance Method And Device Manufacturing Method
App 20130301019 - NAKANO; Katsushi | 2013-11-14 |
Exposure Apparatus And Exposure Method, Maintenance Method, And Device Manufacturing Method
App 20130278908 - NAGAHASHI; Yoshitomo ; et al. | 2013-10-24 |
Exposure method and apparatus, maintenance method and device manufacturing method
Grant 8,514,366 - Nakano August 20, 2 | 2013-08-20 |
Exposure Apparatus And Method For Producing Device
App 20130169945 - KOBAYASHI; Naoyuki ; et al. | 2013-07-04 |
Exposure apparatus and method for producing device
Grant 8,384,877 - Kobayashi , et al. February 26, 2 | 2013-02-26 |
Exposure Apparatus, Exposure Method, Exposure Apparatus Maintenance Method, Exposure Apparatus Adjustment Method And Device Manufacturing Method
App 20120314193 - Sagawa; Natsuko ; et al. | 2012-12-13 |
Exposure apparatus and device manufacturing method
Grant 8,305,553 - Nakano , et al. November 6, 2 | 2012-11-06 |
Exposure method, device manufacturing method, and substrate
Grant 8,294,873 - Nakano October 23, 2 | 2012-10-23 |
Exposure method, exposure apparatus and device manufacturing method
Grant 8,253,924 - Uehara , et al. August 28, 2 | 2012-08-28 |
Exposure apparatus and method for producing device
Grant 8,174,668 - Kobayashi , et al. May 8, 2 | 2012-05-08 |
Exposure apparatus and method for producing device
Grant 8,169,592 - Kobayashi , et al. May 1, 2 | 2012-05-01 |
Substrate Holding Device, Exposure Apparatus, And Device Manufacturing Method
App 20120094238 - NAGASAKA; Hiroyuki ; et al. | 2012-04-19 |
Exposure apparatus and method for producing device
Grant 8,130,363 - Kobayashi , et al. March 6, 2 | 2012-03-06 |
Analysis method, exposure method, and device manufacturing method
Grant 8,111,374 - Nakano February 7, 2 | 2012-02-07 |
Substrate processing method, exposure apparatus, and method for producing device by immersing substrate in second liquid before immersion exposure through first liquid
App 20120008112 - Nakano; Katsushi ; et al. | 2012-01-12 |
Exposure apparatus and method for producing device
Grant 8,072,576 - Kobayashi , et al. December 6, 2 | 2011-12-06 |
Linear motor, stage apparatus and exposure apparatus
Grant 8,053,937 - Nakano , et al. November 8, 2 | 2011-11-08 |
Substrate processing method, exposure apparatus, and method for producing device by immersing substrate in second liquid before immersion exposure through first liquid
Grant 8,040,489 - Nakano , et al. October 18, 2 | 2011-10-18 |
Exposure apparatus and method for producing device
App 20110199594 - Kobayashi; Naoyuki ; et al. | 2011-08-18 |
Exposure apparatus, exposing method, and device fabricating method
App 20100283979 - Nakano; Katsushi ; et al. | 2010-11-11 |
Exposure apparatus, maintaining method and device fabricating method
App 20100045949 - Nakano; Katsushi ; et al. | 2010-02-25 |
Exposure Apparatus And Method For Producing Device
App 20090262316 - Kohno; Hirotaka ; et al. | 2009-10-22 |
Exposure Apparatus, Exposure Method, and Device Manufacturing Method
App 20090226846 - Nakano; Katsushi ; et al. | 2009-09-10 |
Exposure method and apparatus, maintenance method and device manufacturing method
App 20090066922 - Nakano; Katsushi | 2009-03-12 |
Exposure method and apparatus, maintenance method, and device manufacturing method
App 20090061331 - Nakano; Katsushi | 2009-03-05 |
Exposure apparatus, substrate processing method, and device producing method
App 20090033890 - Fujiwara; Tomoharu ; et al. | 2009-02-05 |
Linear Motor, Stage Apparatus and Exposure Apparatus
App 20080265688 - Nakano; Katsushi ; et al. | 2008-10-30 |
Substrate processing method, exposure apparatus, and method for producing device
App 20080246931 - Nakano; Katsushi ; et al. | 2008-10-09 |
Exposure Apparatus and method for producing device
App 20080231825 - Kobayashi; Naoyuki ; et al. | 2008-09-25 |
Exposure apparatus and method for producing device
App 20080225250 - Kobayashi; Naoyuki ; et al. | 2008-09-18 |
Exposure apparatus and method for producing device
App 20080225249 - Kobayashi; Naoyuki ; et al. | 2008-09-18 |
Exposure Method, Exposure Apparatus and Device Manufacturing Method
App 20080218714 - Uehara; Yusaku ; et al. | 2008-09-11 |
Exposing method, exposure apparatus, device fabricating method, and substrate for immersion exposure
App 20080204687 - Nakano; Katsushi | 2008-08-28 |
Substrate Processing Method, Exposure Apparatus, and Method For Producing Device
App 20080143980 - Nakano; Katsushi ; et al. | 2008-06-19 |
Exposure apparatus and method for producing device
Grant 7,388,649 - Kobayashi , et al. June 17, 2 | 2008-06-17 |
Exposure Method, Device Manufacturing Method, and Substrate
App 20080107999 - Nakano; Katsushi | 2008-05-08 |
Exposure apparatus and method for producing device
App 20080030695 - Kobayashi; Naoyuki ; et al. | 2008-02-07 |
Exposure apparatus and method for producing device
App 20080030696 - Kobayashi; Naoyuki ; et al. | 2008-02-07 |
Substrate Holding Device, Exposure Apparatus, and Device Manufacturing Method
App 20070269294 - Nagasaka; Hiroyuki ; et al. | 2007-11-22 |
Exposure Apparatus and Device Manufacturing Method
App 20070263182 - Nakano; Katsushi ; et al. | 2007-11-15 |
Exposure apparatus and method for producing device
App 20070252964 - Kohno; Hirotaka ; et al. | 2007-11-01 |
Exposure Apparatus And Method For Producing Device
App 20070247600 - Kobayashi; Naoyuki ; et al. | 2007-10-25 |
Substrate processing method, exposure apparatus, and method for producing device
App 20070242248 - Nakano; Katsushi ; et al. | 2007-10-18 |
Exposure apparatus and device manufacturing method
App 20070164234 - Tsuji; Toshihiko ; et al. | 2007-07-19 |
Exposure apparatus and method for producing device
App 20070132968 - Kobayashi; Naoyuki ; et al. | 2007-06-14 |
Exposure apparatus and exposure method, maintenance method, and device manufacturing method
App 20070085989 - Nagahashi; Yoshitomo ; et al. | 2007-04-19 |
Exposure apparatus and method for producing device
App 20070064210 - Kobayashi; Naoyuki ; et al. | 2007-03-22 |
Analysis method, exposure method, and device manufacturing method
App 20070058148 - Nakano; Katsushi | 2007-03-15 |
Exposure apparatus and method for producing device
App 20060077367 - Kobayashi; Naoyuki ; et al. | 2006-04-13 |
Low-aberration deflectors for use in charged-particle-beam optical systems, and methods for fabricating such deflectors
App 20050040137 - Nakano, Katsushi | 2005-02-24 |
Low-aberration deflectors for use in charged-particle-beam optical systems, and methods for fabricating such deflectors
Grant 6,802,986 - Nakano October 12, 2 | 2004-10-12 |
Hollow-beam apertures for charged-particle-beam microlithography apparatus and methods for making and using same
Grant 6,635,891 - Nakano , et al. October 21, 2 | 2003-10-21 |
Methods for electrostatically chucking an object to an electrostatic chuck that reduce uncorrectable placement error of the object
App 20030067734 - Nakano, Katsushi | 2003-04-10 |
Low-aberration deflectors for use in charged-particle-beam optical systems, and methods for fabricating such deflectors
App 20030025085 - Nakano, Katsushi | 2003-02-06 |
Methods for fabricating high-precision thermally stable electromagnetic coils
App 20020112963 - Nakano, Katsushi ; et al. | 2002-08-22 |
Magnetically shielded electromagnetic lens assemblies for charged-particle-beam microlithography systems
App 20020074524 - Nakano, Katsushi | 2002-06-20 |
Charged-particle-beam microlithography stage including actuators for moving a reticle or substrate relative to the stage, and associated methods
App 20020021428 - Nakano, Katsushi ; et al. | 2002-02-21 |
Charged-particle-beam optical systems including beam tube exhibiting reduced eddy currents
App 20010051317 - Nakano, Katsushi | 2001-12-13 |
Probe needle arrangement and movement method for use in an atomic force microscope
Grant 6,223,591 - Nakano May 1, 2 | 2001-05-01 |
Packer type groundwater sampling system and water sampling method
Grant 5,896,926 - Hama , et al. April 27, 1 | 1999-04-27 |
Scanning probe microscope
Grant 5,656,769 - Nakano , et al. August 12, 1 | 1997-08-12 |
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