Patent | Date |
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Substrate Treating Apparatus With Parallel Substrate Treatment Lines On Multiple Stories For Simultaneously Treating A Plurality Of Substrates App 20210134626 - Ogura; Hiroyuki ;   et al. | 2021-05-06 |
Substrate Treating Apparatus App 20190221457 - Fukutomi; Yoshiteru ;   et al. | 2019-07-18 |
Substrate treating apparatus with parallel gas supply pipes and a gas exhaust pipe Grant 10,290,521 - Fukutomi , et al. | 2019-05-14 |
Multi-story substrate treating apparatus with flexible transport mechanisms and vertically divided treating units Grant 9,687,874 - Ogura , et al. June 27, 2 | 2017-06-27 |
Substrate treating apparatus with substrate reordering Grant 9,368,383 - Ogura , et al. June 14, 2 | 2016-06-14 |
Substrate Treating Apparatus With Parallel Substrate Treatment Lines App 20160163573 - Ogura; Hiroyuki ;   et al. | 2016-06-09 |
Substrate treating apparatus with parallel substrate treatment lines simultaneously treating a plurality of substrates Grant 9,299,596 - Ogura , et al. March 29, 2 | 2016-03-29 |
Substrate Treating Apparatus App 20160079099 - Fukutomi; Yoshiteru ;   et al. | 2016-03-17 |
Multi-story Substrate Treating Apparatus With Flexible Transport Mechanisms And Vertically Divided Treating Units App 20160008841 - Ogura; Hiroyuki ;   et al. | 2016-01-14 |
Substrate treating apparatus Grant 9,230,834 - Fukutomi , et al. January 5, 2 | 2016-01-05 |
Multi-story substrate treating apparatus with flexible transport mechanisms and vertically divided treating units Grant 9,184,071 - Ogura , et al. November 10, 2 | 2015-11-10 |
Substrate treating apparatus with vertical treatment arrangement including vertical blowout and exhaust units Grant 9,165,807 - Fukutomi , et al. October 20, 2 | 2015-10-20 |
Substrate Treating Apparatus With Substrate Reordering App 20140342558 - OGURA; Hiroyuki ;   et al. | 2014-11-20 |
Parallel substrate treatment for a plurality of substrate treatment lines Grant 8,851,008 - Fukutomi , et al. October 7, 2 | 2014-10-07 |
Substrate treating apparatus with inter-unit buffers Grant 8,708,587 - Ogura , et al. April 29, 2 | 2014-04-29 |
Substrate Treating Apparatus With Inter-unit Buffers App 20140000514 - Ogura; Hiroyuki ;   et al. | 2014-01-02 |
Substrate treating apparatus with inter-unit buffers Grant 8,545,118 - Ogura , et al. October 1, 2 | 2013-10-01 |
Substrate Treating Apparatus App 20120156380 - Fukutomi; Yoshiteru ;   et al. | 2012-06-21 |
Substrate Treating Apparatus App 20120145074 - Fukutomi; Yoshiteru ;   et al. | 2012-06-14 |
Substrate Treating Apparatus App 20120145073 - Fukutomi; Yoshiteru ;   et al. | 2012-06-14 |
Substrate Treating Apparatus With Substrate Reordering App 20090165711 - Ogura; Hiroyuki ;   et al. | 2009-07-02 |
Substrate Treating Apparatus With Parallel Substrate Treatment Lines App 20090165712 - OGURA; Hiroyuki ;   et al. | 2009-07-02 |
Multi-line Substrate Treating Apparatus App 20090139833 - Ogura; Hiroyuki ;   et al. | 2009-06-04 |
Substrate Treating Apparatus With Inter-unit Buffers App 20090142162 - Ogura; Hiroyuki ;   et al. | 2009-06-04 |
Multi-story Substrate Treating Apparatus With Flexible Transport Mechanisms App 20090139450 - Ogura; Hiroyuki ;   et al. | 2009-06-04 |
Substrate Treating Apparatus App 20090000543 - Fukutomi; Yoshiteru ;   et al. | 2009-01-01 |