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Particle Number Measurement Method App 20110216318 - Nagaike; Hiroshi | 2011-09-08 |
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Internal Member Of A Plasma Processing Vessel App 20100307687 - MITSUHASHI; Kouji ;   et al. | 2010-12-09 |
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Substrate processing apparatus, program for performing operation and control method thereof, and computer readable storage medium storing the program Grant 7,756,599 - Kudo , et al. July 13, 2 | 2010-07-13 |
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Particle removal apparatus and method and plasma processing apparatus Grant 7,651,586 - Moriya , et al. January 26, 2 | 2010-01-26 |
Method Of Producing Ceramic Spray-coated Member, Program For Conducting The Method, Storage Medium And Ceramic Spray-coated Member App 20090258148 - MORIYA; Tsuyoshi ;   et al. | 2009-10-15 |
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Method for removing water molecules from vacuum chamber, program for executing the method, and storage medium storing the program Grant 7,560,083 - Moriya , et al. July 14, 2 | 2009-07-14 |
Plasma Processing Apparatus, Ring Member And Plasma Processing Method App 20090104781 - Sasaki; Yasuharu ;   et al. | 2009-04-23 |
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Processing apparatus and method for removing particles therefrom Grant 7,347,006 - Moriya , et al. March 25, 2 | 2008-03-25 |
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Method for removing water molecules from vacuum chamber, program for executing the method, and storage medium storing the program App 20060210469 - Moriya; Tsuyoshi ;   et al. | 2006-09-21 |
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Substrate processing apparatus, program for performing operation and control method thereof, and computer readable storage medium storing the program App 20060105548 - Kudo; Tomoyuki ;   et al. | 2006-05-18 |
Method of producing ceramic spray-coated member, program for conducting the method, storage medium and ceramic spray-coated member App 20060099457 - Moriya; Tsuyoshi ;   et al. | 2006-05-11 |
Processing apparatus and method for removing particles therefrom App 20050189071 - Moriya, Tsuyoshi ;   et al. | 2005-09-01 |
Plasma processing apparatus, ring member and plasma processing method App 20050103275 - Sasaki, Yasuharu ;   et al. | 2005-05-19 |
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Particle removal apparatus and method and plasma processing apparatus App 20050039773 - Moriya, Tsuyoshi ;   et al. | 2005-02-24 |
Internal member of a plasma processing vessel App 20040216667 - Mitsuhashi, Kouji ;   et al. | 2004-11-04 |